CN205703679U - A kind of can the carborundum polishing machine of automated cleaning polishing block - Google Patents
A kind of can the carborundum polishing machine of automated cleaning polishing block Download PDFInfo
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- CN205703679U CN205703679U CN201620388317.1U CN201620388317U CN205703679U CN 205703679 U CN205703679 U CN 205703679U CN 201620388317 U CN201620388317 U CN 201620388317U CN 205703679 U CN205703679 U CN 205703679U
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- polished land
- carborundum
- polished
- rotary shaft
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Abstract
A kind of can the carborundum polishing machine of automated cleaning polishing block, including base, the upper side of described base is provided with fixed plate and the first polished land being rotated by the second driven by motor and the second polished land.The carborundum polishing machine of this automated cleaning polishing block, carborundum be polished by the first polished land of being provided with and the second polished land and by sanding apparatus and burnishing device, so can there is a preliminary operation polishing corner angle for carborundum, not only facilitate following polishing process, and make to polish more thorough, used second polished land can be cleaned by watering support and wiping support, facilitate the cleaning after work, and polishing time and cost can also be saved to a certain extent, there is very strong practicality.
Description
Technical field
The utility model relates to carborundum polishing machine technical field, and specially one can automated cleaning
The carborundum polishing machine of polishing block.
Background technology
As high-brightness LED is in the sharp increase of illuminating engineering domain requirement amount, drive state
The development of industry prepared by interior silicon carbide substrates material.Due to carborundum crystals (α-Al2O3) tool
Have the distinguishing features such as high temperature resistant, corrosion-resistant, transmission region width, be the first-selection of outer prolongation GaN
Backing material, but also big, stable chemical nature just because of carborundum extreme hardness, fragility
Feature, gives materials processing, and especially wafer surface nanoscale polishing brings a lot of tired technically
Difficulty, needs to be processed by shot blasting the surface of carborundum, at present in the operation of processing carborundum
Polishing technology be the processing in single face, again another side is thrown after processing one side finishes
Light process, manufacturing procedure is loaded down with trivial details, and operating efficiency is low, is unfavorable for producing, and processes general
Do not possess chemical polisher, so make to polish not thorough, and the waste liquid of chemical polisher is attached
And forming dirt in polished land, manual scouring is wasted time and energy, to this it is proposed that one can be certainly
The carborundum polishing machine of dynamic cleaning polishing block.
Content of the invention
The purpose of this utility model is to provide a kind of can throw the carborundum of automated cleaning polishing block
Ray machine, with the problem solving to propose in above-mentioned background technology.
A kind of can the carborundum polishing machine of automated cleaning polishing block, including base, the upside of described base
Face is provided with fixed plate and the first polished land and second being rotated by the second driven by motor
Polished land, the side of described first polished land is provided with the polishing dress being installed vertically on base
Putting, described sanding apparatus includes being positioned at the polishing rod directly over the first polished land；Described consolidates
Determine on plate, to be provided with containing liquid chamber and burnishing device, containing liquid chamber bottom connection polishing fluid conveying pipe one
End, the polishing fluid conveying pipe other end is connected with the shower nozzle being positioned at directly over the second polished land；Institute
The burnishing device stated includes being positioned at the polished silicon wafer directly over the second polished land；Flat in the second polishing
Platform is provided with cleaning device, and described cleaning device includes being parallel to the second polished land central shaft
And telescopic first rotary shaft being passed by the second polished land center, described first
Rotary shaft lower end is connected to the output shaft of the first motor, the first rotary shaft upper end be connected with
Its vertical watering support and wiping support, described wiping support length is not less than the second polishing
Platform center is fixed with bristle in the ultimate range and wiping support of side.
During work, the first rotary shaft compression is entered the second polished land, the carborundum needing processing
It is placed in the first polished land and carries out preparatory processing, start the second motor and sanding apparatus, rotate
First polished land utilizes polishing rod to polish, and carries out some bigger corner angle on carborundum
Polish, again the carborundum of preparatory processing is placed in the second polished land afterwards, passes through shower nozzle
Spray polishing fluid on sic, restart the second motor and burnishing device, rotate the second polishing
Platform utilizes polished silicon wafer to be polished, and carries out last finishing polish work to carborundum.Buffer
After making to terminate, taking off carborundum, stretching the first rotary shaft makes it pass table in the second polished land
Face simultaneously starts the first motor, and watering support and wiping support circle, and wipes polishing waste liquid
Wipe clean.It is so possible not only to precisely perfect polishing is carried out for carborundum, but also be easy to
Cleaning, economical and practical.
Described base is hollow structure, and chassis interior is provided with flat with the first polished land and the second polishing
Corresponding second rotary shaft in platform position, the second described rotary shaft lower end connects the second motor, on
End runs through base and is connected with the first polished land and the second polished land.Second motor passes through
Second rotary shaft drives the first polished land and the second polished land to rotate.
The first described motor is positioned at chassis interior, is connected to the first rotary shaft lower end through its output shaft.
After polishing terminates, stretching the first rotary shaft, starting the first motor, the first rotary shaft drives watering
Support and wiping support circle, will polishing waste liquid wiped clean.
Described base passes through bearing and the second rotary shaft connects.Frictional resistance is little, reduces rotary shaft and the end
Frictionally damage between Zuo, improves mechanical efficiency, it is simple to installing/dismounting, easy to maintenance.
Described watering support is fixed with standpipe, and the length direction of described standpipe is provided with watering
Hole.Watering support, when circling, is sprinkled upon water in ground two polished land by water sprayering hole.
The beneficial effects of the utility model are: the carborundum polishing machine of this automated cleaning polishing block, pass through
The first polished land being provided with and the second polished land and pass through sanding apparatus and burnishing device
Carborundum is polished, so can have the preliminary corner angle that polish for carborundum
Operation, not only facilitates following polishing process, and makes to polish more thorough, by spilling
Used second polished land can be cleaned by water support and wiping support, facilitates work
Cleaning after work, and polishing time and cost can also be saved to a certain extent, have
Very strong practicality.
Brief description
Fig. 1 is the utility model structural representation；
Fig. 2 is the connection diagram of the first motor and cleaning device；
Fig. 3 is the second motor and the connection diagram of the first polished land；
In figure: 1 base, 2 first polished land, 3 second polished land, 4 first motors, 5 dozens
Mill apparatus, 6 burnishing devices, 7 polishing fluids conveying pipes, 8 shower nozzles, 9 first rotary shafts, 10
Polishing rod, 11 motors, 12 fixed plates, 13 containing liquid chambers, 14 sprinkle water supports, 15 polished silicon wafer,
16 second rotary shafts, 17 wiping supports.
Detailed description of the invention
A kind of can the carborundum polishing machine of automated cleaning polishing block, including base 1, described base
The upper side of 1 is provided with fixed plate 12 and is driven the first throwing rotating by the second motor 11
Optical platform 2 and the second polished land 3, the side of described first polished land 2 is provided with vertical peace
Being loaded on the sanding apparatus 5 of base 1, described sanding apparatus 5 includes being positioned at the first polished land 2
The polishing rod 10 of surface；It is provided with containing liquid chamber 13 and polishing dress in described fixed plate 12
Putting 6, containing liquid chamber 13 bottom connection polishing fluid conveying pipe 7 one end, polishing fluid conveying pipe 7 is another
One end is connected with the shower nozzle 8 being positioned at directly over the second polished land 3；Described burnishing device 6
Including be positioned at the polished silicon wafer 15 directly over the second polished land 3；In the second polished land 3
Be provided with cleaning device, described cleaning device include being parallel to the second polished land 3 central shaft and
Telescopic first rotary shaft 9 being passed by the second polished land 3 center, described
One rotary shaft 9 lower end is connected to the output shaft of the first motor 4, the first rotary shaft 9 upper end activity
It is connected with perpendicular watering support 14 and wiping support 17, described watering support 14
It is fixed with standpipe, the length direction of described standpipe is provided with water sprayering hole.Described wiping
Support 17 length is propped up not less than ultimate range and the wiping at the second polished land 3 center to side
It is fixed with bristle on frame 17.Described base 1 is hollow structure, and base 1 internal be provided with
First corresponding second rotary shaft 16 of polished land 2 and the second polished land 3 position, described
Second rotary shaft 16 lower end connect the second motor 11, upper end is connected with base 1 by bearing,
Run through base and be connected with the first polished land 2 and the second polished land 3.Described first
It is internal that motor 4 is positioned at base 1, is connected to the first rotary shaft 9 lower end through its output shaft.
Claims (5)
1. can the carborundum polishing machine of automated cleaning polishing block, including base (1), its feature
It is: the upper side of described base (1) is provided with fixed plate (12) and by the second motor (11)
Drive the first polished land (2) of rotating and the second polished land (3), described first
The side of polished land (2) is provided with the sanding apparatus (5) being installed vertically on base (1), institute
State sanding apparatus (5) to include being positioned at polishing rod (10) directly over the first polished land (2)；
It is provided with containing liquid chamber (13) and burnishing device (6), containing liquid chamber in described fixed plate (12)
(13) bottom connection polishing fluid conveying pipe (7) one end, polishing fluid conveying pipe (7) other end
It is connected with the shower nozzle (8) being positioned at directly over the second polished land (3)；Described burnishing device
(6) include being positioned at the polished silicon wafer (15) directly over the second polished land (3)；Throw second
Optical platform (3) is provided with cleaning device, and described cleaning device includes being parallel to the second polishing
Platform (3) central shaft and passed by the second polished land (3) center telescopic
One rotary shaft (9), described the first rotary shaft (9) lower end is connected to the first motor (4)
Output shaft, the first rotary shaft (9) upper end is connected with perpendicular watering support (14)
With wiping support (17), described wiping support (17) length is not less than the second polished land
(3) center is fixed with bristle in the ultimate range and wiping support (17) of side.
2. according to claim 1 can the carborundum polishing machine of automated cleaning polishing block, it is special
Levy and be: described base (1) is hollow structure, and internal being provided with of base (1) is thrown with first
Optical platform (2) and corresponding second rotary shaft in the second polished land (3) position (16), institute
The second rotary shaft (16) lower end stated connects the second motor (11), and base (1) is run through in upper end
And it is connected with the first polished land (2) and the second polished land (3).
3. according to claim 2 can the carborundum polishing machine of automated cleaning polishing block, it is special
Levy and be: it is internal that described the first motor (4) is positioned at base (1), connect through its output shaft
To the first rotary shaft (9) lower end.
4. according to claim 1 can the carborundum polishing machine of automated cleaning polishing block, it is special
Levy and be: described base (1) passes through bearing and the second rotary shaft (16) connects.
5. according to claim 1 can the carborundum polishing machine of automated cleaning polishing block, it is special
Levy and be: described watering support (14) is fixed with standpipe, along the length of described standpipe
Direction is provided with water sprayering hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620388317.1U CN205703679U (en) | 2016-04-29 | 2016-04-29 | A kind of can the carborundum polishing machine of automated cleaning polishing block |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620388317.1U CN205703679U (en) | 2016-04-29 | 2016-04-29 | A kind of can the carborundum polishing machine of automated cleaning polishing block |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205703679U true CN205703679U (en) | 2016-11-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620388317.1U Active CN205703679U (en) | 2016-04-29 | 2016-04-29 | A kind of can the carborundum polishing machine of automated cleaning polishing block |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205703679U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107363662A (en) * | 2017-09-20 | 2017-11-21 | 台山市柔利特研磨科技有限公司 | One kind polishing descaling machine |
| CN107471016A (en) * | 2017-09-20 | 2017-12-15 | 台山市柔利特研磨科技有限公司 | A kind of automatic reciprocating polishing device |
| CN107486783A (en) * | 2017-09-30 | 2017-12-19 | 台山市柔利特研磨科技有限公司 | A kind of reciprocal polishing machine |
| CN107511750A (en) * | 2017-09-30 | 2017-12-26 | 台山市柔利特研磨科技有限公司 | A kind of automatic cleaning polishing machine |
| CN107553237A (en) * | 2017-09-20 | 2018-01-09 | 台山市柔利特研磨科技有限公司 | A kind of automatic polishing descaling machine |
| CN107584423A (en) * | 2017-09-30 | 2018-01-16 | 台山市柔利特研磨科技有限公司 | One kind lifting polishing machine |
| CN108942551A (en) * | 2018-09-20 | 2018-12-07 | 天津市鑫源泓达科技有限公司 | A kind of Mold polishing device |
| CN115157107A (en) * | 2022-07-14 | 2022-10-11 | 江苏晶杰光电科技有限公司 | Chemical mechanical polishing machine for semiconductor polishing |
-
2016
- 2016-04-29 CN CN201620388317.1U patent/CN205703679U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107363662A (en) * | 2017-09-20 | 2017-11-21 | 台山市柔利特研磨科技有限公司 | One kind polishing descaling machine |
| CN107471016A (en) * | 2017-09-20 | 2017-12-15 | 台山市柔利特研磨科技有限公司 | A kind of automatic reciprocating polishing device |
| CN107553237A (en) * | 2017-09-20 | 2018-01-09 | 台山市柔利特研磨科技有限公司 | A kind of automatic polishing descaling machine |
| CN107486783A (en) * | 2017-09-30 | 2017-12-19 | 台山市柔利特研磨科技有限公司 | A kind of reciprocal polishing machine |
| CN107511750A (en) * | 2017-09-30 | 2017-12-26 | 台山市柔利特研磨科技有限公司 | A kind of automatic cleaning polishing machine |
| CN107584423A (en) * | 2017-09-30 | 2018-01-16 | 台山市柔利特研磨科技有限公司 | One kind lifting polishing machine |
| CN108942551A (en) * | 2018-09-20 | 2018-12-07 | 天津市鑫源泓达科技有限公司 | A kind of Mold polishing device |
| CN115157107A (en) * | 2022-07-14 | 2022-10-11 | 江苏晶杰光电科技有限公司 | Chemical mechanical polishing machine for semiconductor polishing |
| CN115157107B (en) * | 2022-07-14 | 2023-07-14 | 江苏晶杰光电科技有限公司 | Chemical mechanical polishing machine for semiconductor polishing |
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Legal Events
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190320 Address after: 250100 AB Block 1106-6-01, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province Patentee after: Shandong Tianyue Advanced Material Technology Co., Ltd. Address before: 250118 the middle part of Mei Li Lake, Huaiyin District, Ji'nan, Shandong Patentee before: Shandong Tianyue Crystal Material Co., Ltd. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: 250100 AB Block 1106-6-01, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |