CN111482901B - Cleaning device of chemical mechanical polishing equipment - Google Patents
Cleaning device of chemical mechanical polishing equipment Download PDFInfo
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- CN111482901B CN111482901B CN202010360833.4A CN202010360833A CN111482901B CN 111482901 B CN111482901 B CN 111482901B CN 202010360833 A CN202010360833 A CN 202010360833A CN 111482901 B CN111482901 B CN 111482901B
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- rod
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- 238000004140 cleaning Methods 0.000 title claims abstract description 112
- 238000005498 polishing Methods 0.000 title claims abstract description 58
- 239000000126 substance Substances 0.000 title claims abstract description 20
- 239000007788 liquid Substances 0.000 claims description 55
- 238000003860 storage Methods 0.000 claims description 31
- 238000004804 winding Methods 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 238000011084 recovery Methods 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 230000001680 brushing effect Effects 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 239000004519 grease Substances 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 abstract description 5
- 238000005096 rolling process Methods 0.000 description 19
- 239000002184 metal Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 8
- 239000002699 waste material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 230000005389 magnetism Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/007—Cleaning of grinding wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
- B01D29/03—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements self-supporting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention provides a cleaning device of chemical mechanical polishing equipment, which comprises a supporting base, wherein a fixed support is arranged at the top end of the outer part of the supporting base, a transverse guide rod is arranged at the top end of the inner wall of the fixed support, a sliding ring is sleeved and arranged at the outer part of the transverse guide rod, a fixed rod is arranged at the bottom end of the sliding ring, a movable block is sleeved and arranged at the outer part of the fixed rod, a supporting side frame is arranged at the middle part of the outer wall of the fixed support, a movable cutting sleeve is sleeved and arranged at the top end of a driving motor, a deflection rod is sleeved and arranged in the movable cutting sleeve, the top end of the deflection rod is rotatably connected with the outer wall of the movable block through an L-shaped steering plate, the movable cutting sleeve is driven to rotate by the driving motor, the deflection rod slides in the movable cutting sleeve, the movable block slides in the fixed rod through the rotation of the L-shaped steering plate, and therefore, the reciprocating motion of a polishing head at the bottom end of the fixed rod at the transverse guide rod at the top end in the fixed support is realized .
Description
Technical Field
The invention relates to the technical field of chemical mechanical equipment cleaning devices, in particular to a cleaning device of chemical mechanical polishing equipment.
Background
In the production process of large-scale integrated circuits, the planarization of the deposit on the wafer is a necessary and frequent procedure, and at present, the chemical mechanical polishing process is mainly adopted for completing the procedure, and the chemical mechanical polishing machine is the main equipment for completing the procedure.
Wherein after the completion of polishing of chemical mechanical polishing equipment, need wash along with the polishing head in the equipment, avoid polishing head surface to glue and cover the sweeps, lead to the relatively poor problem of the polishing quality in device later stage.
Therefore, there is a need to provide a new cleaning device for a chemical mechanical polishing apparatus to solve the above-mentioned technical problems.
Disclosure of Invention
The invention solves the technical problem of providing a cleaning device with chemical mechanical polishing equipment which can be cleaned thoroughly and is convenient to use.
In order to solve the technical problems, the invention provides a cleaning device of chemical mechanical polishing equipment, which comprises a supporting base, wherein a fixed bracket is arranged at the top end of the outer part of the supporting base, a driving mechanism is arranged at the top end of the inner part of the fixed bracket, the driving mechanism comprises a transverse guide rod, a sliding ring, a fixed rod, a supporting side frame, a movable block, an L-shaped steering plate, a deflection rod, a movable clamping sleeve and a driving motor, the transverse guide rod is arranged at the top end of the inner wall of the fixed bracket, the sliding ring is sleeved and arranged outside the transverse guide rod, the fixed rod is arranged at the bottom end of the sliding ring, the movable block is sleeved and arranged outside the fixed rod, the supporting side frame is arranged in the middle part of the outer wall of the fixed bracket, the driving motor is embedded in the middle part of the outer wall of the supporting side frame, and the movable clamping sleeve is arranged at the top end of the driving motor, the movable clamping sleeve is internally sleeved with the deflection rod, the top end of the deflection rod is connected with the outer wall of the movable block through the L-shaped steering plate in a rotating mode, and the power input end of the driving motor is electrically connected with the output end of the commercial power.
Preferably, the bottom end of the fixed rod is fixedly provided with a polishing head through threads, and the joint of the top end of the movable clamping sleeve and the L-shaped steering plate is sleeved with a compression spring.
Preferably, the fixed bolster external correspondence the department of position of polishing head cup joints installs wiper mechanism, wiper mechanism includes cleaning plate, slider, rolling dish, liquid reserve tank, clean cylinder, brush slat and hydrojet board, the outside both sides of fixed bolster correspond the equal slidable mounting in department of position of polishing head has the cleaning plate, install cleaning plate outside one side the rolling dish, cleaning plate top surface one side corresponds rolling dish position department installation embedding and installs the liquid reserve tank, it corresponds to support base inner wall one side liquid reserve tank position department evenly cup joints and installs clean cylinder.
Preferably, the cleaning plate is connected with the fixed support in a sliding mode through the sliding block, and the sliding block is fixedly connected with the fixed support through the bolt.
Preferably, the cleaning roller and the inner wall of the cleaning plate are fixedly connected through a fixed shaft, a brushing plate is uniformly embedded in the outer wall of the cleaning roller, and the spraying plate is embedded in one side of the brushing plate at intervals.
Preferably, the top end inside the winding disc is fixedly connected with the inside of the fixing shaft through a connecting water pipe, and the winding disc is arranged. Internally mounted has the rolling rod, the rolling rod outside cup joints installs the rolling inner disc, just rolling inner disc outer wall with connect the water piping connection department and evenly install the non-slip rubber piece.
Preferably, support the inside top of base and correspond cleaning plate position department and install recovery mechanism, it includes liquid storage fill, stainless steel filter screen, circular telegram magnetic coil and blowoff valve to retrieve the mechanism, it corresponds to support the inside top of base cleaning plate position department has seted up the liquid storage fill, the embedding of liquid storage fill inner wall top is installed the stainless steel filter screen, the embedding of liquid storage fill inner wall bottom one side is installed the blowoff valve.
Preferably, the position of the bottom end inside the supporting base, which corresponds to the position of the liquid storage hopper, is embedded with the electrified magnetic coil, and the bottom end of the liquid storage hopper is obliquely arranged.
Preferably, lubricating grease is attached to the inner wall of the slip ring, and the oil injection nozzle is embedded into the top end of the slip ring.
Preferably, through holes are uniformly formed in the positions, corresponding to the cleaning roller, of the bottom end of the inner wall of the cleaning plate.
Compared with the related art, the cleaning device of the chemical mechanical polishing equipment provided by the invention has the following beneficial effects:
according to the invention, the driving mechanism is arranged, the driving motor arranged at the supporting side frame drives the movable clamping sleeve to rotate, so that the deflection rod slides in the movable clamping sleeve, the movable block slides outside the fixed rod through the rotation of the L-shaped steering plate, and the sliding ring at the top end of the fixed rod slides outside the transverse guide rod, so that the reciprocating motion of the polishing head at the bottom end of the fixed rod at the transverse guide rod at the top end in the fixed support is realized, and the later-stage cleaning of the device is facilitated.
Through being provided with wiper mechanism, when the head of polishing when carrying out reciprocating motion, through the outside contact between a plurality of cleaning roller with the cleaning plate inside of polishing the head, and by rolling dish and external water supply equipment's being connected, the connecting water pipe through liquid reserve tank department injects the cleaning solution into to the cleaning plate inside, through the contact between a plurality of cleaning roller and the head of polishing, the liquid spray board by cleaning roller department can wash the outside impurity of gluing the cover of head of polishing through the cleaning solution, and the accessible scrubbing board carries out the secondary and cleans, thereby the clean performance of head of polishing when wasing has effectively been guaranteed.
Through being provided with recovery mechanism, when the liquid storage bucket is collecting the waste liquid after the washing, can adsorb the metal sweeps after the polishing head washs through the magnetism that the circular telegram magnetic coil produced during the circular telegram to collect the metal sweeps through regularly cutting off the power supply to the circular telegram magnetic coil, avoided the metal sweeps directly to discharge, cause the problem of pollution easily to the environment.
Drawings
FIG. 1 is a schematic structural diagram of a preferred embodiment of the present invention;
FIG. 2 is a schematic structural view of the driving mechanism shown in FIG. 1;
FIG. 3 is a schematic structural view of the cleaning mechanism shown in FIG. 1;
FIG. 4 is a schematic view of the cleaning roller shown in FIG. 1;
FIG. 5 is a schematic structural view of the recovery mechanism shown in FIG. 1;
fig. 6 is a schematic structural view of the inside of the winding disc shown in fig. 1.
Reference numbers in the figures: 1. a support base; 2. fixing a bracket; 3. a drive mechanism; 301. a transverse guide rod; 302. a slip ring; 303. fixing the rod; 304. a support sideframe; 305. a movable block; 306. an L-shaped steering plate; 307. a deflection rod; 308. a movable ferrule; 309. a drive motor; 4. a cleaning mechanism; 401. cleaning the plate; 402. a slider; 403. a winding disc; 404. a liquid storage tank; 405. cleaning the roller; 406. brushing a batten; 407. a liquid spray plate; 5. a recovery mechanism; 501. a liquid storage hopper; 502. a stainless steel filter screen; 503. energizing a magnetic coil; 504. a blowoff valve; 6. polishing head; 7. a compression spring; 8. connecting a water pipe; 9. winding the rod; 10. rolling the inner disc; 11. an anti-skid rubber block; 12. and fixing the shaft.
Detailed Description
The invention is further described with reference to the following figures and embodiments.
Please refer to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5 and fig. 6 in combination, wherein fig. 1 is a schematic structural diagram of a preferred embodiment of the present invention; FIG. 2 is a schematic structural view of the driving mechanism shown in FIG. 1; FIG. 3 is a schematic structural view of the cleaning mechanism shown in FIG. 1; FIG. 4 is a schematic structural view of the cleaning roller shown in FIG. 1; FIG. 5 is a schematic view of the recycling mechanism shown in FIG. 1; fig. 6 is a schematic structural view of the inside of the winding disc shown in fig. 1. A cleaning device of chemical mechanical polishing equipment comprises a supporting base 1, a fixed support 2 is installed at the top end of the outer portion of the supporting base 1, a driving mechanism 3 is installed at the top end of the inner portion of the fixed support 2, the driving mechanism 3 comprises a transverse guide rod 301, a sliding ring 302, a fixed rod 303, a supporting side frame 304, a movable block 305, an L-shaped steering plate 306, a deflection rod 307, a movable clamping sleeve 308 and a driving motor 309, the transverse guide rod 301 is installed at the top end of the inner wall of the fixed support 2, the sliding ring 302 is installed at the outer portion of the transverse guide rod 301 in a sleeved mode, the fixed rod 303 is installed at the bottom end of the sliding ring 302, the movable block 305 is installed at the outer portion of the fixed rod 303 in a sleeved mode, the supporting side frame 304 is installed at the middle portion of the outer wall of the fixed support 2, the driving motor 309 is installed in an embedded mode in the middle portion of the outer wall of the supporting side frame 304, the movable clamping sleeve 308 is installed at the top end of the movable clamping sleeve 308 in a sleeved mode and installed with the deflection rod 307, the top end of the deflection rod 307 is rotatably connected with the outer wall of the movable block 305 through the L-shaped steering plate 306, the power input end of the driving motor 309 is electrically connected to the output end of the commercial power.
The polishing head 6 is fixedly installed at the bottom end of the fixing rod 303 through threads, a compression spring 7 is installed at the joint of the top end of the movable clamping sleeve 308 and the L-shaped steering plate 306 in a sleeved mode, the polishing head 6 after the chemical mechanical polishing device is used can be fixedly installed through the fixing rod 303, the polishing head 6 is firmly installed in the later-period cleaning process, the movable clamping sleeve 308 rotates to be driven by the deflection rod 307 and the L-shaped steering plate 306 to move left and right on the outer wall of the transverse guide rod 301, and the stability of the deflection rod 307 during reciprocating motion is guaranteed through the compression spring 7.
The outside 6 position departments of the head of polishing that corresponds of fixed bolster 2 cup joint and install wiper mechanism 4, wiper mechanism 4 includes cleaning plate 401, slider 402, rolling disc 403, liquid reserve tank 404, cleaning roller 405, brush strip board 406 and hydrojet board 407, the equal slidable mounting in the outside both sides of fixed bolster 2 corresponds 6 position departments of the head of polishing has cleaning plate 401, rolling disc 403 is installed to cleaning plate 401 outside one side, cleaning plate 401 top surface one side corresponds rolling disc 403 position department installation embedding and installs liquid reserve tank 404, it evenly cup joints and installs cleaning roller 405 to correspond liquid reserve tank 404 position department on one side of the support base 1 inner wall.
Through slider 402 sliding connection between cleaning plate 401 and the fixed bolster 2, and through bolt fixed connection between slider 402 and the fixed bolster 2, drive cleaning plate 401 through slider 402 and move about the fixed bolster 2 outer wall, can adjust cleaning plate 401's position department according to the installation height of 6 reality of polishing head to the accessible bolt is locked fixedly.
Through fixed axle 12 fixed connection between cleaning roller 405 and the washing board 401 inner wall, and the even embedding of cleaning roller 405 outer wall installs brush slat 406, and brush slat 406 one side interval embedding installs spray plate 407, when the head 6 of polishing carries out reciprocating motion outside washing board 401, through the contact between a plurality of cleaning roller 405 and the head 6 of polishing, can wash the impurity that the head 6 outside was glued to the cleaning solution through the cleaning solution by the liquid spray plate 407 of cleaning roller 405 department, and the accessible brush slat 406 cleans for the second time, thereby effectively guaranteed the clean performance of head 6 of polishing when wasing.
The top end inside the winding disc 403 is fixedly connected with the inside of the fixed shaft 12 through a connecting water pipe 8, and the winding disc 403 is wound. Internally mounted has winding rod 9, and winding rod 9 outside cup joints and installs rolling inner disc 10, and the rolling inner disc 10 outer wall evenly installs non-slip rubber piece 11 with the junction of being connected water pipe 8, can carry out the rolling with the outside connection water pipe 8 that stretches out of winding disc 403 through rotating winding rod 9 outside rolling inner disc 10 to through non-slip rubber piece 11 increased the rolling inner disc 10 and be connected the frictional force when rolling between the water pipe 8.
Support the inside top of base 1 and correspond cleaning plate 401 position department and install recovery mechanism 5, retrieve mechanism 5 and include that liquid storage fill 501, stainless steel filter screen 502, circular telegram solenoid 503 and blowoff valve 504, support the inside top of base 1 and correspond cleaning plate 401 position department and seted up liquid storage fill 501, stainless steel filter screen 502 is installed in the embedding of liquid storage fill 501 inner wall top, blowoff valve 504 is installed in the embedding of liquid storage fill 501 inner wall bottom one side.
The position of the bottom end inside the supporting base 1 corresponding to the position of the liquid storage bucket 501 is embedded with the electromagnetic coil 503, so that the cleaning waste liquid collected inside the liquid storage bucket 501 can be conveniently recycled and discharged, the bottom end of the liquid storage bucket 501 is arranged in an inclined mode, metal scraps after cleaning the polishing head 6 are adsorbed by magnetism generated by the electromagnetic coil 503 during energization, the metal scraps are collected by regularly powering off the electromagnetic coil 503, direct discharge of the metal scraps is avoided, and the problem of environmental pollution is easily caused.
Lubricating grease is installed in the inner wall of the sliding ring 302 in a covering mode, the oil nozzle is installed at the top end of the sliding ring 302 in an embedded mode, the connecting position between the sliding ring 302 and the transverse guide rod 301 can be lubricated through the lubricating grease, lubricating oil can be supplemented through the oil nozzle, and the stability of the sliding ring 302 during sliding is guaranteed.
The through-hole has evenly been seted up to the corresponding cleaning roller 405 position department in cleaning plate 401 inner wall bottom, and the through-hole of seting up through cleaning plate 401 inner wall bottom position department can discharge the waste liquid that spatters when polishing head 6 washs, avoids the waste liquid to accumulate in cleaning plate 401 inside.
The working principle provided by the invention is as follows: firstly, a driving motor 309 arranged at a supporting side frame 304 drives a movable sleeve 308 to rotate, so that a deflection rod 307 slides inside the movable sleeve 308, a movable block 305 slides outside a fixed rod 303 through the rotation of an L-shaped steering plate 306, and a sliding ring 302 at the top end of the fixed rod 303 slides outside a transverse guide rod 301, so that the reciprocating motion of a sanding head 6 at the bottom end of the fixed rod 303 at the transverse guide rod 301 at the top end inside a fixed bracket 2 is realized, and the later-stage cleaning of the device is facilitated;
then, when the polishing head 6 reciprocates, through the contact between the outside of the polishing head 6 and the plurality of cleaning rollers 405 inside the cleaning plate 401, and the connection between the winding disc 403 and the external water supply equipment, the cleaning solution is injected into the cleaning plate 401 through the connecting water pipe 8 at the liquid storage tank 404, through the contact between the plurality of cleaning rollers 405 and the polishing head 6, the liquid spraying plate 407 at the cleaning roller 405 can wash the impurities stuck on the outside of the polishing head 6 through the cleaning solution, and can perform secondary wiping through the brushing strip plate 406, thereby effectively ensuring the cleaning performance of the polishing head 6 during cleaning;
finally, when the liquid storage hopper 501 collects the cleaned waste liquid, the metal scraps cleaned by the polishing head 6 can be adsorbed by magnetism generated by the electromagnetic coil 503 when the liquid storage hopper is powered on, and the metal scraps are collected by periodically powering off the electromagnetic coil 503, so that the problems that the metal scraps are directly discharged and the environment is easily polluted are solved, the connection water pipe 8 extending out of the winding disc 403 can be wound by rotating the winding inner disc 10 outside the winding rod 9, and the friction force between the winding inner disc 10 and the connection water pipe 8 during winding is increased by the anti-skid rubber block 11.
Compared with the related art, the cleaning device of the chemical mechanical polishing equipment provided by the invention has the following beneficial effects:
according to the invention, the driving mechanism 3 is arranged, the driving motor 309 arranged at the supporting side frame 304 drives the movable sleeve 308 to rotate, so that the deflection rod 307 slides in the movable sleeve 308, the movable block 305 slides outside the fixed rod 303 through the rotation of the L-shaped steering plate 306, and the sliding ring 302 at the top end of the fixed rod 303 slides outside the transverse guide rod 301, so that the reciprocating motion of the sanding head 6 at the bottom end of the fixed rod 303 at the transverse guide rod 301 at the top end inside the fixed bracket 2 is realized, and the later-stage cleaning of the device is facilitated.
Through being provided with wiper mechanism 4, when grinding head 6 is carrying out reciprocating motion, contact between 6 outside and the inside a plurality of cleaning roller 405 of cleaning board 401 through grinding head, and by rolling dish 403 and external water supply equipment's being connected, inject the cleaning solution into to the inside of cleaning board 401 through the connecting water pipe 8 of liquid reserve tank 404 department, through the contact between a plurality of cleaning roller 405 and grinding head 6, can wash the outside impurity that covers of grinding head 6 through the cleaning solution by the liquid spray board 407 of cleaning roller 405 department, and the accessible brush slat 406 cleans for the second time, thereby effectively guaranteed the clean performance of grinding head 6 when wasing.
By arranging the recovery mechanism 5, when the liquid storage hopper 501 collects the cleaned waste liquid, the metal scraps cleaned by the polishing head 6 can be adsorbed by the magnetism generated by the electromagnetic coil 503 when the liquid storage hopper is powered on, and the metal scraps are collected by periodically powering off the electromagnetic coil 503, so that the problems that the metal scraps are directly discharged and the environment is easily polluted are avoided.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (5)
1. The cleaning device of the chemical mechanical polishing equipment comprises a supporting base (1) and is characterized in that a fixed support (2) is installed at the top end of the outside of the supporting base (1), a driving mechanism (3) is installed at the top end of the inside of the fixed support (2), the driving mechanism (3) comprises a transverse guide rod (301), a sliding ring (302), a fixed rod (303), a supporting side frame (304), a movable block (305), an L-shaped steering plate (306), a deflection rod (307), a movable clamping sleeve (308) and a driving motor (309), the transverse guide rod (301) is installed at the top end of the inner wall of the fixed support (2), the sliding ring (302) is installed on the outside of the transverse guide rod (301) in a sleeved mode, the fixed rod (303) is installed at the bottom end of the sliding ring (302), the movable block (305) is installed on the outside of the fixed rod (303) in a sleeved mode, the supporting side frame (304) is installed in the middle of the outer wall of the fixed support (2), the driving motor (309) is embedded in the middle of the outer wall of the supporting side frame (304), the movable clamping sleeve (308) is sleeved at the top end of the driving motor (309), the deflection rod (307) is sleeved inside the movable clamping sleeve (308), the top end of the deflection rod (307) is rotatably connected with the outer wall of the movable block (305) through the L-shaped steering plate (306), and the power input end of the driving motor (309) is electrically connected with the output end of a commercial power;
the bottom end of the fixed rod (303) is fixedly provided with a polishing head (6) through threads, and a compression spring (7) is sleeved at the joint of the top end of the movable clamping sleeve (308) and the L-shaped steering plate (306);
the cleaning device is characterized in that a cleaning mechanism (4) is sleeved and mounted at a position, corresponding to the grinding head (6), of the outer part of the fixed support (2), the cleaning mechanism (4) comprises a cleaning plate (401), a sliding block (402), a winding disc (403), a liquid storage box (404), a cleaning roller (405), a brush strip plate (406) and a liquid spraying plate (407), the cleaning plate (401) is mounted at positions, corresponding to the grinding head (6), of two outer sides of the fixed support (2) in a sliding mode, the winding disc (403) is mounted at one side of the outer part of the cleaning plate (401), the liquid storage box (404) is mounted at one side of the top end surface of the cleaning plate (401) in a position, corresponding to the winding disc (403), in an embedded mode, the cleaning roller (405) is mounted at one side of the inner wall of the supporting base (1) in a position, corresponding to the liquid storage box (404), in a uniform sleeved mode;
the cleaning plate (401) is in sliding connection with the fixed support (2) through the sliding block (402), and the sliding block (402) is fixedly connected with the fixed support (2) through a bolt;
the cleaning roller (405) is fixedly connected with the inner wall of the cleaning plate (401) through a fixed shaft (12), a brushing plate (406) is uniformly embedded and installed on the outer wall of the cleaning roller (405), and the liquid spraying plate (407) is embedded and installed on one side of the brushing plate (406) at intervals;
the top end of the inner part of the winding disc (403) is fixedly connected with the inner part of the fixed shaft (12) through a connecting water pipe (8), a winding rod (9) is installed inside the winding disc (403), a winding inner disc (10) is sleeved outside the winding rod (9), and anti-skid rubber blocks (11) are uniformly installed at the joint of the outer wall of the winding inner disc (10) and the connecting water pipe (8);
when the polishing head (6) reciprocates, the cleaning head (6) is in contact with a plurality of cleaning rollers (405) inside the cleaning plate (401) through the outside of the polishing head (6), the winding disc (403) is connected with external water supply equipment, cleaning liquid is injected into the cleaning plate (401) through a connecting water pipe (8) at the liquid storage tank (404), and through the contact between the cleaning rollers (405) and the polishing head (6), the liquid spraying plate (407) at the cleaning roller (405) can wash impurities adhered to the outside of the polishing head (6) through the cleaning liquid and can perform secondary wiping through the brush strip plate (406), so that the cleaning performance of the polishing head (6) during cleaning is effectively guaranteed.
2. The cleaning device of the chemical mechanical polishing equipment as recited in claim 1, wherein a recovery mechanism (5) is installed at a position corresponding to the cleaning plate (401) on the top end inside the supporting base (1), the recovery mechanism (5) comprises a liquid storage hopper (501), a stainless steel filter screen (502), an electromagnetic coil (503) and a blow-off valve (504), the liquid storage hopper (501) is opened at a position corresponding to the cleaning plate (401) on the top end inside the supporting base (1), the stainless steel filter screen (502) is installed on the top end of the inner wall of the liquid storage hopper (501) in an embedded manner, and the blow-off valve (504) is installed on one side of the bottom end of the inner wall of the liquid storage hopper (501) in an embedded manner.
3. The cleaning device of the chemical mechanical polishing equipment as claimed in claim 2, wherein the electromagnetic coil (503) is embedded and installed at the position of the bottom end inside the supporting base (1) corresponding to the liquid storage bucket (501), and the bottom end of the liquid storage bucket (501) is arranged in an inclined manner.
4. The cleaning device for the chemical mechanical polishing equipment as claimed in claim 1, wherein the inner wall of the slip ring (302) is coated with lubricating grease, and the top end of the slip ring (302) is embedded with an oil nozzle.
5. The cleaning device of the chemical mechanical polishing apparatus as claimed in claim 1, wherein the bottom end of the inner wall of the cleaning plate (401) is provided with through holes at positions corresponding to the cleaning roller (405) uniformly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010360833.4A CN111482901B (en) | 2020-04-30 | 2020-04-30 | Cleaning device of chemical mechanical polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010360833.4A CN111482901B (en) | 2020-04-30 | 2020-04-30 | Cleaning device of chemical mechanical polishing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111482901A CN111482901A (en) | 2020-08-04 |
| CN111482901B true CN111482901B (en) | 2022-08-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010360833.4A Active CN111482901B (en) | 2020-04-30 | 2020-04-30 | Cleaning device of chemical mechanical polishing equipment |
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|---|---|
| CN (1) | CN111482901B (en) |
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| CN117018744B (en) * | 2023-10-10 | 2023-12-12 | 成都航飞航空机械设备制造有限公司 | Mechanical scrap filtering device |
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