CN213388871U

CN213388871U - Double-sided coating film turning device and coating machine

Info

Publication number: CN213388871U
Application number: CN202021596996.4U
Authority: CN
Inventors: 徐琛
Original assignee: Longi Green Energy Technology Co Ltd
Current assignee: Longi Green Energy Technology Co Ltd
Priority date: 2020-08-04
Filing date: 2020-08-04
Publication date: 2021-06-08
Anticipated expiration: 2030-08-04

Abstract

The utility model discloses a piece device and coating machine are turned over in two-sided coating film relates to vacuum coating technical field to the height of circling round that support plate tilting mechanism needs among the solution correlation technique is high, turns over a chamber occupation space big, and increases the fault rate and the problem of cost of production step, equipment. The double-sided coating film turning device comprises: support plate and upset actuating mechanism. The carrier plate comprises two guide rails, a plurality of rotating pieces and a plurality of trays for fixing the pieces to be plated. The tray is a double-sided hollow tray. The tray is supported between the two guide rails through the corresponding rotating parts, and the overturning driving mechanism can drive the corresponding rotating parts to rotate so as to overturn the tray. The coating machine comprises the double-sided coating turnover device provided by the technical scheme. The utility model provides a piece device is turned over in two-sided coating film is used for the coating machine coating film.

Description

Double-sided coating film turning device and coating machine

Technical Field

The utility model relates to a vacuum coating technical field especially relates to a piece device and coating machine are turned over in two-sided coating film.

Background

The silicon heterojunction solar cell is a high-efficiency solar cell which takes a monocrystalline silicon wafer as a substrate, and an amorphous silicon thin film and a Transparent Conductive Oxide (TCO) thin film are sequentially deposited on the front surface and the back surface of the monocrystalline silicon wafer. At present, a magnetron sputtering coating machine is a main mass production device for preparing TCO films.

In order to achieve the purpose of double-sided coating of a coating machine in the related art, a battery piece support plate turnover mechanism is disclosed. The support plate turnover mechanism only needs to add a special turnover cavity in the vacuum cavity, and can realize double-sided coating in a single-sided coating machine through the turnover device and the jacking device.

However, in the process of turning the substrate, the support plate needs to be lifted to a sufficient height by using the jacking device, and the collision between the support plate and the bottom wall or the conveying mechanism of the single-side coating machine in the process of turning is avoided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a piece device and coating machine are turned over in two-sided coating film to reduce the requirement to turning over the piece chamber height of circling round, reduce the occupation space in piece chamber of turning over, simplify two-sided coating film step, and reduce the fault rate and the cost of equipment.

In a first aspect, the utility model provides a two-sided coating film turns over piece device. This two-sided coating film turns over piece device includes: support plate and upset actuating mechanism. The carrier plate comprises two guide rails, a plurality of rotating pieces and a plurality of trays for fixing the pieces to be plated. The tray is a double-sided hollow tray. The tray is supported between the two guide rails through the corresponding rotating parts, and the overturning driving mechanism can drive the corresponding rotating parts to rotate so as to overturn the tray.

Under the condition of adopting the technical scheme, each tray is supported between the two guide rails through the corresponding rotating piece, and the overturning driving mechanism drives the corresponding rotating piece to rotate so as to overturn the tray. Based on this, when turning over the piece, the piece can be realized turning over only need to drive the corresponding piece that rotates to drive the tray that corresponds and rotate by upset actuating mechanism, need not rotate whole support plate. And the height of the tray is far less than that of the carrier plate, so that when the wafer is turned, the turning disc cavity has a lower convolution height, the wafer turning requirement can be met, and the occupied space of the wafer turning cavity is small. Additionally, the utility model provides a piece device is turned over in two-sided coating film only needs to rotate the tray and can realize turning over the piece, and the tray height is low, and the space between ordinary coating machine diapire or transport mechanism and the tray is enough to satisfy the needs of tray upset, need not the cooperation of jacking device and turns over the piece, consequently, the utility model provides a piece device is turned over in two-sided coating film not only simplifies and turns over the piece step, still has simple structure's advantage to reduce equipment trouble incidence and practice thrift the cost.

In one possible implementation, the tumble drive mechanism includes: a plurality of driven shafts, and a drive structure for providing torque to each driven shaft. Each driven shaft is provided at an end of the corresponding rotating member. When the overturning driving mechanism is in an overturning driving state, the driving structure is in power connection with at least one driven shaft. When the overturning driving mechanism is in an overturned driving state, the driving structure can be separated from the driven shaft.

In one possible implementation, the driving structure includes a power source and a plurality of driving shafts in power connection with the power source. Each drive shaft is in dynamic communication with a respective driven shaft. The power source is used to provide torque to the drive shaft. At the moment, the driving shaft can transmit torque to a driven shaft connected with the driving shaft, and the driven shaft drives the rotating part to rotate under the action of the torque, so that the tray is overturned.

In one possible implementation, the power source may include an industrial robot and a driving device for providing a torque to a driving shaft, which is an output shaft of the driving device. The industrial robot is used for driving the driving equipment to move linearly along the designated direction, so that the industrial robot drives the driving shaft to be in power connection with or separated from the driven shaft.

In one possible implementation, when the above-described tumble drive mechanism is in the tumble drive state, the end portion of each drive shaft meshes with the end portion of the corresponding driven shaft.

Under the condition of adopting above-mentioned technical scheme, when upset actuating mechanism drive tray upset, the tip of every drive shaft and the tip meshing of corresponding driven shaft are in the same place for every drive shaft and corresponding driven shaft power are connected. At the moment, the power source provides torque for the driving shaft, the driving shaft transmits the torque to the driven shaft in a meshed mode, and then the driven shaft and the rotating part are matched with each other to achieve the purpose of driving the tray to overturn. After the overturning is finished, each driving shaft moves towards the direction far away from the corresponding driven shaft, so that the end part of each driving shaft is separated from the end part of the corresponding driven shaft, the conveying mechanism can convey the overturned carrier plate away, and the carrier plate which is not overturned is conveyed to the corresponding position of the overturning driving mechanism. The overturning driving mechanism repeats the steps and can overturn the tray on the next carrier plate. Based on this, the drive shaft in the drive structure can be in power connection with the driven shaft in a plurality of carrier plates, the tray in a plurality of carrier plates is overturned repeatedly. Therefore, the double-sided film coating and turning device provided by the utility model can turn the tray in a plurality of carrier plates by only setting one driving structure, thereby saving the cost. The driving shaft is connected with the driven shaft in a meshed mode, and the driving device is simple in structure and convenient to operate.

In another possible implementation, the tumble drive mechanism further includes a plurality of meshing gears. Each meshing gear is fixed on a corresponding driven shaft. The drive structure includes a rack for meshing with the meshing gears.

When the technical scheme is adopted, the transmission mechanism drives the support plate to be transmitted to the rack position, the meshing gear on the driven shaft is meshed with the rack, so that the meshing gear on the driven shaft can roll on the rack in the process that the transmission mechanism drives the support plate to move. And because the meshing gear is fixed on the corresponding driven shaft, when the meshing gear rolls on the rack, the meshing gear can drive the driven shaft to rotate, so that the driven shaft and the rotating part are matched with each other, and the purpose of turning the tray is achieved. Therefore, the utility model provides a piece device is turned over in two-sided coating film can utilize transport mechanism's power as upset actuating mechanism's power, need not to set up upset actuating mechanism's power supply, and simple structure practices thrift the cost, reduces equipment failure rate.

In a possible realization mode, an elastic limiting structure is arranged at the end part of the driven shaft. The end part of the guide rail facing the driven shaft is provided with a groove structure. Each groove structure is detachably clamped with the corresponding elastic limiting structure. Wherein, elasticity limit structure includes one or two elasticity locating parts. Each groove structure comprises two grooves. The two grooves are centrosymmetric about the central axis of the rotating member.

Under the condition of adopting above-mentioned technical scheme, the tray is in the upset state, and elasticity locating part and recess separation. When the tray is in an overturned state, the elastic limiting part is clamped into the groove to fix the driven shaft. When the driven shaft needs to rotate to drive the tray to overturn, the elastic limiting part needs to be separated from the groove. Based on this, the utility model provides a piece device is turned over in two-sided coating film is in when the tray is in not upset state, can fix the driven shaft through elasticity locating part and recess cooperation, avoids the tray to take place the mistake and rotates.

In a possible implementation manner, the double-sided coating film turning device further comprises a plurality of axial limiting pieces for limiting the axial movement of the rotating piece, and the axial limiting pieces are arranged on the guide rail.

Under the condition of adopting above-mentioned technical scheme, axial locating part can restrict the tray along the axial displacement who rotates to avoid influencing the coating film effect.

In a possible implementation, the carrier plate further comprises a transverse stiffener. The transverse reinforcing rods are fixed on the two guide rails. The transverse reinforcing rods can limit the two guide rails to generate relative displacement, and the stability of the carrier plate is improved.

In one possible implementation, each of the rotating members corresponds to a plurality of trays. The support plate further comprises a vertical reinforcing rod connected with the transverse reinforcing rod, and the rotating piece is rotatably connected with the vertical reinforcing rod. Vertical stiffener is connected with horizontal stiffener, can increase the stability that improves the support plate. The rotation piece rotates with vertical stiffener and is connected, and vertical stiffener can provide the supporting for rotating for receive the holding power between a plurality of trays on same rotation piece, avoid rotating a overlength, lead to rotating a middle part unsettled, easy fracture.

In one possible implementation, the tray comprises a base plate and a cover plate for clamping the piece to be plated. The bottom plate is provided with at least one first hollow-out part, the cover plate is provided with at least one second hollow-out part, and each first hollow-out part and the corresponding second hollow-out part are arranged correspondingly.

In a second aspect, the utility model also provides a coating machine. The coating machine comprises the double-sided coating turnover device described in the first aspect or any possible implementation manner of the first aspect.

In one possible implementation, when the turnover driving mechanism includes a power source and a plurality of driving shafts in power connection with the power source, the power source is located outside the coater. The film plating machine is provided with a film turning cavity. When the overturning driving mechanism is in an overturning driving state, the support plate is positioned in the sheet overturning cavity, and each driving shaft extends into the sheet overturning cavity.

Under the condition of adopting the technical scheme, the power source is positioned outside the film coating machine, so that the power source can be prevented from occupying the space of the film turning cavity. When the overturning driving mechanism is in an overturned driving state, one part of the driving shaft can be moved out of the piece overturning cavity, so that the space of the piece overturning cavity can be saved, and the phenomenon that the operation of the coating machine is hindered due to the fact that the most part of the driving shaft is located in the piece overturning cavity is avoided.

In a possible implementation mode, when the turnover driving mechanism is in a turnover driving state, the driving shaft and the side wall of the turnover piece cavity are sealed together through magnetic fluid.

By adopting the technical scheme, the magnetic fluid seal can ensure the sealing effect between the driving shaft and the side wall of the sheet turning cavity, and the vacuum environment of the sheet turning cavity is not damaged.

The embodiment of the utility model provides a beneficial effect of the coating machine that second aspect or the arbitrary possible implementation of second aspect provided is the same with the beneficial effect of the two-sided coating film turning device that first aspect or arbitrary possible implementation described, and the here is not repeated.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

FIG. 1 is a schematic view of a coater according to an embodiment of the present invention;

fig. 2 is a schematic view of a carrier structure according to an embodiment of the present invention;

FIG. 3 is a schematic view of the engagement between the driving shaft and the driven shaft in the embodiment of the present invention;

FIG. 4 is a sectional view taken along line A-A of FIG. 2, wherein the tray is in a horizontal position;

fig. 5 shows the tray rotated 90 ° in the embodiment of the present invention;

fig. 6 is a schematic view of the engagement between the engaging gear and the rack in the embodiment of the present invention;

fig. 7 is a side view of fig. 6.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Fig. 1 illustrates a schematic diagram of a coater according to an embodiment of the present invention. As shown in fig. 1, the coating machine provided by the embodiment of the present invention includes a first coating chamber 100, a second coating chamber 200, a sheet turning chamber 300, and a double-sided coating sheet turning device 400 located in the sheet turning chamber 300. The double-sided coating film turning device can reduce the requirement on the convolution height of the film turning cavity, simplify the double-sided coating step and reduce the failure rate and cost of equipment.

As shown in fig. 1, the film-turning chamber 300 is located between the first film-plating chamber 100 and the second film-plating chamber 200, and the film-turning chamber 300, the first film-plating chamber 100 and the second film-plating chamber 200 are communicated and are vacuum chambers. The coating machine further comprises a conveying mechanism 500 for conveying the carrier plate 410, wherein the conveying mechanism 500 penetrates through the first coating cavity 100, the film turning cavity 300 and the second coating cavity 200 along the conveying direction of the carrier plate 410. After the carrier plate 410 is completely coated in the first coating chamber 100, the transfer mechanism 500 transfers the carrier plate 410 to the turnover chamber 300. After the film is turned over, the transmission mechanism transmits the carrier plate 410 to the second film coating cavity 200 to complete the double-sided film coating. The conveying mechanism 500 may be a conveying roller or a conveying belt, but is not limited thereto. The film coating machine also comprises a photoelectric switch. After the carrier 410 is coated on one side, the transport mechanism 500 transports the carrier 410 into the flipping chamber 300, and when the carrier 410 is transported to a designated position in the flipping chamber 300, the optoelectronic switch controls the transport mechanism 500 to stop transporting.

As shown in fig. 1, in practical applications, a target 600 is installed on the top surface of each coating cavity, and the target 600 may be subjected to target coating on the upper surface of a silicon wafer waiting for coating. The film layer plated on the upper surface of the silicon wafer to be plated can be a TCO film or other film layers.

The embodiment of the utility model provides a piece device is turned over in two-sided coating film, this two-sided coating film turn over piece device and is applied to the preceding coating machine can realize the silicon chip upset 180 of foretell. It should be understood that the double-sided coating film turning device can also turn other to-be-coated pieces. For example: a semiconductor substrate such as a silicon wafer or a germanium wafer, or a semiconductor device with a partial structure formed thereon, where the semiconductor substrate may be an intrinsic semiconductor substrate or a doped semiconductor substrate. Of course, the workpiece may be a glass substrate, a metal substrate, etc., but is not limited thereto.

Fig. 2 illustrates a schematic structural diagram of a double-sided film coating and turning device according to an embodiment of the present invention. As shown in fig. 2, the double-sided coating film turning device of the embodiment of the present invention comprises: a carrier plate 410 and a flip drive mechanism (not shown in fig. 2). The carrier plate 410 includes two guide rails 411, a plurality of rotating members 412, and a plurality of trays 413 for fixing the members to be plated. As shown in fig. 2, two guide rails 411 may be disposed in a parallel manner with a space therebetween to accommodate a plurality of trays 413. The respective rotating members 412 may be distributed along a guide direction (i.e., an arrow direction in fig. 2) of each guide rail 411. The tray 413 is supported between the two guide rails 411 by the corresponding rotating member 412. The reverse driving mechanism may drive the corresponding rotating member 412 to rotate to reverse the tray.

As shown in fig. 2, the number of the rotating members 412 can be adjusted according to the sizes of the sheet turning chamber 300, the first film coating chamber 100 and the second film coating chamber 200, and the number of the to-be-coated members to be coated each time, so as to adjust the number of the trays 413 on the carrier plate; the number of the trays 413 on the carrier plate can also be adjusted by adjusting the number of the trays 413 corresponding to one rotating member 412. For example, as shown in fig. 2, there are 6 rotating members 412, two trays 413 are disposed on each rotating member 412, the 6 rotating members 412 are distributed along the direction of the arrow in fig. 2, and the number of the trays 413 of the whole carrier plate is 12. A gap is left between adjacent trays 413 to facilitate the turning of the trays 413.

As shown in fig. 2, the rotating member 412 may include various structures, and the tray 413 may be rotatably connected to the guide rail 411, for example: the rotating member 412 is a rotating shaft. Two ends of the rotating shaft are respectively connected on the two guide rails 411 in a rotating way. Here, the correspondence relationship between the tray 413 and the corresponding rotation piece 412 may be explained as follows:

for example: as shown in fig. 2, when each rotating member 412 is connected to two trays 413, the two trays 413 on the same rotating member 412 are distributed between the two guide rails 411 in a direction perpendicular to the arrow in fig. 2, and a gap is left between the two trays 413. At this time, the trays 413 fixed to the rotation member 412 are all the trays 413 corresponding to the rotation member 412. That is, the rotating member 412 corresponds to the two trays 413.

When each rotating member is connected with a tray, the tray is fixed on the rotating member. At this time, the tray fixed on the rotating member is the tray corresponding to the rotating member. That is, the rotating member corresponds to one tray.

In one example, as shown in fig. 3, the double-sided coating turnover device further includes a plurality of axial stoppers 430 for restricting the axial movement of the rotating member 412. Each rotating member 412 is rotatably disposed on two guide rails 411 through an axial stopper 430. The axial stoppers 430 may be support bearings, which are respectively connected to the guide rail 411 and the rotation member 412. The axial limiting member 430 limits the rotating member 412 to move horizontally along the axial direction while the rotating member 412 is rotatably connected with the guide rail 411, so as to prevent the tray 413 from shaking along with the rotating member 412 and affecting the film coating effect.

As shown in fig. 2, each tray 413 is a double-sided hollow tray 413, the double-sided hollow tray 413 fixes the piece to be plated, and exposes two sides of the piece to be plated, so that two sides of the piece to be plated can be plated. Each double-sided hollowed-out tray 413 can have three hollowed-out portions, and each hollowed-out portion can fix one piece to be plated.

When the double-sided coating film turning device provided by the embodiment of the utility model is applied to a coating machine, the coating machine can adopt the following mode to realize double-sided coating. It should be understood that the double-sided coating process is described below only by way of example with respect to a silicon wafer, but in practice double-sided coating of other coated articles may also be achieved.

As shown in fig. 2, three silicon wafers are fixed to each tray 413 included in the carrier plate 410, and then the carrier plate 410 is placed on the transfer mechanism 500. At this time, the two guide rails 411 contact the conveying surface of the conveying mechanism 500. The transfer mechanism 500 transfers the carrier plate 410 to the first coating chamber 100, and utilizes the target 600 to sputter a TCO film on the surface of the silicon wafer in the first coating chamber 100. After that, the transfer mechanism 500 transfers the carrier plate 410 to the flip cavity 300. When the photoelectric switch determines that the conveying mechanism 500 conveys the carrier plate 410 to the plate overturning position, the conveying of the carrier plate 410 is stopped. The turning driving mechanism drives the rotating member 412 to rotate, and the rotating member 412 drives the corresponding tray 413 to rotate 180 degrees, so that the silicon wafer is turned over. And after the silicon wafer is turned, the surface of the silicon wafer, which is not sputtered with the TCO film, faces upwards. At this time, the transfer mechanism 500 transfers the carrier plate 410 from the flip cavity 300 to the second coating cavity 200. And sputtering a TCO film on the surface of the silicon wafer by using the target material 600 in the second coating cavity 200, thereby completing the double-sided coating of the target material 600 silicon wafer.

In the process of conveying the carrier plate by the conveying mechanism, the carrier plate is slightly different in structure for meeting the requirement of tray overturning according to the difference of the conveying mechanism.

Fig. 4 illustrates a sectional view taken along line a-a of fig. 2, in which the tray is in a horizontal state. As shown in fig. 4, when the conveying mechanism 500 is a conveying roller 510, the carrier plate 410 is located above the conveying roller 510, two guide rails 411 are parallel to the conveying direction of the roller 510, and the two guide rails 411 are respectively in contact with two rollers 510 in each set of rollers 510. The rollers 510 are greater than half the height of the tray 413. When the carrier 410 is transported, as shown in fig. 4, each set of rollers 510 drives the carrier 410 to be transported along the transport direction. Fig. 5 illustrates a state in which the tray is rotated by 90 ° in the embodiment of the present invention. As shown in fig. 5, when the tray 413 is turned over, since the rollers 510 are supported under the guide rails 411, the height of the rollers 510 is greater than half of the height of the tray 413, so that a space for turning over the tray 413 is left between two rollers 510 in each set of rollers 510, and the tray 413 does not collide with the bottom wall of the coater during the turning over process.

When the conveying mechanism is a conveying belt, the carrier plate is placed on the conveying belt, the two guide rails are parallel to the conveying direction of the conveying belt, and the two guide rails are in contact with the conveying belt. When the carrier plate is conveyed, the conveying belt drives the carrier plate to convey along the conveying direction. In order to meet the requirement of tray turning, the bottom ends of the two guide rails can be provided with thickening layers, so that when the guide rails are placed on the conveying belt, the distance between the tray and the middle part of the conveying belt in a horizontal state is greater than half of the height of the tray. When the tray overturns, the tray cannot collide with the conveying belt.

As shown in fig. 2, it can be seen from the above that, in the double-sided coating film turning device provided in the embodiment of the present invention, each tray 413 is supported between two guide rails 411 through the corresponding rotating member 412, and the corresponding rotating member 412 is driven to rotate by the turnover driving mechanism. Therefore, when the sheet is turned, the turning driving mechanism only needs to drive the corresponding tray 413 to rotate through the corresponding rotating member 412, and the sheet can be turned without rotating the whole carrier 410. And the height of tray 413 is far less than the height of support plate 410, therefore, the utility model provides a two-sided coating film turns over piece device needs the height of circling round low, turns over piece chamber 300's occupation space little, on the basis of traditional single face coating machine increase one turn over piece chamber 300 can, need not to adjust the height of traditional single face coating machine vacuum cavity, application scope is wide. Additionally, the utility model provides a piece device is turned over in two-sided coating film only needs to rotate tray 413 and can realize turning over the piece, and tray 413 is high low, and the space between coating machine diapire or transport mechanism 500 and the tray 413 is enough to satisfy the needs that tray 413 overturns, need not the cooperation of jacking device and turns over the piece, consequently, the utility model provides a piece device is turned over in two-sided coating film not only simplifies and turns over the piece step, still has simple structure's advantage to reduce equipment trouble incidence and practice thrift the cost.

As a possible implementation, as shown in fig. 3, the above-mentioned tumble drive mechanism includes a plurality of driven shafts 421, and a drive structure for supplying torque to each of the driven shafts 421. Each driven shaft 421 is provided at the end of the corresponding rotating member 412. When the tumble drive mechanism is in a tumble drive state, the drive structure is in powered connection with at least one driven shaft 421. The driven shaft 421 may be disposed at an end of the rotating member 412 by welding or bolt assembly, or the driven shaft 421 and the rotating member 412 may be integrally formed, but is not limited thereto. The driven shaft 421 may be provided at one end of the rotation member 412, or may be provided at both ends of the rotation member 412. Here, the corresponding relationship of each driven shaft 421 to the corresponding rotation member 412 may be explained as follows:

for example: when the driven shafts are arranged at one ends of the rotating parts, each rotating part corresponds to one driven shaft. When the driven shafts are arranged at two ends of the rotating part, each rotating part corresponds to two driven shafts.

In an alternative, as shown in FIG. 3, the drive structure includes a power source and a plurality of drive shafts 422 in powered communication with the power source. Each drive shaft 422 is in powered connection with a respective driven shaft 421. Wherein the power source is used to provide torque to the drive shaft 422. The driving shaft 422 may transmit torque to a driven shaft 421 in power connection therewith, and the driven shaft 421 drives the rotation member 412 to rotate, so that the tray 413 is turned. The power source may be an electric, pneumatic or hydraulic drive device. Taking the driving device as a servo motor as an example, the driving shaft 422 is an output shaft of the servo motor.

In one example, as shown in fig. 3, when the above-described tumble drive mechanism is in a tumble drive state, the end of each drive shaft 422 meshes with the end of the corresponding driven shaft 421. In practical applications, to facilitate the engagement of the driven shaft 421 with the driving shaft 422, the rotating member 412 may pass through the guide rail 411, and the driven shaft 421 is connected to an end portion of the driving member extending out of the guide rail 411. And can use industrial robot or cylinder etc. can realize rectilinear movement's device, drive servo motor along rectilinear movement, control drive shaft 422 and driven shaft 421 meshing or separation. When the industrial robot is used, a track parallel to the linear moving direction of the driving shaft 422 can be arranged outside the flap chamber 300, and the industrial robot drives the servo motor to be close to or far away from the flap chamber 300 along the track, so that the driving shaft 422 is controlled to be meshed with or separated from the driven shaft 421.

There are many different embodiments of the engagement of the driving shaft 422 and the driven shaft 421. For example, as shown in fig. 3, the end of the driven shaft 421 is recessed to form a groove 426, the inner wall of the groove 426 is a slope, and a first mating gear is disposed on the slope. The end of the driving shaft 422 is provided with a bevel structure matching with the shape of the groove 426, and the outer wall of the bevel structure is provided with a second matching gear matching with the first matching gear. Of course, the recess 426 and the first mating gear may be disposed on the end surface of the driving shaft 422, and the ramp structure and the second mating gear may be disposed on the end surface of the driven shaft 421.

For example, a cross groove and a cross head which can be inserted into the cross groove may be provided on the end surfaces of the driven shaft and the driving shaft, so that the driving shaft and the driven shaft are engaged with each other. The positions of the cross-shaped groove and the cross-shaped end head on the driven shaft and the driving shaft can be exchanged. The industrial robot drives each driving shaft to move towards one side of the corresponding driven shaft, and the cross-shaped end is inserted into the cross-shaped groove, so that each driving shaft is meshed with the corresponding driven shaft. The industrial robot drives each driving shaft to move away from one side of the corresponding driven shaft, the cross-shaped groove is drawn out from the cross-shaped end, and each driving shaft can be separated from the corresponding driven shaft. It should be noted that the cross-shaped groove and the cross-shaped end can be in other non-circular shapes, so that the driving shaft can rotate the torque after being inserted into the driven shaft.

As shown in fig. 3, when the tray 413 is driven to be turned by the turning driving mechanism, the industrial robot drives the servo motor to be close to the flap chamber 300, so that each driving shaft 422 moves to a side close to the driven shaft 421. The end of each driving shaft 422 is inserted into the recess 426 of the corresponding driven shaft 421, and the first and second mating gears are engaged, so that each driving shaft 422 is engaged with the corresponding driven shaft 421. Then, the power source provides a torque to each driving shaft 422, each driving shaft 422 transmits the torque to the corresponding driven shaft 421, and the driven shaft 421 drives the corresponding rotating member 412 to rotate, so that the tray 413 can be turned over. After the overturning is completed, the industrial robot drives each driving shaft 422 to move towards the side far away from the corresponding driven shaft 421, the end part of each driving shaft 422 is drawn out of the groove 426 of the corresponding driven shaft 421, and each driving shaft 422 can be separated from the corresponding driven shaft 421.

As shown in fig. 3, the driving shaft 422 of the driving structure may be power-connected with the driven shaft 421 of the plurality of carrier plates 410 to repeatedly turn the trays 413 of the plurality of carrier plates 410. Therefore, the utility model provides a two-sided coating film turns over piece device only needs to set up a drive structure and just can turn over the piece to the tray 413 among a plurality of support plates 410, practices thrift the cost. The driving shaft 422 is connected with the driven shaft 421 in a meshing mode, and the driving mechanism is simple in structure and convenient to operate.

In one example, the power source is located outside the coater. When the turnover driving mechanism is in a turnover driving state and the support plate is positioned in the sheet turnover cavity, the industrial robot drives each driving shaft to extend into the sheet turnover cavity to be in power connection with the corresponding driven shaft. The power supply sets up in the coating machine outside, can avoid the power supply to set up when the coating machine is built-in, occupy the space of turning over the piece chamber. When the overturning driving mechanism is in an overturning driving state, the industrial robot drives the driving shaft to move towards one side far away from the film turning cavity, and one part of the driving shaft can move out of the film turning cavity, so that the space of the film turning cavity can be saved, and the phenomenon that the whole driving shaft is positioned in the film turning cavity to cause the operation of the film coating machine to be obstructed is avoided.

In one example, when the turnover driving mechanism is in a turnover driving state, the driving shaft and the side wall of the turnover piece cavity are sealed together through magnetic fluid. The magnetic fluid seal can ensure that the industrial robot drives the driving shaft to stretch into or stretch out of the sheet turning cavity, and the sealing effect between the driving shaft and the side wall of the sheet turning cavity ensures that the sheet turning cavity is always in a vacuum environment.

In another alternative, fig. 6 illustrates a schematic diagram of the engagement between the meshing gear and the rack in the embodiment of the present invention. Fig. 7 illustrates a side view of fig. 6. As shown in fig. 6 and 7, the tumble drive mechanism further includes a plurality of meshing gears 423. Each meshing gear 423 is fixed to the corresponding driven shaft 421. The meshing gear 423 may be welded to the driven shaft 421, and the meshing gear 423 may be integrally formed with the driven shaft 421, but is not limited thereto. It should be understood that the meshing gear 423 is annularly provided on the outer wall of the driven shaft 421 when fixed to the driven shaft 421. The drive structure includes a rack 424 for engaging with the meshing gear 423.

In practice, as shown in fig. 7, a rack 424 may be secured inside the coating machine flap chamber 300. The rack 424 is parallel to the conveying direction of the carrier 410, and the rack 424 is disposed on the bottom or the top of the carrier 410. The length of the rack 424 is half of the circumference of the root circle of the meshing gear 423, so that the driven shaft 421 rotates by exactly 180 degrees after the rack 424 is matched with the meshing gear 423. Since the rack 424 is fixed, the carrier 410 is driven by the transmission mechanism 500 to transmit, and when the carrier 410 is driven by the transmission mechanism 500 to transmit to the rack 424, the engaging gear 423 on the driven shaft 421 engages with the rack 424, so that the engaging gear 423 on the driven shaft 421 can roll on the rack 424 during the process of driving the carrier 410 by the transmission mechanism 500. Since the meshing gear 423 is fixed on the corresponding driven shaft 421, when the meshing gear 423 rolls on the rack 424, the meshing gear 423 can drive the driven shaft 421 to rotate, so that the driven shaft 421 and the rotating member 412 are matched with each other, and the purpose of turning over the tray 413 is achieved. Therefore, the embodiment of the utility model provides a two-sided coating film turns over piece device can utilize transport mechanism 500's power as upset actuating mechanism's power, need not to set up upset actuating mechanism's power supply, and simple structure practices thrift the cost, reduces equipment failure rate.

In an alternative, as shown in fig. 3 and 6, an elastic limit structure is provided at the end of the driven shaft 421. A groove structure is provided at the end of the guide rail 411 facing the driven shaft 421. Each groove structure is detachably clamped with the corresponding elastic limiting structure.

As shown in fig. 3 and 6, the elastic limiting structure may include one or two elastic limiting members 425. Each groove configuration includes two grooves 426. the two grooves 426 are centered symmetrically about the central axis of the rotational member 412. When the elastic limiting structure includes two elastic limiting members 425, the two elastic limiting members 425 in the elastic limiting structure correspond to the two grooves 426 in each groove structure in a one-to-one manner. Since the two grooves 426 of each groove structure are symmetrical about the center of the central axis of the rotating member 412, after the tray 413 is turned 180 °, the elastic limiting member 425 in the elastic limiting structure moves from one groove 426 to the other groove 426, and the elastic limiting member 425 and the grooves 426 are connected again.

In one example, as shown in fig. 3 and 6, the elastic limiting member 425 includes a positioning pin that can extend into the driven shaft 421, and a spring for pushing the top end of the positioning pin out of the driven shaft 421 is disposed between the positioning pin and the driven shaft 421. The positioning pin can be retracted into the driven shaft 421 under the action of external force, and after the external force is removed, the spring can push the top end of the positioning pin out of the driven shaft 421.

In another example, as shown in fig. 3 and 6, the elastic limiting member 425 may be provided in two segments, one segment away from the driven shaft 421 is a first segment, and the other segment close to the driven shaft 421 is a second segment. A spring is disposed between the first section and the second section. The first section can be contracted into the second section under the action of external force, and after the external force is removed, the spring can eject the top end of the first section out of the second section. It should be noted that the elastic limiting member 425 is not limited to the above two ways.

As shown in fig. 3 and 6, the groove 426 and the end of the elastic retainer 425 can be detachably clamped in various ways. Because the elastic limiting member 425 can contract towards one side of the driven shaft 421, when the end of the elastic limiting member 425 and the groove 426 rotate relatively, the groove 426 can provide an acting force towards the direction of the driven shaft 421 to the end of the elastic limiting member 425, so that the end of the elastic limiting member 425 moves out of the groove 426, and the groove 426 can be separated from the elastic limiting member 425. When the elastic limiting member 425 contacts the groove 426 again, the elastic limiting member 425 extends into the groove 426 again under the action of its own elastic force, so that the groove 426 and the elastic limiting member 425 can be clamped.

For example, as shown in fig. 3 and 6, the groove 426 has a semicircular shape. The top end of the resilient retainer 425 is forced outward of the recess 426 by the torque. Since the recess 426 is semicircular, the distance between the inner wall of the recess 426 and the top end of the elastic limiting member 425 becomes shorter and shorter, and the top end of the elastic limiting member 425 provides a force toward the driven shaft 421, so that the elastic limiting member 425 contracts, and the top end of the elastic limiting member 425 can move out of the recess 426. When the top end of the elastic limiting member 425 meets the groove 426 again, the top end of the elastic limiting member 425 extends into the groove 426 again under the action of the elastic force. The groove 426 may be set to be a groove 426 with other radian, and the strength of moving the top end of the elastic limiting member 425 out of the groove 426 may be adjusted by changing the radian of the groove 426 according to the requirement. The larger the radian is, the smaller the required force is; the smaller the arc, the more force is required. Each set of elastic stoppers 425 may also include two elastic stoppers 425, and the two elastic stoppers 425 correspond to the two grooves 426 in each groove 426 structure. When each set of elastic retainers 425 includes one elastic retainer 425, the tray 413 is rotated, and only one elastic retainer 425 needs to be moved out of the groove 426, so that the required force is small. When each set of elastic stoppers 425 includes two elastic stoppers 425, the tray 413 rotates to move the two elastic stoppers 425 out of the groove 426, the required force is large, and the number of the elastic stoppers 425 included in each set of elastic stoppers 425 can be selected as required. To facilitate removal of the top end of the resilient retainer 425 from the recess 426 or to reduce frictional wear between the top end of the resilient retainer 425 and the recess 426, the top end of the resilient retainer 425 may also be curved, preferably hemispherical.

As shown in fig. 4, when the tray 413 is in an overturned state, the top ends of the elastic stoppers 425 extend into the corresponding grooves 426 under the action of the elastic force. When the tray 413 is turned over, the torque provided by the driven shaft 421 makes the top end of the elastic limiting member 425 slide out of the groove 426 along the inner wall of the groove 426, and during this period, the elastic force of the elastic limiting member 425 and the friction force between the elastic limiting member 425 and the groove 426 need to be overcome, so that the elastic limiting member 425 is contracted. As shown in fig. 5, after the tray 413 is turned over by 180 °, the elastic limiting member 425 reaches another groove 426, and the elastic limiting member 425 extends into the corresponding groove 426 again under the action of the elastic force. Therefore, the utility model provides a two-sided coating film turns over piece device when tray 413 is in the state of not overturning, tray 413 upset needs great external force just can make elasticity locating part 425 and recess 426 separate to can avoid tray 413 to take place the mistake and rotate.

As a possible implementation, as shown in fig. 2, to improve the load and stability of the carrier plate 410. In one example, the carrier plate 410 further includes a transverse stiffener 414. A transverse reinforcing bar 414 is fixed to the two guide rails 411. When there are at least two rotors 412, the carrier plate 410 includes at least one transverse stiffener 414. The two rails 411 are connected together by at least one transverse stiffener 414. Each of the transverse reinforcing rods 414 is located between two adjacent rotating members 412, and a gap for turning over the tray 413 is left between the transverse reinforcing rod 414 and the tray 413. The number of the transversal reinforcement bars 414 may be selected according to the number of the rotation members 412, and when the number of the rotation members 412 is increased, the number of the transversal reinforcement bars 414 is increased, and vice versa, the number of the transversal reinforcement bars 414 is decreased. For example, as shown in FIG. 2, when there are 6 rotating members 412, the carrier plate includes two lateral reinforcing rods 414 parallel to the rotating members 412. The two guide rails 411 are connected together by two transverse reinforcing bars 414. The transverse reinforcing bar 414 and the guide rail 411 may be fixed together by welding or bolt assembly, but not limited thereto. The transverse reinforcing rod 414 can limit the relative displacement of the two guide rails 411, increase the stability of the carrier plate 410, and improve the load of the carrier plate 410.

In an example, as shown in fig. 2, when at least two trays 413 are fixed on the same rotating member 412, in order to avoid the situation that the rotating member 412 is too long, the middle portion of the rotating member 412 is suspended and easily broken. The carrier plate 410 also includes vertical stiffeners 415 coupled to the transverse stiffeners 414. The vertical stiffener 415 and the horizontal stiffener 414 may be connected together by welding, riveting or bolt assembly, and the vertical stiffener 415 and the horizontal stiffener 414 may be integrally formed, but is not limited thereto. The transverse stiffener 414 and the vertical stiffener 415 may be perpendicular to each other. The vertical reinforcing rods 415 are located between two adjacent trays 413 on the same rotating member 412, and the rotating member 412 passes through the vertical reinforcing rods 415 and is rotatably connected with the vertical reinforcing rods 415.

As shown in fig. 2, it can be seen from the above that the vertical stiffener 415 is connected to the horizontal stiffener 414, which can improve the load and stability of the carrier plate 410. The rotating member 412 is rotatably connected to the vertical reinforcing rod 415, and the vertical reinforcing rod 415 can provide a support for the rotating member 412, so that a plurality of trays 413 on the same rotating member 412 are supported by the support, and the rotating member 412 is prevented from being too long, so that the middle of the rotating member 412 is suspended and easily broken.

As shown in fig. 2, in practical applications, in order to improve the stability and the load of the carrier plate 410, two cross beams may be disposed between the two guide rails 411, the two cross beams and the two guide rails 411 form a frame, and all of the tray 413, the rotating member 412, the transverse reinforcing rod 414, and the vertical reinforcing rod 415 are disposed in the frame.

As a possible implementation, as shown in fig. 2, each tray 413 includes a bottom plate and a cover plate for clamping a silicon wafer. The base plate and cover plate can have many different embodiments. For example: the shape of the bottom plate and the cover plate may be oval, rectangular or opposite, but is not limited thereto.

As shown in fig. 2, the bottom plate has three first hollow portions, the cover plate has three second hollow portions, each first hollow portion is disposed corresponding to a corresponding second hollow portion to form a fixing position 417, and each fixing position 417 can be used for placing a silicon wafer. The shapes of the first hollow-out part and the second hollow-out part are consistent with the shape of the film coating area of the silicon chip, and the sizes of the first hollow-out part and the second hollow-out part are slightly smaller than the size of the silicon chip, so that the front side and the back side of the silicon chip can be exposed in the film coating area to the maximum extent and cannot fall off. The tray 413 further includes a control assembly for controlling the opening and closing of the bottom plate and the cover plate.

In practical applications, as shown in FIG. 2, the control assembly is opened, the bottom plate and the cover plate are separated, the fixing locations 417 are exposed, and the silicon wafers are respectively placed in the fixing locations 417. And then, covering the cover plate on the bottom plate, closing the control assembly, and fixing the silicon wafer by using the bottom plate and the cover plate. During film coating, the target 600 in the first film coating chamber 100 passes through the first hollow portion with the TCO film, and coats one side of the silicon wafer with a film. After the wafer is turned, the target material 600 in the second film coating cavity 200 passes the TCO film through the second hollow part to coat the other side of the silicon wafer. And after film coating, the control assembly is opened again, and the silicon wafer can be taken out. The tray 413 is used for driving the silicon wafer to rotate, the silicon wafer does not need to be in contact with other devices, and the silicon wafer cannot be scratched. The control assembly can be used for detachably connecting the bottom plate and the cover plate. For example: the control assembly may include a first connection assembly and a second assembly. The first connecting component can rotatably connect one end of the bottom plate and one end of the cover plate together. The second connecting component detachably arranges the other ends of the bottom plate and the cover plate together. When the tray 413 is opened, the bottom plate and the cover plate are separated from each other by the second connecting member, so that the cover plate rotates around the first connecting member. When the tray 413 is closed, one end of the cover plate, which is located at the first connecting assembly, rotates by taking the first connecting assembly as a shaft, the bottom plate and the cover plate are connected through the second connecting assembly, the tray 413 is conveniently opened and closed, the speed of putting in and taking out silicon wafers is increased, and the working efficiency is improved. The first connecting member may be a hinge member and the second connecting member may be a latch device or a bolt member, but is not limited thereto.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. The double-sided coating film turning device is characterized by comprising: the device comprises a support plate and a turnover driving mechanism;

the carrier plate comprises two guide rails, a plurality of rotating pieces and a plurality of trays for fixing the pieces to be plated, and the trays are double-sided hollow trays;

the tray is supported between the two guide rails through the corresponding rotating piece, and the overturning driving mechanism can drive the corresponding rotating piece to rotate so as to overturn the tray.

2. The double-sided coated sheet turnover device of claim 1, wherein the turnover driving mechanism comprises: a plurality of driven shafts and a drive structure for providing torque to each of the driven shafts; each driven shaft is arranged at the end part of the corresponding rotating part;

when the overturning driving mechanism is in an overturning driving state, the driving structure is in power connection with at least one driven shaft.

3. The double-sided coated sheet turnover device of claim 2, wherein the driving structure comprises a power source and a plurality of driving shafts in power connection with the power source; each of the drive shafts is in power connection with a corresponding one of the driven shafts.

4. The double-sided coated sheet turnover device according to claim 3, wherein when the turnover drive mechanism is in the turnover drive state, an end portion of each of the drive shafts is engaged with an end portion of the corresponding driven shaft.

5. The double-sided coated sheet turnover device of claim 2, wherein the turnover driving mechanism further comprises a plurality of meshing gears, each meshing gear being fixed to a corresponding driven shaft; the driving structure comprises a rack which is used for being meshed with the meshing gear.

6. The double-sided coated sheet turnover device of claim 2, wherein an elastic limiting structure is arranged at the end part of the driven shaft, a groove structure is arranged at the end part of the guide rail facing the driven shaft, and each groove structure is detachably clamped with the corresponding elastic limiting structure; wherein the content of the first and second substances,

the elastic limiting structure comprises one or two elastic limiting parts, each groove structure comprises two grooves, and the two grooves are centrosymmetric about the central axis of the rotating part.

7. The double-sided coated sheet turnover device according to any one of claims 1 to 6, further comprising a plurality of axial stoppers for restricting axial movement of the rotating member, the axial stoppers being provided on the guide rail.

8. The double-sided coated sheet turnover device according to any one of claims 1 to 6, wherein the carrier plate further comprises a transverse reinforcing rod, and the transverse reinforcing rod is fixed on the two guide rails.

9. The double-sided coated sheet turnover device of claim 8, wherein each of the rotating members corresponds to a plurality of trays; the carrier plate still include with the vertical stiffener that horizontal stiffener is connected, rotate the piece with vertical stiffener rotates and is connected.

10. The double-sided coated sheet turnover device according to any one of claims 1 to 6, wherein the tray comprises a bottom plate and a cover plate for clamping the to-be-coated member, the bottom plate is provided with at least one first hollow portion, the cover plate is provided with at least one second hollow portion, and each first hollow portion is arranged corresponding to the corresponding second hollow portion.

11. A coating machine characterized by comprising the double-sided coating turnover device of any one of claims 1 to 10.

12. The coater of claim 11 wherein when the tumble drive mechanism includes a power source and a plurality of drive shafts in powered connection with the power source, the power source is located outside the coater, the coater having a blade tumble chamber;

when the overturning driving mechanism is in an overturning driving state, the carrier plate is positioned in the sheet overturning cavity, and each driving shaft extends into the sheet overturning cavity.

13. The coater according to claim 12 wherein the drive shaft is sealed to the side walls of the flipping chamber by a magnetic fluid when the flipping drive mechanism is in the flipping drive state.