CN205508774U - Semiconductor wafer washs basket of flowers - Google Patents
Semiconductor wafer washs basket of flowers Download PDFInfo
- Publication number
- CN205508774U CN205508774U CN201620223468.1U CN201620223468U CN205508774U CN 205508774 U CN205508774 U CN 205508774U CN 201620223468 U CN201620223468 U CN 201620223468U CN 205508774 U CN205508774 U CN 205508774U
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- pin
- wafer
- frame
- shadoof
- base
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Abstract
The utility model discloses a semiconductor wafer washs basket of flowers, the base in wafer groove is equipped with including a middle part, two collateral branch framves that registrate through the screw connection with the base lateral wall, shadoof and two the shelves poles that are fixed in collateral branch frame middle part that are fixed in collateral branch frame upper portion, wherein be equipped with the wafer tooth that matches with the wafer on the base of wafer groove both sides respectively, the middle part of collateral branch frame is equipped with the shadoof frame that links to each other with the shadoof, the both sides of shadoof frame are equipped with the pin frame of symmetry in the shadoof frame, the upper portion of pin frame is equipped with the pin groove that matches with the pin, the pin is fixed in the pin inslot of pin frame through the nut, be equipped with the wafer tooth that matches with the wafer on this pin. The utility model discloses a basket of flowers slide glass volume is showing to be increased, has reduced personnel and has relapseed abluent workload, the pin can freely be followed the support and taken out, makes things convenient for the loading of wafer and takes out, the next door in wafer groove is equipped with the water conservancy diversion hole, and messenger's washing liquid few is as far as possible remained on the basket of flowers, improves cleaning quality.
Description
Technical field
This utility model belongs to apparatus for cleansing semiconductor wafer technical field, is specifically related to a kind of cleaning semiconductor chip hand basket.
Background technology
In semiconductor production process, the cleaning process to silicon chip is requisite.So-called cleaning refers to the removing of impurities on surface of silicon chip, fixed point directional etching etc..At present, the square politef gaily decorated basket special in silicon chip production process, because its structure is fixed, capacity is little, and production efficiency is low, takies substantial amounts of space and relatively costly；And silicon chip edge contact area is big, cleans link at some and can cause again the large-scale edge corrosion marking, cause product failure.
Summary of the invention
This utility model solves the technical problem that and there is provided a kind of cleaning semiconductor chip gaily decorated basket being applicable under static and dither state.
This utility model adopts the following technical scheme that for solving above-mentioned technical problem, a kind of cleaning semiconductor chip gaily decorated basket, it is characterized in that including the base that a middle part is provided with wafer slots, two side stands being connected by screw fit with base side wall, one shadoof being fixed on side stand top and two levers being fixed in the middle part of side stand, wherein it is respectively equipped with, on the base of wafer slots both sides, the wafer teeth matched with wafer, the middle part of side stand is provided with the shadoof frame being connected with shadoof, the both sides of shadoof frame are provided with the pin frame being symmetrical in shadoof frame, the top of pin frame is provided with the pin groove matched with pin, pin is fixed in the pin groove of pin frame by nut, this pin is provided with the wafer teeth matched with wafer.
Further preferably, described semiconductor wafer is circular semiconductor wafers.
Further preferably, described base is provided with liquid-leaking nozzle.
Further preferably, the top of described shadoof frame is provided with fixing groove, and the both sides of shadoof are movably installed in the fixing groove of shadoof frame by the through hole being arranged on shadoof respectively.
This utility model compared with prior art has the advantage that gaily decorated basket slide glass amount dramatically increases, the workload that the personnel that decrease clean repeatedly；Pin can freely take out from side stand, facilitates loading and the taking-up of wafer；The side of wafer slots is provided with liquid-leaking nozzle, and the fewest cleanout fluid that makes remains on the gaily decorated basket, improves cleaning quality；The side stand of hollow out design makes cleanout fluid preferably to flow on silicon chip, and than the current working standard gaily decorated basket more more preferably, and the gaily decorated basket is less with the contact surface of silicon chip, is to a certain degree reducing crash rate, thus is improving the yield rate of product for cleaning performance.Additionally using screw fit side stand and base plate, and the cutting ferrule mode of shadoof and side stand makes the gaily decorated basket the most solid firmly, supporting power is greatly improved.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the side view of Fig. 1；
Fig. 3 is the structural representation of side stand in this utility model；
Fig. 4 is the structural representation of shadoof in this utility model；
Fig. 5 is the structural representation of this utility model central stop lever；
Fig. 6 is the structural representation of base in this utility model.
In figure: 1, base, 2, side stand, 201, shadoof frame, 202, pin frame, 3, shadoof, 4, pin, 5, screw, 6, liquid-leaking nozzle, 7, nut.
Detailed description of the invention
Particular content of the present utility model is described in detail in conjunction with accompanying drawing.A kind of cleaning semiconductor chip gaily decorated basket, the base 1 of wafer slots it is provided with including a middle part, two are passed through screw 5 with base 1 sidewall and are connected the side stand 2 of fit, one shadoof 3 being fixed on side stand 2 top and two levers being fixed in the middle part of side stand 24, wherein it is respectively equipped with, on the base 1 of wafer slots both sides, the wafer teeth matched with wafer, the middle part of side stand 2 is provided with the shadoof frame 201 being connected with shadoof 3, the both sides of shadoof frame 201 are provided with the pin frame 202 being symmetrical in shadoof frame 201, the top of pin frame 202 is provided with the pin groove matched with pin 4, pin 4 is fixed in the pin groove of pin frame 202 by nut 7, this pin 4 is provided with the wafer teeth matched with wafer.Described semiconductor wafer is circular semiconductor wafers.Described base 1 is provided with liquid-leaking nozzle 6.The top of described shadoof frame 201 is provided with fixing groove, and the both sides of shadoof 3 are movably installed in the fixing groove of shadoof frame 201 by the through hole being arranged on shadoof 3 respectively.
Specific operation process of the present utility model is: first inserted by two side stands in the through hole of shadoof both sides by being arranged at the fixing groove on shadoof frame top, rotary side support realizes being flexibly connected of side stand and shadoof respectively, then first a pin is fixed on pin frame according to the size of die size, start silicon chip is installed, after installing silicon chip, support due to three points, silicon chip is substantially stationary, again another pin is fixed on pin frame by nut, wafer teeth on pin and the wafer teeth on base make silicon chip up and down and the gaily decorated basket respectively keeps two fixing points, thus avoid silicon chip and adhere to each other, it is then placed in cleaning liquid being carried out, as needed shake, can rock shadoof makes cleaning react evenly, cleaning performance is more preferably.
This utility model adds the slide glass number cleaning the gaily decorated basket, improve the cleaning efficiency of silicon chip, reduce workman's workload and production cost, prevent because silicon chip spacing reduces the generation of adhesion damage problem between the silicon chip brought simultaneously, and be applicable to during some occasion lifting shake gaily decorated basket prevent silicon chip from coming off.Owing to using the mode of wafer teeth, reduce the contact area of silicon chip and the gaily decorated basket, reduce the inefficacy ratio of product, and the complete hollow out of side, it is simple to the flowing of cleaning liquid so that cleaning performance is more preferably.
Of the present utility model ultimate principle has more than been shown and described; principal character and advantage; on the premise of without departing from this utility model spirit and scope, this utility model also has various changes and modifications, and these changes and improvements both fall within claimed scope of the present utility model.
Claims (4)
1. a cleaning semiconductor chip gaily decorated basket, it is characterized in that including the base that a middle part is provided with wafer slots, two side stands being connected by screw fit with base side wall, one shadoof being fixed on side stand top and two levers being fixed in the middle part of side stand, wherein it is respectively equipped with, on the base of wafer slots both sides, the wafer teeth matched with wafer, the middle part of side stand is provided with the shadoof frame being connected with shadoof, the both sides of shadoof frame are provided with the pin frame being symmetrical in shadoof frame, the top of pin frame is provided with the pin groove matched with pin, pin is fixed in the pin groove of pin frame by nut, this pin is provided with the wafer teeth matched with wafer.
The cleaning semiconductor chip gaily decorated basket the most according to claim 1, it is characterised in that: described semiconductor wafer is circular semiconductor wafers.
The cleaning semiconductor chip gaily decorated basket the most according to claim 1, it is characterised in that: described base is provided with liquid-leaking nozzle.
The cleaning semiconductor chip gaily decorated basket the most according to claim 1, it is characterised in that: the top of described shadoof frame is provided with fixing groove, and the both sides of shadoof are movably installed in the fixing groove of shadoof frame by the through hole being arranged on shadoof respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620223468.1U CN205508774U (en) | 2016-03-22 | 2016-03-22 | Semiconductor wafer washs basket of flowers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620223468.1U CN205508774U (en) | 2016-03-22 | 2016-03-22 | Semiconductor wafer washs basket of flowers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205508774U true CN205508774U (en) | 2016-08-24 |
Family
ID=56733753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620223468.1U Active CN205508774U (en) | 2016-03-22 | 2016-03-22 | Semiconductor wafer washs basket of flowers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205508774U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107737765A (en) * | 2017-11-13 | 2018-02-27 | 常州市杰洋精密机械有限公司 | Silicon wafer cleaning basket |
-
2016
- 2016-03-22 CN CN201620223468.1U patent/CN205508774U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107737765A (en) * | 2017-11-13 | 2018-02-27 | 常州市杰洋精密机械有限公司 | Silicon wafer cleaning basket |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |