CN205123999U - Mems麦克风 - Google Patents
Mems麦克风 Download PDFInfo
- Publication number
- CN205123999U CN205123999U CN201520890561.3U CN201520890561U CN205123999U CN 205123999 U CN205123999 U CN 205123999U CN 201520890561 U CN201520890561 U CN 201520890561U CN 205123999 U CN205123999 U CN 205123999U
- Authority
- CN
- China
- Prior art keywords
- colloidal sol
- substrate
- mems
- wiring board
- sol groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000003292 glue Substances 0.000 claims abstract description 68
- 239000007788 liquid Substances 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims description 63
- 239000003990 capacitor Substances 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 5
- 230000004888 barrier function Effects 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 239000013212 metal-organic material Substances 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 239000000084 colloidal system Substances 0.000 abstract description 4
- 238000004806 packaging method and process Methods 0.000 abstract 2
- 230000009194 climbing Effects 0.000 description 15
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000035755 proliferation Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520890561.3U CN205123999U (zh) | 2015-11-09 | 2015-11-09 | Mems麦克风 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520890561.3U CN205123999U (zh) | 2015-11-09 | 2015-11-09 | Mems麦克风 |
Publications (1)
Publication Number | Publication Date |
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CN205123999U true CN205123999U (zh) | 2016-03-30 |
Family
ID=55579565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520890561.3U Active CN205123999U (zh) | 2015-11-09 | 2015-11-09 | Mems麦克风 |
Country Status (1)
Country | Link |
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CN (1) | CN205123999U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106356391A (zh) * | 2016-08-30 | 2017-01-25 | 昆山工研院新型平板显示技术中心有限公司 | 一种封装盖的制作方法、封装结构及其制作方法 |
WO2021135110A1 (zh) * | 2019-12-31 | 2021-07-08 | 潍坊歌尔微电子有限公司 | 用于mems器件的防尘结构及mems麦克风封装结构 |
-
2015
- 2015-11-09 CN CN201520890561.3U patent/CN205123999U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106356391A (zh) * | 2016-08-30 | 2017-01-25 | 昆山工研院新型平板显示技术中心有限公司 | 一种封装盖的制作方法、封装结构及其制作方法 |
WO2021135110A1 (zh) * | 2019-12-31 | 2021-07-08 | 潍坊歌尔微电子有限公司 | 用于mems器件的防尘结构及mems麦克风封装结构 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right |