CN109841704A - A kind of black silicon fluff making device of anti-sticking sheet - Google Patents
A kind of black silicon fluff making device of anti-sticking sheet Download PDFInfo
- Publication number
- CN109841704A CN109841704A CN201910140983.1A CN201910140983A CN109841704A CN 109841704 A CN109841704 A CN 109841704A CN 201910140983 A CN201910140983 A CN 201910140983A CN 109841704 A CN109841704 A CN 109841704A
- Authority
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- China
- Prior art keywords
- compression bar
- silicon
- flower basket
- silicon chip
- chip flower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021418 black silicon Inorganic materials 0.000 title claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 120
- 239000010703 silicon Substances 0.000 claims abstract description 120
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 118
- 230000006835 compression Effects 0.000 claims abstract description 79
- 238000007906 compression Methods 0.000 claims abstract description 79
- 235000012431 wafers Nutrition 0.000 claims abstract description 68
- 230000018044 dehydration Effects 0.000 claims abstract description 30
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 238000001035 drying Methods 0.000 abstract description 3
- 238000000605 extraction Methods 0.000 abstract description 3
- 230000001737 promoting effect Effects 0.000 abstract 1
- 210000002268 wool Anatomy 0.000 description 19
- 235000008216 herbs Nutrition 0.000 description 17
- 238000000034 method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of black silicon fluff making device of anti-sticking sheet, including mechanical arm, pre-dehydration slot groove body and silicon chip flower basket, opening is provided at the top of the pre-dehydration slot groove body, mechanical arm connects silicon chip flower basket, places silicon wafer in silicon chip flower basket；Mechanical arm includes two groups of mechanical shafts, opposite with the silicon chip flower basket two side walls connection respectively of two groups of mechanical shafts, is provided with up and down compression bar between two groups of mechanical shafts, the bottom surface of compression bar is provided with several latches；Mechanical arm drives the silicon chip flower basket of its bottom through the opening longitudinal movement at the top of pre-dehydration slot groove body, and compression bar is moved downward to latch, and several pieces of silicon wafers in silicon chip flower basket are successively laterally spaced-apart；The device of the invention is arranged in the pre-dehydration slot before silicon chip drying, by increasing compression bar movable up and down on the mechanical arm of catching carrier, in pre-dehydration slot, compression bar is put down, separate silicon wafer, mechanical arm ensures silicon wafer not patch during promoting silicon wafer, for silicon wafer after lifting dehydration, compression bar rises extraction.
Description
Technical field
The invention belongs to silicon wafer wool making technical field, in particular to the black silicon fluff making device of a kind of anti-sticking sheet.
Background technique
The core of solar battery technology is always to reduce cost and raising efficiency, on the one hand process for etching can extend light
In the light path of silicon face, reflection loss on the other hand can be reduced, thus raising efficiency.Monocrystalline silicon piece under alkali process for etching,
Reflectivity 11%, and after the currently used sour making herbs into wool processing of polysilicon chip, reflectivity 16%, reflectivity is higher to be caused to light absorption
Effect is deteriorated, and then influences efficiency.In recent years, metal catalytic chemical corrosion method (MCCE) is also known as black silicon making herbs into wool, as a kind of new
Making herbs into wool technology obtain large-scale application rapidly, this method passes through the etching of metal ion catalysis and silicon wafer contact point speed
Rate forms dell in silicon chip surface.To increase specific surface area, light trapping structure is formed, reduces reflectivity, promotes transformation efficiency.
It is cleaned behind the throwing of MCCE making herbs into wool process substantially 1. alkali, 2. heavy silver, 3. boreholes, 4. reamings, 5..Wherein cleaning is main afterwards
Effect is removal surface residual impurity and oxide layer.Cleaning effect is directly related to finished product yield and cell conversion efficiency.
Since black silicon making herbs into wool is wet process reaction process, silicon chip surface can inevitably remain water droplet before baking, these water droplets exist
Silicon wafer spacing easily causes patch when changing, and eventually becomes water stain dirty bad.Control silicon wafer spacing pair in carrier
Reduction patch is most important, and major measure is to pass through latch increasing the compression bar for having latch on carrier in industry at present
Silicon wafer is separated, but latch will affect silicon wafer wool making effect, is easy to produce that new making herbs into wool is bad, and the present invention is being not required to increase pressure
The mode of bar prevents patch from generating.
Summary of the invention
The present invention provides a kind of black silicon fluff making device of anti-sticking sheet, to solve the problems of the prior art.
To achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of black silicon fluff making device of anti-sticking sheet, including mechanical arm, pre-dehydration slot groove body and silicon chip flower basket, the pre-dehydration
Opening is provided at the top of slot groove body, the lower section of the mechanical arm is connected with silicon chip flower basket, places in the silicon chip flower basket several
Block silicon wafer；
The mechanical arm includes two groups of mechanical shafts, opposite with the silicon chip flower basket two side walls connection respectively of two groups of mechanical shafts,
Up and down compression bar is provided between two groups of mechanical shafts, the bottom surface of the compression bar is provided with several latches；
The mechanical arm drives the silicon chip flower basket of its bottom through the opening longitudinal movement at the top of pre-dehydration slot groove body, works as silicon wafer
The gaily decorated basket, which moves downward, to be placed in pre-dehydration slot groove body, and the intracorporal pure water liquid of pre-dehydration slot slot not excessively silicon wafer top surface when；Compression bar
It is moved downward to latch several pieces of silicon wafers in silicon chip flower basket are successively laterally spaced-apart.
Further, top-down movement slideway, the top and bottom of the movement slideway are provided in the mechanical shaft
Portion is respectively communicated with a positioning groove.
Further, the both ends of the compression bar are respectively arranged with a limited post, and the diameter of the limited post is greater than compression bar
Diameter, the diameter of limited post are greater than the width of movement slideway, and the diameter of compression bar is less than the width of movement slideway；The locating slot is
One longitudinal diameter is greater than the ellipse of trans D, and the diameter of compression bar is less than the trans D of locating slot, the compression bar both ends
Limited post passed through respectively from the center point of locating slot for being located at its both ends, the compression bar slides up and down and most in movement slideway
It is limited in any one locating slot eventually.
Further, the lower section of the mechanical shaft passes through the side wall detachable connection of screw and silicon chip flower basket.
Further, every group of mechanical shaft is 2, with the same side wall of 2 mechanical shafts connection silicon chip flower basket of group.
Further, several latches are successively arranged at equal intervals on the bottom surface of compression bar.
Further, the silicon wafer is placed in silicon chip flower basket, and the top surface of silicon wafer is higher than the top surface of silicon chip flower basket, described
The locating slot for moving slide bottom is higher than the top surface of silicon chip flower basket and is lower than the top surface of silicon wafer.
Further, top-down movement slideway, the top bottom of to of the movement slideway are provided in the mechanical shaft
Portion has been sequentially communicated several locating slots, is higher than the top surface of silicon chip flower basket positioned at the locating slot of bottommost and is lower than the top of silicon wafer
Face.
Further, the both ends of the compression bar are respectively arranged with a limited post, and the diameter of the limited post is greater than compression bar
Diameter, the diameter of limited post are greater than the width of movement slideway, and the diameter of compression bar is less than the width of movement slideway；The locating slot is
One longitudinal radius is greater than the ellipse of lateral radius, and the diameter of compression bar is less than the trans D of locating slot, the compression bar both ends
Limited post passed through respectively from the center point of locating slot for being located at its both ends, the compression bar slides up and down and most in movement slideway
It is limited in any one locating slot eventually.
Compared with prior art, the invention has the following advantages:
The device of the invention is arranged in the pre-dehydration slot before silicon chip drying, by increasing on the mechanical arm of catching carrier
Add a compression bar movable up and down, in pre-dehydration slot, compression bar is put down, and silicon wafer is separated, during mechanical arm promotes silicon wafer
Ensure silicon wafer not patch, for silicon wafer after lifting dehydration, compression bar rises extraction.In this way in the making herbs into wool stage of silicon wafer without increasing pressure
Bar avoids influence of the compression bar latch in the making herbs into wool stage to making herbs into wool, while may insure not fit together between silicon wafer again.
Detailed description of the invention
Fig. 1 is a kind of working state schematic representation of compression bar in the present invention；
Fig. 2 is another working state schematic representation of compression bar in the present invention；
Fig. 3 is the connection schematic diagram of mechanical arm and silicon chip flower basket in the present invention；
Fig. 4 is a kind of working state schematic representation of mechanical arm in the present invention；
Fig. 5 is another working state schematic representation of mechanical arm in the present invention；
Fig. 6 is another working state schematic representation of mechanical arm in the present invention；
Fig. 7 is the structural schematic diagram of compression bar in the present invention；
Fig. 8 is the position view of mechanical arm in the present invention, silicon chip flower basket and compression bar；
Wherein: 1- mechanical arm, 2- compression bar, 3- latch, 4- pre-dehydration slot groove body, 5- silicon wafer, 6- pure water liquid, 7- silicon wafer flower
Basket, 8- mechanical shaft, 9- side wall, 10- screw, 11- limited post, 12- move slideway, 13- locating slot.
Specific embodiment
Below with reference to embodiment, the present invention will be further explained.
As shown in figures 1-8, the black silicon fluff making device of a kind of anti-sticking sheet, including mechanical arm 1, pre-dehydration slot groove body 4 and silicon wafer
The gaily decorated basket 7, the top of the pre-dehydration slot groove body 4 are provided with opening, the lower section of the mechanical arm 1 company detachable by screw
It is connected to silicon chip flower basket 7, places several pieces of silicon wafers 5 in the silicon chip flower basket 7；The mechanical arm 1 include two groups of mechanical shafts 8, two groups
Two side walls 9 opposite with silicon chip flower basket 7 are connect mechanical shaft 8 respectively, are provided with up and down compression bar between two groups of mechanical shafts 8
2, the bottom surface of the compression bar 2 is provided with several equidistant latches 3；The mechanical arm 1 drives the silicon chip flower basket 7 of its bottom to pass through
The opening longitudinal movement at 4 top of pre-dehydration slot groove body, is placed in pre-dehydration slot groove body 4 when silicon chip flower basket 7 moves downward, and pre- de-
When pure water liquid 6 in sink groove body 4 does not have excessively 5 top surface of silicon wafer；Compression bar 2 is moved downward to latch 3 will be several in silicon chip flower basket 7
Block silicon wafer 5 is successively laterally spaced-apart.
Top-down movement slideway 12 is provided in the mechanical shaft 8, the top and bottom of the movement slideway 12 are each
It is communicated with a positioning groove 13；The both ends of the compression bar 2 are respectively arranged with a limited post 11, and the diameter of the limited post 11 is greater than pressure
The diameter of bar 2, the diameter of limited post 11 are greater than the width of movement slideway 12, and the diameter of compression bar 2 is less than the width of movement slideway 12；
The diameter of limited post 11 is greater than the width of movement slideway 12, and the diameter of compression bar 2 is less than the width of movement slideway 12；The locating slot
13 are greater than the ellipse of trans D for a longitudinal diameter, and the diameter of compression bar 2 is less than the trans D of locating slot 13, the pressure
The limited post 11 at 2 both ends of bar is passed through from the center point for the locating slot 13 for being located at its both ends respectively, and the compression bar 2 is in movement slideway 12
It inside slides up and down and is finally limited in any one locating slot 13.
The silicon wafer 5 is placed in silicon chip flower basket 7, and the top surface of silicon wafer 5 is higher than the top surface of silicon chip flower basket 7, the movement
The locating slot 13 of 12 bottom of slideway is higher than the top surface of silicon chip flower basket 7 and is lower than the top surface of silicon wafer 5.
Every group of mechanical shaft 8 is 2, with the same side wall 9 of 2 mechanical shafts 8 connection silicon chip flower basket 7 of group, then relatively
The compression bar 2 answered is 2, and the theorem of straight line is determined according to two o'clock, then may insure that the position of every piece of silicon wafer 5 will not occur partially
Move, simultaneously with this, reduce silicon wafer patch a possibility that, it is ensured that be not bonded between adjacent silicon wafer.In addition, mechanical arm drives silicon wafer
Gaily decorated basket up and down motion belongs to the prior art, is not only referred to the field of silicon wafer preparation, is also referred to mechanical arm driving device
The other equipment to move up and down.
The silicon chip flower basket for being placed with silicon wafer: being fixed on the bottom of mechanical arm by application method of the invention, and then driving mentions
Carrier is grabbed, mechanical arm decline is until the top surface of silicon wafer is also submerged in the pre-dehydration slot groove body equipped with pure water liquid, then by pressure
Bar 2 moves down, and places it in the locating slot of proper height so that latch 3 by several pieces of silicon wafers 5 in silicon chip flower basket 7 according to
It is secondary laterally spaced-apart；When more than the liquid level that silicon wafer is promoted to pure water liquid, compression bar is lifted up, and latch is detached between silicon wafer.
Installation method of the compression bar 2 on mechanical arm 1 in the present invention:
Since the diameter of limited post 11 is greater than the diameter of compression bar 2, and the diameter of limited post 11 is laterally slightly larger than locating slot 13
Diameter, the diameter of limited post 11 are greater than the width of movement slideway 12, and the diameter of compression bar 2 is less than the width of movement slideway 12；Therefore really
Having protected limited post 11 can pass through from locating slot 13, and should not be detached from from locating slot 13, ensure that compression bar 2 is moving up and down
During should not fall, install compression bar when, it is only necessary to by the limited post 11 at 2 both ends of compression bar respectively from be located at its both ends positioning
The center point of slot 13 passes through.
It is preferred in the present embodiment as another embodiment,
As shown in fig. 6, it is not of uniform size in view of the die size specification of each batch production, it is mainly shown as that silicon wafer is longitudinally put
All differences of height when setting, therefore in the present embodiment, top-down movement slideway 12 is provided in mechanical shaft 8, the movement is slided
The top in road 12 to bottom has been sequentially communicated several locating slots 13, and operator can choose difference according to the height of silicon wafer
The locating slot 13 of height is higher than the top surface of silicon chip flower basket 7 positioned at the locating slot 13 of bottommost and is lower than the top surface of silicon wafer 5.
The both ends of the compression bar 2 are respectively arranged with a limited post 11, and the diameter of the limited post 11 is greater than the straight of compression bar 2
Diameter, the diameter of limited post 11 are greater than the width of movement slideway 12, and the diameter of compression bar 2 is less than the width of movement slideway 12；It is described fixed
Position slot 13 is the ellipse that a longitudinal radius is greater than lateral radius, and the diameter of compression bar 2 is less than the trans D of locating slot 13, institute
The limited post 11 for stating 2 both ends of compression bar is passed through from the center point for the locating slot 13 for being located at its both ends respectively, and the compression bar 2 is slided in movement
It slides up and down and is finally limited in any one locating slot 13 in road 12.
The device of the invention is arranged in the pre-dehydration slot before silicon chip drying, by increasing on the mechanical arm of catching carrier
Add a compression bar movable up and down, in pre-dehydration slot, compression bar is put down, and silicon wafer is separated, during mechanical arm promotes silicon wafer
Ensure silicon wafer not patch, for silicon wafer after lifting dehydration, compression bar rises extraction.In this way in the making herbs into wool stage of silicon wafer without increasing pressure
Bar avoids influence of the compression bar latch in the making herbs into wool stage to making herbs into wool, while may insure not fit together between silicon wafer again.
When silicon wafer is immersed in the intracorporal pure water liquid of pre-dehydration slot slot, the compression bar on mechanical arm is put down, the latch on compression bar
Separate silicon wafer, it is ensured that not patch；When more than the liquid level that silicon wafer is promoted to pure water liquid, compression bar is promoted, and latch is detached between silicon wafer.
The present invention applies in the dehydration before crystal silicon chip making herbs into wool, after the device, then carries out the polycrystalline of making herbs into wool stage production
Silicon wafer, without increasing compression bar, avoids influence of the compression bar latch in the making herbs into wool stage to making herbs into wool, while may insure again in the making herbs into wool stage
It does not fit together between silicon wafer, which can apply in field of solar thermal power generation.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (9)
1. a kind of black silicon fluff making device of anti-sticking sheet, it is characterised in that: including mechanical arm (1), pre-dehydration slot groove body (4) and silicon wafer
The gaily decorated basket (7) is provided with opening at the top of the pre-dehydration slot groove body (4), and the lower section of the mechanical arm (1) is connected with silicon chip flower basket
(7), several pieces of silicon wafers (5) are placed in the silicon chip flower basket (7)；
The mechanical arm (1) includes two groups of mechanical shafts (8), two groups of mechanical shafts (8), two sides opposite with silicon chip flower basket (7) respectively
Wall (9) connection, is provided with up and down compression bar (2) between two groups of mechanical shafts (8), the compression bar (2) if bottom surface be provided with
Dry latch (3)；
The mechanical arm (1) drives the silicon chip flower basket (7) of its bottom through the opening longitudinal movement at the top of pre-dehydration slot groove body (4),
It is placed in pre-dehydration slot groove body (4) when silicon chip flower basket (7) moves downward, and the pure water liquid (6) in pre-dehydration slot groove body (4) did not had
When silicon wafer (5) top surface；Compression bar (2) is moved downward to latch (3), and several pieces of silicon wafers (5) in silicon chip flower basket (7) are successively horizontal
To separating.
2. the black silicon fluff making device of anti-sticking sheet according to claim 1, it is characterised in that: be arranged on the mechanical shaft (8)
There is top-down movement slideway (12), the top and bottom of movement slideway (12) are respectively communicated with a positioning groove (13).
3. the black silicon fluff making device of anti-sticking sheet according to claim 2, it is characterised in that: the both ends of the compression bar (2) point
It is not provided with a limited post (11), the diameter of the limited post (11) is greater than the diameter of compression bar (2), and the diameter of limited post (11) is big
In the width of movement slideway (12), the diameter of compression bar (2) is less than the width of movement slideway (12)；The locating slot (13) is one
Longitudinal diameter is greater than the ellipse of trans D, and the diameter of compression bar (2) is less than the trans D of locating slot (13), the compression bar
(2) limited post (11) at both ends is passed through from the center point for the locating slot (13) for being located at its both ends respectively, and the compression bar (2) is moving
It slides up and down and is finally limited in any one locating slot (13) in slideway (12).
4. the black silicon fluff making device of anti-sticking sheet according to claim 1, it is characterised in that: the lower section of the mechanical shaft (8)
Pass through the side wall detachable connection of screw (10) and silicon chip flower basket (7).
5. the black silicon fluff making device of anti-sticking sheet according to claim 1, it is characterised in that: every group of mechanical shaft (8) is 2
Root, with the same side wall (9) of 2 mechanical shafts (8) connection silicon chip flower basket (7) of group.
6. the black silicon fluff making device of anti-sticking sheet according to claim 1, it is characterised in that: several latches (3) are successively etc.
Spacing is arranged on the bottom surface of compression bar (2).
7. the black silicon fluff making device of anti-sticking sheet according to claim 3, it is characterised in that: the silicon wafer (5) is placed in silicon
In the piece gaily decorated basket (7), and the top surface of silicon wafer (5) is higher than the top surface of silicon chip flower basket (7), the locating slot of described movement slideway (12) bottom
(13) top surface higher than silicon chip flower basket (7) and the top surface lower than silicon wafer (5).
8. the black silicon fluff making device of anti-sticking sheet according to claim 1, it is characterised in that: be arranged on the mechanical shaft (8)
There is top-down movement slideway (12), top to the bottom of movement slideway (12) has been sequentially communicated several locating slots
(13), it is higher than the top surface of silicon chip flower basket (7) positioned at the locating slot of bottommost (13) and is lower than the top surface of silicon wafer (5).
9. the black silicon fluff making device of anti-sticking sheet according to claim 8, it is characterised in that: the both ends of the compression bar (2) point
It is not provided with a limited post (11), the diameter of the limited post (11) is greater than the diameter of compression bar (2), and the diameter of limited post (11) is big
In the width of movement slideway (12), the diameter of compression bar (2) is less than the width of movement slideway (12)；The locating slot (13) is one
Longitudinal radius is greater than the ellipse of lateral radius, and the diameter of compression bar (2) is less than the trans D of locating slot (13), the compression bar
(2) limited post (11) at both ends is passed through from the center point for the locating slot (13) for being located at its both ends respectively, and the compression bar (2) is moving
It slides up and down and is finally limited in any one locating slot (13) in slideway (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910140983.1A CN109841704A (en) | 2019-02-26 | 2019-02-26 | A kind of black silicon fluff making device of anti-sticking sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910140983.1A CN109841704A (en) | 2019-02-26 | 2019-02-26 | A kind of black silicon fluff making device of anti-sticking sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109841704A true CN109841704A (en) | 2019-06-04 |
Family
ID=66885018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910140983.1A Pending CN109841704A (en) | 2019-02-26 | 2019-02-26 | A kind of black silicon fluff making device of anti-sticking sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109841704A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112909121A (en) * | 2019-12-04 | 2021-06-04 | 苏州阿特斯阳光电力科技有限公司 | Silicon wafer texturing method and silicon wafer texturing device |
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| JP2005288331A (en) * | 2004-03-31 | 2005-10-20 | Mitsubishi Materials Polycrystalline Silicon Corp | Washing and dewatering apparatus for polycrystalline silicon |
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| CN207868177U (en) * | 2017-12-15 | 2018-09-14 | 江西展宇新能源股份有限公司 | A kind of gaily decorated basket reducing black silicon flower basket mark ratio |
| CN209461475U (en) * | 2019-02-26 | 2019-10-01 | 镇江仁德新能源科技有限公司 | A kind of black silicon fluff making device of anti-sticking sheet |
-
2019
- 2019-02-26 CN CN201910140983.1A patent/CN109841704A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005288331A (en) * | 2004-03-31 | 2005-10-20 | Mitsubishi Materials Polycrystalline Silicon Corp | Washing and dewatering apparatus for polycrystalline silicon |
| WO2016115721A1 (en) * | 2015-01-19 | 2016-07-28 | 常州捷佳创精密机械有限公司 | Shower type wet-process texturing device and method for solar silicon wafer |
| CN204927319U (en) * | 2015-09-09 | 2015-12-30 | 新奥光伏能源有限公司 | Wash basket of flowers and belt cleaning device |
| CN204953498U (en) * | 2015-09-18 | 2016-01-13 | 无锡隆基硅材料有限公司 | Silicon chip washs inserted sheet accessory plate |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112909121A (en) * | 2019-12-04 | 2021-06-04 | 苏州阿特斯阳光电力科技有限公司 | Silicon wafer texturing method and silicon wafer texturing device |
| CN112909121B (en) * | 2019-12-04 | 2022-07-15 | 苏州阿特斯阳光电力科技有限公司 | Silicon wafer texturing method and silicon wafer texturing device |
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