CN204658194U - A kind of cleaning device - Google Patents
A kind of cleaning device Download PDFInfo
- Publication number
- CN204658194U CN204658194U CN201520175032.5U CN201520175032U CN204658194U CN 204658194 U CN204658194 U CN 204658194U CN 201520175032 U CN201520175032 U CN 201520175032U CN 204658194 U CN204658194 U CN 204658194U
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- abrasive disk
- cleaning device
- cleaning
- grinding
- base plate
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model relates to technical field of manufacturing semiconductors, particularly relates to a kind of cleaning device, for the abrasive disk of cleaning grinding pad trimmer.This cleaning device forms primarily of pedestal, hairbrush and nozzle, hairbrush is fixedly installed on the base, base plate is provided with multiple nozzle, in cleaning process, can not only spraying-rinsing be continued, also utilize the bristle of hairbrush to carry out full angle to the abrasive disk of grinding mat trimmer and thoroughly clean, effectively can remove the lapping liquid of abrasive disk surface crystallization and remnants, thus in the process of limit grinding limit start grinding mat trimmer, reduce the ratio that wafer scratches, improve product yield.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, particularly relates to a kind of cleaning device.
Background technology
Chemical mechanical milling tech (CMP) is by lapping liquid (Slurry) and grinding pad (Pad) and the chemical reaction of wafer (Wafer) surfacing and the effect of mechanical force, crystal column surface is polished, thus realizes planarized with the technical requirement meeting semiconductor chip design.
Wherein, grinding pad (Pad) is after grinding a period of time, have the residue that some abrasive grains and film grind to deposit in the groove on grinding pad surface, these particles and residue can affect the distribution of lapping liquid on grinding pad, and then the uniformity of impact grinding.At this moment, industry just works out grinding mat trimmer (Pad Conditioner) and repairs the lapped face of grinding pad, recovers groove and clears up abrasive grains and residue.
Grinding mat trimmer (Pad Conditioner) is formed primarily of mechanical arm and abrasive disk, the grinding mat trimmer of current main flow adopts in-situ pattern, i.e. limit grinding limit start grinding mat trimmer, this pattern can clear up adjustment grinding pad timely and effectively, makes the lapped face of grinding pad be in good state.But this has also caused another one problem: constantly use lapping liquid in process of lapping simultaneously, limit grinding limit start grinding mat trimmer makes the abrasive disk of grinding mat trimmer adheres to a lot of lapping liquid, along with the growth of service time, if these lapping liquids adhered to are not removed in time, crystallization will be formed, cause crystallization in process of lapping below to scratch crystal column surface, affect the product yield of wafer.
Therefore need the cleaning carrying out grinding mat trimmer (Pad Conditioner), and the cleaning of the existing grinding mat trimmer design nozzle that only use one is fan-shaped is sprayed water to abrasive disk, keep abrasive disk surface wettability to prevent the generation of crystallization; Or cleaning equipment is integrated on the head construction of grinding mat trimmer, by water spray, abrasive disk is simply cleaned.But based on the prolongation of time in the characteristic of different lapping liquid and grinding mat trimmer processing procedure process, only moisturizing and simple spraying-rinsing can not prevent the generation of crystallization on abrasive disk effectively.
Utility model content
The utility model is for the limitation of prior art, a kind of cleaning device is provided in a creative way, for the abrasive disk of cleaning grinding pad trimmer (Pad Conditioner), this cleaning device effectively can remove lapping liquid and the crystallization on the abrasive disk surface of grinding mat trimmer, thus in the process of limit grinding limit start grinding mat trimmer (Pad Conditioner), reduce the ratio of wafer scuffing, improve product yield.
The utility model solves the problems of the technologies described above adopted technical scheme:
There is provided a kind of cleaning device, for cleaning grinding pad trimmer, this cleaning device mainly comprises:
Hairbrush, comprises the base plate with upper surface and the lower surface relative to this upper surface, and is fixed on the bristle on described plate upper surface;
Pedestal, described hairbrush is fixedly installed on the base;
Wherein, described base plate is also provided with multiple nozzle, described grinding mat trimmer drives described abrasive disk to rotate and presses to and described bristle contact, carries out cleaning with the cleaning fluid utilizing described bristle and described multiple nozzle to spray to described abrasive disk.
Preferably, above-mentioned cleaning device also comprises screw, and this screw runs through described base plate and embeds in described pedestal, to be fixed on described pedestal by described hairbrush.
Preferably, in above-mentioned cleaning device, the length in the region that described bristle is distributed on described base plate is more than or equal to the diameter of described abrasive disk, comprehensively to scrub described abrasive disk in cleaning process.
Preferably, in above-mentioned cleaning device, described multiple nozzle is through to the upper surface of described base plate from the lower surface of described base plate, and preferred the plurality of nozzle is evenly distributed on described base plate; And the plurality of nozzle exceeds the height of height lower than described bristle of described plate upper surface.
Preferably, above-mentioned cleaning device also comprises the guard shield of a upper end open, is set on the sidewall of described pedestal, and the barrel shaped structure that described guard shield and described pedestal are formed is the cleaning space of described cleaning device.
Preferably, in above-mentioned cleaning device, described grinding mat trimmer also comprises: cylinder, includes air cylinder connecting rod, and the center of described abrasive disk is connected with this air cylinder connecting rod; Mechanical arm, described cylinder is fixedly installed on one end of this mechanical arm; Described cylinder controls rotation and the lifting of described abrasive disk by air cylinder connecting rod.Wherein, described air cylinder connecting rod is connected with described abrasive disk by drive unit, rotates to drive this abrasive disk; While described air cylinder connecting rod drives described abrasive disk to rotate, this abrasive disk can be driven to carry out descending operation and maybe this abrasive disk to be fixed on specific position.
The operation principle of above-mentioned cleaning device is: when after the finishing that grinding mat trimmer completes grinding pad, described grinding mat trimmer drives directly over described abrasive disk to described cleaning device by mechanical arm, control described abrasive disk by described cylinder rotate and described abrasive disk is depressurized to and described bristle contact, and do not contact with described multiple nozzle; Meanwhile open the driving arrangement of described cleaning device, make described nozzle to abrasive disk jet cleaning liquid, and described bristle is scrubbed abrasive disk back and forth along with the rotation of abrasive disk, effectively to remove lapping liquid on abrasive disk and crystallization.
Technique scheme tool has the following advantages or beneficial effect: the cleaning device for cleaning grinding pad trimmer (Pad Conditioner) that the utility model provides, spraying-rinsing can not only be continued, also utilize bristle to carry out full angle to abrasive disk thoroughly to clean, effectively can remove lapping liquid and the crystallization on abrasive disk surface, thus in the process of limit grinding limit start grinding mat trimmer, reduce the ratio of wafer scuffing, improve product yield.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, the utility model and feature, profile and advantage will become more apparent.It should be noted that in accompanying drawing and proportionally do not draw associated components, focus on purport of the present utility model is shown.
Fig. 1 is the sectional view of a kind of cleaning device of the present utility model;
Fig. 2 is the top view of a kind of cleaning device of the present utility model;
Fig. 3 is the schematic diagram of a kind of cleaning device of the present utility model in cleaning process.
Detailed description of the invention
Below in conjunction with accompanying drawing and specific embodiment, the utility model is further described, but not as restriction of the present utility model.
As shown in Fig. 1 sectional view and Fig. 2 top view, a kind of cleaning device that the utility model provides, for cleaning grinding pad trimmer (Pad Conditioner), the main composition parts of this cleaning device comprise:
Pedestal 1, its size is greater than the abrasive disk size of grinding mat trimmer to be cleaned;
As a preferred embodiment, the abrasive disk because of existing main flow grinding mat trimmer mostly is circular, is matched design, pedestal 1 is set to circle.
Be provided with the interface (not shown) connecting driving arrangement in this pedestal 1, drive the cleaning device of the application to operate to connect driving arrangement by interface in use;
In another preferred embodiment of the application, it is inner that driving arrangement also can be arranged on pedestal 1, as long as it can drive the cleaning device normal operation of the application.
As a preferred embodiment, the upper surface of pedestal 1 can also offer some osculum (not shown)s, to be discharged by the cleaning fluid having cleaned abrasive disk in cleaning in time; This apopore is connected in waste liquid pool or special container by pipeline.
The main composition parts of above-mentioned cleaning device also comprise:
Hairbrush, is made up of base plate 2 and the bristle 3 installed on a base plate 2, is fixed on pedestal 1 by screw by the base plate 2 of hairbrush;
Wherein, base plate 2 can be square, circular or other shapes, as long as it can be fixedly mounted on pedestal 1; Be described for square chassis 2 in Fig. 1;
Further, bristle 3 is evenly distributed in the zone line of base plate 2 thick and fast, and concrete, the length of bristle 3 distributed areas is on a base plate 2 more than or equal to the diameter of abrasive disk, to realize comprehensive cleaning to abrasive disk.
As a preferred embodiment, the material hardness of bristle 3 will ensure its crystallization thoroughly removing abrasive disk surface and don't as scratch abrasive disk.
Nozzle 4, is formed by offering some slotted eyes on the base plate 2 of hairbrush; Meanwhile, nozzle 4 is connected to delivery equipment (not shown) by water-supply-pipe, and this delivery equipment can be arranged in pedestal 1, to ensure to provide cleaning fluid to nozzle 4 in cleaning process.
As a preferred embodiment, the selection of cleaning fluid can make accommodation according to the character of lapping liquid residual on abrasive disk and crystallization thereof, as can deionized water be selected, or clear water etc., the technical program is not restricted this.
As a preferred embodiment, above-mentioned cleaning device also comprises the cylindrical shape guard shield 5 of a upper end open, is fixed on pedestal 1, splashes other places to prevent water in the process of cleaning abrasive disk.
In another preferred embodiment of the present utility model, the above-mentioned osculum (not shown) be arranged on pedestal 1 can also be arranged on the sidewall (not shown) of guard shield 5, as long as it can ensure to be discharged by the cleaning fluid having cleaned abrasive disk in cleaning in time.
When utilizing above-mentioned cleaning device to carry out cleaning to grinding mat trimmer (Pad Conditioner), as shown in Figure 3: grinding mat trimmer (Pad Conditioner) includes cylinder 101, be fixedly installed on one end of mechanical arm 100, controlled rotation and the lifting of abrasive disk 200 by air cylinder connecting rod 102; Wherein, the center of abrasive disk 200 is connected with air cylinder connecting rod 102, drives abrasive disk 200 to rotate, rise or decline to make air cylinder connecting rod 102 under the control of cylinder 101.
In concrete cleaning, after grinding mat trimmer (Pad Conditioner) completes the finishing to grinding pad, drive directly over abrasive disk 200 to cleaning device by mechanical arm 100, can realize comprehensively scrubbing to the abrasive disk 200 in rotation to make further bristles 3.
Then, control abrasive disk 200 by cylinder 101 by air cylinder connecting rod 102 and rotate, and abrasive disk 200 is depressurized to contacts with bristle 3, and do not contact with nozzle 4.Because lapping liquid residual on abrasive disk 200 in concrete trim process and the character of crystallization thereof are also incomplete same, therefore herein can according to actual conditions, suitable cleaning fluid is selected to clean abrasive disk 200, and correspondingly control the rotary speed of abrasive disk 200 and the degree that presses down, make abrasive disk 200 and bristle 3 have contact in various degree.
Wherein, the rotating operation of the abrasive disk 200 controlled by cylinder 101 and descending operation are two and independently operate mutually, also namely cylinder 101 can carry out descending operation by air cylinder connecting rod 102 while driving abrasive disk 200 rotates, or abrasive disk 200 is fixed on specific position rotates, or carry out descending operation separately, concrete combination operation adjusts according to actual needs.
Further, open the driving arrangement of cleaning device, make to be positioned at nozzle 4 on the base plate 2 of hairbrush to abrasive disk 200 jet cleaning liquid, and bristle 3 is scrubbed to abrasive disk 200 back and forth along with the motion of abrasive disk 200 rotates, effectively to remove lapping liquid on abrasive disk 200 and crystallization.
In sum, the utility model discloses a kind of cleaning device, for cleaning grinding pad trimmer (Pad Conditioner), this cleaning device can not only continue spraying-rinsing, also utilize bristle to carry out full angle to abrasive disk thoroughly to clean, effectively can remove lapping liquid and the crystallization on abrasive disk surface, thus in the process of limit grinding limit start grinding mat trimmer (Pad Conditioner), reduce the ratio of wafer scuffing, improve product yield.
It should be appreciated by those skilled in the art that those skilled in the art can realize various change case in conjunction with prior art and above-described embodiment, such change case does not affect flesh and blood of the present utility model, does not repeat them here.
Above preferred embodiment of the present utility model is described.It is to be appreciated that the utility model is not limited to above-mentioned particular implementation, the equipment wherein do not described in detail to the greatest extent and structure are construed as to be implemented with the common mode in this area; Any those of ordinary skill in the art, do not departing under technical solutions of the utility model ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solutions of the utility model, or being revised as the Equivalent embodiments of equivalent variations, this does not affect flesh and blood of the present utility model.Therefore, every content not departing from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solutions of the utility model protection.
Claims (9)
1. a cleaning device, is characterized in that, is applied to the abrasive disk of cleaning grinding pad trimmer, and described cleaning device comprises:
Hairbrush, comprises the base plate with upper surface and the lower surface relative to this upper surface, and is fixed on the bristle on described plate upper surface;
Pedestal, described hairbrush is fixedly installed on the base;
Wherein, described base plate is also provided with multiple nozzle, described grinding mat trimmer drives described abrasive disk to rotate and presses down this abrasive disk and described bristle contact, carries out cleaning with the cleaning fluid utilizing described bristle and described multiple nozzle to spray to described abrasive disk.
2. cleaning device according to claim 1, is characterized in that, also comprises:
Screw, runs through described base plate and embeds in described pedestal, to be fixed on described pedestal by described hairbrush.
3. cleaning device according to claim 1, is characterized in that, the length in the region that described bristle is distributed on described base plate is more than or equal to the diameter of described abrasive disk.
4. cleaning device according to claim 1, is characterized in that, described multiple nozzle is through to the upper surface of described base plate from the lower surface of described base plate, with to described abrasive disk jet cleaning liquid.
5. cleaning device according to claim 1, is characterized in that, also comprises:
Guard shield, is set on the sidewall of described pedestal, and jointly to be formed the barrel shaped structure of a upper end open with this pedestal, and described hairbrush is positioned at the chamber of this barrel shaped structure.
6. cleaning device according to claim 1, is characterized in that, described grinding mat trimmer also comprises:
Mechanical arm, described abrasive disk is arranged on an end of this mechanical arm, to be transferred to directly over described hairbrush by this abrasive disk.
7. cleaning device according to claim 6, is characterized in that, described grinding mat trimmer also comprises:
Cylinder, described mechanical arm is connected with described abrasive disk by this cylinder;
Wherein, described cylinder drives described abrasive disk to carry out descending operation, with make the lower surface of described abrasive disk and described bristle contact or away from.
8. cleaning device according to claim 7, is characterized in that, described cylinder comprises:
Air cylinder connecting rod, described cylinder is connected with described abrasive disk by this air cylinder connecting rod, carries out descending operation to drive described abrasive disk.
9. cleaning device according to claim 8, is characterized in that, described grinding mat trimmer also comprises:
Drive unit, is connected with described abrasive disk by described air cylinder connecting rod, rotates to drive this abrasive disk;
Wherein, described air cylinder connecting rod, while the described abrasive disk of driving rotates, can drive this abrasive disk to carry out descending operation and maybe this abrasive disk is fixed on specific position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520175032.5U CN204658194U (en) | 2015-03-26 | 2015-03-26 | A kind of cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520175032.5U CN204658194U (en) | 2015-03-26 | 2015-03-26 | A kind of cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204658194U true CN204658194U (en) | 2015-09-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520175032.5U Active CN204658194U (en) | 2015-03-26 | 2015-03-26 | A kind of cleaning device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105269420A (en) * | 2015-11-21 | 2016-01-27 | 中国船舶重工集团公司第七一六研究所 | Full-automatic polishing tool clamp and mounting method thereof |
| CN106623163A (en) * | 2017-03-01 | 2017-05-10 | 贵州大学 | Milling disc type soybean cleaning device |
| WO2018092440A1 (en) * | 2016-11-15 | 2018-05-24 | 株式会社Sumco | Wafer edge polishing device and method |
| CN111482901A (en) * | 2020-04-30 | 2020-08-04 | 杨圣 | Cleaning device of chemical mechanical polishing equipment |
| CN111834259A (en) * | 2020-07-17 | 2020-10-27 | 中国科学院微电子研究所 | Cleaning assembly |
| CN111842259A (en) * | 2020-06-30 | 2020-10-30 | 长江存储科技有限责任公司 | Cleaning device for grinding pad dresser |
| CN112845305A (en) * | 2021-01-04 | 2021-05-28 | 长江存储科技有限责任公司 | Wafer cleaning device |
| CN113539904A (en) * | 2021-07-19 | 2021-10-22 | 西安奕斯伟硅片技术有限公司 | Cleaning device, system and method for grooves of lower fixed disc in double-sided grinding |
-
2015
- 2015-03-26 CN CN201520175032.5U patent/CN204658194U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105269420A (en) * | 2015-11-21 | 2016-01-27 | 中国船舶重工集团公司第七一六研究所 | Full-automatic polishing tool clamp and mounting method thereof |
| WO2018092440A1 (en) * | 2016-11-15 | 2018-05-24 | 株式会社Sumco | Wafer edge polishing device and method |
| US11559869B2 (en) | 2016-11-15 | 2023-01-24 | Sumco Corporation | Wafer edge polishing apparatus and method |
| CN106623163A (en) * | 2017-03-01 | 2017-05-10 | 贵州大学 | Milling disc type soybean cleaning device |
| CN106623163B (en) * | 2017-03-01 | 2023-05-09 | 贵州大学 | Millstone type soybean cleaning device |
| CN111482901A (en) * | 2020-04-30 | 2020-08-04 | 杨圣 | Cleaning device of chemical mechanical polishing equipment |
| CN111482901B (en) * | 2020-04-30 | 2022-08-26 | 青岛华芯晶电科技有限公司 | Cleaning device of chemical mechanical polishing equipment |
| CN111842259A (en) * | 2020-06-30 | 2020-10-30 | 长江存储科技有限责任公司 | Cleaning device for grinding pad dresser |
| CN111834259A (en) * | 2020-07-17 | 2020-10-27 | 中国科学院微电子研究所 | Cleaning assembly |
| CN112845305A (en) * | 2021-01-04 | 2021-05-28 | 长江存储科技有限责任公司 | Wafer cleaning device |
| CN113539904A (en) * | 2021-07-19 | 2021-10-22 | 西安奕斯伟硅片技术有限公司 | Cleaning device, system and method for grooves of lower fixed disc in double-sided grinding |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |