CN207741854U - Without guide rail fast and stable FTIR spectrum detection device - Google Patents
Without guide rail fast and stable FTIR spectrum detection device Download PDFInfo
- Publication number
- CN207741854U CN207741854U CN201721880905.8U CN201721880905U CN207741854U CN 207741854 U CN207741854 U CN 207741854U CN 201721880905 U CN201721880905 U CN 201721880905U CN 207741854 U CN207741854 U CN 207741854U
- Authority
- CN
- China
- Prior art keywords
- index glass
- guide rail
- light
- mirror
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model is related to no guide rail fast and stable FTIR spectrum detection device and detection method, which includes semi-transparent semi-reflecting beam splitter, horizontal glass, index glass group, convergent mirror, detector and circuit hardware processing system and computer software data processing display system；Index glass group includes index glass, the fixed mirror and without guide rail micro-displacement device of turning back；No guide rail micro-displacement device is fixed on pedestal, and index glass is connect with the driving part of no guide rail micro-displacement device.The utility model eliminates the guide rail needed for index glass movement in traditional FTIR, not only fundamentally solve the stability problem of index glass driving, and the frequency of index glass scanning interferometer figure can be more than 1KHz, so that spectrogram responsiveness greatly improves, have the advantages that alternative strong, the spectral resolution height of more light path realization methods, strong antijamming capability, especially suitable for the spectral measurement demand to complicated occasions such as high-speed motion, quick variations.
Description
Technical field
The utility model belongs to spectral imaging technology field, is related to a kind of no guide rail fast and stable Fourier transform infrared
(FTIR) device of spectrographic detection.
Background technology
Spectral imaging technology can obtain the two-dimensional space information of target and one-dimensional spectral information, be widely used in simultaneously
Military affairs, medicine, industry, agricultural, resource environment, Atmospheric Survey, astronomy etc., development are just in the ascendant.Interference type spectral at
As technology is one of the main light splitting type in spectral imaging technology.FTIR belongs to the imaging of time-modulation type (dynamic) interference spectrum
Technology is one of the major technique of interference type spectral imaging technique, is based primarily upon Michelson's interferometer.FTIR spectrum instrument passes through
The movement of index glass in its interferometer and generate different optical path differences, spoke under all different optical path differences is recorded in a manner of time integral
Interference pattern (striped) signal for penetrating the corresponding different order of interferences of target carries out Fourier transformation integral to interference pattern and obtains target
Spectrum.FTIR spectrum instrument flux is high, signal-to-noise ratio is high, but speed in being moved to index glass and gesture stability require it is very high.
Also therefore, there is diversification in the motion mode of index glass.It is different in the way of index glass movement with generation optical path difference,
Linear motion type, pendulum motion formula, rotary motion type can be divided into.Wherein, linear motion type refers to that index glass is transported with uniform rectilinear
Flowing mode generates optical path difference, and Major Difficulties are the index glass scanning systems for developing high stability.The campaign-styled FTIR light of traditional line
In spectrometer, index glass driving mechanism mainly uses voice coil motor to drive high-accuracy mechanical bearing guide rail, magnetic suspended guide, air supporting
Guide rail etc., but all it is especially that subtle vibration is all very sensitive, and stability is poor to external environmental interference, it is difficult to it applies in complexity
Work condition environment in.Pendulum motion formula and rotary motion type make index glass make certain mainly by designing suitable light splitting optical path
The swing or rotation of angle, and then generate optical path difference.Rotary motion type further includes transmission-type and reflective.Due to by the straight of index glass
Swing or rotation are changed into line movement, and the rotating speed and rotation angle of index glass are relatively easy to control so that system reliability is high, anti-interference energy
Amount is strong.In rotary motion type, by the high speed rotation of index glass, high (the hereinafter referred to as spectrogram response of frequency of spectrogram is obtained
Rate), commercial product can reach 50Hz at present, and also there is the spectrogram acquisition rate of nearly 1KHz in laboratory.The quick obtaining of spectrogram
So that FTIR can be applied to high-speed motion, quickly variation etc. occasions spectral measurement demand, such as the automobile of high-speed motion,
Aircraft, blast process, chemical reaction process etc..The time resolution that the processes such as explosion and chemical reaction need is more than millisecond rank,
Even require microsecond or higher.But the spectrogram responsiveness of linear motion type is then relatively low, generally below 20Hz.Current all FTIR
Spectrogram responsiveness be also not enough to solve the requirement to the ultrafast variation spectrogram of ms or more.
On the one hand, for traditional FTIR, spectrogram responsiveness is high not enough, is insufficient for wanting for certain quick occasions
It asks.On the other hand, in linear motion type FTIR, index glass driving stability is to be improved to adapt to more complicated extraneous ring
Border.In typical displacement sweep mechanism, 1KHz responsivenesses to be reached must use micro-displacement mechanism.But micro-displacement mechanism responsiveness root
It is different according to micro-displacement size and the difference of load.To the micro-displacement mechanism more than 1KHz, such as piezoelectric ceramics, displacement nanometer with
Between hundreds of microns.Enough optical path differences are unable to reach to meet the requirement of spectral resolution.To increase optical path difference, this practicality is new
Type proposes the method using more light path reciprocating folding type light paths.Typical more light path implementation methods have the pond White (White), He Liao
Special pond (Herriott), matrix type and their modified, and more light path methods etc. based on angle mirror, such as patent of invention
" a method of realize more light paths " (ZL 201010574558.2) and " a kind of more path interferometer light-splitting methods and application
More path interferometers of this method " (ZL 201010575359.3).But traditional pond White (White), Maurice Herriott
(Herriott) each optical device is relatively stationary in more optical path devices such as pond, matrix type and its modified, is applied in FTIR
The optical path difference of variation can not be generated in spectrometer, for this purpose, the utility model in design by these more optical path devices wherein
One reflection device is as index glass, to generate optical path difference.
The utility model is related to a kind of linear motion type FTIR, and index glass is realized using micro-displacement mechanism and more light path methods
Linear drives and scanning eliminate the guide rail needed for the movement of index glass in traditional FTIR, realize the acquisition to target spectrogram, not only from
The stability problem of index glass driving is fundamentally solved, and the frequency of index glass scanning interferometer figure can be more than 1KHz so that spectrogram is rung
Should rate greatly improve, especially suitable for high-speed motion, the spectral measurement demand of the quick complicated occasion such as variation.
Invention content
The purpose of this utility model is that a kind of no guide rail of proposition, high stability, quick, the high no guide rail of spectral resolution
Fast and stable FTIR spectrum detection device and detection method.
The technical solution of the utility model is：
Without guide rail fast and stable FTIR spectrum detection device, including the semi-transparent semi-reflecting beam splitting that is arranged on the round of light
Device 6, horizontal glass 5, index glass group, convergent mirror 8, detector and circuit hardware processing system 9 and computer software data processing display system
System 10；It is characterized in that：The index glass group includes index glass 3, the fixed mirror 4 and without guide rail micro-displacement device of turning back；The index glass 3
More light path index glass groups are formed with fixed mirror 4 of turning back；The no guide rail micro-displacement device is fixed on pedestal 1, the index glass 3 and nothing
The driving part of guide rail micro-displacement device connects.
Further, this detection device further includes preposition optical system 7；The preposition optical system 7 includes setting gradually
Convergent lens e, diaphragm d and collimation lens c；Target emanation light is become directional light by the preposition optical system.
Further, collimated directional light is divided into the first transmitted ray and first by above-mentioned semi-transparent semi-reflecting beam splitter 6
Reflection light；The horizontal glass 5 reflects the first transmitted ray after semi-transparent semi-reflecting beam splitter 6 so that light by backtracking, then
Form the second transmitted ray and the second reflection light after semi-transparent semi-reflecting beam splitter 6, the concentrated mirror of the second reflection light therein 8
Detector and circuit hardware processing system 9 are reached afterwards；More light path index glass groups are by the first reflection light backtracking to semi-transparent
The light is divided into third transmitted ray and third reflection light by half anti-beam splitter 6, semi-transparent semi-reflecting beam splitter 6 again.Third transmits
Arrival detector and circuit hardware processing system 9 after the concentrated mirror 8 of light；The third transmitted ray with through horizontal glass 5 reflection after
Second reflection light generates interference, and interference fringe is received by a detector.
Further, microscope group structure can be used in above-mentioned fixation mirror 4 of turning back.
Further, above-mentioned no guide rail micro-displacement device is piezoelectric actuator 2.
Further, the index glass that above-mentioned more light path index glass groups are made of angle mirror combines, or by the ponds Herriott,
The index glass combination in the ponds White, matrix type pond or its modified pond composition.
Further, above-mentioned more light path index glass groups be by movable cube angle mirror and fixed dihedral angle mirror and cube
Angle mirror forms.
Further, above-mentioned more light path index glass groups be formed by the ponds Herriott, wherein：The side spherical surface in the ponds Herriott
Speculum is as the index glass in FTIR spectrum instrument, and other side spherical reflector is fixed.
The utility model has the advantages that：
1, it is driven without guide rail.The utility model has abandoned motor driving and guide rail phase in traditional FTIR needed for index glass driving
In conjunction with mode eliminate guide rail directly with no guide rail micro-displacement device drive index glass.Index glass links solid with micro-displacement device
Fixed, the change in displacement of index glass results from the micro-displacement device physical deformation of itself, so that structure is compacter.
2, spectrogram responsiveness is high.Since used micro-displacement mechanism itself can realize very high frequency response, tuning
Range can be from a few Hz to KHz even up to tens KHz, i.e., the time that the primary whole displacement scanning of completion needs is smaller than 1ms, by it
Movement as the driving mechanisms control index glass of index glass in FTIR spectrum instrument is then obtained with scanning the interference pattern at different optical path differences
The response time of the complete interference pattern of one width is smaller than 1ms, to realize that the ultrahigh speed to spectrogram KHz or more obtains, can fit
With the occasion for having rapid response to customer's need to spectrogram.
3, the occupation mode of the more optical path pools of tradition is changed, more light path realization methods are alternative strong.Realize more light paths
Method mainly has the pond White (White), the pond Maurice Herriott (Herriott), matrix type and their modified, and is based on angle
More light path methods of mirror etc..The pond some more optical path devices such as White (White), the pond Maurice Herriott (Herriott) etc., tradition are used
Under static state, and the utility model is changed into dynamic and is used (using a reflection component in more optical path devices as dynamic
Mirror), the application of more optical path devices is extended, the selectivity of more light path realization methods is increased.
4, spectral resolution is high.The method that more light paths are used due to the utility model so that micro-displacement mechanism is in movement
The light path that several times can be generated to decades of times under small displacement amplifies, thus the stroke of index glass is larger, can generate larger light path
Difference realizes higher spectral resolution, meets the typical application demand of FTIR spectrum instrument.
5, strong antijamming capability.Since index glass and micro-displacement device link fixation, posture is relatively solid in index glass motion process
It is fixed, little interference by environment, thus anti-interference ability greatly enhances.
Description of the drawings
Fig. 1 and Fig. 2 is typical fast and stable high-resolution FTIR spectrum (imaging) optical schematic diagram of the utility model.
In figure：1-piezoelectric actuator pedestal, 2-piezoelectric actuators, 3-index glass, 4-fixed mirrors of turning back, 5-horizontal glass,
6-semi-transparent semi-reflecting beam splitters, 7-preposition optical systems, 8-convergent mirrors, 9-detectors and circuit hardware processing system, 10-
Computer software data processing display system, a- angle mirrors, b- angle mirrors or plane mirror, c- collimation lenses, d- diaphragms, e- assemble saturating
Mirror.
Specific implementation mode
For the utility model without guide rail fast and stable high-resolution FTIR spectrum (imaging) method, core is will be in FTIR
Index glass generates amount of movement by micro-displacement device or mechanism controls, and is amplified amount of movement by more light path structures, dynamic to realize
The high stability of mirror posture controls, and quickly scans, and generate enough optical path differences and reach higher spectral resolution.
Fast and stable high-resolution FTIR spectrum (imaging) device involved by the utility model, referring to Fig. 1, preferably
Embodiment is：
It is realized by following steps：
Step 1：Target emanation light is collected by preposition optical system, collimation processing, target emanation light is changed into
Directional light；
Step 2：By the beam splitting after semi-transparent semi-reflecting beam splitter of the directional light of step 1), the first transmitted ray and first is formed instead
Penetrate light；
Step 3：By the first transmitted ray after beam splitting along backtracking after horizontal glass reflects, then it is divided into second after beam splitting
Transmitted ray and the second reflection light；
Step 4：The first reflection light after beam splitting is returned after entering more light path index glass group reflections along former direction or former road
It returns, then is divided into third transmitted ray and third reflection light after beam splitting；
Step 5：By third transmitted ray and first transmitted ray of first reflection light after beam splitting after beam splitting
Two reflection lights are by convergent mirror into line convergence；
Step 6：The convergence interference light of step 5 is acquired by detector, after the processing such as noise reduction filtering, amplification,
Software is handled on hardware chip or computer, and extraction obtains the information of interference fringe；
Step 7：Data processing is carried out to the interference signal of step 6) and analyzes and exports result.Include mainly that interference pattern is naked
Pretreatment, error correction, spectral responsivity scaled correction, radiometric calibration amendment and Fourier transformation of data etc. are completed
The recuperation of spectrum obtains the spectrum or high-resolution spectroscopy image of target.
Existing method can be used in the step 1, step 2, step 3, step 5, step 6 and step 7 of the utility model
Processing.
The concrete methods of realizing of the step 4 of the utility model is：
Step 4.1：The index glass of interferometer is fixedly connected with piezoelectric actuator one end, is transported with the movement of piezoelectric actuator
It is dynamic, it is oriented to without guide rail, the movement of support index glass, index glass is driven without mechanical gear, voice coil motor.
This piezoelectric actuator can be piezo-electric crystal driving element, can also be magnetostriction materials driving element, or
Luminescent material driving element is played, central characteristics are made of the shape-changing material caused by the physical effects such as stress, electromagnetism without guide rail
Micro-displacement device.
Step 4.2：The other end of piezoelectric actuator is connect with fixed pedestal.
The deformation that piezoelectric actuator is generated by piezoelectric effect will be but not same with fixed pedestal so that position movement occurs for index glass
Shi Yundong does round-trip linear motion so that piezoelectric actuator drives index glass.
Step 4.3：More light path index glass groups are made of index glass and fixed mirror (microscope group) of turning back.
It is index glass to be used to generate unique moving component of optical path difference in interferometer, and piezoelectric actuator driving index glass movement
Formation it is limited, it is difficult to generate sufficiently large optical path difference, it is therefore desirable to combined to form more light paths with fixed microscope group using index glass,
To amplify the scheme of optical path difference at multiple.More light path index glass groups can be combined by index glass that angle mirror forms, can also be by
The index glass combination that the ponds Herriott, the ponds White, matrix type pond or its modified pond form.
Referring to Fig. 1 and Fig. 2, the utility model is related to fast and stable high-resolution FTIR spectrum (imaging) device, in fact
The mode of applying is：Including the preposition optical system 7, semi-transparent semi-reflecting beam splitter 6, horizontal glass 5, dynamic being set in turn on the round of light
Mirror 3 and fixed turn back mirror 4 (microscope group), convergent mirror 8, detector and circuit hardware processing system 9 and computer software data processing
Display system 10, wherein index glass 3 and fixed mirror 4 (microscope group) of turning back form more light path index glass groups, and index glass 3 and piezoelectric actuator 2
Connection, piezoelectric actuator 2 are fixed by pedestal 1.
Preposition optical system 7 includes convergent lens e, diaphragm d and the collimation lens c set gradually, and target emanation light is main
It is assembled by convergent lens e, diaphragm d, which filters, limits the shape of convergent lens e image planes, and prevents stray light, then accurate by collimation lens c
Directly, the light by preposition optical system 7 is made to become directional light.Refraction, catadioptric and total reflection etc. can be used in preposition optical system 7
Various forms, the purpose is to so that target emanation is changed into parallel rays.If the laser light source after being applied to laser light source or expanding,
Then this preposition optical system 7 can be saved.
Semi-transparent semi-reflecting beam splitter 6 is that collimated directional light is divided into the first transmitted ray and the first reflection light；The
The intensity of one transmitted ray and the first reflection light depends on the semi-transparent semi-reflecting spectro-film of semi-transparent semi-reflecting beam splitter 6, such as metal
Film or deielectric-coating, it is seen that, infrared, ultraviolet band also can, can according to specific requirement design be selected, as long as can reach
The purpose of beam splitting.
Horizontal glass 5 reflects the first transmitted ray after semi-transparent semi-reflecting beam splitter 6 so that light is by backtracking, then passes through half
It forms the second transmitted ray and the second reflection light after saturating half anti-beam splitter 6, is arrived after the concentrated mirror of the second reflection light therein 8
Up to detector and circuit hardware processing system 9；Horizontal glass 5 can also be substituted by combining forms such as other reflections, transmissions, and such as special human relations are reflected
System or mechanical-optical setup identical with swing arm etc., effect are intended to reflection incident ray, incident light are made to be returned by former direction
It returns.
Moving component of the index glass 3 as interferometer in FTIR, to generate the optical path difference of variation, and interferometer then corresponds to production
Interference pattern under raw different optical path differences.Index glass 3 collectively constitutes more light path index glass groups with fixed mirror 4 (microscope group) of turning back so that when dynamic
When mirror 3 generates optical path difference d, more light path index glass groups can generate the optical path difference N*d of N times (N is the light path number of more light path index glass groups), from
And improve the spectral resolution of FTIR.
The effect of fixed mirror 4 (microscope group) 4 of turning back is used in conjunction with index glass 3, more light path index glass groups is formed, to improve the folding of light beam
Number is returned, more light paths are generated.More light path index glass groups are by the first reflection light (by half after from light source incidence to semi-transparent semi-reflecting beam splitter
The light of saturating half anti-beam splitter first reflection) for backtracking to semi-transparent semi-reflecting beam splitter 6, semi-transparent semi-reflecting beam splitter 6 again should
Light is divided into third transmitted ray and third reflection light.Arrival detector and circuit are hard after the concentrated mirror 8 of third transmitted ray
Part processing system 9.The third transmitted ray generates interference with the second reflection light after the reflection of horizontal glass 5, and interference fringe is visited
Device is surveyed to receive.
In Fig. 1, more light path index glass groups are by movable cube angle mirror and fixed dihedral angle mirror and cube corner microscope group
At；More light path index glass groups are formed by the improved ponds Herriott in Fig. 2.Two spherical reflectors in traditional ponds Herriott are
Opposing stationary, and in fig. 2, for the left side spherical reflector in the ponds Herriott as the index glass in FTIR spectrum instrument, being can
Mobile, and another spherical reflector is then fixed static.
Piezoelectric actuator 2 is used as micro-displacement driver, effect be extraneous electricity, magnetic, light, heat or the power the effects that under,
Generate transformable displacement.This piezoelectric actuator can be piezo-electric crystal driving element, can also be that magnetostriction materials drive
Dynamic device, or luminescent material driving element is played, central characteristics are the shape-changing material systems caused by the physical effects such as stress, electromagnetism
At micro-displacement device.Driver 2 is fixedly connected with pedestal 1, index glass 3, but when driver 2 is deformed, and pedestal 1 is relatively not
Dynamic, index glass 3 then generates movement.
The main function of piezoelectric actuator pedestal 1 is fixed piezoelectric actuator 2.Piezoelectric actuator pedestal 1 is relative to index glass
Formula fixed static state.When driver 2 is other type micro-displacement drivers, the main function of pedestal 1 is constant.Pedestal 1 with
The connection of driver 2 can be flexible connection, can also be that hard contact is fixed.
Detector receives respectively come by the third transmitted ray of index glass 3 and the fixed more light path microscope groups that mirror 4 forms of turning back, with
The interference signal that both second reflection lights from horizontal glass 5 generate.The effect of detector and circuit hardware processing system 9 be by
Sample collection is carried out according to the interferometric fringe signal of Wavelength distribution, and is converted to electric signal, and signal is amplified, is filtered
Processing.Detector can be photoelectricity CCD, can also be other electrooptical devices.
Computer software data processing display system 10, the interference obtained to detector and circuit hardware processing system 9 are believed
Number carry out data processing and analysis, including the pretreatment of interference pattern uncorrected data, error correction, spectral responsivity scaled correction, spoke
Degree of penetrating scaled correction and Fourier transformation etc. complete the recuperation of spectrum, obtain the spectrum or high-resolution light of target
Spectrogram picture.
In the utility model, the pond White (White), the pond Maurice Herriott (Herriott), square can be used in more light path index glass groups
The modified of formation and they, and more optical path devices etc. based on angle mirror, main function are by the movement of wherein index glass
The optical path difference of variation is generated, wherein the effect of more light paths is amplification optical path difference, realizes the high spectral resolution of FTIR.
The interferometer of other forms can be derived based on this principle.Such as increase and decrease certain devices therein, such as cancels preposition light
System can reduce the volume of instrument, weight；Polarizer is added in the optical path, then can be formed multi-pass Intensity modulation and
Polarization spectrum imaging instrument etc..
Claims (8)
1. without guide rail fast and stable FTIR spectrum detection device, including the semi-transparent semi-reflecting beam splitter that is arranged on the round of light
(6), horizontal glass (5), index glass group, convergent mirror (8), detector and circuit hardware processing system (9) and computer software data processing
Display system (10)；It is characterized in that：
The index glass group includes index glass (3), the fixed mirror (4) and without guide rail micro-displacement device of turning back；The index glass (3) and fixed folding
It returns mirror (4) and forms more light path index glass groups；The no guide rail micro-displacement device is fixed on pedestal (1), and the index glass (3) is led with nothing
The driving part of rail micro-displacement device connects.
2. no guide rail fast and stable FTIR spectrum detection device according to claim 1, it is characterised in that：
Further include preposition optical system (7)；The preposition optical system (7) includes the convergent lens (e) set gradually, diaphragm
(d) and collimation lens (c)；Target emanation light is become directional light by the preposition optical system.
3. no guide rail fast and stable FTIR spectrum detection device according to claim 1 or 2, it is characterised in that：
Collimated directional light is divided into the first transmitted ray and the first reflection light by the semi-transparent semi-reflecting beam splitter (6)；Institute
It states horizontal glass (5) and reflects the first transmitted ray after semi-transparent semi-reflecting beam splitter (6) so that light is by backtracking, then through semi-transparent
Half anti-beam splitter (6) forms the second transmitted ray and the second reflection light afterwards, after the concentrated mirror of the second reflection light (8) therein
Reach detector and circuit hardware processing system (9)；
More light path index glass groups are by the first reflection light backtracking to semi-transparent semi-reflecting beam splitter (6), semi-transparent semi-reflecting beam splitter
(6) and by the light it is divided into third transmitted ray and third reflection light, the concentrated mirror of third transmitted ray (8) reaches detection afterwards
Device and circuit hardware processing system (9)；
The third transmitted ray and the second reflection light after horizontal glass (5) reflection generate interference, interference fringe by detector and
Detector in circuit hardware processing system (9) receives.
4. no guide rail fast and stable FTIR spectrum detection device according to claim 3, it is characterised in that：The fixed folding
It returns mirror (4) and microscope group structure can be used.
5. no guide rail fast and stable FTIR spectrum detection device according to claim 3, it is characterised in that：The no guide rail
Micro-displacement device is piezoelectric actuator (2).
6. no guide rail fast and stable FTIR spectrum detection device according to claim 3, it is characterised in that：More light paths
Index glass group is combined by the index glass that angle mirror forms, or by the ponds Herriott, the ponds White, matrix type pond or its modified pond
The index glass of composition combines.
7. no guide rail fast and stable FTIR spectrum detection device according to claim 6, it is characterised in that：More light paths
Index glass group be by movable cube angle mirror and fixed dihedral angle mirror and cube corner microscope group at.
8. no guide rail fast and stable FTIR spectrum detection device according to claim 6, it is characterised in that：More light paths
Index glass group be formed by the ponds Herriott, wherein：The side spherical reflector in the ponds Herriott is as dynamic in FTIR spectrum instrument
Mirror, and other side spherical reflector is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721880905.8U CN207741854U (en) | 2017-12-28 | 2017-12-28 | Without guide rail fast and stable FTIR spectrum detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721880905.8U CN207741854U (en) | 2017-12-28 | 2017-12-28 | Without guide rail fast and stable FTIR spectrum detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207741854U true CN207741854U (en) | 2018-08-17 |
Family
ID=63120502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721880905.8U Active CN207741854U (en) | 2017-12-28 | 2017-12-28 | Without guide rail fast and stable FTIR spectrum detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207741854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108151881A (en) * | 2017-12-28 | 2018-06-12 | 中国科学院西安光学精密机械研究所 | Without guide rail fast and stable FTIR spectrum detection device and detection method |
-
2017
- 2017-12-28 CN CN201721880905.8U patent/CN207741854U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108151881A (en) * | 2017-12-28 | 2018-06-12 | 中国科学院西安光学精密机械研究所 | Without guide rail fast and stable FTIR spectrum detection device and detection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103076090B (en) | Laser interferometer optical path difference location method and system | |
| CN108827172B (en) | Non-contact laser thickness measuring device and method based on solid zoom lens | |
| CN103913227B (en) | Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter | |
| CN203069274U (en) | Laser interferometer optical path difference positioning system | |
| CN102486408B (en) | Light splitting method for multi-light-path interferometer, and multi-light-path interferometer adopting light splitting method | |
| CN103162616B (en) | For microsphere surface morphology detect instantaneous phase-shifting interference measuring instrument and adopt this measuring instrument to realize the measuring method of microsphere surface morphology | |
| CN103344609B (en) | A kind of Miniature Fourier transform spectrometer | |
| CN103604375A (en) | Double frequency laser grating interference two-dimensional measurement method and system with optical aliasing resistance | |
| CN109297600B (en) | Fourier transform hyperspectral imaging device based on high-speed double-reflection rotating mirror | |
| CN101105390A (en) | Synthetic wave interference nano surface tri-dimensional on-line measuring system and method | |
| CN105891958A (en) | Large-stroke high-scanning frequency optical fiber delay line | |
| CN102175323A (en) | Hadamard transform imaging spectrometer based on bridge type grating light modulator | |
| CN103604376A (en) | Double frequency laser grating interference three-dimensional measurement method and system with optical aliasing resistance | |
| CN101105391A (en) | Synthetic wave interference nano surface tri-dimensional on-line measuring system and method | |
| CN101532880B (en) | Double movable mirror interferometer | |
| CN102486572B (en) | Method for implementing multiple light paths | |
| CN103344198A (en) | Octave type phase-shifting diffraction interferometer and measurement method used for detecting micro spherical surface profile | |
| CN108151881A (en) | Without guide rail fast and stable FTIR spectrum detection device and detection method | |
| CN207741854U (en) | Without guide rail fast and stable FTIR spectrum detection device | |
| Ataman et al. | Compact Fourier transform spectrometers using FR4 platform | |
| CN203396702U (en) | Miniature Fourier transformation spectrometer | |
| CN106323198B (en) | A kind of high-precision, wide scope and big working distance laser auto-collimation apparatus and method | |
| CN106225730B (en) | The big working distance autocollimation of portable combined zeroing high-precision laser and method | |
| CN204788666U (en) | Near -infrared fourier transform spectral imaging appearance | |
| CN103712691A (en) | Fourier transformation spectrograph |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |