CN209736202U - Pickling device for silicon wafer raw materials - Google Patents

Pickling device for silicon wafer raw materials Download PDF

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Publication number
CN209736202U
CN209736202U CN201920309809.0U CN201920309809U CN209736202U CN 209736202 U CN209736202 U CN 209736202U CN 201920309809 U CN201920309809 U CN 201920309809U CN 209736202 U CN209736202 U CN 209736202U
Authority
CN
China
Prior art keywords
basket
placing
rod
placing basket
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920309809.0U
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Chinese (zh)
Inventor
周建明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZHEJIANG MINGFENG ELECTRONIC TECHNOLOGY CO LTD
Original Assignee
ZHEJIANG MINGFENG ELECTRONIC TECHNOLOGY CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZHEJIANG MINGFENG ELECTRONIC TECHNOLOGY CO LTD filed Critical ZHEJIANG MINGFENG ELECTRONIC TECHNOLOGY CO LTD
Priority to CN201920309809.0U priority Critical patent/CN209736202U/en
Application granted granted Critical
Publication of CN209736202U publication Critical patent/CN209736202U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a pickling device of silicon chip raw materials, including wasing the jar, the bottom of wasing the jar is rotated through the bearing and is installed the rotation circle, and the dwang is worn to be equipped with by the rotation circle, the one end of dwang extends to in wasing the jar, the first basket of placing of one end fixedly connected with of dwang, the first bottom of placing the basket are plate structure, and the first equal fixedly connected with in inner wall both sides of placing the basket is vertical arranges the backing plate of placing, the first one side of placing the basket is equipped with the second and places the basket, and first basket of placing and second are placed the basket and are constituteed cylindrical structure together, and first basket of placing and second place the basket and all weld two connecting blocks near the both sides outer wall of placing the backing plate, and the crisscross through-hole has all been seted up to the connecting block, and the equal fixed mounting in one side. The utility model relates to a rational in infrastructure, easy operation, convenient to use can conveniently wash, and the cleaning performance is better moreover.

Description

Pickling device for silicon wafer raw materials
Technical Field
The utility model relates to a silicon chip production technical field especially relates to a pickling device of silicon chip raw materials.
Background
Silicon wafers are subjected to rigorous cleaning in the production of semiconductor devices. Trace contamination can also lead to device failure. The cleaning is intended to remove surface contaminating impurities, including organic and inorganic substances. Some of these impurities exist in an atomic state or an ionic state, and some exist in a thin film form or a particle form on the surface of the silicon wafer. Organic contamination includes photoresist, organic solvent residues, synthetic waxes, and grease or fibers from human contact devices, tools, utensils. Inorganic pollution including heavy metals such as gold, copper, iron, chromium, etc., seriously affects minority carrier lifetime and surface conductance; alkali metals such as sodium, etc., causing severe leakage; particulate contamination including silica fume, dust, bacteria, microorganisms, organic colloidal fibers, etc., can cause various defects. The existing cleaning device only needs to put the silicon wafer into the acid solution for standing and carrying out chemical reaction, because the standing reaction efficiency is low, dirt cannot well fall off from the surface of the silicon wafer, and the surface scratching is easily caused if brushing is adopted to affect the quality.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problems of insufficient acid washing of the silicon chip and easy scraping of the defects existing in the prior art, and providing the acid washing device for the silicon chip raw material.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
A pickling device for silicon wafer raw materials comprises a cleaning cylinder, wherein a rotating ring is rotatably arranged at the bottom end of the cleaning cylinder through a bearing, a rotating rod penetrates through the rotating ring, one end of the rotating rod extends into the cleaning cylinder, a first placing basket is fixedly connected to one end of the rotating rod, the bottom of the first placing basket is of a plate type structure, vertically-arranged placing backing plates are fixedly connected to two sides of the inner wall of the first placing basket, a second placing basket is arranged on one side of the first placing basket, the first placing basket and the second placing basket form a cylindrical structure together, two connecting blocks are welded on the outer walls of the two sides of the first placing basket and the second placing basket close to the placing backing plates, cross-shaped through holes are formed in the connecting blocks, a protective shell is fixedly mounted on one side of the connecting blocks of the second placing basket, a pull rod penetrates through the protective shell in a movable mode, a spring is sleeved on the rod body, and dog and spring all are located the protective housing, and the spring is located between the one end inner wall of dog and protective housing, and the one end of pull rod passes the second and places the connecting block of basket and extend to the opposite side, and the one end fixedly connected with kelly of pull rod, and the one end of kelly still passes the first through-hole of placing the connecting block of basket.
Preferably, the bottom outer wall welding of washing jar has four bracing pieces, and the common fixed mounting of one end of four bracing pieces has the bedplate, rotates through the bearing between the bottom outer wall of washing jar and the top of bedplate and installs two-way threaded rod, and two-way threaded rod is located between four bracing pieces, has the backup pad through screw movable mounting between two-way threaded rod.
Preferably, the hole that rotates the circle is the rectangle structure, and the body of rod of dwang is the quadrangular structure, dwang and the hole phase-match that rotates the circle, and the other end of dwang passes through the top rotation installation of bearing and backup pad, and the bottom fixed mounting of backup pad has first motor, the output shaft of first motor and the other end fixed connection of dwang.
Preferably, the bottom outer wall of the rotating ring is fixedly provided with a second motor, an output shaft of the second motor is fixedly provided with a first gear, a rod body of one of the two-way threaded rods is fixedly provided with a second gear, the first gear is meshed with the second gear, the rod bodies of the two-way threaded rods are fixedly provided with belt wheels, the belt wheels are connected through a belt, and the belt is located below the first motor.
The utility model has the advantages that: through the designed first placing basket and the second placing basket which are convenient to mount and dismount, a plurality of silicon wafers can be respectively inserted into a gap between the two placing base plates, so that the silicon wafers are placed layer by layer, the silicon wafers do not collide with each other, a cylindrical structure formed by the first placing basket and the second placing basket can rotate during acid washing, so that the acid washing is more sufficient, the designed bidirectional threaded rod can drive the rotating rod to move upwards, the first placing basket and the second placing basket can be pushed out of the washing cylinder, and the washed silicon wafers can be conveniently taken out; the cleaning device is reasonable in design structure, simple to operate, convenient to use, capable of being cleaned conveniently and good in cleaning effect.
Drawings
FIG. 1 is a schematic view of a front view cross-sectional structure of a silicon wafer raw material pickling apparatus provided by the present invention;
FIG. 2 is a schematic view of a combined installation overlooking structure of a first placing basket and a second placing basket of the silicon wafer raw material pickling device provided by the present invention;
Fig. 3 is a schematic view of a clamping rod mounting structure of a silicon wafer raw material pickling device according to the present invention.
In the figure: 1 washing jar, 2 first basket of placing, 3 connecting blocks, 4 place the backing plate, 5 turn circles, 6 dwangs, 7 backup pads, 8 two-way threaded rod, 9 second place basket, 10 pull rods, 11 protective housing, 12 springs, 13 kellies.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a pickling device for silicon wafer raw materials, comprising a cleaning cylinder 1, wherein a rotating ring 5 is rotatably installed at the bottom end of the cleaning cylinder 1 through a bearing, a rotating rod 6 penetrates through the rotating ring 5, one end of the rotating rod 6 extends into the cleaning cylinder 1, one end of the rotating rod 6 is fixedly connected with a first placing basket 2, the bottom of the first placing basket 2 is of a plate type structure, two vertically arranged placing backing plates 4 are fixedly connected to two sides of the inner wall of the first placing basket 2, a second placing basket 9 is arranged at one side of the first placing basket 2, the first placing basket 2 and the second placing basket 9 form a cylindrical structure together, two connecting blocks 3 are welded on the outer walls of two sides of the first placing basket 2 and the second placing basket 9, which are close to the placing backing plates 4, the connecting blocks 3 are both provided with cross-shaped through holes, a protective shell 11 is fixedly installed at one side of the, pull rod 10 is worn to be equipped with in the activity of protective housing 11, the body of rod cover of pull rod 10 is equipped with spring 12, the body of rod welding of pull rod 10 has the dog, and dog and spring 12 all are located protective housing 11, spring 12 is located between the one end inner wall of dog and protective housing 11, the one end of pull rod 10 is passed the second and is placed connecting block 3 of basket 9 and extend to the opposite side, and the one end fixedly connected with kelly 13 of pull rod 10, and the one end of kelly 13 still passes the first through-hole of placing connecting block 3 of basket 2.
In the embodiment, when the first placing basket 2 and the second placing basket 9 are installed, the connecting blocks 3 of the first placing basket 2 and the second placing basket 9 are aligned, one end of the pull rod 10 respectively passes through the through holes of the connecting blocks 3 of the first placing basket 2, then the pull rod 10 is rotated, the rotating position of the clamping rod 13 at one end of the pull rod 10 is staggered with the through holes of the connecting blocks 3 of the first placing basket 2, so that the clamping rod 13 is clamped on the connecting blocks 3 of the first placing basket 2, the installation of the first placing basket 2 and the second placing basket 9 is completed, the first motor and the second motor are connected with an external power supply through wires, the rotating ring 5 and the rotating rod 6 are designed to realize that the rotating rod 6 drives the rotating ring 5 to rotate, the acid liquor is poured into the cleaning cylinder 1, the first motor is started, so that the first motor drives the rotating rod 6 to rotate, thereby driving the first placing basket 2 and the second placing basket 9 to rotate, make the silicon chip rotate, thereby carry out the pickling, the pickling is accomplished and is discharged the acidizing fluid, start the second motor, under first gear and second gear action, make one of them two-way threaded rod 8 rotate, drive two-way threaded rod 8 and rotate together under belt and band pulley effect, thereby drive backup pad 7 shifts up, dwang 6 promotes first basket 2 of placing and basket 9 is placed to the second, make the silicon chip shift out washing jar 1, because the two-way screw of two-way threaded rod 8, make backup pad 7 go up when moving to the top move down again under the effect of two-way screw, thereby can realize backup pad 7 can move the back and descend again and reset more, whole device adopts acid-resistant stainless steel to make.
the above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (4)

1. the acid washing device for the silicon wafer raw materials comprises a washing cylinder (1) and is characterized in that a rotating ring (5) is installed at the bottom end of the washing cylinder (1) in a rotating mode through a bearing, a rotating rod (6) is arranged on the rotating ring (5) in a penetrating mode, one end of the rotating rod (6) extends into the washing cylinder (1), a first placing basket (2) is fixedly connected with one end of the rotating rod (6), the bottom of the first placing basket (2) is of a plate type structure, vertically-arranged placing base plates (4) are fixedly connected to two sides of the inner wall of the first placing basket (2), a second placing basket (9) is arranged on one side of the first placing basket (2), the first placing basket (2) and the second placing basket (9) form a cylindrical structure together, and two connecting blocks (3) are welded on the outer walls of two sides, close to the placing base plates (4), of the first placing basket (2) and the second placing basket (9), crisscross through-hole has all been seted up in connecting block (3), the equal fixed mounting in one side of connecting block (3) of basket (9) is placed to the second has protective housing (11), pull rod (10) are worn to be equipped with in protective housing (11) activity, the body of rod cover of pull rod (10) is equipped with spring (12), the body of rod welding of pull rod (10) has the dog, and dog and spring (12) all are located protective housing (11), spring (12) are located between the one end inner wall of dog and protective housing (11), connecting block (3) that the second was placed basket (9) are passed to the one end of pull rod (10) extend to the opposite side, and the one end fixedly connected with kelly (13) of pull rod (10), and the one end of kelly (13) still passes the first through-hole of placing connecting block (3) of basket (2.
2. The silicon wafer raw material pickling device as claimed in claim 1, wherein four support rods are welded on the outer wall of the bottom end of the cleaning cylinder (1), a seat plate is fixedly mounted at one end of each support rod, two bidirectional threaded rods (8) are rotatably mounted between the outer wall of the bottom end of the cleaning cylinder (1) and the top end of the seat plate through bearings, the bidirectional threaded rods (8) are located between the four support rods, and a support plate (7) is movably mounted between the two bidirectional threaded rods (8) through threads.
3. The silicon wafer raw material pickling device according to claim 2, wherein the inner hole of the rotating ring (5) is of a rectangular structure, the rod body of the rotating rod (6) is of a quadrangular prism structure, the rotating rod (6) is matched with the inner hole of the rotating ring (5), the other end of the rotating rod (6) is rotatably installed with the top end of the supporting plate (7) through a bearing, the bottom end of the supporting plate (7) is fixedly provided with a first motor, and the output shaft of the first motor is fixedly connected with the other end of the rotating rod (6).
4. The silicon wafer raw material pickling device as claimed in claim 2, wherein a second motor is fixedly mounted on the outer wall of the bottom end of the rotating ring (5), a first gear is fixedly mounted on an output shaft of the second motor, a second gear is fixedly mounted on a rod body of one of the two-way threaded rods (8), the first gear is meshed with the second gear, belt wheels are fixedly mounted on rod bodies of the two-way threaded rods (8), the belt wheels are connected through a belt, and the belt is located below the first motor.
CN201920309809.0U 2019-03-12 2019-03-12 Pickling device for silicon wafer raw materials Expired - Fee Related CN209736202U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920309809.0U CN209736202U (en) 2019-03-12 2019-03-12 Pickling device for silicon wafer raw materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920309809.0U CN209736202U (en) 2019-03-12 2019-03-12 Pickling device for silicon wafer raw materials

Publications (1)

Publication Number Publication Date
CN209736202U true CN209736202U (en) 2019-12-06

Family

ID=68716502

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920309809.0U Expired - Fee Related CN209736202U (en) 2019-03-12 2019-03-12 Pickling device for silicon wafer raw materials

Country Status (1)

Country Link
CN (1) CN209736202U (en)

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20191206

CF01 Termination of patent right due to non-payment of annual fee