CN205703715U - A kind of carborundum chemical polisher efficient and convenient for cleaning - Google Patents

A kind of carborundum chemical polisher efficient and convenient for cleaning Download PDF

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Publication number
CN205703715U
CN205703715U CN201620388348.7U CN201620388348U CN205703715U CN 205703715 U CN205703715 U CN 205703715U CN 201620388348 U CN201620388348 U CN 201620388348U CN 205703715 U CN205703715 U CN 205703715U
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China
Prior art keywords
polished land
polished
base
carborundum
efficient
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CN201620388348.7U
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Chinese (zh)
Inventor
宗艳民
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Shandong Tianyue Advanced Technology Co Ltd
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Shandong Tianyue Crystal Material Co Ltd
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Priority to CN201620388348.7U priority Critical patent/CN205703715U/en
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Abstract

A kind of carborundum chemical polisher efficient and convenient for cleaning, including base, the upper side of described base is provided with fixed plate and the first polished land being rotated by driven by motor and the second polished land.This carborundum chemical polisher efficient and convenient for cleaning, carborundum be polished by the first polished land of being provided with and the second polished land and by sanding apparatus and burnishing device, so can there is a preliminary operation polishing corner angle for carborundum, not only facilitate following polishing process, and make to polish more thorough, can be collected for used polishing fluid by annular waste liquid tank and waste collection groove, polishing fluid will not be trickled everywhere, facilitate the cleaning after work, and polishing time and cost can also be saved to a certain extent, there is very strong practicality.

Description

A kind of carborundum chemical polisher efficient and convenient for cleaning
Technical field
The utility model relates to silicon carbide optical polishing machine technology field, be specially a kind of efficiently and Carborundum chemical polisher convenient for cleaning.
Background technology
As high-brightness LED is in the sharp increase of illuminating engineering domain requirement amount, drive state The development of industry prepared by interior silicon carbide substrates material.Due to carborundum crystals (α-Al2O3) tool Have the distinguishing features such as high temperature resistant, corrosion-resistant, transmission region width, be the first-selection of outer prolongation GaN Backing material, but also big, stable chemical nature just because of carborundum extreme hardness, fragility Feature, gives materials processing, and especially wafer surface nanoscale polishing brings a lot of tired technically Difficulty, needs to be processed by shot blasting the surface of carborundum, at present in the operation of processing carborundum Polishing technology be the processing in single face, again another side is thrown after processing one side finishes Light process, manufacturing procedure is loaded down with trivial details, and operating efficiency is low, is unfavorable for producing, and processes general Do not possess chemical polisher, so make to polish not thorough, and the waste liquid of chemical polisher is not Easily collecting, to this it is proposed that a kind of carborundum chemical polisher efficient and convenient for cleaning.
Content of the invention
The purpose of this utility model is to provide a kind of carborundum chemistry efficient and convenient for cleaning to throw Ray machine, with the problem solving to propose in above-mentioned background technology.
Design of the present utility model is: a kind of silicon carbide optical polishing efficient and convenient for cleaning Machine, including base, the upper side of described base is provided with fixed plate and is revolved by driven by motor The first polished land turning and the second polished land, the side of described first polished land is provided with vertical Directly being installed on the sanding apparatus of base, described sanding apparatus includes that being positioned at the first polished land just goes up The polishing rod of side;It is provided with containing liquid chamber and burnishing device, containing liquid chamber bottom in described fixed plate Connection polishing fluid conveying pipe one end, polishing fluid conveying the pipe other end be connected be positioned at the second polishing put down Shower nozzle directly over platform, is provided with annular in the second polished land bottom around the second polished land useless Liquid bath, described annular waste liquid tank connects with waste collection groove through a guiding gutter;Described polishing dress Put and include being positioned at the polished silicon wafer directly over the second polished land.
During work, the carborundum needing processing is placed in the first polished land and carries out preparatory processing, open Dynamic motor and sanding apparatus, rotate the first polished land and utilize polishing rod to polish, to carbonization On silicon, some bigger corner angle polish, and again the carborundum of preparatory processing are placed on afterwards In two polished land, sprayed polishing fluid by shower nozzle on sic, restart motor and polishing Device, rotates the second polished land and utilizes polished silicon wafer to be polished, carry out last to carborundum Finishing polish works, and the polishing fluid spraying out after usage, flows back in annular waste liquid tank, Flow in waste collection groove by guiding gutter again, be so possible not only to carborundum is carried out precisely Perfect polishing, but also it is easy to cleaning, economical and practical.
Described base is hollow structure, and the inside of base is provided with and the first polished land and the second polishing The corresponding rotary shaft in position of platform, described rotary shaft lower end connects motor, and base is run through in upper end And it is connected with the first polished land and the second polished land.Motor drives first by rotary shaft Polished land and the second polished land rotate.
In order to ensure have certain altitude difference between annular waste liquid tank and waste collection groove, waste liquid can be suitable Profit flows into waste collection groove, and described waste collection groove is positioned at base side, described guiding gutter It is located on base.
Preferably, described base is connected with rotary shaft by bearing.Frictional resistance is little, reduces rotary shaft And the frictionally damage between base, improves mechanical efficiency, it is simple to installing/dismounting, easy to maintenance. The beneficial effects of the utility model are: this carborundum chemical polisher efficient and convenient for cleaning, By the first polished land of being provided with and the second polished land and pass through sanding apparatus and polishing Device is polished for carborundum, so one can be had preliminary to polish rib for carborundum The operation at angle, not only facilitates following polishing process, and makes to polish more thorough, logical Cross annular waste liquid tank and waste collection groove can be collected for used polishing fluid so that Polishing fluid will not trickle everywhere, facilitates the cleaning after work, and goes back to a certain extent Polishing time and cost can be saved, there is very strong practicality.
Brief description
Fig. 1 is the utility model structural representation;
Fig. 2 is motor schematic diagram of the present utility model.
In figure: 1 base, 2 first polished land, 3 second polished land, 4 annular waste liquid tanks, 5 Sanding apparatus, 6 burnishing devices, 7 polishing fluids conveying pipes, 8 shower nozzles, 9 waste collection grooves, 10 Polishing rod, 11 motors, 12 fixed plates, 13 containing liquid chambers, 14 guiding gutters, 15 polished silicon wafer, 16 rotary shafts.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the utility model embodiment, to the skill in the utility model embodiment Art scheme is clearly and completely described.As shown in figs. 1-2, a kind of efficient and convenient clear Clean carborundum chemical polisher, including base 1, the upper side of described base 1 is provided with fixing Plate 12 and motor 11 is driven the first polished land 2 of rotating and the second polished land 3, the side of described first polished land 2 is provided with the sanding apparatus 5 being installed vertically on base 1, Described sanding apparatus 5 includes being positioned at the polishing rod 10 directly over the first polished land 2;Described Fixed plate 12 on be provided with containing liquid chamber 13 and burnishing device 6, containing liquid chamber 13 bottom connects Polishing fluid carry pipe 7 one end, polishing fluid conveying pipe 7 other end be connected be positioned at the second polishing put down Shower nozzle 8 directly over platform 3, sets around the second polished land 3 in the second polished land 3 bottom Having annular waste liquid tank 4, described annular waste liquid tank 4 is through a guiding gutter 14 and waste collection groove 9 Connection;Described burnishing device 6 includes being positioned at the polished silicon wafer directly over the second polished land 3 15.Described base 1 is hollow structure, and base 1 internal be provided with the first polished land 2 and The second corresponding rotary shaft 16 in polished land 3 position, described rotary shaft 16 lower end connects electricity Machine 11, upper end is run through base 1 and connects with the first polished land 2 and the second polished land 3 Connecing, described base 1 is connected with rotary shaft 16 by bearing.
Workflow: first, is placed on the carborundum needing processing in the first polished land 2, Starting motor 11 and sanding apparatus 5, polishes in limit rotation limit, on carborundum, some are bigger Corner angle polish, and again the carborundum of preparatory processing are placed on the second polished land 3 afterwards On, sprayed polishing fluid by shower nozzle on sic, restart motor 11 and burnishing device 6, Limit rotates edge polishing, carries out last finishing polish work, the polishing fluid spraying out to carborundum After usage, flow back in annular waste liquid tank 4, receive flowing to waste liquid by guiding gutter 14 In collection groove 9.

Claims (4)

1. a carborundum chemical polisher efficient and convenient for cleaning, including base (1), it is special Levy and be: the upper side of described base (1) is provided with fixed plate (12) and by motor (11) Drive the first polished land (2) of rotating and the second polished land (3), described first The side of polished land (2) is provided with the sanding apparatus (5) being installed vertically on base (1), institute State sanding apparatus (5) to include being positioned at polishing rod (10) directly over the first polished land (2); It is provided with containing liquid chamber (13) and burnishing device (6), containing liquid chamber in described fixed plate (12) (13) bottom connection polishing fluid conveying pipe (7) one end, polishing fluid conveying pipe (7) other end It is connected with the shower nozzle (8) being positioned at directly over the second polished land (3), in the second polished land (3) bottom is provided with annular waste liquid tank (4) around the second polished land (3), and described annular is given up Liquid bath (4) connects with waste collection groove (9) through a guiding gutter (14);Described polishing dress Put (6) to include being positioned at the polished silicon wafer (15) directly over the second polished land (3).
2. carborundum chemical polisher efficient and convenient for cleaning according to claim 1, its It is characterised by: described base (1) is hollow structure, and base (1) inside is provided with and first Polished land (2) and the corresponding rotary shaft in the second polished land (3) position (16), described Rotary shaft (16) lower end connect motor (11), base (1) is run through and with first in upper end Polished land (2) and the second polished land (3) connect.
3. carborundum chemical polisher efficient and convenient for cleaning according to claim 1, its It is characterised by: described waste collection groove (9) is positioned at base (1) side, described water conservancy diversion Groove (14) is located on base (1).
4. carborundum chemical polisher efficient and convenient for cleaning according to claim 1, its It is characterised by: described base (1) is connected with rotary shaft (16) by bearing.
CN201620388348.7U 2016-04-29 2016-04-29 A kind of carborundum chemical polisher efficient and convenient for cleaning Active CN205703715U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620388348.7U CN205703715U (en) 2016-04-29 2016-04-29 A kind of carborundum chemical polisher efficient and convenient for cleaning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620388348.7U CN205703715U (en) 2016-04-29 2016-04-29 A kind of carborundum chemical polisher efficient and convenient for cleaning

Publications (1)

Publication Number Publication Date
CN205703715U true CN205703715U (en) 2016-11-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620388348.7U Active CN205703715U (en) 2016-04-29 2016-04-29 A kind of carborundum chemical polisher efficient and convenient for cleaning

Country Status (1)

Country Link
CN (1) CN205703715U (en)

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C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20190325

Address after: 250100 AB Block 1106-6-01, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province

Patentee after: Shandong Tianyue Advanced Material Technology Co., Ltd.

Address before: 250118 the middle part of Mei Li Lake, Huaiyin District, Ji'nan, Shandong

Patentee before: Shandong Tianyue Crystal Material Co., Ltd.

TR01 Transfer of patent right
CP03 Change of name, title or address

Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province

Patentee after: Shandong Tianyue advanced technology Co., Ltd

Address before: 250100 AB Block 1106-6-01, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province

Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd.

CP03 Change of name, title or address