CN204455282U - The continuous film plating machine of thin sheet glass aluminium mirror - Google Patents

The continuous film plating machine of thin sheet glass aluminium mirror Download PDF

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Publication number
CN204455282U
CN204455282U CN201520064778.9U CN201520064778U CN204455282U CN 204455282 U CN204455282 U CN 204455282U CN 201520064778 U CN201520064778 U CN 201520064778U CN 204455282 U CN204455282 U CN 204455282U
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CN
China
Prior art keywords
station
coating apparatus
pull
film coating
film
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Expired - Fee Related
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CN201520064778.9U
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Chinese (zh)
Inventor
朱建明
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ZHAOQING KERUN VACUUM EQUIPMENT CO Ltd
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ZHAOQING KERUN VACUUM EQUIPMENT CO Ltd
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Priority to CN201520064778.9U priority Critical patent/CN204455282U/en
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Publication of CN204455282U publication Critical patent/CN204455282U/en
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Abstract

The utility model discloses a kind of continuous film plating machine of thin sheet glass aluminium mirror, comprise workpiece transfer device, slice loading and unloading device and film coating apparatus, film coating apparatus is rotary structure, film coating apparatus is provided with come in and go out sheet station and plated film station, workpiece transfer device is located at outside film coating apparatus, workpiece transfer device is provided with handling sheet station, arranges rotatable slice loading and unloading device between handling sheet station and discrepancy sheet station; Slice loading and unloading device adopts pull-fork assembly clamping with the tray for work pieces of glass pieces, and is transported in handling sheet station by pivot arm and comes in and goes out between sheet station.This continuous film plating machine is by being set to rotary structure by film coating apparatus, and coordinate revolving slice loading and unloading device, the compact construction of coating equipment can be made, floor space is little, and save equipment cost, its energy consumption is also low, compared with traditional linear horizontal coating machine, its energy consumption is only 1/10 of traditional coating equipment, and floor space is also only 1/10 of traditional coating equipment, is more conducive to the control of production cost.

Description

The continuous film plating machine of thin sheet glass aluminium mirror
Technical field
The utility model relates to glass coating technical field, particularly a kind of continuous film plating machine of thin sheet glass aluminium mirror.
Background technology
For the plated film of thin sheet glass aluminium mirror, current filming equipment mostly is the linear horizontal coating machine that many vacuum chambers are connected to form, the coating equipment huge structure of this structure formation, floor space also quite large, energy consumption also higher, equipment manufacturing cost is also high.In addition, in the coating equipment of this structure, be directly located on workpiece transfer device by each vacuum chamber being in the different process stage, the stopping property of its coating chamber can not well be ensured; Meanwhile, on turnover sheet station, the handling of glass pieces can only be completed by manual operation, can not realize continuous print automated job, and its working efficiency is lower, and glass pieces is easily contaminated; Glass pieces is directly positioned on workpiece transfer device and carries, and for thin sheet glass, usually produces broken phenomenon, affect normally carrying out of coating process, be also unfavorable for the cost control of glass coating in the actual course of processing.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of compact construction, energy consumption lower and the continuous film plating machine of the thin sheet glass aluminium mirror that Product processing is stable.
The technical solution of the utility model is: a kind of continuous film plating machine of thin sheet glass aluminium mirror, comprise workpiece transfer device, slice loading and unloading device and film coating apparatus, film coating apparatus is rotary structure, film coating apparatus is provided with come in and go out sheet station and plated film station, workpiece transfer device is located at outside film coating apparatus, workpiece transfer device is provided with handling sheet station, arranges rotatable slice loading and unloading device between handling sheet station and discrepancy sheet station; Slice loading and unloading device adopts pull-fork assembly clamping with the tray for work pieces of glass pieces, and is transported in handling sheet station by pivot arm and comes in and goes out between sheet station.
Described slice loading and unloading device comprises turning axle, the first rotating machine, pivot arm, pull-fork assembly and pull-fork assembly lift cylinder, turning axle is vertically arranged, first rotating machine is located at bottom turning axle, rotating arms horizontal is located at turning axle top, pivot arm two ends arrange pull-fork assembly lift cylinder respectively, and bottom each pull-fork assembly lift cylinder, correspondence is provided with one group of pull-fork assembly.
Described pull-fork assembly comprises shift fork, shift fork rotating shaft, shift fork connecting rod, shift fork cylinder and cover plate, be fixedly connected with in the middle part of cover plate with bottom pull-fork assembly lift cylinder, cover plate edge is distributed with 4 shift forks, each shift fork correspondence is provided with a shift fork rotating shaft, connected by shift fork connecting rod between two adjacent shift fork rotating shafts, one end of each shift fork connecting rod arranges a shift fork cylinder; During pull-fork assembly holding workpiece pallet, 4 shift forks are embedded in below tray for work pieces.When pull-fork assembly realizes piece-holder, first drop to glass pieces place by pull-fork assembly lift cylinder shift fork assembly, then by shift fork air cylinder driven shift fork axis of rotation, corresponding shift fork is produced, grabbing workpiece pallet, risen by pull-fork assembly lift cylinder shift fork assembly again, carry out Switch of working position finally by pivot arm; In this process, cover plate hides tray for work pieces, can prevent glass pieces to come off or contaminated from tray for work pieces.
When described slice loading and unloading device remains static, the pull-fork assembly being positioned at pivot arm one end is positioned at above the load/unload stations of workpiece transfer device, and the pull-fork assembly being positioned at the pivot arm the other end is positioned at above the discrepancy sheet station of film coating apparatus.Pivot arm in slice loading and unloading device can carry out 180 ° of rotations, the pull-fork assembly at pivot arm two ends is switched between handling sheet station and discrepancy sheet station, realizes the conveying of glass pieces.
Described film coating apparatus comprises cavity, rotating disk, rotary seat and the second rotating machine, and rotating disk is located in cavity, and the second rotating machine is located at below rotating disk, and the output terminal of the second rotating machine is connected with bottom rotating disk by rotary seat; Rotating disk is provided with multiple lifting supporting plate, and each lifting supporting plate is corresponding with discrepancy sheet station and plated film station respectively, and bottom each lifting supporting plate, correspondence is provided with pallet lift cylinder.
In the cavity of described film coating apparatus, the part corresponding with the sheet station of coming in and going out is that workpiece pass in and out chamber, and workpiece turnover chamber external first is bled unit, first bleed unit comprise connect successively main valve, lead and take out pump and the first prime mechanical pump; The part corresponding with plated film station is plated film chamber, plated film chamber interior is provided with magnetron sputtering target, plated film chamber external second is bled unit, and the second unit of bleeding comprises the high vacuum valve, fine pumping pump, fore line valve, prime lobe pump and the second prime mechanical pump that connect successively.
In described film coating apparatus, the top of sheet station of coming in and going out also is provided with vacuum gate valve, the setting of vacuum gate valve, can ensure the vacuum tightness in film coating apparatus cavity better, reach better coating effects.
As a kind of preferred version, described film coating apparatus is provided with come in and go out sheet station and a plated film station, is provided with workpiece transfer device outside the film coating apparatus at sheet station place of coming in and going out.In this structure, the angle that the rotating disk in film coating apparatus rotates at every turn is 180 °.
As another kind of preferred version, described film coating apparatus is provided with two come in and go out sheet station and two plated film stations, and discrepancy sheet station and plated film station are alternately distributed, and is respectively equipped with workpiece transfer device outside the film coating apparatus at each sheet station place of coming in and going out.In this structure, the angle that the rotating disk in film coating apparatus rotates at every turn is 90 °.
When the continuous film plating machine of this thin sheet glass aluminium mirror uses, its principle is: workpiece transfer device runs, the tray for work pieces being placed with glass pieces is sent into handling sheet station, meanwhile, be placed with the tray for work pieces having completed coated glass workpiece in film coating apparatus and enter sheet station of coming in and going out; Slice loading and unloading device runs, 2 groups of pull-fork assembly gripping simultaneously handling sheet stations and the tray for work pieces of coming in and going out on sheet station, pivot arm rotates 180 °, drive 2 tray for work pieces switches, now, glass pieces to be coated enters the discrepancy sheet station of film coating apparatus, and the glass pieces having completed plated film enters the handling sheet station of conveying belt; Workpiece transfer device runs, and the glass pieces completing plated film sent, meanwhile, the turntable rotation in film coating apparatus, delivers to plated film station by glass pieces to be coated and carry out aluminium plating film.
The utility model, relative to prior art, has following beneficial effect:
The technique that this continuous film plating machine is mainly aluminized for thin sheet glass proposes, by film coating apparatus is set to rotary structure, and coordinate revolving slice loading and unloading device, can make the compact construction of coating equipment, floor space is little, save equipment cost, its energy consumption is also low, and compared with traditional linear horizontal coating machine, its energy consumption is only 1/10 of traditional coating equipment, floor space is also only 1/10 of traditional coating equipment, is more conducive to the control of production cost.
In this continuous film plating machine, the whole course of conveying of glass pieces is all completed by tray for work pieces, effectively can prevent the phenomenon of glass shards; Meanwhile, the type of drive of this continuous film plating machine is simple, and process velocity is fast, and the production cycle can be down to less than 15 seconds.
In this continuous film plating machine, only need to be equipped with vacuum suction unit for discrepancy sheet station and plated film station, its energy consumption is effectively reduced.
Accompanying drawing explanation
Fig. 1 is the structural representation of this continuous film plating machine embodiment 1.
Fig. 2 is that the A-A of Fig. 1 is to cross sectional view.
Fig. 3 is the structural representation of slice loading and unloading device in Fig. 1.
Fig. 4 is that B-B in Fig. 3 is to cross sectional view.
Fig. 5 is that C-C in Fig. 3 is to cross sectional view.
Fig. 6 is the structural representation of this continuous film plating machine embodiment 2.
Fig. 7 is the structural representation of this continuous film plating machine embodiment 3.
Embodiment
Below in conjunction with embodiment, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment 1
The continuous film plating machine of a kind of thin sheet glass aluminium of the present embodiment mirror, as shown in Figure 1 or 2, comprise workpiece transfer device 1, slice loading and unloading device 2 and film coating apparatus 3, film coating apparatus is rotary structure, film coating apparatus is provided with come in and go out sheet station 4 and a plated film station 5, workpiece transfer device is located at outside film coating apparatus, and workpiece transfer device is provided with handling sheet station 6, arranges rotatable slice loading and unloading device between handling sheet station and discrepancy sheet station; Slice loading and unloading device adopts pull-fork assembly clamping with the tray for work pieces of glass pieces, and is transported in handling sheet station by pivot arm and comes in and goes out between sheet station.
As shown in Figure 3 or Figure 4, slice loading and unloading device comprises turning axle 7, first rotating machine 8, pivot arm 9, pull-fork assembly 10 and pull-fork assembly lift cylinder 11, turning axle is vertically arranged, first rotating machine is located at bottom turning axle, rotating arms horizontal is located at turning axle top, pivot arm two ends arrange pull-fork assembly lift cylinder respectively, and bottom each pull-fork assembly lift cylinder, correspondence is provided with one group of pull-fork assembly.
As shown in Fig. 3 or Fig. 5, pull-fork assembly comprises shift fork 10-1, shift fork rotating shaft 10-2, shift fork connecting rod 10-3, shift fork cylinder 10-4 and cover plate 10-5, be fixedly connected with in the middle part of cover plate with bottom pull-fork assembly lift cylinder, cover plate edge is distributed with 4 shift forks, each shift fork correspondence is provided with a shift fork rotating shaft, connected by shift fork connecting rod between two adjacent shift fork rotating shafts, one end of each shift fork connecting rod arranges a shift fork cylinder; During pull-fork assembly holding workpiece pallet, 4 shift forks are embedded in below tray for work pieces 27.When pull-fork assembly realizes piece-holder, first drop to glass pieces place by pull-fork assembly lift cylinder shift fork assembly, then by shift fork air cylinder driven shift fork axis of rotation, corresponding shift fork is produced, grabbing workpiece pallet, risen by pull-fork assembly lift cylinder shift fork assembly again, carry out Switch of working position finally by pivot arm; In this process, cover plate hides tray for work pieces, can prevent glass pieces to come off or contaminated from tray for work pieces.
When slice loading and unloading device remains static, the pull-fork assembly being positioned at pivot arm one end is positioned at above the load/unload stations of workpiece transfer device, and the pull-fork assembly being positioned at the pivot arm the other end is positioned at above the discrepancy sheet station of film coating apparatus.Pivot arm in slice loading and unloading device can carry out 180 ° of rotations, the pull-fork assembly at pivot arm two ends is switched between handling sheet station and discrepancy sheet station, realizes the conveying of glass pieces.
As shown in Figure 1, film coating apparatus comprises cavity 12, rotating disk 13, rotary seat 14 and the second rotating machine 15, and rotating disk is located in cavity, and the second rotating machine is located at below rotating disk, and the output terminal of the second rotating machine is connected with bottom rotating disk by rotary seat; Rotating disk is provided with multiple lifting supporting plate 16, and each lifting supporting plate is corresponding with discrepancy sheet station and plated film station respectively, and bottom each lifting supporting plate, correspondence is provided with pallet lift cylinder 17.
In the cavity of film coating apparatus, the part corresponding with sheet station of coming in and going out is that workpiece passes in and out chamber, workpiece turnover chamber external first is bled unit, as shown in Figure 1, first bleed unit comprise connect successively main valve 18, main take out pump 19 (can lobe pump be adopted) and the first prime mechanical pump 20 (sliding vane rotary pump or slide valve pump can be adopted); The part corresponding with plated film station is plated film chamber, plated film chamber interior is provided with magnetron sputtering target 21, plated film chamber external second is bled unit, and the second unit of bleeding comprises the high vacuum valve 22, fine pumping pump 23 (can adopt diffusion pump, molecular pump or cryopump), fore line valve 24, prime lobe pump 25 and the second prime mechanical pump 26 (can adopt sliding vane rotary pump or slide valve pump) that connect successively.
When the continuous film plating machine of this thin sheet glass aluminium mirror uses, its principle is: workpiece transfer device runs, the tray for work pieces being placed with glass pieces is sent into handling sheet station, meanwhile, be placed with the tray for work pieces having completed coated glass workpiece in film coating apparatus and enter sheet station of coming in and going out; Slice loading and unloading device runs, 2 groups of pull-fork assembly gripping simultaneously handling sheet stations and the tray for work pieces of coming in and going out on sheet station, pivot arm rotates 180 °, drive 2 tray for work pieces switches, now, glass pieces to be coated enters the discrepancy sheet station of film coating apparatus, and the glass pieces having completed plated film enters the handling sheet station of conveying belt; Workpiece transfer device runs, and the glass pieces completing plated film sent, meanwhile, the turntable rotation in film coating apparatus, delivers to plated film station by glass pieces to be coated and carry out aluminium plating film.
Embodiment 2
The continuous film plating machine of a kind of thin sheet glass aluminium of the present embodiment mirror, as shown in Figure 6, compared with embodiment 1, its difference is: in film coating apparatus, the top of discrepancy sheet station is also provided with vacuum gate valve 28, the push-pull valve that vacuum gate valve can adopt market general.The setting of vacuum gate valve, can ensure the vacuum tightness in film coating apparatus cavity better, reach better coating effects.
Embodiment 3
The continuous film plating machine of a kind of thin sheet glass aluminium of the present embodiment mirror, as shown in Figure 7, compared with embodiment 1, its difference is: film coating apparatus is provided with two come in and go out sheet station and two plated film stations, discrepancy sheet station and plated film station are alternately distributed, and are respectively equipped with workpiece transfer device outside the film coating apparatus at each sheet station place of coming in and going out.In this structure, the angle that the rotating disk in film coating apparatus rotates at every turn is 90 °.
As mentioned above, just can realize the utility model preferably, above-described embodiment is only preferred embodiment of the present utility model, is not used for limiting practical range of the present utility model; Namely all equalizations done according to the utility model content change and modify, all by the utility model claim scope required for protection is contained.

Claims (9)

1. the continuous film plating machine of thin sheet glass aluminium mirror, it is characterized in that, comprise workpiece transfer device, slice loading and unloading device and film coating apparatus, film coating apparatus is rotary structure, film coating apparatus is provided with come in and go out sheet station and plated film station, workpiece transfer device is located at outside film coating apparatus, and workpiece transfer device is provided with handling sheet station, arranges rotatable slice loading and unloading device between handling sheet station and discrepancy sheet station; Slice loading and unloading device adopts pull-fork assembly clamping with the tray for work pieces of glass pieces, and is transported in handling sheet station by pivot arm and comes in and goes out between sheet station.
2. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 1, it is characterized in that, described slice loading and unloading device comprises turning axle, the first rotating machine, pivot arm, pull-fork assembly and pull-fork assembly lift cylinder, turning axle is vertically arranged, first rotating machine is located at bottom turning axle, rotating arms horizontal is located at turning axle top, and pivot arm two ends arrange pull-fork assembly lift cylinder respectively, and bottom each pull-fork assembly lift cylinder, correspondence is provided with one group of pull-fork assembly.
3. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 2, it is characterized in that, described pull-fork assembly comprises shift fork, shift fork rotating shaft, shift fork connecting rod, shift fork cylinder and cover plate, be fixedly connected with in the middle part of cover plate with bottom pull-fork assembly lift cylinder, cover plate edge is distributed with 4 shift forks, each shift fork correspondence is provided with a shift fork rotating shaft, is connected between two adjacent shift fork rotating shafts by shift fork connecting rod, and one end of each shift fork connecting rod arranges a shift fork cylinder; During pull-fork assembly holding workpiece pallet, 4 shift forks are embedded in below tray for work pieces.
4. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 2, it is characterized in that, when described slice loading and unloading device remains static, the pull-fork assembly being positioned at pivot arm one end is positioned at above the load/unload stations of workpiece transfer device, and the pull-fork assembly being positioned at the pivot arm the other end is positioned at above the discrepancy sheet station of film coating apparatus.
5. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 1, it is characterized in that, described film coating apparatus comprises cavity, rotating disk, rotary seat and the second rotating machine, rotating disk is located in cavity, second rotating machine is located at below rotating disk, and the output terminal of the second rotating machine is connected with bottom rotating disk by rotary seat; Rotating disk is provided with multiple lifting supporting plate, and each lifting supporting plate is corresponding with discrepancy sheet station and plated film station respectively, and bottom each lifting supporting plate, correspondence is provided with pallet lift cylinder.
6. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 5, it is characterized in that, in the cavity of described film coating apparatus, the part corresponding with sheet station of coming in and going out is that workpiece passes in and out chamber, workpiece turnover chamber external first is bled unit, first bleed unit comprise connect successively main valve, mainly take out pump and the first prime mechanical pump; The part corresponding with plated film station is plated film chamber, plated film chamber interior is provided with magnetron sputtering target, plated film chamber external second is bled unit, and the second unit of bleeding comprises the high vacuum valve, fine pumping pump, fore line valve, prime lobe pump and the second prime mechanical pump that connect successively.
7. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 1, is characterized in that, in described film coating apparatus, the top of sheet station of coming in and going out also is provided with vacuum gate valve.
8. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 1 or 7, is characterized in that, described film coating apparatus is provided with come in and go out sheet station and a plated film station, is provided with workpiece transfer device outside the film coating apparatus at sheet station place of coming in and going out.
9. the continuous film plating machine of thin sheet glass aluminium mirror according to claim 1 or 7, it is characterized in that, described film coating apparatus is provided with two come in and go out sheet station and two plated film stations, discrepancy sheet station and plated film station are alternately distributed, and are respectively equipped with workpiece transfer device outside the film coating apparatus at each sheet station place of coming in and going out.
CN201520064778.9U 2015-01-29 2015-01-29 The continuous film plating machine of thin sheet glass aluminium mirror Expired - Fee Related CN204455282U (en)

Priority Applications (1)

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CN201520064778.9U CN204455282U (en) 2015-01-29 2015-01-29 The continuous film plating machine of thin sheet glass aluminium mirror

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109055905A (en) * 2018-08-13 2018-12-21 武汉科瑞达真空科技有限公司 A kind of Horizontal mobile cathode coating machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109055905A (en) * 2018-08-13 2018-12-21 武汉科瑞达真空科技有限公司 A kind of Horizontal mobile cathode coating machine
CN109055905B (en) * 2018-08-13 2020-08-25 武汉科瑞达真空科技有限公司 Horizontal moving cathode film coating machine

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150708

Termination date: 20190129

CF01 Termination of patent right due to non-payment of annual fee