CN204788666U - Near -infrared fourier transform spectral imaging appearance - Google Patents

Near -infrared fourier transform spectral imaging appearance Download PDF

Info

Publication number
CN204788666U
CN204788666U CN201520435786.XU CN201520435786U CN204788666U CN 204788666 U CN204788666 U CN 204788666U CN 201520435786 U CN201520435786 U CN 201520435786U CN 204788666 U CN204788666 U CN 204788666U
Authority
CN
China
Prior art keywords
index glass
beam splitter
fourier transform
near infrared
imaging lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201520435786.XU
Other languages
Chinese (zh)
Inventor
王新全
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao Zhongke Zhifu Photoelectric Technology Co ltd
Original Assignee
Qingdao Academy for Opto Electronics Engineering
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qingdao Academy for Opto Electronics Engineering filed Critical Qingdao Academy for Opto Electronics Engineering
Priority to CN201520435786.XU priority Critical patent/CN204788666U/en
Application granted granted Critical
Publication of CN204788666U publication Critical patent/CN204788666U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The utility model provides a near -infrared fourier transform spectral imaging appearance, leading formation of image mirror, collimating mirror, integral type interferometer, formation of image mirror and area array detector including the order connection, leading formation of image mirror for it is polaroid to the target, the collimating mirror be used for with polaroid beam collimation, the integral type interferometer is used for faling into the imaging beam behind the collimation two bundles of light beams and producing the optical path difference, the formation of image mirror takes place to interfere on being used for assembling the area array detector that forms images with two bundles of light that have the optical path difference, the area array detector is used for gathering the target image that the stack has interference fringe. The beneficial effects of the utility model are that, adopt the drive of driver straight line to adopt displacement closed -loop control, the restrict each other of breakthrough time modulation type near -infrared fourier transform spectral imaging appearance precision and speed, precision and speed all improve greatly, and the interferometer volume reduces greatly, the practicality is stronger.

Description

A kind of near infrared Fourier transform spectral imager
Technical field
The utility model relates to spectral imaging technology field, particularly relates to a kind of near infrared Fourier transform spectral imager.
Background technology
Near infrared spectrum contains abundant material information, not only comprises chemical composition information, also includes physical characteristics, biological nature etc., is the reflection of the many-sided integrated information of material.
Near infrared spectrum imager can obtain the two dimensional image of target and the complete near infrared spectrum of target every bit simultaneously, has application widely in biological medicine, agricultural product and the field such as food, forensic science.Near infrared spectrum imager mainly contains color dispersion-type, optical filtering flap-type and near infrared Fourier transform type etc., near infrared Fourier transform spectral imager compares to traditional color dispersion-type optical spectrum imagers and optical filtering flap-type optical spectrum imagers, there is the advantage of high flux, hyperchannel, high precision and wide Free Spectral Range, there is important using value.Conventional near infrared Fourier transform spectral imager adopts classical Michelson interferometer to realize, namely time-modulation type Fourier transform spectral imager.
Utility model people finds in the process of research, in actual applications, there is major defect in time-modulation type Fourier transform spectral imager, a set of high-precision mechanical index glass drive system is needed to drive, machinery index glass requires uniform motion, strict to the area requirement tilting, rock, also need a set of laser instrument to carry out the accurate measurement of displacement.The problems referred to above cause precision and speed mutually to restrict, therefore are not suitable for fast spectrum imaging.Because interferometer volume is large, also have impact on practicality.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, the utility model provides a kind of near infrared Fourier transform spectral imager, has avoided precision optical machinery index glass drive system, avoids the situation that precision and speed restrict mutually.
The technical solution of the utility model is:
A kind of near infrared Fourier transform spectral imager, comprises the preposition imaging lens, collimating mirror, integrated dry interferometer, imaging lens and the planar array detector that are linked in sequence;
Described preposition imaging lens, for carrying out Polaroid to target;
Described collimating mirror, is placed in the rear portion of described preposition imaging lens, for receiving Polaroid light beam and by the beam collimation after Polaroid;
Described integrated dry interferometer, is placed in the rear portion of described collimating mirror, for receiving the imaging beam after collimation, and the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens, is placed in described integrated dry interferometer rear portion, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector, is placed in described imaging lens rear portion, for gathering the target image being superimposed with interference fringe.
Further, described integrated dry interferometer comprises entity beam splitter, horizontal glass, index glass, index glass driver and displacement transducer;
Described entity beam splitter inside is provided with beam splitting coating, and is provided with horizontal glass at the offside of its incident light, and top is provided with index glass, and index glass space is reserved at top, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference;
The bottom of described index glass driver is connected with described index glass, carries out straight line uniform motion for driving index glass;
Institute's displacement sensors is connected with the side of described index glass, for monitoring in real time the displacement of index glass, realizes the closed-loop control of index glass motion.
Further, described entity beam splitter is made up of the first beam splitter and the second beam splitter;
The triangular prism of described first beam splitter to be profile be isosceles right triangle, described second beam splitter is the at right angles trapezoidal quadrangular of profile, described beam splitting coating is arranged on the inclined-plane of described first beam splitter, the inclined-plane of described first beam splitter docks with the inclined-plane of described second beam splitter, and the bottom width of described second beam splitter and height, be all greater than the height of described first beam splitter.
Further, described beam splitting coating is the beam splitting coating of half-reflection and half-transmission, for the incident beam by entering entity beam splitter, is divided into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at horizontal glass place, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at index glass place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating.
Further, described index glass driver adopts the voice coil motor that can realize high-speed straight-line motion, and institute's displacement sensors adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
Preposition imaging lens is the apochromatic leanse of near infrared spectral coverage.
Collimating mirror is identical with imaging lens focal length.
Planar array detector 16 adopts the InGaAs high speed near infrared detector that pixel number is 320 × 256, Pixel size is 30 μm × 30 μm.
Compared with prior art, the beneficial effects of the utility model adopt voice coil motor linear motion driver, and adopt displacement closed-loop control, the mutual restriction of breakthrough time modulation type near infrared Fourier transform spectral imager precision and speed, precision and speed improve all greatly, and interferometer volume reduces greatly, and practicality is stronger.
Accompanying drawing explanation
Fig. 1 is near infrared Fourier transform spectral imager theory diagram.
In figure: target 11, preposition imaging lens 12, collimating mirror 13, integrated dry interferometer 14, imaging lens 15, planar array detector 16, computing machine 17.
Fig. 2 is integral type interferometer schematic diagram.
In figure: entity beam splitter 201, first beam splitter 202, second beam splitter 203, beam splitting coating 204, horizontal glass 205, index glass 206, index glass driver 207, displacement transducer 208, index glass direction of motion 210, incident beam 211, first incident beam 212, second incident beam 213, first outgoing beam 214, second outgoing beam 215.
Embodiment
Below in conjunction with accompanying drawing, the technical solution of the utility model is specifically addressed; it is to be noted; the technical solution of the utility model is not limited to the embodiment described in embodiment; the content of those skilled in the art's reference and reference technical solutions of the utility model; the improvement that basis of the present utility model is carried out and design, should belong to protection domain of the present utility model.
As shown in Figure 1,
The utility model embodiment provides this kind of near infrared Fourier transform spectral imager, comprises the preposition imaging lens 12, collimating mirror 13, integrated dry interferometer 14, imaging lens 15 and the planar array detector 16 that are linked in sequence;
Described preposition imaging lens 12, for carrying out Polaroid to target 11;
Described collimating mirror 13, is placed in the rear portion of described preposition imaging lens 12, for receive Polaroid light beam and by described Polaroid after beam collimation;
Described integrated dry interferometer 14, is placed in the rear portion of described collimating mirror 13, for receiving the imaging beam after collimation, and the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens 15, is placed in the rear portion of described integrated dry interferometer 14, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector 16, is placed in the rear portion of described imaging lens 15, for gathering the target image being superimposed with interference fringe.
Further, described integrated dry interferometer 14 comprises entity beam splitter 201, horizontal glass 205, index glass 206, index glass driver 207 and displacement transducer 208;
Described entity beam splitter 201 inside is provided with beam splitting coating 204, and is provided with horizontal glass 205 at the offside of its incident light, and top is provided with index glass 206, and index glass space is reserved at top,
Preferably, horizontal glass 205 is formed at the lateral surface plating reflectance coating of the incident light offside of beam splitter 201.
The bottom of described index glass driver 207 is connected with described index glass 206, carries out straight line uniform motion for driving index glass 206;
Institute's displacement sensors 208 is connected with the side of described index glass 206, for monitoring in real time the displacement of index glass 206, realizes the closed-loop control that index glass 206 moves;
Described integrated dry interferometer 14, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference.
Further, described entity beam splitter 201 is made up of the first beam splitter 202 and the second beam splitter 203;
Described first beam splitter 202 for profile be the triangular prism of isosceles right triangle, described second beam splitter 203 is the at right angles trapezoidal quadrangular of profile, described beam splitting coating 204 is arranged on the inclined-plane of described first beam splitter 202, the inclined-plane of described first beam splitter 202 docks with the inclined-plane of described second beam splitter 203, and the bottom width of described second beam splitter 203 and height, be all greater than the height of described first beam splitter 202.
Further, described beam splitting coating 204 is the beam splitting coating of half-reflection and half-transmission, for entering the incident beam 211 of entity beam splitter 201, is divided into incident beam 212 and second incident beam 213;
Described first incident beam 212, through beam splitting coating 204, at horizontal glass 205, place is reflected, and the light beam be reflected back becomes the first outgoing beam 214 again after beam splitting coating 204 reflects;
Described second incident beam 213, in the reflection of beam splitting coating 204 place, at index glass 206, place is reflected, and the light beam be reflected back becomes the second outgoing beam 215 through beam splitting coating 204.
Further, described index glass driver 207 adopts the voice coil motor that can realize high-speed straight-line motion, and institute's displacement sensors 208 adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
Utility model also discloses a kind of near infrared Fourier trasform spectroscopy formation method, and the method comprises the following steps:
Preposition imaging lens 12 pairs of targets are Polaroid;
Collimating mirror 13 is by described Polaroid beam collimation;
Imaging beam after collimation is divided into two light beams and produces optical path difference by integrated dry interferometer 14;
Two-beam with optical path difference is assembled and is imaged onto on planar array detector 16 and interferes by imaging lens 15;
Planar array detector 16 receives and gathers the target image being superimposed with interference fringe.
Further, the imaging beam after collimation is divided into two light beams and produces optical path difference by described integrated dry interferometer, specifically comprises:
Incident beam 211 enters in the entity beam splitter 201 of integrated dry interferometer 14, and the beam splitting coating 204 in entity beam splitter 201 punishes into the first incident beam 212 and the second incident beam 213;
Described first incident beam 212, through beam splitting coating 204, is reflected at horizontal glass 205 place of the offside outer setting of entity beam splitter 201 incident light, and the light beam be reflected back becomes the first outgoing beam 214 again after beam splitting coating 204 reflects;
Described second incident beam 213, in the reflection of beam splitting coating 204 place, reflected at index glass 206 place being arranged on entity beam splitter 201 headroom place, the light beam be reflected back becomes the second outgoing beam 215 through beam splitting coating 204;
The two light beams of the amplitudes such as the first outgoing beam 214 and the second outgoing beam 215 formation, and produce optical path difference.
Further, the method also comprises, and described integrated dry interferometer 14 and described planar array detector 16 by computing machine 17 synchro control, and carry out the spectrum picture of the target of process acquisition in real time to the target image gathered.
Further, the bottom of described index glass driver 207 is connected with described index glass 206, index glass is driven to carry out straight line uniform motion, the displacement of index glass driver is controlled by computing machine 17, and according to the displacement measurement signal of the displacement transducer 208 be arranged on index glass driver 207, FEEDBACK CONTROL is carried out to index glass driver, realize the closed-loop control of index glass motion.
Further, described index glass driver 208 adopts voice coil motor linear motion driver, realizes high-speed straight-line motion;
Institute's displacement sensors 208 adopts capacitance displacement sensor, in real time the displacement of monitoring index glass.Ensure to ensure stability, repeatability and the linearity that index glass moves the accurate recording of interferogram optical path difference, improve spectrum recovering precision by the closed-loop control of computing machine 17.
Preferably, displacement transducer 208 can adopt sub-nano-precision capacitance displacement sensor.
The apochromatic leanse of the optional near infrared spectral coverage of preposition imaging lens 12, collimating mirror 13 is identical with imaging lens 15 focal length, the relay imaging system of composition one x magnification.Planar array detector 16 adopts the InGaAs high speed near infrared detector that pixel number is 320 × 256, Pixel size is 30 μm × 30 μm, can realize interfering image acquisition at a high speed.
Compared with prior art, the beneficial effects of the utility model adopt voice coil motor linear motion driver, and adopt displacement closed-loop control, the mutual restriction of breakthrough time modulation type near infrared Fourier transform spectral imager precision and speed, precision and speed improve all greatly, and interferometer volume reduces greatly, and practicality is stronger.

Claims (8)

1. a near infrared Fourier transform spectral imager, is characterized in that, comprises the preposition imaging lens, collimating mirror, integrated dry interferometer, imaging lens and the planar array detector that are linked in sequence;
Described preposition imaging lens, for carrying out Polaroid to target;
Described collimating mirror, is placed in the rear portion of described preposition imaging lens, for receiving Polaroid light beam and by the beam collimation after Polaroid;
Described integrated dry interferometer, is placed in the rear portion of described collimating mirror, for receiving the imaging beam after collimation, and the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens, is placed in described integrated dry interferometer rear portion, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector, is placed in described imaging lens rear portion, for gathering the target image being superimposed with interference fringe.
2. a kind of near infrared Fourier transform spectral imager as claimed in claim 1, is characterized in that, described integrated dry interferometer comprises entity beam splitter, horizontal glass, index glass, index glass driver and displacement transducer;
Described entity beam splitter inside is provided with beam splitting coating, and is provided with horizontal glass at the offside of its incident light, and top is provided with index glass, and index glass space is reserved at top, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference;
The bottom of described index glass driver is connected with described index glass, carries out straight line uniform motion for driving index glass;
Institute's displacement sensors is connected with the side of described index glass, for monitoring in real time the displacement of index glass, realizes the closed-loop control of index glass motion.
3. a kind of near infrared Fourier transform spectral imager as claimed in claim 2, is characterized in that, described entity beam splitter is made up of the first beam splitter and the second beam splitter;
The triangular prism of described first beam splitter to be profile be isosceles right triangle, described second beam splitter is the at right angles trapezoidal quadrangular of profile, described beam splitting coating is arranged on the inclined-plane of described first beam splitter, the inclined-plane of described first beam splitter docks with the inclined-plane of described second beam splitter, and the bottom width of described second beam splitter and height, be all greater than the height of described first beam splitter.
4. a kind of near infrared Fourier transform spectral imager as claimed in claim 2 or claim 3, is characterized in that, described beam splitting coating is the beam splitting coating of half-reflection and half-transmission, for the incident beam by entering entity beam splitter, is divided into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at horizontal glass place, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at index glass place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating.
5. a kind of near infrared Fourier transform spectral imager as claimed in claim 2, it is characterized in that, described index glass driver adopts the voice coil motor that can realize high-speed straight-line motion, and institute's displacement sensors adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
6. a kind of near infrared Fourier transform spectral imager as claimed in claim 1, is characterized in that, preposition imaging lens is the apochromatic leanse of near infrared spectral coverage.
7. a kind of near infrared Fourier transform spectral imager as claimed in claim 1, it is characterized in that, collimating mirror is identical with imaging lens focal length.
8. a kind of near infrared Fourier transform spectral imager as claimed in claim 1, is characterized in that, planar array detector adopts the InGaAs high speed near infrared detector that pixel number is 320 × 256, Pixel size is 30 μm × 30 μm.
CN201520435786.XU 2015-06-23 2015-06-23 Near -infrared fourier transform spectral imaging appearance Active CN204788666U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520435786.XU CN204788666U (en) 2015-06-23 2015-06-23 Near -infrared fourier transform spectral imaging appearance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520435786.XU CN204788666U (en) 2015-06-23 2015-06-23 Near -infrared fourier transform spectral imaging appearance

Publications (1)

Publication Number Publication Date
CN204788666U true CN204788666U (en) 2015-11-18

Family

ID=54528688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520435786.XU Active CN204788666U (en) 2015-06-23 2015-06-23 Near -infrared fourier transform spectral imaging appearance

Country Status (1)

Country Link
CN (1) CN204788666U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105004425A (en) * 2015-06-23 2015-10-28 青岛市光电工程技术研究院 Near-infrared Fourier transform spectral imager
CN106768334A (en) * 2017-01-19 2017-05-31 深圳大学 A kind of Portable two-dimensional is imaged micro spectrometer
CN115389445A (en) * 2022-10-27 2022-11-25 杭州泽天春来科技有限公司 Control method and system of Fourier infrared interferometer and readable storage medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105004425A (en) * 2015-06-23 2015-10-28 青岛市光电工程技术研究院 Near-infrared Fourier transform spectral imager
CN106768334A (en) * 2017-01-19 2017-05-31 深圳大学 A kind of Portable two-dimensional is imaged micro spectrometer
CN115389445A (en) * 2022-10-27 2022-11-25 杭州泽天春来科技有限公司 Control method and system of Fourier infrared interferometer and readable storage medium

Similar Documents

Publication Publication Date Title
US20230145537A1 (en) Optical system for collecting distance information within a field
CN108827172B (en) Non-contact laser thickness measuring device and method based on solid zoom lens
CN103076090B (en) Laser interferometer optical path difference location method and system
CN101915542B (en) Biaxial MEMS reflective galvanometer and F-Theta lens-based linear scanning system used for laser heterodyne interferometer
CN103226238B (en) Confocal transverse scanning method based on reflection type liquid crystal spatial light modulator
CN103196361B (en) The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology and measuring method
CN204788666U (en) Near -infrared fourier transform spectral imaging appearance
CN103162616B (en) For microsphere surface morphology detect instantaneous phase-shifting interference measuring instrument and adopt this measuring instrument to realize the measuring method of microsphere surface morphology
CN105333815B (en) A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire
CN103822718A (en) Scanning interferometer device for measuring imaging Fourier transform spectrum
CN101532880B (en) Double movable mirror interferometer
CN104568152B (en) Fourier transform imaging spectrometer adopting lateral shear interference scanning
CN103344198A (en) Octave type phase-shifting diffraction interferometer and measurement method used for detecting micro spherical surface profile
CN206905904U (en) A kind of relevant dispersion spectrum imaging device of high flux high stable
CN105606338B (en) A kind of centre wavelength error compensating method based on white light interference test system
CN105004425A (en) Near-infrared Fourier transform spectral imager
CN101750146A (en) Adjustable frequency domain optical coherence chromatography imaging method and system thereof
CN107421448A (en) A kind of micro-displacement measuring device and measuring method
CN114089373B (en) Radar system scanning method and device based on image fusion laser
CN106323197B (en) The big working distance autocollimation of portable array zeroing high-precision laser and method
CN106017362B (en) A kind of big working distance autocollimation of portable high dynamic precision and method
CN108151881A (en) Without guide rail fast and stable FTIR spectrum detection device and detection method
CN101782431A (en) High-resolution reflection type high-speed rotating mirror interference spectrometer
CN207741854U (en) Without guide rail fast and stable FTIR spectrum detection device
CN104807545B (en) The high-precision spectral measurement device of spatio-temporal synergy and method

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20221011

Address after: 266000 room 205, building 1, 61 Guangsheng Road, high tech Zone, Qingdao, Shandong Province

Patentee after: Qingdao Zhongke Zhifu Photoelectric Technology Co.,Ltd.

Address before: 266109 No. 61, Guangsheng Road, national high tech Industrial Development Zone, Qingdao, Shandong

Patentee before: QINGDAO ACADEMY FOR OPTO-ELECTRONICS ENGINEERING