CN205159294U - Rotation type silicon chip washs basket of flowers - Google Patents
Rotation type silicon chip washs basket of flowers Download PDFInfo
- Publication number
- CN205159294U CN205159294U CN201520820086.2U CN201520820086U CN205159294U CN 205159294 U CN205159294 U CN 205159294U CN 201520820086 U CN201520820086 U CN 201520820086U CN 205159294 U CN205159294 U CN 205159294U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- framework
- frame
- pivot
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 239000010703 silicon Substances 0.000 title claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 35
- 238000004140 cleaning Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 7
- 239000004809 Teflon Substances 0.000 claims description 6
- 229920006362 Teflon® Polymers 0.000 claims description 6
- 239000007788 liquid Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model belongs to the semiconductor field relates to the instrument in the silicon chip manufacture craft, concretely relates to rotation type silicon chip washs basket of flowers, support including frame and frame both sides, the frame for the quadrangle structure that link up from top to bottom, two long limits of frame be the low type of the falling V structure in middle high both sides, a plurality of groups slot has been seted up to two long limit inner wall symmetries, the minor face outer wall fixed connection pivot of frame, the pivot link up with adjacent support mutually, and the pivot be located the support outside one end be provided with the bolt, be located fixedly connected with swing pinion in the pivot between one of them support and the frame, the swing pinion passes through the chain and links to each other with external motor. The utility model discloses a do planning and designing again to the holistic structural configuration of the basket of flowers, can make its rotatory through external motor drive to increase the relative velocity on liquid and silicon chip surface, reduce boundary layer thickness, and have and be convenient for get the characteristics of putting the silicon chip, the reduction breakage rate.
Description
Technical field
The utility model belongs to semiconductor applications, relates to a kind of instrument in silicon wafer to manufacture technique, is specifically related to a kind of rotary silicon wafer cleaning basket.
Background technology
In semiconductor device is produced, the operation of nearly 20% is relevant with Wafer Cleaning.Silicon chip is after the different operation processing such as section, chamfering, grinding, surface treatment, polishing, extension, and surface has been subjected to serious pollution, and the object of cleaning is exactly to remove the pollutions such as silicon chip surface particle, metal ion and organic substance.
Current Wafer Cleaning is mainly based on chemical cleaning, chemical cleaning refers to and utilizes various chemical reagent and organic solvent and the impurity be adsorbed on cleaned material surface and greasy dirt generation chemical reaction or dissolution, or accompany by ultrasonic, heat, the physical measure such as to vacuumize, make impurity from the surface desorption being eliminated object, then use a large amount of high-purity heat, cold deionized water rinsing, thus obtain the process of clean surface.Chemical cleaning can be divided into again wet-chemical cleaning and chemical dry cleaning, and wherein wet-chemical cleaning technology is still in leading position in silicon wafer surface cleaning.
When cleaning fluid contacts with silicon chip, there is the very thin moisture film of one deck at silicon chip surface, due to the effect of intermolecular attraction, this water membrane is actionless relative to silicon chip, is also referred to as boundary layer.The existence in boundary layer, the cleaning performance for silicon chip has very important impact.Those diameters are less than to the particle of boundary layer thickness, particle self can only be relied on to diffuse through boundary layer at leisure, in ingoing stream, then taken away silicon chip surface by current, these particles are difficult to be removed in cleaning process.Boundary layer thickness depends on the viscosity of liquid, the relative velocity etc. of liquid and silicon chip surface.Reduce boundary layer thickness and become the significant challenge improving cleaning efficiency.
In wet-chemical cleaning, need to adopt the cleaning gaily decorated basket to hold silicon chip, then the cleaning gaily decorated basket is put into cleaning fluid.Be all fixed after cleaning fluid put into by the existing cleaning gaily decorated basket, in order to the thickness that can reduce boundary layer is merely able to accelerate water velocity, just needs to improve constantly plant capacity, cause a large amount of losses of electricity.
In addition, the existing cleaning gaily decorated basket is socket type structure, namely clean the gaily decorated basket and evenly offer multiple slot, a silicon chip is inserted in each slot, because level height between each slot is consistent and adjacent slots spacing is short, so will make troubles in the process of inserting and taking out silicon chip, be easy to the situation occurring die crack.
Utility model content
According to above the deficiencies in the prior art, the utility model provides a kind of rotary silicon wafer cleaning basket, by doing planning and designing again to the topology layout of gaily decorated basket entirety, being driven by external motor to make it rotate, to increase the relative velocity of liquid and silicon chip surface, reduce boundary layer thickness, and have the advantages that to be convenient to pick and place silicon chip, reduce breakage rate.
The rotary silicon wafer cleaning basket of one described in the utility model, it is characterized in that: the bearing comprising framework and framework both sides, described framework is the quadrilateral structure of up/down perforation, two long limits of framework are the low reverse V-shaped structures in middle high both sides, two long limit inwall symmetries offer some group slots, the minor face outer wall of framework is fixedly connected with rotating shaft, and rotating shaft and adjacent bearing connect, and rotating shaft is positioned at support outer one end is provided with latch; Rotating shaft between one of them bearing and framework is fixedly connected with swing pinion, and swing pinion is connected with external motor by chain.
Wherein, preferred version is as follows:
Described framework adopts special teflon material to make.Special teflon material is corrosion-resistant, chemical stability good, long service life, and cheap.
Described slot is provided with 25 groups.The design of 25 groups meets designing requirement conventional at present, identical with current silicon wafer cleaning basket group number.
In the utility model, swing pinion is connected with external motor by chain, drives rotating shaft that framework is rotated, realize the rotary motion of relative seat under the driving of motor.
The beneficial effect that the utility model has is: the framework that (1) holds silicon chip can drive by motor and rotate, and increases the relative velocity of liquid and silicon chip surface, effectively reduces boundary layer thickness, makes Wafer Cleaning can be cleaner; (2) special teflon material is adopted to make, cheap, be convenient to the marketization and promote; (3) the reverse V-shaped structure that in the middle of framework employing, high both sides are low, makes to have difference in height between two adjacent slots, this difference in height just can be utilized to be convenient to pick and place silicon chip, be unlikely to touch adjacent silicon chip, to reduce the generation of silicon chip disrepair phenomenon.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
In figure: 1, framework 2, slot 3, bearing 4, rotating shaft 5, latch 6, swing pinion.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described further.
Embodiment 1:
As shown in Figure 1, a kind of rotary silicon wafer cleaning basket, comprise the bearing 3 of framework 1 and framework 1 both sides, described framework 1 is the quadrilateral structure of up/down perforation, two long limits of framework are the low reverse V-shaped structures in middle high both sides, and two long limit inwall symmetries offer some group slots 2, and the minor face outer wall of framework 1 is fixedly connected with rotating shaft 4, rotating shaft 4 and adjacent bearing 3 connect, and rotating shaft 4 is positioned at bearing 3 lateral ends is provided with latch 5; Rotating shaft 4 between one of them bearing 3 and framework 1 is fixedly connected with swing pinion 6, and swing pinion 6 is connected with external motor by chain.
Described framework 1 adopts special teflon material to make.Special teflon material is corrosion-resistant, chemical stability good, long service life, and cheap.
Described slot 2 is provided with 25 groups.The design of 25 groups meets designing requirement conventional at present, identical with current silicon wafer cleaning basket group number.
In the utility model, swing pinion 6 is connected with external motor by chain, drives rotating shaft 4 that framework 1 is rotated, realize the rotary motion of relative seat 3 under the driving of motor.
Claims (3)
1. a rotary silicon wafer cleaning basket, it is characterized in that: the bearing comprising framework and framework both sides, described framework is the quadrilateral structure of up/down perforation, two long limits of framework are the low reverse V-shaped structures in middle high both sides, two long limit inwall symmetries offer some group slots, the minor face outer wall of framework is fixedly connected with rotating shaft, and rotating shaft and adjacent bearing connect, and rotating shaft is positioned at support outer one end is provided with latch; Rotating shaft between one of them bearing and framework is fixedly connected with swing pinion, and swing pinion is connected with external motor by chain.
2. the rotary silicon wafer cleaning basket of one according to claim 1, is characterized in that: described framework adopts special teflon material to make.
3. the rotary silicon wafer cleaning basket of one according to claim 1, is characterized in that: described slot is provided with 25 groups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520820086.2U CN205159294U (en) | 2015-10-21 | 2015-10-21 | Rotation type silicon chip washs basket of flowers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520820086.2U CN205159294U (en) | 2015-10-21 | 2015-10-21 | Rotation type silicon chip washs basket of flowers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205159294U true CN205159294U (en) | 2016-04-13 |
Family
ID=55694957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520820086.2U Active CN205159294U (en) | 2015-10-21 | 2015-10-21 | Rotation type silicon chip washs basket of flowers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205159294U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107955972A (en) * | 2017-10-17 | 2018-04-24 | 中锗科技有限公司 | Rotate germanium wafer/silicon chip alkali corrosion technique and its special equipment |
-
2015
- 2015-10-21 CN CN201520820086.2U patent/CN205159294U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107955972A (en) * | 2017-10-17 | 2018-04-24 | 中锗科技有限公司 | Rotate germanium wafer/silicon chip alkali corrosion technique and its special equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Rotation type silicon chip washs basket of flowers Effective date of registration: 20190312 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: 2019990000200 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200427 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: 2019990000200 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Rotation type silicon chip washs basket of flowers Effective date of registration: 20200428 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2020990000391 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210604 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2020990000391 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A rotary silicon wafer cleaning basket Effective date of registration: 20220704 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2022370010106 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231127 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2022370010106 |