CN105004425A - Near-infrared Fourier transform spectral imager - Google Patents
Near-infrared Fourier transform spectral imager Download PDFInfo
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- CN105004425A CN105004425A CN201510349286.9A CN201510349286A CN105004425A CN 105004425 A CN105004425 A CN 105004425A CN 201510349286 A CN201510349286 A CN 201510349286A CN 105004425 A CN105004425 A CN 105004425A
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Abstract
The invention provides a near-infrared Fourier transform spectral imager, which comprises a preposing imaging lens, a collimating lens, an integrated interferometer, an imaging lens and a plane array detector, wherein the preposing imaging lens is used for one-time imaging of a target; the collimating lens is used for collimating one-time imaging light beams; the integrated interferometer is used for splitting the collimated imaging light beams into two light beams and generating an optical path difference; the imaging lens is used for converging and imaging the two light beams with the optical path difference onto the plane array detector and generating interference; and the plane array detector is used for acquiring a target image superposed with interference fringes. The near-infrared Fourier transform spectral imager has the beneficial effects that a driver is adopted for linear driving, a displacement closed-loop control is adopted, the mutual constraint of precision and speed of a time modulation type near-infrared Fourier transform spectral imager is broken through, the precision and speed are greatly increased, the size of the interferometer is greatly reduced, and the practicability is higher. The invention further discloses a near-infrared Fourier transform spectral imaging method.
Description
Technical field
The present invention relates to spectral imaging technology field, particularly relate to a kind of near infrared Fourier transform spectral imager.
Background technology
Near infrared spectrum contains abundant material information, not only comprises chemical composition information, also includes physical characteristics, biological nature etc., is the reflection of the many-sided integrated information of material.
Near infrared spectrum imager can obtain the two dimensional image of target and the complete near infrared spectrum of target every bit simultaneously, has application widely in biological medicine, agricultural product and the field such as food, forensic science.Near infrared spectrum imager mainly contains color dispersion-type, optical filtering flap-type and near infrared Fourier transform type etc., near infrared Fourier transform spectral imager compares to traditional color dispersion-type optical spectrum imagers and optical filtering flap-type optical spectrum imagers, there is the advantage of high flux, hyperchannel, high precision and wide Free Spectral Range, there is important using value.Conventional near infrared Fourier transform spectral imager adopts classical Michelson interferometer to realize, namely time-modulation type Fourier transform spectral imager.
Inventor finds in the process of research, in actual applications, there is major defect in time-modulation type Fourier transform spectral imager, a set of high-precision mechanical index glass drive system is needed to drive, machinery index glass requires uniform motion, strict to the area requirement tilting, rock, also need a set of laser instrument to carry out the accurate measurement of displacement.The problems referred to above cause precision and speed mutually to restrict, therefore are not suitable for fast spectrum imaging.Because interferometer volume is large, also have impact on practicality.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the invention provides a kind of near infrared Fourier transform spectral imager, having avoided precision optical machinery index glass drive system, avoid the situation that precision and speed restrict mutually.
Technical scheme of the present invention is:
A kind of near infrared Fourier transform spectral imager, comprises the preposition imaging lens, collimating mirror, integrated dry interferometer, imaging lens and the planar array detector that are linked in sequence;
Described preposition imaging lens, for carrying out Polaroid to target;
Described collimating mirror, is placed in the rear portion of described preposition imaging lens, for receiving Polaroid light beam and by the beam collimation after Polaroid;
Described integrated dry interferometer, is placed in the rear portion of described collimating mirror, for receiving the imaging beam after collimation, and the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens, is placed in described integrated dry interferometer rear portion, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector, is placed in described imaging lens rear portion, for gathering the target image being superimposed with interference fringe.
Further, described integrated dry interferometer comprises entity beam splitter, horizontal glass, index glass, index glass driver and displacement transducer;
Described entity beam splitter inside is provided with beam splitting coating, and is provided with horizontal glass at the offside of its incident light, and top is provided with index glass, and index glass space is reserved at top, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference;
The bottom of described index glass driver is connected with described index glass, carries out straight line uniform motion for driving index glass;
Institute's displacement sensors is connected with the side of described index glass, for monitoring in real time the displacement of index glass, realizes the closed-loop control of index glass motion.
Further, described entity beam splitter is made up of the first beam splitter and the second beam splitter;
The triangular prism of described first beam splitter to be profile be isosceles right triangle, described second beam splitter is the at right angles trapezoidal quadrangular of profile, described beam splitting coating is arranged on the inclined-plane of described first beam splitter, the inclined-plane of described first beam splitter docks with the inclined-plane of described second beam splitter, and the bottom width of described second beam splitter and height, be all greater than the height of described first beam splitter.
Further, described beam splitting coating is the beam splitting coating of half-reflection and half-transmission, for the incident beam by entering entity beam splitter, is divided into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at horizontal glass place, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at index glass place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating.
Further, described index glass driver adopts the voice coil motor that can realize high-speed straight-line motion, and institute's displacement sensors adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
The invention also discloses a kind of near infrared Fourier trasform spectroscopy formation method, the method comprises the following steps:
Preposition imaging lens is Polaroid to target;
Collimating mirror is by described Polaroid beam collimation;
Imaging beam after collimation is divided into two light beams and produces optical path difference by integrated dry interferometer;
Two-beam with optical path difference is assembled and is imaged onto on planar array detector and interferes by imaging lens;
Planar array detector receives and gathers the target image being superimposed with interference fringe.
Further, the imaging beam after collimation is divided into two light beams and produces optical path difference by described integrated dry interferometer, specifically comprises:
Incident beam enters in the entity beam splitter of integrated dry interferometer, and the beam splitting coating in entity beam splitter punishes into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at the horizontal glass place of the offside outer setting of entity beam splitter incident light, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at the index glass place being arranged on entity beam splitter headroom place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating;
The two light beams of the amplitudes such as the first outgoing beam and the second outgoing beam formation, and produce optical path difference.
Further, the method also comprises, and described integrated dry interferometer and described planar array detector by computer synchronous control, and carry out the spectrum picture of the target of process acquisition in real time to the target image gathered.
Further, the bottom of described index glass driver is connected with described index glass, index glass is driven to carry out straight line uniform motion, the displacement of index glass driver is controlled by computing machine, and according to the displacement measurement signal of the displacement transducer be arranged on index glass driver, FEEDBACK CONTROL is carried out to index glass driver, realize the closed-loop control of index glass motion.
Further, described index glass driver adopts voice coil motor linear motion driver, realizes high-speed straight-line motion;
Institute's displacement sensors adopts capacitance displacement sensor, in real time the displacement of monitoring index glass.
Compared with prior art, the invention has the beneficial effects as follows and adopt voice coil motor linear motion driver, and adopt displacement closed-loop control, the mutual restriction of breakthrough time modulation type near infrared Fourier transform spectral imager precision and speed, precision and speed improve all greatly, and interferometer volume reduces greatly, and practicality is stronger.
Accompanying drawing explanation
Fig. 1 is near infrared Fourier transform spectral imager theory diagram.
In figure: target 11, preposition imaging lens 12, collimating mirror 13, integrated dry interferometer 14, imaging lens 15, planar array detector 16, computing machine 17.
Fig. 2 is integral type interferometer schematic diagram.
In figure: entity beam splitter 201, first beam splitter 202, second beam splitter 203, beam splitting coating 204, horizontal glass 205, index glass 206, index glass driver 207, displacement transducer 208, index glass direction of motion 210, incident beam 211, first incident beam 212, second incident beam 213, first outgoing beam 214, second outgoing beam 215.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is specifically addressed; it is to be noted; technical scheme of the present invention is not limited to the embodiment described in embodiment; the content of those skilled in the art's reference and reference technical solution of the present invention; the improvement that basis of the present invention is carried out and design, should belong to protection scope of the present invention.
As shown in Figure 1,
The embodiment of the present invention provides this kind of near infrared Fourier transform spectral imager, comprises the preposition imaging lens 12, collimating mirror 13, integrated dry interferometer 14, imaging lens 15 and the planar array detector 16 that are linked in sequence;
Described preposition imaging lens 12, for Polaroid to target 11;
Described collimating mirror 13 is connected with described preposition imaging lens 12, for by described Polaroid beam collimation;
Described integrated dry interferometer 14 is connected with described collimating mirror 13, for the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens 15 is connected with described integrated dry interferometer 14, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector 16 is connected with described imaging lens 15, for gathering the target image being superimposed with interference fringe.
Further, described integrated dry interferometer 14 comprises entity beam splitter 201, horizontal glass 205, index glass 206, index glass driver 207 and displacement transducer 208;
Described entity beam splitter 201 inside is provided with beam splitting coating 204, and is provided with horizontal glass 205 at the offside of its incident light, and top is provided with index glass 206, and index glass space is reserved at top,
Preferably, horizontal glass 205 is formed at the lateral surface plating reflectance coating of the incident light offside of beam splitter 201.
The bottom of described index glass driver 207 is connected with described index glass 206, for driving index glass 206 to carry out straight line uniform motion, realizes the closed-loop control that index glass 206 moves;
Institute's displacement sensors 208 is connected with the side of described index glass 206, for monitoring in real time the displacement of index glass 206;
Described integrated dry interferometer 14, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference.
Further, described entity beam splitter 201 is made up of same glass material first beam splitter 202 and the second beam splitter 203;
Described first beam splitter 202 for profile be the triangular prism of isosceles right triangle, described second beam splitter 203 is the at right angles trapezoidal quadrangular of profile, described beam splitting coating 204 is arranged on the inclined-plane of described first beam splitter 202, the inclined-plane of described first beam splitter 202 docks with the inclined-plane of described second beam splitter 203, and the sole length of described second beam splitter 203 and height, be all greater than the height of described first beam splitter 202.
Further, described beam splitting coating 204 is the beam splitting coating of half-reflection and half-transmission, for entering the incident beam 211 of entity beam splitter 201, is divided into the first incident beam 212 and the second incident beam 213 of equivalent;
Described first incident beam 212, through beam splitting coating 204, at horizontal glass 205, place is reflected, and the light beam be reflected back becomes the first outgoing beam 214 again after beam splitting coating 204 reflects;
Described second incident beam 213, in the reflection of beam splitting coating 204 place, at index glass 206, place is reflected, and the light beam be reflected back becomes the second outgoing beam 215 through beam splitting coating 204.
Further, described index glass driver 207 adopts the voice coil motor linear motion driver that can realize high-speed straight-line motion, and institute's displacement sensors 208 adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
The invention also discloses a kind of near infrared Fourier trasform spectroscopy formation method, the method comprises the following steps:
Preposition imaging lens 12 pairs of targets are Polaroid;
Collimating mirror 13 is by described Polaroid beam collimation;
Imaging beam after collimation is divided into two light beams and produces optical path difference by integrated dry interferometer 14;
Two-beam with optical path difference is assembled and is imaged onto on planar array detector 16 and interferes by imaging lens 15;
Planar array detector 16 receives and gathers the target image being superimposed with interference fringe.
Further, the imaging beam after collimation is divided into two light beams and produces optical path difference by described integrated dry interferometer, specifically comprises:
Incident beam 211 enters in the entity beam splitter 201 of integrated dry interferometer 14, and the beam splitting coating 204 in entity beam splitter 201 punishes into the first incident beam 212 and the second incident beam 213 of equivalent;
Described first incident beam 212, through beam splitting coating 204, is reflected at horizontal glass 205 place of the offside outer setting of entity beam splitter 201 incident light, and the light beam be reflected back becomes the first outgoing beam 214 again after beam splitting coating 204 reflects;
Described second incident beam 213, in the reflection of beam splitting coating 204 place, reflected at index glass 206 place being arranged on entity beam splitter 201 headroom place, the light beam be reflected back becomes the second outgoing beam 215 through beam splitting coating 204;
The two light beams of the amplitudes such as the first outgoing beam 214 and the second incident beam 215 formation, and produce optical path difference.
Further, the method also comprises, and described integrated dry interferometer 14 and described planar array detector 16 by computing machine 17 synchro control, and carry out the spectrum picture of the target of process acquisition in real time to the target image gathered.
Further, the bottom of described index glass driver 207 is connected with described index glass 206, index glass is driven to carry out straight line uniform motion, the displacement of index glass driver is controlled by computing machine 17, and according to the displacement measurement signal of the displacement transducer 208 be arranged on index glass driver 207, FEEDBACK CONTROL is carried out to index glass driver, realize the closed-loop control of index glass motion.
Further, described index glass driver 208 adopts voice coil motor linear motion driver, realizes high-speed straight-line motion;
Institute's displacement sensors 208 adopts capacitance displacement sensor, in real time the displacement of monitoring index glass.Ensure to ensure stability, repeatability and the linearity that index glass moves the accurate recording of interferogram optical path difference, improve spectrum recovering precision by the closed-loop control of computing machine 17.
Preferably, displacement transducer 208 can adopt sub-nano-precision capacitance displacement sensor.
The apochromatic leanse of the optional near infrared spectral coverage of preposition imaging lens 12, collimating mirror 13 is identical with imaging lens 15 focal length, the relay imaging system of composition one x magnification.Planar array detector 16 adopts the InGaAs high speed near infrared detector that pixel number is 320 × 256, Pixel size is 30 μm × 30 μm, can realize interfering image acquisition at a high speed.
Compared with prior art, the invention has the beneficial effects as follows and adopt voice coil motor linear motion driver, and adopt displacement closed-loop control, the mutual restriction of breakthrough time modulation type near infrared Fourier transform spectral imager precision and speed, precision and speed improve all greatly, and interferometer volume reduces greatly, and practicality is stronger.
Claims (10)
1. a near infrared Fourier transform spectral imager, is characterized in that, comprises the preposition imaging lens, collimating mirror, integrated dry interferometer, imaging lens and the planar array detector that are linked in sequence;
Described preposition imaging lens, for carrying out Polaroid to target;
Described collimating mirror, is placed in the rear portion of described preposition imaging lens, for receiving Polaroid light beam and by the beam collimation after Polaroid;
Described integrated dry interferometer, is placed in the rear portion of described collimating mirror, for receiving the imaging beam after collimation, and the imaging beam after collimation is divided into two light beams and produces optical path difference;
Described imaging lens, is placed in described integrated dry interferometer rear portion, is imaged onto on planar array detector for being assembled by the two-beam with optical path difference and interferes;
Described planar array detector, is placed in described imaging lens rear portion, for gathering the target image being superimposed with interference fringe.
2. a kind of near infrared Fourier transform spectral imager as claimed in claim 1, is characterized in that, described integrated dry interferometer comprises entity beam splitter, horizontal glass, index glass, index glass driver and displacement transducer;
Described entity beam splitter inside is provided with beam splitting coating, and is provided with horizontal glass at the offside of its incident light, and top is provided with index glass, and index glass space is reserved at top, for the two light beams of amplitudes such as being divided into by the incident beam after collimation, and produces optical path difference;
The bottom of described index glass driver is connected with described index glass, carries out straight line uniform motion for driving index glass;
Institute's displacement sensors is connected with the side of described index glass, for monitoring in real time the displacement of index glass, realizes the closed-loop control of index glass motion.
3. a kind of near infrared Fourier transform spectral imager as claimed in claim 2, is characterized in that, described entity beam splitter is made up of the first beam splitter and the second beam splitter;
The triangular prism of described first beam splitter to be profile be isosceles right triangle, described second beam splitter is the at right angles trapezoidal quadrangular of profile, described beam splitting coating is arranged on the inclined-plane of described first beam splitter, the inclined-plane of described first beam splitter docks with the inclined-plane of described second beam splitter, and the bottom width of described second beam splitter and height, be all greater than the height of described first beam splitter.
4. a kind of near infrared Fourier transform spectral imager as claimed in claim 2 or claim 3, is characterized in that, described beam splitting coating is the beam splitting coating of half-reflection and half-transmission, for the incident beam by entering entity beam splitter, is divided into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at horizontal glass place, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at index glass place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating.
5. a kind of near infrared Fourier transform spectral imager as claimed in claim 2, it is characterized in that, described index glass driver adopts the voice coil motor that can realize high-speed straight-line motion, and institute's displacement sensors adopts the capacitance displacement sensor can monitoring index glass displacement in real time.
6. a near infrared Fourier trasform spectroscopy formation method, is characterized in that, the method comprises the following steps:
Preposition imaging lens is Polaroid to target;
Collimating mirror is by described Polaroid beam collimation;
Imaging beam after collimation is divided into two light beams and produces optical path difference by integrated dry interferometer;
Two-beam with optical path difference is assembled and is imaged onto on planar array detector and interferes by imaging lens;
Planar array detector receives and gathers the target image being superimposed with interference fringe.
7. method as claimed in claim 6, is characterized in that, the imaging beam after collimation is divided into two light beams and produces optical path difference by described integrated dry interferometer, specifically comprises:
Incident beam enters in the entity beam splitter of integrated dry interferometer, and the beam splitting coating in entity beam splitter punishes into the first incident beam and the second incident beam;
Described first incident beam, through beam splitting coating, is reflected at the horizontal glass place of the offside outer setting of entity beam splitter incident light, and the light beam be reflected back becomes the first outgoing beam again after beam splitting coating reflection;
Described second incident beam, in the reflection of beam splitting coating place, reflected at the index glass place being arranged on entity beam splitter headroom place, the light beam be reflected back becomes the second outgoing beam through beam splitting coating;
The two light beams of the amplitudes such as the first outgoing beam and the second outgoing beam formation, and produce optical path difference.
8. method as claimed in claim 6, it is characterized in that, the method also comprises, and described integrated dry interferometer and described planar array detector by computer synchronous control, and carry out the spectrum picture of the target of process acquisition in real time to the target image gathered.
9. method as claimed in claim 7, it is characterized in that, the bottom of described index glass driver is connected with described index glass, index glass is driven to carry out straight line uniform motion, the displacement of index glass driver is controlled by computing machine, and according to the displacement measurement signal of the displacement transducer be arranged on index glass driver, FEEDBACK CONTROL is carried out to index glass driver, realize the closed-loop control of index glass motion.
10. method as claimed in claim 6, is characterized in that,
Described index glass driver adopts voice coil motor linear motion driver, realizes high-speed straight-line motion;
Institute's displacement sensors adopts capacitance displacement sensor, in real time the displacement of monitoring index glass.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284542A (en) * | 2020-09-15 | 2021-01-29 | 中国科学院上海技术物理研究所 | Method for controlling motor of movable mirror of multi-resolution broadband Fourier infrared spectrometer |
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| US20070133008A1 (en) * | 2005-12-12 | 2007-06-14 | Coherix, Inc. | Optical fiber delivered reference beam for interferometric imaging |
| US20110194117A1 (en) * | 2009-01-27 | 2011-08-11 | University Of Florida Research Foundation, Inc. | Mirror-tilt-insensitive fourier transform spectrometer |
| CN203929229U (en) * | 2014-07-01 | 2014-11-05 | 史伟立 | Index glass Fourier imaging spectrometer |
| CN204788666U (en) * | 2015-06-23 | 2015-11-18 | 青岛市光电工程技术研究院 | Near -infrared fourier transform spectral imaging appearance |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2000002506A (en) * | 1998-03-30 | 2000-01-07 | Carl Zeiss Jena Gmbh | Method and apparatus for optical coherence tomography with coherent dynamic focus |
| US20070133008A1 (en) * | 2005-12-12 | 2007-06-14 | Coherix, Inc. | Optical fiber delivered reference beam for interferometric imaging |
| US20110194117A1 (en) * | 2009-01-27 | 2011-08-11 | University Of Florida Research Foundation, Inc. | Mirror-tilt-insensitive fourier transform spectrometer |
| CN203929229U (en) * | 2014-07-01 | 2014-11-05 | 史伟立 | Index glass Fourier imaging spectrometer |
| CN204788666U (en) * | 2015-06-23 | 2015-11-18 | 青岛市光电工程技术研究院 | Near -infrared fourier transform spectral imaging appearance |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112284542A (en) * | 2020-09-15 | 2021-01-29 | 中国科学院上海技术物理研究所 | Method for controlling motor of movable mirror of multi-resolution broadband Fourier infrared spectrometer |
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Application publication date: 20151028 |