CN205452233U - 具有温度调节功能的托盘单元及利用其的基板放置系统 - Google Patents

具有温度调节功能的托盘单元及利用其的基板放置系统 Download PDF

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Publication number
CN205452233U
CN205452233U CN201620284708.9U CN201620284708U CN205452233U CN 205452233 U CN205452233 U CN 205452233U CN 201620284708 U CN201620284708 U CN 201620284708U CN 205452233 U CN205452233 U CN 205452233U
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China
Prior art keywords
lower plate
substrate
heat transfer
temperature
transfer gas
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Chinese (zh)
Inventor
郑相坤
金亨源
丘璜燮
金铉济
郑熙锡
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Ji Jialan Science And Technology Co Ltd
GigaLane Co Ltd
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Ji Jialan Science And Technology Co Ltd
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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma & Fusion (AREA)
CN201620284708.9U 2015-12-18 2016-04-07 具有温度调节功能的托盘单元及利用其的基板放置系统 Active CN205452233U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020150182122A KR102489201B1 (ko) 2015-12-18 2015-12-18 온도 조절 기능을 갖는 트레이 유닛 및 이를 이용한 기판 안착 시스템
KR10-2015-0182122 2015-12-18

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CN205452233U true CN205452233U (zh) 2016-08-10

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KR (1) KR102489201B1 (ko)
CN (1) CN205452233U (ko)
TW (1) TWM526754U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109983347A (zh) * 2016-11-23 2019-07-05 吉佳蓝科技股份有限公司 探针卡用螺丝紧固装置以及具备它的探针卡组装装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11610792B2 (en) 2019-08-16 2023-03-21 Applied Materials, Inc. Heated substrate support with thermal baffles

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6001183A (en) * 1996-06-10 1999-12-14 Emcore Corporation Wafer carriers for epitaxial growth processes
KR100734016B1 (ko) * 2006-07-06 2007-06-29 주식회사 래디언테크 기판 재치대 및 이를 구비한 플라즈마 처리 장치
KR100954754B1 (ko) * 2008-03-25 2010-04-27 (주)타이닉스 플라즈마 처리장치용 기판 트레이
KR20120097667A (ko) 2011-02-25 2012-09-05 서현모 냉각효과가 우수한 플라즈마 처리장치용 기판 트레이 및 플라즈마 처리장치
KR101504880B1 (ko) * 2014-11-14 2015-03-20 주식회사 기가레인 기판 안착유닛

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109983347A (zh) * 2016-11-23 2019-07-05 吉佳蓝科技股份有限公司 探针卡用螺丝紧固装置以及具备它的探针卡组装装置

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Publication number Publication date
KR20170073333A (ko) 2017-06-28
KR102489201B1 (ko) 2023-01-18
TWM526754U (zh) 2016-08-01

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