CN204462640U - Light shield carrier - Google Patents
Light shield carrier Download PDFInfo
- Publication number
- CN204462640U CN204462640U CN201520104466.6U CN201520104466U CN204462640U CN 204462640 U CN204462640 U CN 204462640U CN 201520104466 U CN201520104466 U CN 201520104466U CN 204462640 U CN204462640 U CN 204462640U
- Authority
- CN
- China
- Prior art keywords
- light shield
- carrying arm
- rod
- arm
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of light shield carrier, comprise the first carrying arm, second carrying arm, support, first control device and second control device, first carrying arm and the second carrying arm all have one end can be rack-mount up or down separately, first control device and second control device be respectively used to control first carry arm and second carrying arm move up and down along support, one of them carrying arm that first carrying arm and second is carried in arm is used for putting into new light shield in exposure bench, another carrying arm that first carrying arm and second is carried in arm is used for from exposure bench, take out the light shield temporarily left unused.By above-mentioned light shield carrier, eliminate and between light shield carrier and light shield cabinet, a dead lift of light shield is operated, greatly reduce the probability damaging light shield, improve carrying, change the efficiency of light shield, reduce the product line burden caused because the running time is long.
Description
Technical field
The utility model relates to the technical field of manufacture of semiconductor, particularly relates to a kind of light shield carrier.
Background technology
Light shield (Mask) is making a kind of mask plate needing in the manufacture of semiconductor such as display panels (Liquid Crystal Display Panel), integrated circuit (Integrated Circuit) to use, utilize exposure and etching technique, form various Thinfilm pattern upper making of underlay substrate (such as glass substrate).
In exposure manufacture process, used light shield is placed in exposure bench, completes exposure manufacture process by exposure bench.The light shield limited amount can put in exposure bench, generally can deposit the light shield of about ten.Along with the increasing of the required various Thinfilm patterns formed on underlay substrate, also get more and more for the formation of the light shield quantity needed for these Thinfilm patterns, but because depositing the quantitative limitation of light shield number in exposure bench, these light shields can not all be placed in exposure bench in advance, therefore sometimes need light shield temporarily idle in exposure bench to be replaced by new light shield.In addition, when making different products, used light shield kind is also different, also needs to carry out replacement operation to the light shield on exposure bench.
Namely in exposure manufacture process, usually need new light shield to put into exposure bench, also need light shield temporarily idle in exposure bench to take out.In prior art, when carrying out light shield replacing at every turn, a light shield cabinet need be first put into by light shield carrier having been carried the new light shield come, again light shield temporarily idle in exposure bench is taken out and also put into light shield cabinet, last taking-up by the new light shield just putting into light shield cabinet again puts into exposure bench again, so at light shield carrier, repeatedly move between light shield cabinet and exposure bench three, shift out light shield.That is, light shield is changed and is specifically comprised the steps: that (1) puts into light shield cabinet by light shield carrier having been carried the new light shield come; (2) utilize light shield carrier to be taken out by light shield temporarily idle in exposure bench, also put into light shield cabinet; (3) utilize light shield carrier to be taken out by the new light shield just putting into light shield cabinet, then put into exposure bench.
In the prior art, when light shield is moved into light shield cabinet from light shield carrier or moves into light shield carrier from light shield cabinet, operating personnel are needed to carry out a dead lift operation to light shield, and at least need 2 talents to complete, carrying light shield frequently, to cause operating personnel to contact the frequency of light shield higher, and the extreme higher position of depositing light shield in light shield cabinet reaches 1.5 meters, light shield is put into the higher deposit position relative difficulty of light shield cabinet by operating personnel.Therefore, light shield because of the risk of artificial damage higher, simultaneously light shield needs when replacement operation by the transfer of light shield cabinet, and handling efficiency is lower, makes to produce line and runs smooth, increase and produce line burden.
Utility model content
The utility model provides a kind of light shield carrier, to realize the carrying to light shield safety, and when changing light shield without the need to by the transfer of light shield cabinet, improving handling efficiency, reducing and producing line burden.
The utility model provides a kind of light shield carrier, comprise the first carrying arm, second carrying arm, support, first control device and second control device, described first carrying arm and described second carrying arm all have one end to install on the bracket up or down separately, described first carrying arm is upper and lower spaced parallel with described second carrying arm, described first control device and described second control device are respectively used to the described first carrying arm of control and described second carrying arm moves up and down along described support, one of them carrying arm that described first carrying arm and described second is carried in arm is used for putting into new light shield in exposure bench, another carrying arm that described first carrying arm and described second is carried in arm is used for from described exposure bench, take out the light shield temporarily left unused.
Further, described first carrying arm and described second carrying arm are mechanical arm, and respective one end is connected with described support, and the other end extends away from described support.
Further, described support is provided with padded coaming between described first carrying arm and described second carrying arm.
Further, described light shield carrier also comprises underframe, and the bottom of described support is arranged on described underframe.
Further, described support comprises two vertical bodies of rod, the first horizontal body of rod and the second horizontal body of rod, the bottom of described two vertical bodies of rod is installed on described underframe, described two vertical bodies of rod are spaced, described first handling hand arm rest is connected on the described first horizontal body of rod to one end of described support, described second handling hand arm rest is connected on the described second horizontal body of rod to one end of described support, the two ends of the described first horizontal body of rod are connected with described two vertical bodies of rod respectively, the two ends of the described second horizontal body of rod are connected with described two vertical bodies of rod respectively, the described first horizontal body of rod and the described second horizontal body of rod can move up and down along described two vertical bodies of rod.
Further, described first control device is connected with the described first horizontal body of rod by the first cylinder, and described second control device is connected with the described second horizontal body of rod by the second cylinder.
Further, described support vertical is installed in described underframe, and described first carrying arm and described second carrying arm are perpendicular to described support installing, and described first carrying arm, described second carrying arm and described underframe are parallel to each other.
Further, described first control device and described second control device are arranged on described underframe.
Further, described underframe is provided with roller, described support is provided with gripping handle.
Further, described first control device and described second control device are two independently controllers or be integrated in same controller, and described controller is Programmable Logic Controller.
The utility model embodiment has the following advantages: by above-mentioned light shield carrier, when carrying out light shield replacement operation to exposure bench, the cooperation of arm only need be carried by the first carrying arm and second, just replacing light shield can be completed near exposure bench, and do not need between light shield carrier and light shield cabinet, and between exposure bench and light shield cabinet come and go repeatedly move into repeatedly, shift out light shield, eliminate and between light shield carrier and light shield cabinet, a dead lift of light shield is operated, greatly reduce the probability damaging light shield, improve carrying, change the efficiency of light shield, reduce the product line burden caused because the running time is long.
Accompanying drawing explanation
Fig. 1 is the side view of the light shield carrier in the utility model embodiment.
Fig. 2 is the rear view of the light shield carrier in the utility model embodiment.
Embodiment
For further setting forth the utility model for the technological means reaching predetermined utility model object and take and effect, below in conjunction with accompanying drawing and preferred embodiment, the utility model is described in detail as follows.
Please also refer to Fig. 1 and Fig. 2, Fig. 1 is the side view of the light shield carrier in the utility model embodiment, and Fig. 2 is the rear view of the light shield carrier in the utility model embodiment.The utility model embodiment provides a kind of light shield carrier, for safety, carries light shield efficiently.This light shield carrier comprises the first carrying arm 101, second and carries arm 102, support 103, first control device 104, second control device 105 and underframe 106.
First carrying arm 101 and the second carrying arm 102 all have one end can be arranged on up or down on support 103 separately, first control device 104 and second control device 105 are respectively used to control first and carry arm 101 and the second carrying arm 102 moves up and down along support 103, namely first control device 104 moves up and down along support 103 for controlling the first carrying arm 101, and second control device 105 moves up and down along support 103 for controlling the second carrying arm 102.In other words, the first carrying arm 101 and the second carrying arm 102 are separate control.
First carrying arm 101 and second one of them carrying arm carried in arm 102 are used for putting into new light shield in exposure bench (not shown), first carrying arm 101 and second another carrying arm carried in arm 102 are used for from exposure bench, take out the light shield temporarily left unused, and change light shield temporarily idle in exposure bench to utilize new light shield.Such as, utilize the first carrying arm 101 to put into new light shield in exposure bench, utilize the second carrying arm 102 from exposure bench, take out temporarily idle light shield; But be not limited thereto, the second carrying arm 102 also can be utilized in exposure bench to put into new light shield, utilize the first carrying arm 101 from exposure bench, take out temporarily idle light shield.
In the present embodiment, light shield carrier has the first carrying arm 101 and the second carrying arm 102, the first carrying arm 101 can be utilized in exposure bench to move into new light shield, utilize the second carrying arm 102 from exposure bench, move lower temporarily idle light shield, make in the operation carrying out light shield replacing, without the need to carrying out light shield transfer by light shield cabinet, but directly complete light shield replacement operation by the first carrying arm 101 and the second carrying arm 102.Cancel light shield transfer also to mean to eliminate and operate a dead lift that light shield carries out between light shield carrier and light shield cabinet, greatly reduce the risk of artificial damage light shield, simultaneously because light shield is without the need to by the transfer of light shield cabinet, improve handling efficiency, decrease and produce line burden.
More specifically, arm about 102 is spaced is arranged on support 103 abreast for first carrying arm 101 and the second carrying, first carrying arm 101 and the second carrying arm 102 are also respectively arranged with liner 1010,1020, to provide flexible support when carrying light shield to light shield.The bottom of support 103 is arranged on underframe 106, and support 103 is installed perpendicular to underframe 106, and the first carrying arm 101 and the second carrying arm 102 are installed perpendicular to support 103, and the first carrying arm 101, second carries arm 102 and underframe 106 is parallel to each other.
Support 103 comprises the two vertical body of rod 1030, the first horizontal body of rod 1031 and the second horizontal bodies of rod 1032, the bottom of two vertical bodies of rod 1030 is installed on underframe 106, two vertical bodies of rod 1030 are spaced, one end that first carrying arm 101 is close to support 103 is connected on the first horizontal body of rod 1031, and one end that the second carrying arm 102 is close to support 103 is connected on the second horizontal body of rod 1032.The two ends of the first horizontal body of rod 1031 respectively body of rod 1030 vertical with two are connected, the two ends of the second horizontal body of rod 1032 respectively body of rod 1030 vertical with two are connected, the first horizontal body of rod 1031 can move up and down along the vertical body of rod 1030 and drive the first carrying arm 101 also to move up and down, and the second horizontal body of rod 1032 can move up and down along the vertical body of rod 1030 and drive the second carrying arm 102 also to move up and down.Particularly, two vertical bodies of rod 1030 can be provided with chute (not shown), and the first horizontal body of rod 1031 and the second horizontal body of rod 1032 can be provided with slide rail (not shown), moved in chute by slide rail, realize the first carrying arm 101 and second and carry arm 102 relative to the smooth and easy movement of support about 103.
First carrying arm 101 and the second carrying arm 102 are mechanical arm, and respective one end is connected with support 103, and the other end extends away from support 103 and for putting in exposure bench or taking out light shield from exposure bench.
First control device 104 and second control device 105 are arranged on underframe 106, first control device 104 and second control device 105 can be two independently controllers, also can be integrated in same controller, controller can be specifically Programmable Logic Controller (programmable logic controller, PLC).First control device 104 is connected with the first horizontal body of rod 1031 by the first cylinder 107, utilizes the first cylinder 107 that the first horizontal body of rod 1031 can be driven to drive the first carrying arm 101 to move up and down along support 103; Second control device 105 is connected with the second horizontal body of rod 1032 by the second cylinder 108, utilizes the second cylinder 108 that the second horizontal body of rod 1032 can be driven to drive the second carrying arm 102 to move up and down along support 103.
Support 103 can be provided with padded coaming (not shown) between the first carrying arm 101 and the second carrying arm 102, the first carrying arm 101 and the second carrying arm 102 is close to each other move in a distance time, this padded coaming is extruded, slow down the motion of the first carrying arm 101 and the second carrying arm 102, and maintain minor increment between the first carrying arm 101 and the second carrying arm 102, preventing mutual collision, avoiding the light shield to being carried on the first carrying arm 101 and the second carrying arm 102 to cause damage.
Underframe 106 is provided with roller 109.Support 103 is provided with gripping handle (not shown), for gripping for operating personnel to operate light shield carrier.When this light shield carrier mobile, this light shield carrier can be promoted by operating personnel and move on the ground.
Below, to utilize the first carrying arm 101 to put into new light shield in exposure bench, it is example that the second carrying arm 102 takes out temporarily idle light shield from exposure bench, illustrates that this light shield carrier needs operation when carrying out replacing light shield as follows at exposure bench.
Utilize first of light shield carrier the carrying arm 101 to carry new light shield, and this light shield carrier mobile is to exposure bench position;
First control device 104 and second control device 105 is utilized to control the first carrying arm 101 and the second carrying position of arm 102 on support 103 respectively, the temporarily idle light shield position of the second carrying arm 102 and exposure bench needing take out is aligned, such as when the position of the second carrying arm 102 is lower than light shield position temporarily idle on exposure bench, then control the first carrying arm 101 respectively by first control device 104 and second control device 105 and the second carrying arm 102 moves up along support 103, until the light shield that position and the exposure bench of the second carrying arm 102 temporarily leave unused aligns,
Utilize the second carrying arm 102 from exposure bench, take out this temporarily idle light shield, in exposure bench, now vacate a light shield idle space;
Utilize first control device 104 and second control device 105 to control respectively to reduce the first carrying arm 101 and the second carrying position of arm 102 on support 103, the light shield idle space that the position of the first carrying arm 101 and exposure bench have just been vacateed is aligned; And
Utilize the first carrying arm 101 in exposure bench, move into this new light shield, namely complete and the light shield of exposure bench is changed.
By above-mentioned light shield carrier, when carrying out light shield replacement operation to exposure bench, the cooperation of arm 101 and the second carrying arm 102 only need be carried by first, just replacing light shield can be completed near exposure bench, and do not need between light shield carrier and light shield cabinet, and between exposure bench and light shield cabinet come and go repeatedly move into repeatedly, shift out light shield, eliminate and between light shield carrier and light shield cabinet, a dead lift of light shield is operated, greatly reduce the probability damaging light shield, improve carrying, change the efficiency of light shield, reduce the product line burden caused because the running time is long.
The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, although the utility model discloses as above with preferred embodiment, but and be not used to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be do not depart from technical solutions of the utility model content, according to any simple modification that technical spirit of the present utility model is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (10)
1. a light shield carrier, it is characterized in that, comprise the first carrying arm (101), second carrying arm (102), support (103), first control device (104) and second control device (105), described first carrying arm (101) and described second carrying arm (102) all have one end can be arranged on described support (103) up or down separately, described first carrying arm (101) is upper and lower spaced parallel with described second carrying arm (102), described first control device (104) and described second control device (105) are respectively used to described first carrying arm (101) of control and described second carrying arm (102) moves up and down along described support (103), one of them carrying arm that described first carrying arm (101) and described second is carried in arm (102) is used for putting into new light shield in exposure bench, another carrying arm that described first carrying arm (101) and described second is carried in arm (102) is used for from described exposure bench, take out the light shield temporarily left unused.
2. light shield carrier according to claim 1, it is characterized in that, described first carrying arm (101) and described second carrying arm (102) are mechanical arm, respective one end is connected with described support (103), and the other end extends away from described support (103).
3. light shield carrier according to claim 1, is characterized in that, described support (103) is provided with padded coaming between described first carrying arm (101) and described second carrying arm (102).
4. light shield carrier according to claim 1, is characterized in that, described light shield carrier also comprises underframe (106), and the bottom of described support (103) is arranged on described underframe (106).
5. light shield carrier according to claim 4, it is characterized in that, described support (103) comprises two vertical bodies of rod (1030), the first horizontal body of rod (1031) and the second horizontal body of rod (1032), the bottom of described two vertical bodies of rod (1030) is installed on described underframe (106), described two vertical bodies of rod (1030) are spaced, one end that described first carrying arm (101) is close to described support (103) is connected on the described first horizontal body of rod (1031), one end that described second carrying arm (102) is close to described support (103) is connected on the described second horizontal body of rod (1032), the two ends of the described first horizontal body of rod (1031) are connected with described two vertical bodies of rod (1030) respectively, the two ends of the described second horizontal body of rod (1032) are connected with described two vertical bodies of rod (1030) respectively, the described first horizontal body of rod (1031) and the described second horizontal body of rod (1032) can move up and down along described two vertical bodies of rod (1030).
6. light shield carrier according to claim 5, it is characterized in that, described first control device (104) is connected with the described first horizontal body of rod (1031) by the first cylinder (107), and described second control device (105) is connected with the described second horizontal body of rod (1032) by the second cylinder (108).
7. light shield carrier according to claim 4, it is characterized in that, described support (103) is installed perpendicular to described underframe (106), described first carrying arm (101) and described second carrying arm (102) are installed perpendicular to described support (103), and described first carrying arm (101), described second carrying arm (102) and described underframe (106) are parallel to each other.
8. light shield carrier according to claim 4, is characterized in that, described first control device (104) and described second control device (105) are arranged on described underframe (106).
9. light shield carrier according to claim 4, is characterized in that, described underframe (106) is provided with roller (109), and (103) are provided with gripping handle to described support.
10. light shield carrier according to claim 1, it is characterized in that, described first control device (104) and described second control device (105) are two independently controllers or be integrated in same controller, and described controller is Programmable Logic Controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520104466.6U CN204462640U (en) | 2015-02-12 | 2015-02-12 | Light shield carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520104466.6U CN204462640U (en) | 2015-02-12 | 2015-02-12 | Light shield carrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204462640U true CN204462640U (en) | 2015-07-08 |
Family
ID=53669502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520104466.6U Active CN204462640U (en) | 2015-02-12 | 2015-02-12 | Light shield carrier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204462640U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110262185A (en) * | 2019-06-12 | 2019-09-20 | 北海惠科光电技术有限公司 | It is etched by light the control method and photoetch equipment of equipment |
| CN110297390A (en) * | 2019-07-29 | 2019-10-01 | 武汉华星光电技术有限公司 | Light shield trolley improves structure |
| CN110588735A (en) * | 2019-09-12 | 2019-12-20 | 武汉华星光电技术有限公司 | Photomask trolley and photomask system |
-
2015
- 2015-02-12 CN CN201520104466.6U patent/CN204462640U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110262185A (en) * | 2019-06-12 | 2019-09-20 | 北海惠科光电技术有限公司 | It is etched by light the control method and photoetch equipment of equipment |
| CN110297390A (en) * | 2019-07-29 | 2019-10-01 | 武汉华星光电技术有限公司 | Light shield trolley improves structure |
| CN110588735A (en) * | 2019-09-12 | 2019-12-20 | 武汉华星光电技术有限公司 | Photomask trolley and photomask system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204462640U (en) | Light shield carrier | |
| CN204727040U (en) | The double-deck underloading belt line of a kind of hollow type | |
| CN104828459A (en) | Hollow two-layer light-load belt line | |
| CN103858948A (en) | Stuffing feeding tray and off-line stuffing feeding device with same | |
| CN102887343A (en) | Perpendicular lifting three-dimensional multilayer integrated conveying device and conveying method thereof | |
| CN104495206A (en) | Multilayer synchronous lifting equipment | |
| JP2012059798A (en) | Component mounting apparatus | |
| CN204341839U (en) | A kind of Multi-layer synchronous jacking equipment | |
| CN109592330A (en) | The automatic coil inserting apparatus of the green body of ceramic sanitary ware product and method | |
| CN107571009B (en) | Assembly line | |
| CN203144283U (en) | Automatic feed mechanism of mobile phone glass | |
| CN103866295A (en) | Apparatus used for reaction chamber substrate heating and transmission | |
| CN205602694U (en) | A blanking machine on monomer for LCD product manufacture processing | |
| CN209522207U (en) | The automatic coil inserting apparatus of the green body of ceramic sanitary ware product | |
| CN208531612U (en) | A kind of twin-stage material-pulling device | |
| CN204777050U (en) | Automatic unloading mechanism of going up of tray dish | |
| CN203157014U (en) | Stereo injection molding factory | |
| CN203740592U (en) | Synchronous transporting and grabbing mechanism | |
| CN203792892U (en) | Code spraying device | |
| CN202807808U (en) | Bottle loading and unloading machine | |
| CN105501946A (en) | Novel decorative plasterboard substrate feeding machine | |
| CN205555461U (en) | Automatic sign indicating number brick block forming machine of layer board exempts from | |
| CN103640084B (en) | A kind of circulating burden distribution system of producing ceramic wall and floor bricks | |
| CN205602685U (en) | A blanking machine on binary for LCD product manufacture processing | |
| CN109092625A (en) | A kind of combined type spot gluing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee after: InfoVision Optoelectronics(Kunshan)Co.,Ltd. Address before: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee before: INFOVISION OPTOELECTRONICS (KUNSHAN) Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |