CN205596034U - Electric drive device is pressed to accurate adjustable impacted style of frictional force - Google Patents

Electric drive device is pressed to accurate adjustable impacted style of frictional force Download PDF

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Publication number
CN205596034U
CN205596034U CN201620322206.0U CN201620322206U CN205596034U CN 205596034 U CN205596034 U CN 205596034U CN 201620322206 U CN201620322206 U CN 201620322206U CN 205596034 U CN205596034 U CN 205596034U
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spring
frictional force
inertial mass
micro
base
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CN201620322206.0U
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沈煜年
郭永彬
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Abstract

The utility model discloses a little displacement driving device of the accurate adjustable impacted style piezoelectricity of frictional force, an electric drive device is pressed to accurate adjustable impacted style of frictional force, including frictional force accuracy adjustment mechanism, micro -nano level piezoelectricity actuating mechanism and accurate manual translation platform, frictional force accuracy adjustment mechanism and accurate manual translation platform are located micro -nano level piezoelectricity actuating mechanism both ends respectively, and the setting of accurate manual translation platform is personally experienced sth. Part of the body and is set up on micro -nano level piezoelectricity actuating mechanism in micro -nano level piezoelectricity actuating mechanism top, target. Accurate adjustment mechanism of frictional force and accurate manual translation platform provide accurate target the biggest stiction of the body and stroke spring precommpression volume for micro -nano level piezoelectricity actuating mechanism. The utility model provides an accurate frictional force has improved location efficiency, has realized the target body and has fixed a position the big stroke of distance.

Description

A kind of accurate adjustable impact type Piexoelectric actuator of frictional force
Technical field
This utility model belongs to micro-location and microcontroller field, is specifically related to a kind of accurate adjustable impact type Piexoelectric actuator of frictional force.
Background technology
Along with the fast development of ultraprecise science and technology, the measurement of micro/nano level displacement, position and control technology has become an urgent demand of precision instrument industry upgrading further.Structure of intelligence based on piezoelectric is high, not by the advantage of electromagnetic interference owing to having control accuracy height, fast response time, unit mass output, it is widely applied in fields such as Ultra-precision Turning, the assembling of milli machine part, micro-manipulating robot, MEMS manufacture, pH effect, micro-medical treatment and biological engineering, and becomes one of the most promising intelligent drives device at present.
Piexoelectric actuator the earliest, merely with the inverse piezoelectric effect of piezoelectrics, changes the stroke of piezoelectrics, so that piezoelectric stack creates pinpoint ability by the size changing voltage drive.Classical Inchworm type piezoelectric actuator utilizes the frictional force between mass and the workbench that piezoelectric stack end consolidates to realize being accurately positioned mass.But the output total displacement amount of piezoelectric stack is less, and therefore its stroke is less.
Shen Yunian to a kind of novel stroke spring-piezoelectric impact formula driver (magazine name: Science in China Series E: Technological Sciences) dynamic response carried out Theoretical Calculation, obtained this driver position fixing process under different voltage drives.Liu Yung-Tien proposes the piezoelectric actuator (magazine name: Precision Engineering) of a kind of novel stroke spring-piezoelectric impact formula, utilizes stroke spring to realize the big stroke of driver, uses shock mode to implement to be accurately positioned to objective body.Owing in this driver, the bringing device simple coarse of objective body normal pressure (is fed by a nut, normal direction spring is made to produce certain thrust, this thrust is simply estimated simply by the number of turns that feeds of nut, estimated value can reduce intended positioning precision), therefore this driver still suffers from the problem that the frictional force on objective body cannot accurately apply and stroke spring pre compressed magnitude cannot accurately give.
Summary of the invention
The purpose of this utility model is to provide a kind of accurate adjustable impact type Piexoelectric actuator of frictional force, solves the problem such as the accurately applying of objective body frictional force and the most given of stroke spring pre compressed magnitude.
The technical solution realizing this utility model purpose is: a kind of accurate adjustable impact type Piexoelectric actuator of frictional force, including frictional force precise regulation mechanism, micro/nano level drive mechanism and precise manual translation stage, frictional force precise regulation mechanism and precise manual translation stage lay respectively at micro/nano level drive mechanism two ends, and precise manual translation stage is arranged on micro/nano level drive mechanism top, objective body is arranged in micro/nano level drive mechanism.
Described frictional force precise regulation mechanism includes feed screw, latch segment, stand frame, spring upper bed-plate, compression spring, spring lower bottom base, defeats electricity sensor/sensor and lower gasket;Stand frame end face is provided with strip through hole, and feed screw passes described strip through hole, is connected with stand frame end face by latch segment;Spring upper bed-plate and spring lower bottom base are separately positioned on the two ends of compression spring, feed screw bottom surface contacts with spring upper bed-plate, spring lower bottom base bottom surface is provided with defeats electricity sensor/sensor, defeat electricity sensor/sensor and be arranged on objective body top, and defeat electricity sensor/sensor and objective body between be provided with lower gasket, stand frame is arranged on one end of micro/nano level drive mechanism.
Described lower gasket bottom surface coating lubricating oil.
Described micro/nano level drive mechanism includes base before stroke spring, spring, spring rear base, elastic rod, anterior inertial mass, rear portion inertial mass, piezoelectric stack, shaft-like jump bit, support slipper, objective body pedestal and V-groove base;Before stroke spring, spring, base, spring rear base, elastic rod, anterior inertial mass, rear portion inertial mass, piezoelectric stack, shaft-like jump bit, support slipper, objective body pedestal are arranged on V-groove base, it is provided with piezoelectric stack between anterior inertial mass and rear portion inertial mass, anterior inertial mass and inertial mass both sides, rear portion are provided with support slipper, shaft-like jump bit one end is connected through support slipper with anterior inertial mass, the other end contacts with objective body, and objective body is arranged on objective body pedestal;Elastic rod one end is connected through support slipper with rear portion inertial mass;Before the elastic rod other end and spring, base is connected, stroke spring two ends respectively with spring before base and spring rear base be connected.
Described piezoelectric stack be respectively arranged at two ends with attachment cap, be used for connecting anterior inertial mass, rear portion inertial mass.
Described shaft-like jump bit and elastic rod all and between support slipper without friction.
Compared with prior art, its remarkable advantage is this utility model: (1) this utility model, owing to can accurately be shown by frictional force precise regulation mechanism and be regulated maximum static friction force value, improves applying precision and the location efficiency of maximum static friction force.
(2) pre compressed magnitude of stroke spring can be accurately applied by precise manual translation stage.
(3) objective body produces the driving force of motion is contact force, and it is Unilateral constraints power, different from traditional bilateral constraint power, uses Unilateral constraints power to be advantageous in that the driving voltage alternating voltage of piezoelectric stack, without always DC voltage.
(4) by axially consolidating a stroke spring in piezoelectric stack rear end, target physical ability is made to obtain the location displacement much larger than piezoelectric stack self maximal dilation amount.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the accurate adjustable impact type Piexoelectric actuator of frictional force of the present utility model;Wherein, I-frictional force precise regulation mechanism, II-micro/nano level drive mechanism, III-precise manual translation stage.
Fig. 2 is the structural representation of micro/nano level drive mechanism of the present utility model;Wherein, 1-stroke spring, base before 2-spring, 3-spring rear base, 4-elastic rod, 5-front portion inertial mass, 6-rear portion inertial mass, 7-piezoelectric stack, the shaft-like jump bit of 8-, 9-V type slide block, 10-V type bottom land seat, 11-objective body.
Fig. 3 is the structural representation of frictional force precise regulation mechanism of the present utility model.Wherein, 12-feed screw, 13-latch segment, 14-stand frame, 15-spring upper bed-plate, 16-compression spring, 17-spring lower bottom base, 18-defeat electricity sensor/sensor, 19-lower gasket, 24-objective body pedestal.
Fig. 4 is the structural representation of precise manual translation stage of the present utility model.Wherein, 20-closely-pitched screw rod or differential head, 21-moves table top, 22-table top consolidation board, and 23-has V-way translation stage base.
Fig. 5 is the side view of the accurate adjustable impact type Piexoelectric actuator of frictional force of the present utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is described in further detail.
In conjunction with Fig. 1 to Fig. 5, a kind of accurate adjustable impact type Piexoelectric actuator of frictional force, handle jump bit by voltage controller and clash into objective body, it is achieved the stepwise motion of objective body, complete being accurately positioned of objective body micro/nano level.Including frictional force precise regulation mechanism I, micro/nano level drive mechanism II and precise manual translation stage III, frictional force precise regulation mechanism I and precise manual translation stage III lays respectively at micro/nano level drive mechanism II two ends, and precise manual translation stage III is arranged on micro/nano level drive mechanism II top, objective body 11 is arranged in micro/nano level drive mechanism II.
Described frictional force precise regulation mechanism I includes feed screw 12, latch segment 13, stand frame 14, spring upper bed-plate 15, compression spring 16, spring lower bottom base 17, defeats electricity sensor/sensor 18 and lower gasket 19.Stand frame 14 end face is provided with strip through hole, and feed screw 12, through described strip through hole, is connected with stand frame 14 end face by latch segment 13.Spring upper bed-plate 15 and spring lower bottom base 17 are separately positioned on the two ends of compression spring 16, feed screw 12 bottom surface contacts with spring upper bed-plate 15, spring lower bottom base 17 bottom surface is provided with defeats electricity sensor/sensor 18, defeat electricity sensor/sensor 18 and be arranged on objective body 11 top, and defeat electricity sensor/sensor 18 and objective body 11 between be provided with lower gasket 19, stand frame 14 is arranged on one end of micro/nano level drive mechanism II.
The lower gasket 19 bottom surface contact surface of objective body 11 (i.e. with) coating lubricating oil.
Micro/nano level drive mechanism II is the source of objective body driving force, including base 2, spring rear base 3, elastic rod 4, anterior inertial mass 5, rear portion inertial mass 6, piezoelectric stack 7, shaft-like jump bit 8, support slipper 9, objective body pedestal 24 and V-groove base 10 before stroke spring 1, spring.Before stroke spring 1, spring, base 2, spring rear base 3, elastic rod 4, anterior inertial mass 5, rear portion inertial mass 6, piezoelectric stack 7, shaft-like jump bit 8, support slipper 9, objective body pedestal 24 are arranged on V-groove base 10.It is provided with piezoelectric stack 7 between anterior inertial mass 5 and rear portion inertial mass 6, for the ease of assembling, piezoelectric stack 7 be respectively arranged at two ends with attachment cap, piezoelectric stack 7 uses adhering with epoxy resin with attachment cap, and attachment cap is connected with anterior inertial mass 5, rear portion inertial mass 6 respectively by screw thread.The outer wall of anterior inertial mass 5 and rear portion inertial mass 6 is respectively equipped with support slipper 9, shaft-like jump bit 8 one end is connected by screw thread through support slipper 9 with anterior inertial mass 5, the other end contacts with objective body 11, and objective body 11 is arranged on objective body pedestal 24;Elastic rod 4 one end is connected (or in elastic rod 4 outer ring be bonded with rear portion inertial mass 6) with rear portion inertial mass 6 by screw thread through support slipper 9.Before elastic rod 4 other end and spring, base 2 is connected by screw thread, stroke spring 1 two ends respectively with spring before base 2 and spring rear base 3 be connected.
The various forms of input voltages of piezoelectric stack 7 are provided by piezoelectric stack power source special.Shaft-like jump bit 8 and elastic rod 4 without friction, when Surface Machining, need the contact surface making the two the most smooth, and apply lubricating oil coating all and between support slipper 9.Objective body pedestal 24 and V-groove base 10 use screw thread to be connected.Bolt is utilized to be fixed on precision instrument Isolating Platform by V-groove base 10.
Translation stage III(is commercial for precise manual, producer: Beijing China light Kodak, model HG21TM25M), use centre-driven mode, promote mobile table top 21 to move on the translation stage base 23 have V-way and linear ball with differential head 20.Mobile table top 21 sets gauge orifice position, it is simple to install table top consolidation board 22.For ensureing the static of the front whole device in location, it is desirable to the pretightning force of stroke spring 1 not can exceed that the maximum static friction force between objective body 11 and V-groove base 10, the i.e. setting value of frictional force fine adjuster frictional force.
Work process: first, utilize frictional force precise regulation mechanism that objective body 11 loads an accurate frictional resistance, then, utilize precise manual translation stage that stroke spring 1 is applied pre compressed magnitude, piezoelectric stack 7 extends under the effect of voltage drive, and shaft-like jump bit 8, under the promotion of piezoelectric stack 7, clashes into objective body 11, cause objective body 11 to produce the displacement of micro/nano level, be finally completed being accurately positioned objective body 11.
Frictional force precise regulation mechanism both can accurately show the pretightning force of compression spring 16, can accurately regulate again the pretightning force of compression spring 16, thus add the applying precision of objective body 11 maximum static friction force, improve location efficiency.

Claims (6)

1. the accurate adjustable impact type Piexoelectric actuator of frictional force, it is characterized in that: include frictional force precise regulation mechanism (I), micro/nano level drive mechanism (II) and precise manual translation stage (III), frictional force precise regulation mechanism (I) and precise manual translation stage (III) lay respectively at micro/nano level drive mechanism (II) two ends, and precise manual translation stage (III) is arranged on micro/nano level drive mechanism (II) top, objective body (11) is arranged in micro/nano level drive mechanism (II).
The accurate adjustable impact type Piexoelectric actuator of frictional force the most according to claim 1, it is characterised in that: described frictional force precise regulation mechanism (I) includes feed screw (12), latch segment (13), stand frame (14), spring upper bed-plate (15), compression spring (16), spring lower bottom base (17), defeats electricity sensor/sensor (18) and lower gasket (19);Stand frame (14) end face is provided with strip through hole, and feed screw (12) passes described strip through hole, is connected with stand frame (14) end face by latch segment (13);Spring upper bed-plate (15) and spring lower bottom base (17) are separately positioned on the two ends of compression spring (16), feed screw (12) bottom surface contacts with spring upper bed-plate (15), spring lower bottom base (17) bottom surface is provided with defeats electricity sensor/sensor (18), defeat electricity sensor/sensor (18) and be arranged on objective body (11) top, and defeat electricity sensor/sensor (18) and objective body (11) between be provided with lower gasket (19), stand frame (14) is arranged on one end of micro/nano level drive mechanism (II).
The accurate adjustable impact type Piexoelectric actuator of frictional force the most according to claim 2, it is characterised in that: described lower gasket (19) bottom surface coating lubricating oil.
The accurate adjustable impact type Piexoelectric actuator of frictional force the most according to claim 2, it is characterised in that: described micro/nano level drive mechanism (II) includes base (2) before stroke spring (1), spring, spring rear base (3), elastic rod (4), anterior inertial mass (5), rear portion inertial mass (6), piezoelectric stack (7), shaft-like jump bit (8), support slipper (9), objective body pedestal (24) and V-groove base (10);Stroke spring (1), base (2) before spring, spring rear base (3), elastic rod (4), anterior inertial mass (5), rear portion inertial mass (6), piezoelectric stack (7), shaft-like jump bit (8), support slipper (9), objective body pedestal (24) is arranged on V-groove base (10), it is provided with piezoelectric stack (7) between anterior inertial mass (5) and rear portion inertial mass (6), anterior inertial mass (5) and rear portion inertial mass (6) both sides are provided with support slipper (9), shaft-like jump bit (8) one end is connected through support slipper (9) with anterior inertial mass (5), the other end contacts with objective body (11), objective body (11) is arranged on objective body pedestal (24);Elastic rod (4) one end is connected through support slipper (9) with rear portion inertial mass (6);Before elastic rod (4) other end and spring, base (2) is connected, stroke spring (1) two ends respectively with spring before base (2) and spring rear base (3) connected.
The accurate adjustable impact type Piexoelectric actuator of frictional force the most according to claim 4, it is characterised in that: described piezoelectric stack (7) be respectively arranged at two ends with attachment cap, be used for connecting anterior inertial mass (5), rear portion inertial mass (6).
The accurate adjustable impact type Piexoelectric actuator of frictional force the most according to claim 4, it is characterised in that: described shaft-like jump bit (8) and elastic rod (4) all and between support slipper (9) without friction.
CN201620322206.0U 2016-04-18 2016-04-18 Electric drive device is pressed to accurate adjustable impacted style of frictional force Withdrawn - After Issue CN205596034U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105720858A (en) * 2016-04-18 2016-06-29 南京理工大学 Friction force precisely adjustable impact type piezoelectric driving device
CN107154751A (en) * 2017-05-27 2017-09-12 河海大学常州校区 A kind of frequency-adjustable piezoelectricity oscillating generating set
CN107462144A (en) * 2017-07-20 2017-12-12 北京航天控制仪器研究所 A kind of single-degree-of-freedom micro-displacement
CN110581670A (en) * 2019-09-27 2019-12-17 长春工业大学 Precise linear driving device with clamping type stator
CN110601594A (en) * 2019-09-27 2019-12-20 长春工业大学 Multi-foot coupling actuated micro-nano linear driver and excitation method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105720858A (en) * 2016-04-18 2016-06-29 南京理工大学 Friction force precisely adjustable impact type piezoelectric driving device
CN107154751A (en) * 2017-05-27 2017-09-12 河海大学常州校区 A kind of frequency-adjustable piezoelectricity oscillating generating set
CN107154751B (en) * 2017-05-27 2019-01-08 河海大学常州校区 A kind of adjustable piezoelectricity oscillating generating set of frequency
CN107462144A (en) * 2017-07-20 2017-12-12 北京航天控制仪器研究所 A kind of single-degree-of-freedom micro-displacement
CN107462144B (en) * 2017-07-20 2019-06-18 北京航天控制仪器研究所 A kind of single-degree-of-freedom micro-displacement
CN110581670A (en) * 2019-09-27 2019-12-17 长春工业大学 Precise linear driving device with clamping type stator
CN110601594A (en) * 2019-09-27 2019-12-20 长春工业大学 Multi-foot coupling actuated micro-nano linear driver and excitation method thereof
CN110601594B (en) * 2019-09-27 2022-12-02 长春工业大学 Multi-foot coupling actuated micro-nano linear driver and excitation method thereof

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Granted publication date: 20160921

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