CN205313716U - 一种SiC单晶生长设备中坩埚独立旋转机构 - Google Patents
一种SiC单晶生长设备中坩埚独立旋转机构 Download PDFInfo
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105442044A (zh) * | 2015-12-17 | 2016-03-30 | 中国电子科技集团公司第二研究所 | 一种SiC单晶生长设备中坩埚独立旋转机构 |
CN107523871A (zh) * | 2016-06-22 | 2017-12-29 | 江苏拜尔特光电设备有限公司 | 一种碳化硅单晶炉 |
CN113564696A (zh) * | 2021-07-26 | 2021-10-29 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | 一种提高pvt法生长晶体的径向均匀性的装置及方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105442044A (zh) * | 2015-12-17 | 2016-03-30 | 中国电子科技集团公司第二研究所 | 一种SiC单晶生长设备中坩埚独立旋转机构 |
CN107523871A (zh) * | 2016-06-22 | 2017-12-29 | 江苏拜尔特光电设备有限公司 | 一种碳化硅单晶炉 |
CN113564696A (zh) * | 2021-07-26 | 2021-10-29 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | 一种提高pvt法生长晶体的径向均匀性的装置及方法 |
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Effective date of registration: 20180510 Address after: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee after: Taiyuan Yixing Science and Technology Co., Ltd. Address before: 030024 Heping South Road, Taiyuan, Shanxi Province, No. 115 Patentee before: China Electronic Technology Group Corporation No.2 Research Institute |
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Effective date of registration: 20180628 Address after: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee after: China Electronic Technology Group Corporation No.2 Research Institute Address before: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee before: Taiyuan Yixing Science and Technology Co., Ltd. |
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Effective date of registration: 20190612 Address after: 030006 Room 102, No. 5 Tanghuai Road, Tanghuai Park, Taiyuan City, Shanxi Comprehensive Reform Demonstration Area, Shanxi Province Patentee after: Shanxi Scintillation New Materials Co., Ltd. Address before: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee before: China Electronic Technology Group Corporation No.2 Research Institute |
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Effective date of registration: 20220406 Address after: 030032 No. 9, fenxiao street, Taiyuan Xiaohe Park, Shanxi comprehensive reform demonstration zone, Taiyuan City, Shanxi Province Patentee after: Shanxi Scintillation Crystal Co.,Ltd. Address before: 030006 Room 102, No. 5 Tanghuai Road, Tanghuai Park, Taiyuan City, Shanxi Comprehensive Reform Demonstration Area, Shanxi Province Patentee before: Shanxi Scintillation New Materials Co.,Ltd. |