CN205115663U - 一种改善区熔硅单晶硅生长的热场 - Google Patents
一种改善区熔硅单晶硅生长的热场 Download PDFInfo
- Publication number
- CN205115663U CN205115663U CN201520813370.7U CN201520813370U CN205115663U CN 205115663 U CN205115663 U CN 205115663U CN 201520813370 U CN201520813370 U CN 201520813370U CN 205115663 U CN205115663 U CN 205115663U
- Authority
- CN
- China
- Prior art keywords
- main body
- coil main
- coil
- thermal field
- described coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 37
- 239000010703 silicon Substances 0.000 title claims abstract description 37
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title abstract description 3
- 238000004857 zone melting Methods 0.000 title abstract description 3
- 239000013078 crystal Substances 0.000 claims abstract description 16
- 235000019994 cava Nutrition 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 230000002500 effect on skin Effects 0.000 abstract description 2
- 239000000155 melt Substances 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 238000012797 qualification Methods 0.000 description 2
- 230000002860 competitive effect Effects 0.000 description 1
- 238000005090 crystal field Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520813370.7U CN205115663U (zh) | 2015-10-19 | 2015-10-19 | 一种改善区熔硅单晶硅生长的热场 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520813370.7U CN205115663U (zh) | 2015-10-19 | 2015-10-19 | 一种改善区熔硅单晶硅生长的热场 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205115663U true CN205115663U (zh) | 2016-03-30 |
Family
ID=55571285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520813370.7U Active CN205115663U (zh) | 2015-10-19 | 2015-10-19 | 一种改善区熔硅单晶硅生长的热场 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN205115663U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110257899A (zh) * | 2019-06-24 | 2019-09-20 | 天津中环领先材料技术有限公司 | 一种平衡热场的区熔线圈 |
-
2015
- 2015-10-19 CN CN201520813370.7U patent/CN205115663U/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110257899A (zh) * | 2019-06-24 | 2019-09-20 | 天津中环领先材料技术有限公司 | 一种平衡热场的区熔线圈 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102352530B (zh) | 用于直拉硅单晶炉的热屏装置 | |
EP2083098B1 (en) | Apparatus for manufacturing semiconductor single crystal ingot and method using the same | |
US20180044815A1 (en) | Crystal growing systems and crucibles for enhancing heat transfer to a melt | |
CN205115663U (zh) | 一种改善区熔硅单晶硅生长的热场 | |
CN201620202U (zh) | 一种用于生长真空区熔硅单晶的加热线圈 | |
WO2022135301A1 (zh) | 单晶炉的石墨坩埚及其制造方法、坩埚组件和单晶炉 | |
CN107604439A (zh) | 一种生长大尺寸碳化硅单晶的热场结构 | |
CN205474106U (zh) | 一种保护籽晶型坩埚 | |
CN201267022Y (zh) | 一种用于多晶硅真空区熔提纯的加热线圈 | |
CN202380126U (zh) | 一种用于直拉硅单晶炉的热屏装置 | |
CN205420598U (zh) | 单晶炉短加热器 | |
CN203602749U (zh) | 一种用于拉制六英寸区熔硅单晶的加热线圈 | |
CN108179462B (zh) | 一种用于制备区熔大直径单晶的加热线圈 | |
CN105154967A (zh) | 一种制备区熔单晶的凸台线圈 | |
CN105177700A (zh) | 一种改善区熔硅单晶硅生长的热场 | |
CN203049080U (zh) | 一种用于区熔法制备硅单晶的加热线圈 | |
CN102011180A (zh) | 一种单晶炉热场结构 | |
CN203049079U (zh) | 一种多晶硅真空区熔线圈 | |
CN202658266U (zh) | 一种用于拉制4寸区熔单晶硅加热线圈 | |
CN203820920U (zh) | 同时拉制七根至十四根硅芯的高频线圈拉制孔布局 | |
CN205035491U (zh) | 一种制备区熔单晶的凸台线圈 | |
CN203049091U (zh) | 一种用于多晶硅区熔的加热线圈 | |
CN215668290U (zh) | 一种多晶硅反应器沉积载体 | |
CN202430318U (zh) | 一种区熔法大直径单晶生长用单匝平板线圈 | |
CN203049078U (zh) | 一种用于硅单晶制备的区熔线圈 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20181101 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191227 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address |