CN204558508U - 非晶硅薄膜太阳能pecvd芯片清洁装置 - Google Patents
非晶硅薄膜太阳能pecvd芯片清洁装置 Download PDFInfo
- Publication number
- CN204558508U CN204558508U CN201520217738.3U CN201520217738U CN204558508U CN 204558508 U CN204558508 U CN 204558508U CN 201520217738 U CN201520217738 U CN 201520217738U CN 204558508 U CN204558508 U CN 204558508U
- Authority
- CN
- China
- Prior art keywords
- cleaning device
- shell
- amorphous silicon
- silicon thin
- film solar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004140 cleaning Methods 0.000 title claims abstract description 34
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 23
- 238000007664 blowing Methods 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 28
- 235000013312 flour Nutrition 0.000 abstract description 14
- 239000000377 silicon dioxide Substances 0.000 abstract description 14
- 239000010408 film Substances 0.000 abstract description 8
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 230000002950 deficient Effects 0.000 abstract description 3
- 238000005457 optimization Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520217738.3U CN204558508U (zh) | 2015-04-13 | 2015-04-13 | 非晶硅薄膜太阳能pecvd芯片清洁装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520217738.3U CN204558508U (zh) | 2015-04-13 | 2015-04-13 | 非晶硅薄膜太阳能pecvd芯片清洁装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN204558508U true CN204558508U (zh) | 2015-08-12 |
Family
ID=53833588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520217738.3U Expired - Fee Related CN204558508U (zh) | 2015-04-13 | 2015-04-13 | 非晶硅薄膜太阳能pecvd芯片清洁装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN204558508U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107685536A (zh) * | 2017-09-28 | 2018-02-13 | 德清利维通讯科技股份有限公司 | 一种射频芯片生产系统 |
CN112054089A (zh) * | 2020-08-03 | 2020-12-08 | 宣城开盛新能源科技有限公司 | 一种改善cigs薄膜太阳能电池稳定性的层压装置 |
-
2015
- 2015-04-13 CN CN201520217738.3U patent/CN204558508U/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107685536A (zh) * | 2017-09-28 | 2018-02-13 | 德清利维通讯科技股份有限公司 | 一种射频芯片生产系统 |
CN112054089A (zh) * | 2020-08-03 | 2020-12-08 | 宣城开盛新能源科技有限公司 | 一种改善cigs薄膜太阳能电池稳定性的层压装置 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190214 Address after: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee after: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address before: 251200 Haneng Photovoltaic Industrial Park, Revitalization Avenue, Yucheng High-tech Zone, Dezhou City, Shandong Province Patentee before: SHANDONG YUCHENG HANERGY FILM SOLAR ENERGY CO.,LTD. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190308 Address after: Room 107, Building 2, Olympic Village Street Comprehensive Office District, Chaoyang District, Beijing Patentee after: HANERGY MOBILE ENERGY HOLDING GROUP Co.,Ltd. Address before: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee before: HANERGY PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150812 |