CN208245285U - A kind of silicon chip cleaning device - Google Patents

A kind of silicon chip cleaning device Download PDF

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Publication number
CN208245285U
CN208245285U CN201820099223.1U CN201820099223U CN208245285U CN 208245285 U CN208245285 U CN 208245285U CN 201820099223 U CN201820099223 U CN 201820099223U CN 208245285 U CN208245285 U CN 208245285U
Authority
CN
China
Prior art keywords
pedestal
cleaning
circular orbit
water
silicon chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820099223.1U
Other languages
Chinese (zh)
Inventor
吕海强
郑安
黄杨康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG KINGLEX SOLAR TECHNOLOGY Co Ltd
Original Assignee
ZHEJIANG KINGLEX SOLAR TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG KINGLEX SOLAR TECHNOLOGY Co Ltd filed Critical ZHEJIANG KINGLEX SOLAR TECHNOLOGY Co Ltd
Priority to CN201820099223.1U priority Critical patent/CN208245285U/en
Application granted granted Critical
Publication of CN208245285U publication Critical patent/CN208245285U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of silicon chip cleaning devices, including pedestal, the pedestal is rectangular enclosure structure, the middle position of the bottom end inner wall of the pedestal is equipped with driving motor, the output shaft end of the driving motor runs through the top side wall of pedestal and is connected with shaft, the shaft is connected with placement plate far from one end of driving motor, the top side wall of the pedestal is provided with water collection sheet, the top side wall of the pedestal is provided with circular orbit, two mobile devices are movably installed in the circular orbit, two mobile devices are located at the two sides of circular orbit, support rod is connected in the mobile device, two support rods are connected with placement plate far from one end of mobile device.The utility model structure is simple, and novel in design, cleaning effect is more preferable, can be realized simultaneously two functions of cleaning and drying, does not need substep and carry out, time saving and energy saving, while can clean to multiple silicon wafers, simple and convenient, is worthy to be popularized.

Description

A kind of silicon chip cleaning device
Technical field
The utility model relates to cleaning device technical field more particularly to a kind of silicon chip cleaning devices.
Background technique
With the development of science and technology, the application of silicon wafer is more and more wider, is all applied in various fields, semiconductor Silicon wafer must be cleaned strictly in device production, and micropollution also results in component failure, and the purpose of cleaning is to remove surface dirt Contaminate impurity, including organic matter and inorganic matter, these impurity some with state of atom or ionic condition, some in the form of a film or Particle shape formula is present in silicon chip surface, and organic contamination includes that photoresist, organic solvent residual object, synthetic wax and people contact device, work Tool, vessel bring grease or fiber, inorganic pollution include heavy metal gold, copper, iron, chromium etc., seriously affect the minority carrier longevity Life and surface conductance;Alkali metal such as sodium etc., causes serious drain;Particle contamination includes silicon slag, dust, bacterium, microorganism, organic Colloid fiber etc. will lead to various defects.
The method for removing pollution has a physical cleaning and two kinds of chemical cleaning, and when Wafer Cleaning needs to use cleaning device, but Be the generally existing following defect of cleaning device in the prior art: 1, cleaning efficiency is low, can not be by the cleaning of silicon wafer Journey production line is usually all to be directly placed at silicon wafer in cleaning device together, it is same it is washed after take out, then place down again A collection of silicon wafer, extremely wastes time;2, also silicon wafer is dried after Wafer Cleaning taking-up, first cleans the mode thrown away afterwards It operates more wasteful manpower and time.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of Wafer Cleaning dress proposed It sets.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of silicon chip cleaning device, including pedestal, the pedestal are rectangular enclosure structure, the bottom end inner wall of the pedestal Middle position is equipped with driving motor, and the output shaft end of the driving motor, which runs through the top side wall of pedestal and is connected with, to be turned Axis, the shaft are connected with placement plate far from one end of driving motor, and the top side wall of the pedestal is provided with water collection sheet, described The top side wall of pedestal is provided with circular orbit, and two mobile devices, two mobile dresses are movably installed in the circular orbit Setting in the two sides of circular orbit, support rod, two one end of support rod far from mobile device are connected in the mobile device It is connected with placement plate, the upper surface circumference array of the placement plate is provided with placing groove, and the base upper surface two sides are symmetrically pacified Equipped with fixed link, fixed plate is fixed between two fixed links, fixed plate upper surface two sides are symmetrically arranged with water tank, described Cleaning device is provided on water tank, the upper surface middle position of the fixed plate is equipped with blower, the fixed plate lower surface Middle position is fixed with mounting rack, and electric heating item is equipped on the mounting rack.
Preferably, the water collection sheet is ring structure, and water collection sheet is located at the inside of circular orbit, and water collection sheet is circumferentially square It is fluted to being arranged.
Preferably, there are movable pulley and mounting plate in the mobile device, movable pulley is installed on a mounting board by bearing, and Movable pulley is movably arranged on circular orbit, and mounting plate is connected with support rod.
Preferably, the placing groove is located at the surface of water collection sheet, and is evenly arranged on the bottom end side wall of placing groove logical Water hole.
Preferably, the cleaning device includes water pipe and nozzle, and one end of water pipe is connected with water tank, and the other end is connected with spray Mouth, nozzle are equidistantly positioned along length of pipe direction, and water pump is provided on water pipe.
Compared with prior art, the utility model has the beneficial effects that
Silicon wafer is placed in placing groove, placement plate rotation is driven by driving motor and shaft, using cleaning device and Blower is cleaned and is dried to silicon wafer, and silicon wafer is moved with the rotation of placement plate, can be cleaned by two cleaning devices Twice, cleaning effect is more preferable, directly removes silicon wafer after the completion of cleaning, then places next piece of silicon wafer and cleaned, time saving province Power, while multiple silicon wafers can be cleaned, it is simple and convenient, it is worthy to be popularized.
The utility model structure is simple, and novel in design, cleaning effect is more preferable, can be realized simultaneously two function of cleaning and drying Can, it does not need distribution and carries out, it is time saving and energy saving, while multiple silicon wafers can be cleaned, it is simple and convenient, it is worthy to be popularized.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of silicon chip cleaning device structural schematic diagram;
Fig. 2 be the utility model proposes a kind of silicon chip cleaning device placement plate top view.
In figure: 1 pedestal, 2 driving motors, 3 shafts, 4 placement plates, 5 water collection sheets, 6 circular orbits, 7 mobile devices, 8 supports Bar, 9 fixed links, 10 fixed plates, 11 water tanks, 12 cleaning devices, 13 blowers, 14 mounting racks, 15 electric heating items, 16 placing grooves.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.
Referring to Fig.1-2, a kind of silicon chip cleaning device, including pedestal 1, pedestal 1 are rectangular enclosure structure, the bottom end of pedestal 1 The middle position of inner wall is equipped with driving motor 2, top side wall and connection of the output shaft end of driving motor 2 through pedestal 1 There is shaft 3, shaft 3 is connected with placement plate 4 far from one end of driving motor 2, and the top side wall of pedestal 1 is provided with water collection sheet 5, collection Water plate 5 is ring structure, and water collection sheet 5 is located at the inside of circular orbit 6, and water collection sheet 5 is peripherally disposed fluted, pedestal 1 top side wall is provided with circular orbit 6, is movably installed with two mobile devices 7 in circular orbit 6, and two mobile device 7 In the two sides of circular orbit 6, it is connected with support rod 8 in mobile device 7, there is movable pulley and mounting plate, movable pulley in mobile device 7 On a mounting board by bearing installation, and movable pulley is movably arranged on circular orbit 6, and mounting plate is connected with support rod 8, and two Support rod 8 is connected with placement plate 4 far from one end of mobile device 7, and the upper surface circumference array of placement plate 4 is provided with placing groove 16, placing groove 16 is located at the surface of water collection sheet 5, and limbers is evenly arranged on the bottom end side wall of placing groove, table on pedestal 1 Face two sides are symmetrically installed with fixed link 9, and fixed plate 10 is fixed between two fixed links 9, and 10 upper surface two sides of fixed plate are symmetrical It is provided with water tank 11, cleaning device 12 is provided on water tank 11, cleaning device 12 includes water pipe and nozzle, and one end of water pipe connects There is water tank, the other end is connected with nozzle, and nozzle is equidistantly positioned along length of pipe direction, and water pump, fixed plate are provided on water pipe 10 upper surface middle position is equipped with blower 13, and the middle position of 10 lower surface of fixed plate is fixed with mounting rack 14, mounting rack Electric heating item 15 is installed, the utility model structure is simple, and novel in design, cleaning effect is more preferable, can be realized simultaneously cleaning on 14 With two functions of drying, does not need distribution and carry out, it is time saving and energy saving, while multiple silicon wafers can be cleaned, simple and convenient, value It must promote.
Working principle: in cleaning silicon chip, silicon wafer being once placed in placing groove 16, then opens driving motor 2, is led to Shaft 3 is crossed, placement plate 4 is driven to carry out circular motion in circular orbit 6 by support rod 8 and mobile device 7, opens cleaning dress The water pump, blower 13 and electric heating item 15 for setting 12, clean silicon wafer using the spray head of cleaning device 12, the sewage of cleaning passes through Limbers on placing groove 16 enters in water collection sheet 5, using blower 13 and electric heating item 15, dries to silicon wafer, passes through two Cleaning device 12 can clean twice, and cleaning effect is more preferable, directly remove silicon wafer after the completion of cleaning, then place next block of silicon Piece is cleaned, time saving and energy saving, while can be cleaned to multiple silicon wafers, simple and convenient, is worthy to be popularized.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model Within enclosing.

Claims (5)

1. a kind of silicon chip cleaning device, including pedestal (1), which is characterized in that the pedestal (1) is rectangular enclosure structure, described The middle position of the bottom end inner wall of pedestal (1) is equipped with driving motor (2), and the output shaft end of the driving motor (2) runs through It the top side wall of pedestal (1) and is connected with shaft (3), the shaft (3) is connected with placement plate far from the one end of driving motor (2) (4), the top side wall of the pedestal (1) is provided with water collection sheet (5), and the top side wall of the pedestal (1) is provided with circular orbit (6), two mobile devices (7) are movably installed in the circular orbit (6), two mobile devices (7) are located at circular orbit (6) Two sides, be connected with support rod (8) on the mobile device (7), two support rods (8) connect far from the one end of mobile device (7) It is connected to placement plate (4), the upper surface circumference array of the placement plate (4) is provided with placing groove (16), pedestal (1) upper surface Two sides are symmetrically installed with fixed link (9), are fixed with fixed plate (10) between two fixed links (9), table on the fixed plate (10) Face two sides are symmetrically arranged with water tank (11), are provided with cleaning device (12) on the water tank (11), the fixed plate (10) it is upper Surface middle position is equipped with blower (13), and the middle position of fixed plate (10) lower surface is fixed with mounting rack (14), institute It states and electric heating item (15) is installed on mounting rack (14).
2. a kind of silicon chip cleaning device according to claim 1, which is characterized in that the water collection sheet (5) is ring structure, And water collection sheet (5) is located at the inside of circular orbit (6), water collection sheet (5) is peripherally disposed fluted.
3. a kind of silicon chip cleaning device according to claim 1, which is characterized in that have movement on the mobile device (7) Wheel and mounting plate, movable pulley is installed on a mounting board by bearing, and movable pulley is movably arranged on circular orbit (6), installation Plate is connected with support rod (8).
4. a kind of silicon chip cleaning device according to claim 1, which is characterized in that the placing groove (16) is located at water collection sheet (5) surface, and limbers is evenly arranged on the bottom end side wall of placing groove.
5. a kind of silicon chip cleaning device according to claim 1, which is characterized in that the cleaning device (12) includes water pipe And nozzle, one end of water pipe are connected with water tank, the other end is connected with nozzle, and nozzle is equidistantly positioned along length of pipe direction, water Water pump is provided on pipe.
CN201820099223.1U 2018-01-22 2018-01-22 A kind of silicon chip cleaning device Expired - Fee Related CN208245285U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820099223.1U CN208245285U (en) 2018-01-22 2018-01-22 A kind of silicon chip cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820099223.1U CN208245285U (en) 2018-01-22 2018-01-22 A kind of silicon chip cleaning device

Publications (1)

Publication Number Publication Date
CN208245285U true CN208245285U (en) 2018-12-18

Family

ID=64620186

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820099223.1U Expired - Fee Related CN208245285U (en) 2018-01-22 2018-01-22 A kind of silicon chip cleaning device

Country Status (1)

Country Link
CN (1) CN208245285U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111318510A (en) * 2019-11-18 2020-06-23 南京市浦口区浦城资产经营有限公司 Cleaning equipment for agricultural product processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111318510A (en) * 2019-11-18 2020-06-23 南京市浦口区浦城资产经营有限公司 Cleaning equipment for agricultural product processing

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181218

Termination date: 20200122

CF01 Termination of patent right due to non-payment of annual fee