CN204866575U - 镀膜后硅片缺陷检测分选设备 - Google Patents
镀膜后硅片缺陷检测分选设备 Download PDFInfo
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- CN204866575U CN204866575U CN201520427485.2U CN201520427485U CN204866575U CN 204866575 U CN204866575 U CN 204866575U CN 201520427485 U CN201520427485 U CN 201520427485U CN 204866575 U CN204866575 U CN 204866575U
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- silicon chip
- conveyer belt
- camera bellows
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- plated film
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 39
- 239000010703 silicon Substances 0.000 title claims abstract description 39
- 230000007547 defect Effects 0.000 title claims abstract description 21
- 239000011248 coating agent Substances 0.000 title abstract description 5
- 238000000576 coating method Methods 0.000 title abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 11
- 241000252254 Catostomidae Species 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000002950 deficient Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 206010023126 Jaundice Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
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CN201520427485.2U CN204866575U (zh) | 2015-06-19 | 2015-06-19 | 镀膜后硅片缺陷检测分选设备 |
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CN201520427485.2U CN204866575U (zh) | 2015-06-19 | 2015-06-19 | 镀膜后硅片缺陷检测分选设备 |
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CN204866575U true CN204866575U (zh) | 2015-12-16 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107185857A (zh) * | 2017-05-31 | 2017-09-22 | 镇江苏仪德科技有限公司 | 一种太阳能电池片颜色分选双传送带装置 |
CN108682715A (zh) * | 2018-04-28 | 2018-10-19 | 深圳市拉普拉斯能源技术有限公司 | 一种超高效太阳能电池表面多效钝化膜生产设备 |
-
2015
- 2015-06-19 CN CN201520427485.2U patent/CN204866575U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107185857A (zh) * | 2017-05-31 | 2017-09-22 | 镇江苏仪德科技有限公司 | 一种太阳能电池片颜色分选双传送带装置 |
CN108682715A (zh) * | 2018-04-28 | 2018-10-19 | 深圳市拉普拉斯能源技术有限公司 | 一种超高效太阳能电池表面多效钝化膜生产设备 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhenjiang yinuoweisi Intelligent Technology Co.,Ltd. Assignor: ZHENJIANG SYD TECHNOLOGY Co.,Ltd. Contract record no.: X2022320000303 Denomination of utility model: Silicon wafer defect detection and sorting equipment after coating Granted publication date: 20151216 License type: Common License Record date: 20221210 |
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EE01 | Entry into force of recordation of patent licensing contract | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Zhenjiang yinuoweisi Intelligent Technology Co.,Ltd. Assignor: ZHENJIANG SYD TECHNOLOGY Co.,Ltd. Contract record no.: X2022320000303 Date of cancellation: 20240116 |
|
EC01 | Cancellation of recordation of patent licensing contract | ||
CB03 | Change of inventor or designer information |
Inventor after: Sun Zhiquan Inventor after: Tong Gang Inventor after: Zhou Qi Inventor before: Sun Zhiquan Inventor before: Tong Gang Inventor before: Zhao Buhui Inventor before: Zhang Qian Inventor before: Zhou Qi |
|
CB03 | Change of inventor or designer information |