CN205542739U - Quick -witted brilliant boat plummer is surveyed to needle - Google Patents
Quick -witted brilliant boat plummer is surveyed to needle Download PDFInfo
- Publication number
- CN205542739U CN205542739U CN201620303135.XU CN201620303135U CN205542739U CN 205542739 U CN205542739 U CN 205542739U CN 201620303135 U CN201620303135 U CN 201620303135U CN 205542739 U CN205542739 U CN 205542739U
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- China
- Prior art keywords
- fixture block
- plummer
- surveyed
- gripping member
- active card
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Abstract
The utility model discloses a quick -witted brilliant boat plummer is surveyed to needle, the piece is held to the first fixture block, second fixture block, response compression leg, the activity card that include the plummer body and set up respectively on the plummer body, first fixture block and second fixture block are located the both ends of plummer body respectively, activity card hold the piece have a plurality of, respectively the level setting on the plummer body, the both ends that the piece is located first fixture block and second fixture block are respectively held to the activity card, be equipped with the setting element on the second fixture block, the response compression leg has two, sets up respectively in the side of first fixture block and second fixture block, first fixture block and second fixture block be vertical the setting on the plummer body in proper order. The utility model discloses simple structure convenient to use has avoided the brilliant boat of operating personnel to place the wafer fragmentation that the position leads to when not good.
Description
Technical field
This utility model relates to the auxiliary equipment of a kind of wafer production, and in particular machine cassette plummer surveyed by a kind of pin.
Background technology
Machine surveyed by the pin used during wafer sort in semiconductor production manufacture process.The cassette plummer of Zhen Ce wafer transfer mechanism is changed
Make.Pin is surveyed machine and is divided into two large divisions for outward appearance；One is machine table main body part, additionally implies that for the therefore named think of of chip transmission mechanism
For main operating part. wafer and probe card are positioned under the measuring head of test machine and test by main part.And wafer transfer machine
The groundwork of structure is wafer transfer in cassette to be used to carrier as test.
Production and the manufacture of quasiconductor define perfect production procedure in constantly development.Being usually chip circuit design (is
Realize some function, design rational circuit) manufacture (circuit is integrated on wafer through the special process)-crystalline substance of-wafer
The test (thousands of chips integrated on wafer being carried out functional test, eliminate the chip of part of functions defect) of circle-
The encapsulation of cutting and grinding (by being taken off by the chip cutting of functional test on the wafer)-chip of wafer is (take off on wafer
Chip is packaged, and protects its circuit the most protected from environmental) test of-finished chip (carries out merit to the most packaged chip
Can test, eliminate the chip of functional defect).
During semiconductor production manufactures, the cost control of this chip is even more important by the test of wafer.The test of wafer is permissible
The chip of functional defect is found out, does not enter in the encapsulation of later stage bigger cost, saved the cost of entirety.Simultaneously also to upper one
Manufacturing of operation wafer provides the direction improved.Therefore wafer sort is essential in being the whole manufacture process of quasiconductor
Important step.
Wafer sort equipment is by manually to semi-automatic, then machine surveyed by full-automatic pin till now, and efficiency, stability, safety all exist
Increase exponentially.
Wafer is all carried in crystal-boat box in whole manufacture process, and a cassette is a collection of, and a usual box carries 25 wafer.
Cassette is put in during middle survey (Wafer Sort) pin survey on board cassette plummer.The step for be all by manually-operated, people
Member, toward on plummer during placement cassette, usually can place situation not in place.If forward, the support gas bar of plummer lid
Wafer can be weighed wounded；If wafer also can be weighed when pressing under plummer lid rearward wounded.In recent years this type of wafer fragmentation is there is for certain wafer sort factory
Statistics, adds up to cause direct economic loss to be up to 16,000,000 yuan.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, it is provided that a kind of pin surveys machine cassette plummer, improvement carrying
Platform guarantees cassette to be placed on plummer does not has potential safety hazard.
This utility model is achieved through the following technical solutions, and this utility model includes plummer body and is respectively arranged at carrying
The first fixture block on playscript with stage directions body, the second fixture block, sensing compression leg, active card gripping member；Described first fixture block and the second fixture block position respectively
In the two ends of plummer body, described active card gripping member has multiple, is horizontally set on respectively on plummer body, described active card
Gripping member lays respectively at the first fixture block and the two ends of the second fixture block, and described second fixture block is provided with keeper, and described sensing compression leg has two
Individual, it is respectively arranged at the first fixture block and the side of the second fixture block, described first fixture block and the second fixture block are vertically arranged at carrying successively
On playscript with stage directions body.
Described first fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure.T-shaped structure disclosure satisfy that
Restriction to active card gripping member.
The top of described second fixture block is T-shaped structure, and described active card gripping member is arranged at the both sides of T-shaped structure, described keeper
It is arranged on the bottom of the second fixture block.
Described keeper is stepped massif.Can effectively clamp the bottom of crystal-boat box.
Described active card gripping member includes that chute and movable block, described movable block projection are arranged in chute, described active card gripping member water
Put down and be arranged on plummer body.
Described sensing compression leg projection is arranged on plummer body, and described sensing compression leg is provided with pressure transducer.Once it is clamped to
Position, sensing compression leg can sense pressure, thus carry out next step action.
Described sensing compression leg has two, a side being arranged at the first fixture block, and another is arranged at the opposite side of the second fixture block.
May insure that both sides are all held in place.
The bottom keeper of the second fixture block is capable of the location bottom crystal-boat box.It is positioned at the first fixture block and the second fixture block both sides
Active card gripping member disclosure satisfy that the location to crystal-boat box left and right directions, thus realizes the overall location to crystal-boat box.
This utility model has the advantage that this utility model simple in construction is easy to use compared to existing technology, it is to avoid operator
The wafer fragmentation that member's cassette placement location causes time the best.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
Elaborating embodiment of the present utility model below, the present embodiment enters under premised on technical solutions of the utility model
Row is implemented, and gives detailed embodiment and concrete operating process, but protection domain of the present utility model is not limited to following
Embodiment.
As it is shown in figure 1, the present embodiment include plummer body 1 and the first fixture block 2 being respectively arranged on plummer body 1,
Second fixture block 3, sensing compression leg 4, active card gripping member 5；Described first fixture block 2 and the second fixture block 3 lay respectively at plummer body
The two ends of 1, described active card gripping member 5 has multiple, is horizontally set on respectively on plummer body 1, described active card gripping member 5
Laying respectively at the first fixture block 2 and two ends of the second fixture block 3, described second fixture block 3 is provided with keeper 31, described sensing compression leg
4 have two, are respectively arranged at the first fixture block 2 and side of the second fixture block 3, and described first fixture block 2 and the second fixture block 3 are successively
It is vertically arranged on plummer body 1.
Described first fixture block 2 is T-shaped structure, and described active card gripping member 5 is arranged at the both sides of T-shaped structure.T-shaped structure can
Meet the restriction to active card gripping member 5.
The top of described second fixture block 3 is T-shaped structure, and described active card gripping member 5 is arranged at the both sides of T-shaped structure, described fixed
Position part 31 is arranged on the bottom of the second fixture block 3.
Described keeper 31 is stepped massif.Can effectively clamp the bottom of crystal-boat box.
Described active card gripping member 5 includes that chute 51 and movable block 52, described movable block 52 projection are arranged in chute 51, institute
State active card gripping member 5 to be horizontally set on plummer body 1.
Described sensing compression leg 4 projection is arranged on plummer body 1, and described sensing compression leg 4 is provided with pressure transducer.Once
Being held in place, sensing compression leg 4 can sense pressure, thus carries out next step action.
Described sensing compression leg 4 has two, a side being arranged at the first fixture block 2, and another is arranged at the another of the second fixture block 3
Side.May insure that both sides are all held in place.
The bottom keeper 31 of the second fixture block 3 is capable of the location bottom crystal-boat box.It is positioned at the first fixture block 2 and the second fixture block
The active card gripping member 5 of 3 both sides disclosure satisfy that the location to crystal-boat box left and right directions, thus realizes the overall location to crystal-boat box.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all new in this practicality
Any amendment, equivalent and the improvement etc. made within the spirit of type and principle, should be included in protection model of the present utility model
Within enclosing.
Claims (7)
1. machine cassette plummer surveyed by a pin, it is characterised in that includes plummer body and is respectively arranged on plummer body
First fixture block, the second fixture block, sensing compression leg, active card gripping member；Described first fixture block and the second fixture block lay respectively at the carrying playscript with stage directions
The two ends of body, described active card gripping member has multiple, is horizontally set on respectively on plummer body, described active card gripping member position respectively
In the first fixture block and the two ends of the second fixture block, described second fixture block is provided with keeper, and described sensing compression leg has two, sets respectively
Being placed in the first fixture block and the side of the second fixture block, described first fixture block and the second fixture block are vertically arranged on plummer body successively.
Machine cassette plummer surveyed by a kind of pin the most according to claim 1, it is characterised in that described first fixture block is T-shaped knot
Structure, described active card gripping member is arranged at the both sides of T-shaped structure.
Machine cassette plummer surveyed by a kind of pin the most according to claim 1, it is characterised in that the top of described second fixture block is
T-shaped structure, described active card gripping member is arranged at the both sides of T-shaped structure, and described keeper is arranged on the bottom of the second fixture block.
Machine cassette plummer surveyed by a kind of pin the most according to claim 3, it is characterised in that described keeper is stepped piece
Body.
Machine cassette plummer surveyed by a kind of pin the most according to claim 1, it is characterised in that described active card gripping member includes sliding
Groove and movable block, described movable block projection is arranged in chute, and described active card gripping member is horizontally set on plummer body.
Machine cassette plummer surveyed by a kind of pin the most according to claim 1, it is characterised in that described sensing compression leg projection is arranged
On plummer body, described sensing compression leg is provided with pressure transducer.
Machine cassette plummer surveyed by a kind of pin the most according to claim 1, it is characterised in that described sensing compression leg has two,
One side being arranged at the first fixture block, another is arranged at the opposite side of the second fixture block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620303135.XU CN205542739U (en) | 2016-04-11 | 2016-04-11 | Quick -witted brilliant boat plummer is surveyed to needle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620303135.XU CN205542739U (en) | 2016-04-11 | 2016-04-11 | Quick -witted brilliant boat plummer is surveyed to needle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205542739U true CN205542739U (en) | 2016-08-31 |
Family
ID=56790643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620303135.XU Active CN205542739U (en) | 2016-04-11 | 2016-04-11 | Quick -witted brilliant boat plummer is surveyed to needle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205542739U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105719995A (en) * | 2016-04-11 | 2016-06-29 | 安徽晶新微电子有限公司 | Wafer boat carrier table for prober |
| CN114823441A (en) * | 2022-06-28 | 2022-07-29 | 深圳市星国华先进装备科技有限公司 | Wafer anti-slipping protection device and method for transmission mechanism of probe testing machine |
-
2016
- 2016-04-11 CN CN201620303135.XU patent/CN205542739U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105719995A (en) * | 2016-04-11 | 2016-06-29 | 安徽晶新微电子有限公司 | Wafer boat carrier table for prober |
| CN114823441A (en) * | 2022-06-28 | 2022-07-29 | 深圳市星国华先进装备科技有限公司 | Wafer anti-slipping protection device and method for transmission mechanism of probe testing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200421 Address after: 221000 north side of Liaohe Road and west side of Huashan Road, Pizhou Economic Development Zone, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: JIANGSU AOXIN MICROELECTRONIC Co.,Ltd. Address before: 234000 Administrative Committee of hi tech Zone, 8 hi tech tower, Suzhou Road, Anhui Patentee before: ANHUI JINGXIN MICROELECTRONICS Co.,Ltd. |