CN110262185A - It is etched by light the control method and photoetch equipment of equipment - Google Patents

It is etched by light the control method and photoetch equipment of equipment Download PDF

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Publication number
CN110262185A
CN110262185A CN201910508211.9A CN201910508211A CN110262185A CN 110262185 A CN110262185 A CN 110262185A CN 201910508211 A CN201910508211 A CN 201910508211A CN 110262185 A CN110262185 A CN 110262185A
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CN
China
Prior art keywords
light shield
equipment
photoetch
processed
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910508211.9A
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Chinese (zh)
Inventor
潘柏松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beihai Hui Ke Photoelectric Technology Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Beihai HKC Optoelectronics Technology Co Ltd
Original Assignee
Beihai Hui Ke Photoelectric Technology Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beihai Hui Ke Photoelectric Technology Co Ltd, Chongqing HKC Optoelectronics Technology Co Ltd filed Critical Beihai Hui Ke Photoelectric Technology Co Ltd
Priority to CN201910508211.9A priority Critical patent/CN110262185A/en
Publication of CN110262185A publication Critical patent/CN110262185A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80Etching

Abstract

The invention discloses a kind of control methods for being etched by light equipment, the following steps are included: obtaining the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the material information includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;In first light shield number and not identical second light shield number, the processing light shield in the photoetch equipment is changed to the corresponding processing light shield of the material to be processed;It controls the photoetch equipment and processes the material to be processed according to the machined parameters.The invention also discloses a kind of photoetch equipment, the effect for improving the production efficiency of photoetch equipment is reached.

Description

It is etched by light the control method and photoetch equipment of equipment
Technical field
The present invention relates to the control methods and photoetch equipment in display panel field, more particularly to photoetch equipment.
Background technique
The procedure for producing of Thin Film Transistor-LCD includes yellow light process, and yellow light process is needed in glass film and light Light shield is placed between source, to etch special pattern on glass film by the interception of light shield.Therefore, when light shield selects When mistake, the scrap of the product currently made will lead to.
At present to avoid leading to scrap of the product because light shield selects mistake, detection dress is generally provided on yellow light board It sets, can detecte the model for the light shield being currently installed on, whether the model that then contrasting detection arrives is identical as predetermined model, in difference When, yellow light board can stop working, and give a warning.During production, more by yellow light board production switch to be treated Frequently, cause yellow light board often out of service, give a warning, and continuous production can not be carried out, exist under production efficiency in this way The shortcomings that drop.
Summary of the invention
The main purpose of the present invention is to provide a kind of control method for being etched by light equipment and photoetch equipment, it is intended to reach Improve the effect of the production efficiency of photoetch equipment.
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the object Material information includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing in the photoetch equipment Light shield is changed to the corresponding processing light shield of the material to be processed;
It controls the photoetch equipment and processes the material to be processed according to the machined parameters.
Optionally, the first light shield of the material information for obtaining material to be processed and the processing light shield in photoetch equipment Before the step of number, further includes:
When keeping in the position in storehouse addition material to be processed to the material of the photoetch equipment, material pair to be processed is obtained The material information number answered, wherein the material information and material information number correspond;
It does not include the corresponding material letter of the material to be processed in the corresponding material information number of the photoetch equipment When ceasing number, the prompt information of outputting material addition mistake;
It include the corresponding material information of the material to be processed in the corresponding material information number of the photoetch equipment When number, the material to be processed is added to the position in storehouse of the photoetch equipment.
Optionally, the processing light shield by the photoetch equipment is changed to the corresponding processing of the material to be processed The step of light shield includes:
Control light shield more changing device dismantles the processing light shield in the photoetch equipment, and is numbered according to second light shield The corresponding processing light shield of the material to be processed is searched in light shield working area;
It controls light shield more changing device and the corresponding processing light shield of the material to be processed is installed.
Optionally, the step of control photoetch equipment processes the material to be processed according to the machined parameters Before, further includes:
Transmitting device is controlled by the material transmission to be processed to Working position.
Optionally, the first light shield of the material information for obtaining material to be processed and the processing light shield in photoetch equipment The step of number includes:
Control scanning means scans the identification label of the material to be processed and the processing light shield in the photoetch equipment;
The processing light shield on the material information and the photoetch equipment of the material to be processed is obtained according to scanning result The first light shield number.
Optionally, the first light shield of the material information for obtaining material to be processed and the processing light shield in photoetch equipment Number, the material information include the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed After step, further includes:
When first light shield number is identical as the second light shield number, the control photoetch equipment is executed The step of processing the material to be processed according to the machined parameters.
Optionally, the machined parameters include processing temperature and processing pressure.
In addition, to achieve the above object, the present invention also provides a kind of photoetch equipment, the photoetch equipment includes: to deposit Reservoir, processor and it is stored in the control program that can be run on the memory and on the processor, the control program The step of control method of photoetch equipment as described above is realized when being executed by the processor.
Optionally, the photoetch equipment is yellow light board, and the yellow light board includes light shield working area, for storing light Cover;The yellow light board further includes glass flake working area to be processed, for storing glass flake to be processed.
In addition, to achieve the above object, the present invention also provides be etched by light to set described in a kind of control method for being etched by light equipment Standby control method the following steps are included:
When keeping in position in storehouse addition material to be processed to the material of photoetch equipment, it is corresponding to obtain the material to be processed Material information number, wherein the material information and material information number correspond;
It include the corresponding material information of the material to be processed in the corresponding material information number of the photoetch equipment When number, the material that the material to be processed is added to the photoetch equipment is kept in into position in storehouse;
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the object Material information includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing in the photoetch equipment Light shield is changed to the corresponding processing light shield of the material to be processed;
Transmitting device is controlled by the material transferring to be processed in the position in storehouse to Working position;
Control the material to be processed that the photoetch equipment is processed according to the machined parameters on the Working position.
The control method and photoetch equipment for a kind of photoetch equipment that the embodiment of the present invention proposes, first obtain the first light shield Then number, the second light shield number and machined parameters judge whether the first light shield number and the second light shield number are identical, and the When one light shield number and not identical the second light shield number, it is corresponding that the processing light shield being etched by light in equipment is changed to material to be processed Processing light shield (i.e. the second light shield number corresponding processing light shield) control the photoetch equipment after the completion of light shield replacement The material to be processed is processed according to the machined parameters, due to described to be added in current installed processing light shield and processing When needing processing light shield to be used not identical when work material, current mounted processing light shield can be changed to target processing light Cover, so that photoetch equipment will not stop when current mounted light shield light shield corresponding with material to be processed is not identical The effect for improving the production efficiency of photoetch equipment has been reached in work in this way.
Detailed description of the invention
Fig. 1 is the terminal structure schematic diagram for the hardware running environment that the embodiment of the present invention is related to;
Fig. 2 is the flow diagram of an embodiment of the control method of present invention photoetch equipment;
Fig. 3 is the refinement flow diagram of step S20 in an embodiment of the control method of present invention photoetch equipment;
Fig. 4 is the flow diagram of another embodiment of the present invention;
Fig. 5 is the flow diagram of further embodiment of this invention.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not intended to limit the present invention.
The primary solutions of the embodiment of the present invention are:
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the object Material information includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing in the photoetch equipment Light shield is changed to the corresponding processing light shield of the material to be processed;
It controls the photoetch equipment and processes the material to be processed according to the machined parameters.
The control method and photoetch equipment for a kind of photoetch equipment that the embodiment of the present invention proposes, first obtain the first light shield Then number, the second light shield number and machined parameters judge whether the first light shield number and the second light shield number are identical, and the When one light shield number and not identical the second light shield number, it is corresponding that the processing light shield being etched by light in equipment is changed to material to be processed Processing light shield (i.e. the second light shield number corresponding processing light shield) control the photoetch equipment after the completion of light shield replacement The material to be processed is processed according to the machined parameters, due to described to be added in current installed processing light shield and processing When needing processing light shield to be used not identical when work material, current mounted processing light shield can be changed to target processing light Cover, so that photoetch equipment will not stop when current mounted light shield light shield corresponding with material to be processed is not identical The effect for improving the production efficiency of photoetch equipment has been reached in work in this way.
As shown in Figure 1, Fig. 1 is the terminal structure schematic diagram for the hardware running environment that the embodiment of the present invention is related to.
The terminal of that embodiment of the invention can be the terminal devices such as yellow light board.
As shown in Figure 1, the terminal may include: processor 1001, such as CPU, light shield more changing device 1004, scanning means 1003, memory 1005, communication bus 1002.Wherein, communication bus 1002 is for realizing the connection communication between these components. Scanning means 1003 may include video camera, two-dimensional code scanning instrument, barcode scanner and/or radiofrequency signal identification instrument etc., Light shield replacement 1004 may include optionally mechanical arm.Memory 1005 can be high speed RAM memory, be also possible to stablize Memory (non-volatile memory), such as magnetic disk storage.Memory 1005 optionally can also be independently of preceding State the storage device of processor 1001.
It will be understood by those skilled in the art that the restriction of the not structure paired terminal of terminal structure shown in Fig. 1, can wrap It includes than illustrating more or fewer components, perhaps combines certain components or different component layouts.
As shown in Figure 1, as may include that operating system, network are logical in a kind of memory 1005 of computer storage medium Believe module, Subscriber Interface Module SIM and control program.
In terminal shown in Fig. 1, light shield more changing device 1004 is mainly used for according to processing light shield;Scanning means 1003 is main It is used to scan material to be processed and processes the identification label of light shield, to identify material to be processed and processing light shield;And processor 1001 can be used for calling the control program stored in memory 1005, and execute following operation:
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the object Material information includes the second light shield and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing in the photoetch equipment Light shield is changed to the corresponding processing light shield of the material to be processed;
It controls the photoetch equipment and processes the material to be processed according to the machined parameters.
Further, processor 1001 can call the control program stored in memory 1005, also execute following operation:
When keeping in the position in storehouse addition material to be processed to the material of the photoetch equipment, material pair to be processed is obtained The material information number answered, wherein the material information and material information number correspond;
It does not include the corresponding material letter of the material to be processed in the corresponding material information number of the photoetch equipment When ceasing number, the prompt information of outputting material addition mistake;
It include the corresponding material information of the material to be processed in the corresponding material information number of the photoetch equipment When number, the material that the material to be processed is added to the photoetch equipment is kept in into position in storehouse further, processor 1001 The control program stored in memory 1005 can be called, following operation is also executed:
Control light shield more changing device dismantles the processing light shield in the photoetch equipment, and is numbered according to second light shield The corresponding processing light shield of the material to be processed is searched in light shield working area;
It controls light shield more changing device and the corresponding processing light shield of the material to be processed is installed.
Further, processor 1001 can call the control program stored in memory 1005, also execute following operation:
Transmitting device is controlled by the material transmission to be processed to Working position.
Further, processor 1001 can call the control program stored in memory 1005, also execute following operation:
Control scanning means scans the identification label of the material to be processed and the processing light shield in the photoetch equipment;
The processing light shield on the material information and the photoetch equipment of the material to be processed is obtained according to scanning result The first light shield number.
Further, processor 1001 can call the control program stored in memory 1005, also execute following operation:
When first light shield number is identical as the second light shield number, the control photoetch equipment is executed The step of processing the material to be processed according to the machined parameters.
Referring to Fig. 2, in an embodiment of the control method of present invention photoetch equipment, the control of the photoetch equipment Method the following steps are included:
Step S10, the first light shield for obtaining the processing light shield on the material information and photoetch equipment of material to be processed is compiled Number, the material information includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In the present invention, first obtain the material information of material to be processed, wherein the material information include processing it is described to The identification information of processing light shield to be used is needed when processing materials, the id signal can be number, i.e., the described object to be processed Expect the second light shield number of corresponding processing light shield.The second light shield number can be the character being made of character and digit String.The light shield number is corresponded with the processing light shield, thus can be numbered according to the light shield and be distinguished different processing Light shield.There is different transparent figures on different processing light shields.The photoetch equipment, can be with by different processing light shields Different figures is etched on material to be processed.
The machined parameters may include the processing temperature being etched by light when equipment processes the material to be processed and add Work pressure.When the material to be processed is in different processing temperatures and/or processing pressure, different etching effects can be generated Fruit.
For example, the photoetch equipment can be yellow light board, the material to be processed can be glass thin to be etched Film.Transparent area and alternatively non-transparent district are provided on the light shield, the transparent area is to the unobstructed effect of light, and the alternatively non-transparent district can To block the light of light source sending, so that being upwardly formed shadow region relative to the negative side of light source in alternatively non-transparent district.Therefore, work as Huang When ray machine platform is etched by light glass film according to the pattern that the transparent area of light shield forms, the light that light source issues penetrates light transmission Area is radiated on glass film, so that the photosensitive material transmission photochemistry in region corresponding with transparent area is anti-on glass film It answers, to achieve the effect that photoetch.When glass flake be in different temperature and or pressure under when, photosensitive material sends photochemical Severe degree when learning reaction is not also identical.
Specifically, it when obtaining the first light shield number and the second light shield number, can first control described in scanning means scanning The identification label of material to be processed and the processing light shield in the photoetch equipment, wherein the identification label can be character String, two dimensional code, bar code and/or RF tag, the scanning means can be video camera, two-dimensional code scanning instrument, bar code and sweep Retouch instrument and/or radiofrequency signal identification instrument etc..According to the material information of the available material to be processed of scanning result and institute The the first light shield number for stating the processing light shield in photoetch equipment obtains the second light shield number for including in material information.
It should be noted that the first light shield number is current time mounted processing light in the photoetch equipment The number of cover, it is described second processing light shield when, it is described photoetch equipment processing current time need process material to be processed when, The number of the required processing light shield used.
Step S20, in first light shield number and not identical second light shield number, by the photoetch equipment On processing light shield be changed to the corresponding processing light shield of the material to be processed;
In the present invention, when getting first light shield number and the second light shield number, first judge described the Whether one light shield number numbers identical with second light shield.Judge the photoetch equipment currently installed processing light Whether cover is the light shield for needing to use when processing presently described material to be processed.
If the light shield used when the current installed processing light shield of photoetch equipment and the processing material to be processed It is not identical, then current mounted processing light shield is changed to the corresponding light shield of material to be processed.To pass through the object to be processed Expect corresponding processing light shield, processes the material to be processed.
It should be noted that the processing light shield can be mounted on by the movable connection method of grafting or clamping it is described It is etched by light in equipment, the photoetch equipment further includes light source, and the light shield is mounted on the light source and the material to be processed Between, so that can just expose to the material to be processed after the light that light source issues needs to pass through light shield from the transmission region of light shield On.
Specifically, referring to Fig. 3, it is corresponding that the processing light shield in the photoetch equipment is changed to the material to be processed Process light shield the step of include:
Step S21, control light shield more changing device dismantles the processing light shield in the photoetch equipment, and according to described second Light shield number searches the corresponding processing light shield of the material to be processed in light shield working area;
Step S22, control light shield more changing device installs the corresponding processing light shield of the material to be processed.
In the present invention, the light shield more changing device can be mechanical arm, due to processing light shield and photoetch equipment it Between be to be detachably connected, therefore can will be etched by light by mechanical arm under the current installed processing light shield of equipment dismantles Come, then the processing light shield disassembled is placed in the light shield working area of photoetch equipment.Wherein, the light shield working area is used In processing light shield of the storage photoetch equipment for the material to be processed of various different models.
After will be etched by light equipment installed processing light shield disassembly, it can be cleared off by scanning means in cover working area The identification marking of the processing light shield of storage, to search the corresponding processing light shield of the material to be processed.When finding object to be processed When expecting corresponding processing light shield, the corresponding processing light shield of material to be processed is taken out from light shield working area, and installs to photoetch The light shield installation site of equipment.
If the first light shield number is identical as the second light shield number, that is, it is etched by light equipment currently installed processing light shield It is identical as the light shield used when processing the material to be processed, then execute the step S30.
Step S30, it controls the photoetch equipment and processes the material to be processed according to the machined parameters.
In the present invention, when being etched by light equipment and being mounted with the corresponding processing light shield of material to be processed, illustrate photetching The material to be processed can be processed according to current mounted processing light shield by carving equipment.Therefore it can control photoetch Equipment processes material to be processed according to machined parameters.
Specifically, the photoetch equipment may include processing storehouse, and processing object to be processed is provided in the processing storehouse The Working position of material, the processing storehouse can be with sealed set.Therefore, photoetch equipment, which can control, is adjusted in the processing storehouse Air pressure and/or temperature.
Since machined parameters include process air pressure and processing temperature, photoetch equipment can will process the gas in storehouse Pressure and temperature are adjusted to numerical value identical with the process air pressure and processing temperature.
It should be noted that the machined parameters can also include processing humidity, so that photoetch equipment can also basis Process humidity regulation processing storehouse in humidity value and/or the machined parameters can also include except processing temperature, processing humidity and Other parameters that can influence to be etched by light effect except processing pressure.
In the present embodiment, the first light shield number, the second light shield number and machined parameters are first obtained, then judge the first light Whether cover number and the second light shield number are identical, and in the first light shield number and not identical the second light shield number, will be etched by light Processing light shield in equipment is changed to the corresponding processing light shield of material to be processed (i.e. the second light shield numbers corresponding processing light shield), After the completion of light shield replacement, control the photoetch equipment according to the machined parameters processing material to be processed, due to It, can be by when current installed processing light shield and while processing the material to be processed need processing light shield to be used not identical Current mounted processing light shield is changed to target processing light shield, so that corresponding with material to be processed in current mounted light shield Light shield it is not identical when, photoetch equipment will not stop working, and in this way reach the production efficiency for improving photoetch equipment Effect.
Referring to Fig. 4, based on the above embodiment, in another embodiment, before the step S10 further include:
Step S40, it when keeping in the position in storehouse addition material to be processed to the material of the photoetch equipment, obtains to be added The corresponding material information number of work material;
Step S50, whether judge in the corresponding material information number of the photoetch equipment comprising the material to be processed Corresponding material information number;
Step S60, corresponding not comprising the material to be processed in the corresponding material information number of the photoetch equipment Material information number when, outputting material addition mistake prompt information;
Step S70, corresponding comprising the material to be processed in the corresponding material information number of the photoetch equipment When material information number, the material that the material to be processed is added to the photoetch equipment is kept in into position in storehouse.
In the present invention, the photoetch equipment is provided with the material for storing material to be processed and keeps in position in storehouse, described The material to be processed that material keeps in the storage in position in storehouse can be transmitted to adding for photoetch equipment by transmitting devices such as transmission belts In work storehouse, to process the material to be processed by photoetch equipment.
Before adding the material to be processed into the temporary position in storehouse of the material, can first obtain will be added to institute The material information number A that material keeps in the material to be processed of position in storehouse is stated, then the corresponding material information of retrieval photoetch equipment is compiled Number whether include the material information number A.If being etched by light the corresponding material information number of equipment includes the material information Number A then illustrates the light of the machined parameters that the material to be processed is stored in the photoetch equipment and the photoetch equipment There is the processing light shield for processing the material to be processed in Lacquer finish cover working area, to allow to add the material to be processed Material to the photoetch equipment is kept in position in storehouse.
If being etched by light the corresponding material information number of equipment does not include the material information number A, illustrate to be etched by light The machined parameters of the material to be processed are not preserved in equipment, there is no use in the light shield working area of Mingguang City's etching machines in other words In the processing light shield for processing the material to be processed.To cause the photoetch equipment to process the material to be processed, from And it can control the prompt information of photoetch equipment outputting material addition mistake.Wherein, the prompt letter of the material addition mistake Breath can be output by voice, and when being output by voice the prompt information of material addition mistake, the photoetch equipment is also wrapped Loudspeaker is included, for exporting speech prompt information;And/or the prompt information of the material addition mistake can also pass through control pair Indicator light flashing output is answered, when flashing the prompt information of outputting material addition mistake by control instructions lamp, the photoetch Equipment further includes the indicator light for exporting prompt information;And/or the prompt information of the material addition mistake can also pass through To intelligent terminal and or control panel send prompt information, with by intelligent terminal and or control panel export material addition The prompt information of mistake.
In the present embodiment, it when keeping in the position in storehouse addition material to be processed to the material of the photoetch equipment, obtains The corresponding material information number of material to be processed is taken, does not then include in the corresponding material information number of the photoetch equipment When the corresponding material information number of the material to be processed, the prompt information of outputting material addition mistake in this way can be to avoid object Material addition is wrong and causes photoetch equipment out of service, to reach the mesh for further increasing photoetch production efficiency of equipment 's.
Referring to Fig. 5, it is based on any of the above embodiment, in another embodiment, before the step S30, further includes:
Step S80, transmitting device is controlled by the material transferring to be processed to Working position.
In the present invention, when keeping in position in storehouse to the material of photoetch equipment and adding material to be processed, first obtain it is described to Processing materials corresponding material information number, then include in the corresponding material information number of the photoetch equipment described in When the corresponding material information number of processing materials, the material to be processed is added to the material temporary storing bin of the photoetch equipment Position, or do not include the corresponding material information of the material to be processed in the corresponding material information of the photoetch equipment is numbered When number, the prompt information of outputting material addition mistake.
The material to be processed can be kept in the processing storehouse that photoetch equipment is transmitted in position in storehouse by transmitting device from material, The photoetch available material of equipment keeps in the object that the current waiting in position in storehouse is transferred to the material to be processed in processing storehouse Expect the first light shield number of information and the processing light shield in the photoetch equipment, the material information includes the object to be processed Expect the second light shield and machined parameters of corresponding processing light shield, is then compiled in first light shield number with second light shield When number not identical, the processing light shield in the photoetch equipment is changed to the corresponding processing light shield of the material to be processed, When the Working position that material to be processed arrives, controls the photoetch equipment and processed on the Working position according to the machined parameters The material to be processed.
In the present embodiment, the photoetch equipment is provided with the material for storing material to be processed and keeps in position in storehouse, passes Material can be kept in the material to be processed stored in position in storehouse and passed on the Working position in photoetch equipment processing storehouse by defeated device, this Sample has ensured processing matter when photoetch equipment treats processing materials processing while promoting the processing efficiency of photoetch equipment Amount.
In addition, the embodiment of the present invention also proposes that a kind of photoetch equipment, the photoetch equipment include: memory, processing Device and it is stored in the control program that can be run on the memory and on the processor, the control program is by the processing The step of control method of photoetch equipment described in as above each embodiment is realized when device executes.
In one embodiment, the photoetch equipment is yellow light board, and the yellow light board includes light shield working area, is used for Store light shield;The yellow light board further includes glass flake working area to be processed, for storing glass flake to be processed.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row His property includes, so that the process, method, article or the system that include a series of elements not only include those elements, and And further include other elements that are not explicitly listed, or further include for this process, method, article or system institute it is intrinsic Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including being somebody's turn to do There is also other identical elements in the process, method of element, article or system.
The serial number of the above embodiments of the invention is only for description, does not represent the advantages or disadvantages of the embodiments.
Through the above description of the embodiments, those skilled in the art can be understood that above-described embodiment side Method can be realized by means of software and necessary general hardware platform, naturally it is also possible to by hardware, but in many cases The former is more preferably embodiment.Based on this understanding, technical solution of the present invention substantially in other words does the prior art The part contributed out can be embodied in the form of software products, which is stored in one as described above In storage medium (such as ROM/RAM, magnetic disk, CD), including some instructions are used so that a terminal device (can be with yellow light machine Platform) execute method described in each embodiment of the present invention.
The above is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills Art field, is included within the scope of the present invention.

Claims (10)

1. a kind of control method for being etched by light equipment, which is characterized in that the control method of the photoetch equipment includes following step It is rapid:
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the material letter Breath includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing light shield in the photoetch equipment It is changed to the corresponding processing light shield of the material to be processed;
It controls the photoetch equipment and processes the material to be processed according to the machined parameters.
2. the control method of photoetch equipment as described in claim 1, which is characterized in that the object for obtaining material to be processed Before the step of expecting the first light shield number of the processing light shield in information and photoetch equipment, further includes:
When keeping in the position in storehouse addition material to be processed to the material of the photoetch equipment, it is corresponding to obtain material to be processed Material information number, wherein the material information and material information number correspond;
It does not include that the corresponding material information of the material to be processed is compiled in the corresponding material information number of the photoetch equipment Number when, outputting material addition mistake prompt information;
It include the corresponding material information number of the material to be processed in the corresponding material information number of the photoetch equipment When, the material that the material to be processed is added to the photoetch equipment is kept in into position in storehouse.
3. as described in claim 1 photoetch equipment control method, which is characterized in that it is described will be in the photoetch equipment Processing light shield the step of being changed to the material to be processed corresponding processing light shield include:
Control light shield more changing device dismantles the processing light shield in the photoetch equipment, and is numbered according to second light shield in light It covers working area and searches the corresponding processing light shield of the material to be processed;
It controls light shield more changing device and the corresponding processing light shield of the material to be processed is installed.
4. the control method of photoetch equipment as described in claim 1, which is characterized in that the control photoetch equipment Before the step of processing the material to be processed according to the machined parameters, further includes:
Transmitting device is controlled by the material transmission to be processed to Working position.
5. the control method of photoetch equipment as described in claim 1, which is characterized in that the object for obtaining material to be processed Material information and be etched by light equipment on processing light shield the first light shield number the step of include:
Control scanning means scans the identification label of the material to be processed and the processing light shield in the photoetch equipment;
The of the processing light shield on the material information and the photoetch equipment of the material to be processed is obtained according to scanning result One light shield number.
6. the control method of photoetch equipment as described in claim 1, which is characterized in that the object for obtaining material to be processed First light shield of the processing light shield expecting information and being etched by light in equipment is numbered, and the material information includes the material pair to be processed After the step of the second light shield number and machined parameters of the processing light shield answered, further includes:
When first light shield number is identical with the second light shield number, execution is described control the photoetch equipment according to The machined parameters process the step of material to be processed.
7. the control method of photoetch equipment as described in claim 1, which is characterized in that the machined parameters include processing temperature Degree and processing pressure.
8. a kind of photoetch equipment, which is characterized in that the photoetch equipment includes: memory, processor and is stored in described On memory and the control program that can run on the processor, realized such as when the control program is executed by the processor Described in any one of claims 1 to 7 the step of the control method of photoetch equipment.
9. photoetch equipment as claimed in claim 8, which is characterized in that the photoetch equipment is yellow light board, the Huang Ray machine platform includes light shield working area, for storing light shield;The yellow light board further includes glass flake working area to be processed, is used for Store glass flake to be processed.
10. a kind of control method for being etched by light equipment, which is characterized in that the control method of the photoetch equipment includes following step It is rapid:
When keeping in position in storehouse addition material to be processed to the material of photoetch equipment, the corresponding material of the material to be processed is obtained Information encoding, wherein the material information and material information number correspond;
It include the corresponding material information number of the material to be processed in the corresponding material information number of the photoetch equipment When, the material that the material to be processed is added to the photoetch equipment is kept in into position in storehouse;
Obtain the first light shield number of the processing light shield on the material information and photoetch equipment of material to be processed, the material letter Breath includes the second light shield number and machined parameters of the corresponding processing light shield of the material to be processed;
In first light shield number and not identical second light shield number, by the processing light shield in the photoetch equipment It is changed to the corresponding processing light shield of the material to be processed;
Transmitting device is controlled by the material transferring to be processed in the position in storehouse to Working position;
Control the material to be processed that the photoetch equipment is processed according to the machined parameters on the Working position.
CN201910508211.9A 2019-06-12 2019-06-12 It is etched by light the control method and photoetch equipment of equipment Pending CN110262185A (en)

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CN107422615A (en) * 2017-09-25 2017-12-01 武汉华星光电技术有限公司 Exposure machine control method, exposure machine control system and storage medium
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169129A (en) * 1984-09-13 1986-04-09 Canon Inc Automatic reticle plate replacement
TW200606743A (en) * 2004-08-02 2006-02-16 Powerchip Semiconductor Corp Mask management method and bar code reading apparatus thereof
CN105334700A (en) * 2014-07-21 2016-02-17 中芯国际集成电路制造(上海)有限公司 Method and device for assisting switching photomask of photolithography area machine and machine
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Application publication date: 20190920