CN110595615B - High-spectral imaging device based on piezoelectric ceramic driving type multi-optical-path Fourier transform - Google Patents
High-spectral imaging device based on piezoelectric ceramic driving type multi-optical-path Fourier transform Download PDFInfo
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Abstract
The invention belongs to the technical field of hyperspectral imaging of overspeed detection, particularly relates to a hyperspectral imaging device based on piezoelectric ceramic driving type multi-optical-path Fourier transform, and aims to solve the problem that the existing imaging device is low in measurement speed. The device is characterized in that a light beam collimated by the device enters a second beam splitter after passing through a first reflecting mirror, a transmitted light beam of the second beam splitter enters a corresponding optical path adjusting unit after being reflected by a second full reflecting mirror, a reflected light beam enters a corresponding optical path adjusting unit after being reflected by a third full reflecting mirror, the light beam is emitted in the direction opposite to an incident light path after passing through the two optical path adjusting units, and the light beam is emitted as an interference light beam after passing through a secondary reflection light path of the second reflecting mirror and the third reflecting mirror. The optical path adjusting unit comprises a plane reflector and at least two hollow reflectors, wherein a high-frequency driver is arranged on the back surface of one reflector, and the first reflector generates high-frequency reciprocating motion through the piezoelectric ceramic high-frequency driver, so that the aim of quickly collecting can be fulfilled.
Description
Technical Field
The invention belongs to the technical field of hyperspectral imaging of overspeed detection, and particularly relates to a hyperspectral imaging device based on piezoelectric ceramic driving type multi-optical-path Fourier transform.
Background
Imaging spectroscopic detection techniques have evolved at a high rate over twenty years, and have formed a very distinctive modern discipline. With the continuous improvement of the cognition ability of people on things in nature, the detection precision of the spatial resolution and the spectral resolution of the remote sensing detection technology is also higher and higher, and under the promotion of science and technology, the various resolution capabilities of the detector are also gradually improved. The imaging spectrum technology integrates the advantages of the spectrum technology and the imaging technology, can be used for analyzing the image and the spectrum information of a target object, and the image information and the spectrum information form a three-dimensional data cube of the target object.
The existing imaging spectrometers are rapid in development, wide in application and multiple in variety, and each imaging spectrometer has own advantages and disadvantages. The Fourier transform hyperspectral imager uses a Michelson interferometer to obtain an interferogram without using a prism or a grating light splitting, and the Fourier transform is adopted to transform the interferogram with time as a variable into a spectrogram with frequency as a variable. A fourier transform infrared spectrometer is a hybrid of complex optical, electronic, mechanical structures and software programs. The task of collecting an interference pattern can be completed through the matching of all functional units, and then a spectrogram is obtained through Fourier transform. The hardware system of the Fourier transform infrared spectrometer mainly comprises an optical part, a movable mirror motion control part, a fixed mirror dynamic correction part, a data acquisition part and the like. The movable mirror and the static mirror in the system are polished high-reflectivity plane reflectors, reflected, transmitted or radiated light from a measured target is collimated by a front-end optical system and then divided into two beams of parallel light with the same intensity by a pair of beam splitters with uniform thickness and materials, one beam of the parallel light is reflected light, the other beam of the parallel light is transmitted light, and the reflected light is reflected by the static mirror reflected light passive mirror and the transmitted light passive mirror and then is focused on a detector. Since the optical path differences of the reflected light and the transmitted light are different, the relevant interferometric measurement can be implemented by changing the displacement of the movable mirror, that is, the maximum optical path difference is realized by the maximum movable mirror displacement.
In practical applications, the time modulation type interference imaging spectrometer has two disadvantages: firstly, the movable mirror is required to be uniform in speed and strict in requirements on inclination and shaking, and secondly, the movable mirror needs to move for a period when the interferogram is sampled, so that the movable mirror is not suitable for rapid change spectral measurement and is only suitable for measuring spectral information of a target object which changes slowly along with time.
The human sensory perception is greatly limited by certain high speed movements of objects, rapid deformation, lack of luminescence, and other disturbances. Many scientific instruments expand the human perception ability and observe many phenomena that cannot be sensed by the human sense instinct. The visual discrimination ability of the naked human eye is one tenth of a second, and the time discrimination rate can be improved by one million times or even higher by applying a high-speed photographic instrument, so that a series of space-time information can be provided. Therefore, the motion rule of the high-speed process can be displayed to people, and further, a plurality of important scientific and technical tasks can be studied in detail. In order to observe the flow image and the change process thereof at each moment of the high-speed motion flow field, rapid detection is an essential means. In a moving mirror scanning type interference spectrum imager, a set of linear moving mirror system with high precision requirement is generally needed, the stability is poor, the process is complex, a plurality of difficulties are brought to the development, and most importantly, the measurement speed is very low. In general, the detector receives the optical interference signal to form an interference pattern, and then the system software performs apodization, phase calculation, zero padding, fourier transform and phase correction on the interference pattern to obtain a spectrogram. In some cases, in order to remove noise and increase the signal-to-noise ratio, the interferograms obtained by scanning are also averaged in the process of generating the interferograms. The fast scanning technology is to edit the program during measurement, so that a great amount of interferograms are generated and stored in one time during FTIR measurement, and finally the interferograms are subjected to digital truncation, phase calculation, zero padding, fourier transformation and phase correction uniformly. Therefore, the rapid scanning technology has advantages for more efficient learning of the information of the object to be measured for some rapid reactions or some unstable reactions, such as combustion flame emission, chimney emission, leakage and the like. For example, when the solid propellant burns, the flame contains rich infrared characteristic spectrum information, the type of the formula of the solid propellant can be identified through research, whether the medicament meets working requirements or not can be judged, the working state of a part loaded with the medicament is judged to be beneficial to understanding the detailed physicochemical process of combustion, and the rocket can be detected, identified and early warned through the research on a rocket smoke plume signal.
Disclosure of Invention
The invention aims to overcome the defect of low measurement speed of the existing time modulation type interference imaging spectrometer, provides a hyperspectral imaging device based on piezoelectric ceramic drive type multi-optical path Fourier transform,
in order to achieve the above purpose, the specific technical solution of the present invention is: a high spectral imaging device based on piezoelectric ceramic driving type multi-optical-path Fourier transform is characterized in that: comprises a preposed collimation system arranged on the light path of a measured target, a first reflector is arranged on the light path of the collimated light, the collimated light path enters a second beam splitter after passing through the first reflector, the second beam splitter divides the incident light into a reflection light path and a transmission light path,
a third reflector is arranged on a reflection light path of the second beam splitter, a second reflector is arranged on a transmission light path of the second beam splitter, a first optical path adjusting unit is arranged on a reflection light path of the third reflector, a second optical path adjusting unit is arranged on a reflection light path of the second reflector,
the transmission light beam is reflected by the second reflector, enters the second optical path adjusting unit, then is emitted in the direction opposite to the transmission optical path, is reflected again by the second reflector, enters the second beam splitter, and enters the rear imaging lens group after being reflected by the second beam splitter; the reflected light beam is reflected by the third reflector, enters the first optical path adjusting unit, then is emitted in the direction opposite to the reflected light path, is reflected by the third reflector again, enters the second beam splitter, is transmitted to the rear imaging lens group through the second beam splitter, and then interferes with the transmitted light beam reflected to the rear imaging lens group on the detector; the interference signal is transmitted to a computer connected with the detector;
the first optical path adjusting unit and the second optical path adjusting unit respectively comprise a plane reflector and at least two hollow reflectors, wherein one hollow reflector is provided with a high-frequency driver for enabling the hollow reflector to generate high-frequency reciprocating motion, the high-frequency driver is connected with a controller for controlling the vibration frequency and the vibration amplitude of the high-frequency driver, and the controller is connected with a computer; the vibration amplitude and the vibration frequency of the high-frequency driver of the first optical path adjusting unit and the high-frequency driver of the second optical path adjusting unit are equal.
Further, the phase difference of the driving voltages of the high-frequency driver of the first optical path adjusting unit and the high-frequency driver of the second optical path adjusting unit is 180 °.
Furthermore, the first optical path adjusting unit comprises a first hollow reflector, a second hollow reflector, a third hollow reflector and a fourth reflector, the reflected light beam enters the first optical path adjusting unit and is reflected by the first hollow reflector, the second hollow reflector, the third hollow reflector and the fourth reflector in sequence and then is emitted out along the direction opposite to the incident optical path, the first hollow reflector is rigidly connected with a first high-frequency driver, the first high-frequency driver is electrically connected with a first controller,
the second optical path adjusting unit comprises a fourth hollow reflector, a fifth hollow reflector, a sixth hollow reflector and a fifth reflector, the transmitted light beam enters the second optical path adjusting unit, is reflected by the fourth hollow reflector, the fifth hollow reflector, the sixth hollow reflector and the fifth reflector in sequence and then is emitted out along the direction opposite to the incident light path, the fourth hollow reflector is rigidly connected with a second high-frequency driver, and the second high-frequency driver is electrically connected with a second controller.
Further, the first high-frequency driver and the second high-frequency driver are both piezoelectric ceramic high-frequency drivers, and the first controller and the second controller are both piezoelectric ceramic controllers.
Furthermore, a first beam splitter is arranged on a collimating light path between the front collimating system and the first reflector, the collimating light path passing through the first beam splitter is divided into two paths, one path of the collimating light path enters the first reflector, and the other path of the collimating light path enters the calibrating device.
Compared with the prior art, the invention has the advantages that:
1. the imaging device firstly adopts a front-end collimation system to collimate reflected light, radiation or transmitted light from a measured target, collimated light beams are incident on a second beam splitter after passing through a first reflector, the second beam splitter divides the incident light into reflected light and transmitted light, the reflected light is reflected into a first multi-optical path unit by the second reflector, and the reflected light is emitted along an original optical path after being reflected for multiple times; the transmitted light is reflected into the second multi-optical path unit by the third reflector and is emitted along the original optical path after being reflected for multiple times; the two beams of light pass through the beam splitter and interfere with each other, and the interference light is received by the detector through the rear imaging lens group.
The first optical path adjusting unit and the second optical path adjusting unit are composed of a plane reflector and three hollow reflectors, namely a first hollow reflector, a second hollow reflector, a third hollow reflector and a fourth reflector, light beams entering the optical path adjusting unit are reflected by the first hollow reflector, the second hollow reflector, the third hollow reflector and the fourth reflector in sequence and then are emitted out in the direction opposite to an incident light path, a piezoelectric ceramic high-frequency driver is arranged on the back of the first reflector, and the piezoelectric ceramic high-frequency driver enables the first reflector to generate high-frequency reciprocating motion, so that the purpose of rapid collection can be achieved.
2. The third reflectors of the two optical path units are respectively provided with a piezoelectric ceramic high-frequency driver, the two piezoelectric ceramic high-frequency drivers are controlled by a computer, so that the amplitude and the frequency of the driving voltage of the two piezoelectric ceramic high-frequency drivers are equal, but the phase difference of the driving voltage is 180 degrees, the third reflectors of the two optical path adjusting units are positively and negatively displaced at the same moment, and when the displacement respectively reaches the positive maximum value and the negative maximum value, the system has the maximum optical path difference, so that the aim of improving the spectral resolution is fulfilled.
Drawings
FIG. 1 is a schematic structural diagram of a piezoelectric ceramic drive type multi-optical path Fourier transform based hyperspectral imaging device according to the invention;
fig. 2 is a schematic structural view of a first optical path adjusting unit of the present invention;
fig. 3 is a schematic structural view of a second optical path adjusting unit of the present invention.
In the figure: 1-a pre-collimation system, 2-a first mirror, 3-a first beam splitter, 4-a calibration device, 5-a second beam splitter, 6-a third mirror, 7-a second mirror, 8-a first optical path adjusting unit, 801-a first hollow mirror, 802-a second hollow mirror, 803-a third hollow mirror, 804-a fourth mirror, 9-a second optical path adjusting unit, 901-a fourth hollow mirror, 902-a fifth hollow mirror, 903-a sixth hollow mirror, 904-a fifth mirror, 10-a rear imaging lens group, 11-a detector, 12-a computer, 13-a first piezoceramic high-frequency driver, 14-a second piezoceramic high-frequency driver, 15-a first piezoceramic controller, 16-a second piezo ceramic controller.
Detailed Description
The invention is described in detail below with reference to the following figures and specific examples:
in order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used for illustrating the present invention and are not intended to limit the scope of the present invention.
The invention uses a method of folding a light path to increase the effective optical path difference, and uses a movable hollow reflector, two stationary hollow reflector sets and a plane reflector to replace the plane reflector in the traditional Michelson interferometer. Because the hollow reflector has a folding function on the light path, the moving distance of the hollow reflector is shorter than the scanning distance of the portable infrared spectrometer under the same resolution. For example, the displacement amount of the hollow mirror pushed by the piezoceramic high-frequency driver in the invention is x, each optical path adjusting unit generates an optical path of 12x, and the system generates an optical path of 24 x. In practical applications, the number of hollow mirrors can be increased or decreased to change the optical path length of the system.
The hyperspectral imaging device based on the piezoceramic driving type multi-optical path Fourier transform comprises a front collimation system 1 arranged on a light path of a measured target, wherein a first reflector 2 is arranged on the light path of collimated light, a first beam splitter 3 is arranged on the collimated light path between the front collimation system 1 and the first reflector 2, the collimated light path passing through the first beam splitter 3 is divided into two paths, one path of collimated light path enters a calibration device 4, the other path of collimated light path enters a second beam splitter 5 after entering the first reflector 2, and the incident light path is divided into a reflection light path and a transmission light path by the second beam splitter 5;
a third reflector 6 is arranged on a reflection light path of the second beam splitter 5, a second reflector 7 is arranged on a transmission light path of the second beam splitter 5, a first light path adjusting unit 8 is arranged on the reflection light path of the third reflector 6, a second light path adjusting unit 9 is arranged on a reflection light path of the second reflector 7, a transmission light beam of the second beam splitter 5 enters the second light path adjusting unit 9 after being reflected by the second total reflector 7, and a reflection light beam of the second beam splitter 5 enters the first light path adjusting unit 8 after being reflected by the third total reflector 6;
the first optical path adjusting unit 8 comprises a first hollow reflector 801, a second hollow reflector 802, a third hollow reflector 803 and a fourth reflector 804, the reflected light beam enters the first optical path adjusting unit 8, is reflected by the first hollow reflector 801, the second hollow reflector 802, the third hollow reflector 803 and the fourth reflector 804 in sequence and then is emitted in the direction opposite to the incident light path, is reflected again by the second reflector 7 and enters the second beam splitter 5, and is reflected by the second beam splitter 5 and enters the rear imaging lens group 10;
the second optical path adjusting unit 9 includes a fourth hollow mirror 901, a fifth hollow mirror 902, a sixth hollow mirror 903 and a fifth mirror 904, the transmitted light beam enters the second optical path adjusting unit 9, is reflected by the fourth hollow mirror 901, the fifth hollow mirror 902, the sixth hollow mirror 903 and the fifth mirror 904 in sequence and then is emitted in a direction opposite to the incident light path, is reflected again by the third mirror 6 and enters the second beam splitter 5, is transmitted to the rear imaging lens group 10 through the second beam splitter 5, interferes with the transmitted light beam reflected to the rear imaging lens group 10 on the detector 11, and the interference signal is transmitted to the computer 12 connected to the detector 11;
the back of the first hollow reflector 801 is glued with a first piezoelectric ceramic high-frequency driver 13, the back of the fourth hollow reflector 901 is glued with a second piezoelectric ceramic high-frequency driver 14, the two piezoelectric ceramic high-frequency drivers are respectively connected with a controller for controlling the vibration frequency and the vibration amplitude of the high-frequency drivers, namely a first piezoelectric ceramic controller 15 and a second piezoelectric ceramic controller 16, and the two piezoelectric ceramic controllers are respectively connected with a computer 12. The computer 12 controls the two piezoelectric ceramic high-frequency drivers to ensure that the amplitude and the frequency of the driving voltage of the two piezoelectric ceramic high-frequency devices are equal, but the phase difference of the driving voltage is 180 degrees, the first hollow reflector 801 and the fourth hollow reflector 901 are positively and negatively displaced at the same moment, when the displacement respectively reaches the positive maximum value and the negative maximum value, the system has the maximum optical path difference, and the spectral resolution can be improved while the purpose of quick acquisition is achieved.
It should be noted that the above-mentioned only shows the preferred embodiments of the present invention, and that several variations and modifications can be made by those skilled in the art without departing from the inventive concept of the present invention.
Claims (4)
1. The utility model provides a high spectral imaging device based on driven many optical paths Fourier transform of piezoceramics which characterized in that: comprises a preposed collimation system (1) arranged on a light path of a measured target, a first reflector (2) is arranged on the light path of the collimation light, the collimation light enters a second beam splitter (5) after passing through the first reflector (2), the second beam splitter (5) divides incident light into a reflection light path and a transmission light path,
a third reflector (6) is arranged on a reflection light path of the second beam splitter (5), a second reflector (7) is arranged on a transmission light path of the second beam splitter (5), a first optical path adjusting unit (8) is arranged on a reflection light path of the third reflector (6), a second optical path adjusting unit (9) is arranged on a reflection light path of the second reflector (7),
the transmitted light beam is reflected by the second reflecting mirror (7), enters the second optical path adjusting unit (9), then is emitted along the direction opposite to the transmitted optical path, is reflected again by the second reflecting mirror (7), enters the second beam splitter (5), and is reflected by the second beam splitter (5) to enter the rear imaging lens group (10); the reflected light beam is reflected by the third reflector (6), enters the first optical path adjusting unit (8), then is emitted in the direction opposite to the reflected light path, is reflected again by the third reflector (6), enters the second beam splitter (5), is transmitted to the rear imaging lens group (10) through the second beam splitter (5), and interferes with the transmitted light beam reflected to the rear imaging lens group (10) on the detector (11); the interference signal is transmitted to a computer (12) connected with the detector (11);
the first optical path adjusting unit (8) and the second optical path adjusting unit (9) respectively comprise a plane reflector and at least two hollow reflectors, wherein one hollow reflector is provided with a high-frequency driver used for enabling the hollow reflector to generate high-frequency reciprocating motion, the high-frequency driver is connected with a controller used for controlling the vibration frequency and the vibration amplitude of the high-frequency driver, and the controller is connected with a computer (12); the vibration amplitude and the vibration frequency of the high-frequency driver of the first optical path adjusting unit (8) and the high-frequency driver of the second optical path adjusting unit (9) are equal; the phase difference between the driving voltages of the high-frequency driver of the first optical path adjusting unit (8) and the high-frequency driver of the second optical path adjusting unit (9) is 180 degrees.
2. The device according to claim 1, wherein the device comprises: the first optical path adjusting unit (8) comprises a first hollow reflector (801), a second hollow reflector (802), a third hollow reflector (803) and a fourth reflector (804), a reflected light beam enters the first optical path adjusting unit (8) and is sequentially reflected by the first hollow reflector (801), the second hollow reflector (802), the third hollow reflector (803) and the fourth reflector (804) and then is emitted out along the direction opposite to the incident optical path, a first high-frequency driver is rigidly connected to the first hollow reflector (801), and the first high-frequency driver is electrically connected to a first controller,
the second optical path adjusting unit (9) comprises a fourth hollow reflector (901), a fifth hollow reflector (902), a sixth hollow reflector (903) and a fifth reflector (904), the transmitted light beam enters the second optical path adjusting unit (9) and is emitted out along the direction opposite to the incident light path after being reflected by the fourth hollow reflector (901), the fifth hollow reflector (902), the sixth hollow reflector (903) and the fifth reflector (904) in sequence, a second high-frequency driver is rigidly connected to the fourth hollow reflector (901), and the second high-frequency driver is electrically connected to a second controller.
3. The device according to claim 2, wherein the device comprises: the first high-frequency driver and the second high-frequency driver are both piezoelectric ceramic high-frequency drivers, and the first controller and the second controller are both piezoelectric ceramic controllers.
4. The device according to claim 3, wherein the device comprises: the collimating light path between the front collimating system (1) and the first reflector (2) is provided with a first beam splitter (3), the collimating light path passing through the first beam splitter (3) is divided into two paths, one path of light is incident to the first reflector (2), and the other path of light is incident to the calibrating device (4).
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| PL2634551T3 (en) * | 2010-10-28 | 2021-11-02 | Foss Analytical A/S | Interferometer and fourier-transform spectroscopic analyzer |
| CN102486408B (en) * | 2010-12-06 | 2014-08-06 | 中国科学院西安光学精密机械研究所 | Light splitting method for multi-light-path interferometer, and multi-light-path interferometer adopting light splitting method |
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| CN202329812U (en) * | 2011-12-09 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Multiple-optical path interferometer with variable optical path number |
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