CN208378995U - A kind of continuity plasma-based nanometer film deposition apparatus - Google Patents
A kind of continuity plasma-based nanometer film deposition apparatus Download PDFInfo
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- CN208378995U CN208378995U CN201821052733.XU CN201821052733U CN208378995U CN 208378995 U CN208378995 U CN 208378995U CN 201821052733 U CN201821052733 U CN 201821052733U CN 208378995 U CN208378995 U CN 208378995U
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Abstract
The utility model is a kind of continuity plasma-based nanometer film deposition apparatus, rack including upper and lower structures, coating apparatus and transmitting device, wherein transmitting device is by the driving drum of multiple driving mechanisms driving rotation, including being set to multiple intracorporal transport mechanisms of plated film chamber, it is set to the passback mechanism of lower layer support frame, it is set to the charging elevating mechanism of front end of rack and is set to the discharging elevating mechanism of rear end of rack, each group of driving drum in each plated film cavity is driven by independent driving mechanism, and the driving drum for being located at vacuum film coating chamber is arranged in can be in the rotary disk member of 360 ° of rotations, guarantee the uniformity of workpiece plated film.
Description
Technical field
The utility model relates to nano-coating apparatus fields, more specifically, it is heavy to be related to a kind of continuity plasma-based nanometer film
Product equipment.
Background technique
Vacuum coating technology is more and more applied in a variety of materials at present, to assign new performance, continous way
Filming equipment is generally linear pattern, including is connected with feed space, feed surge room, vacuum film coating chamber, discharging buffering in turn
Room and discharge chamber are provided with the conveyer belt for conveying workpiece to be coated in equipment side, take up a large area, and pass through biography
Workpiece, which rests on, after dynamic roller enters in plated film cavity carries out plated film on pallet, not by rotation, be easy to cause plated film it is uneven,
The defective situation of workpiece film layer.
Utility model content
In view of the deficienciess of the prior art, that the purpose of the utility model is to provide a kind of occupied areas is small, plated film is uniform
And the filming equipment that can repeatedly coat automatically.
In order to solve above-mentioned technical problem, the utility model is adopted the following technical solutions:
A kind of continuity plasma-based nanometer film deposition apparatus, including rack, coating apparatus and transmitting device, the coating apparatus
It is concatenated for five plated film cavitys, including sequentially connected feed space, feed surge room, vacuum film coating chamber, discharging surge chamber
And discharge chamber, plated film cavity front and back end are both provided with inlet port and outlet port, the inlet port and outlet port are both provided with
Vacuum valve to be opened/closed, and each plated film cavity side is connected separately with the vacuum pump for extracting vacuum, the rack
For Dual-layer structure, including upper layer support frame and lower layer support frame, wherein coating apparatus is fixedly installed in upper layer support frame, institute
Transmitting device is stated to include the transport mechanism for being set to upper layer support frame, the passback mechanism for being set to lower layer support frame, be set to machine
The charging elevating mechanism of frame front end and the discharging elevating mechanism for being set to rear end of rack, the transport mechanism include being set in turn in
First group of driving drum, the second group of transmission rolling of feed space, feed surge room, vacuum film coating chamber, discharging surge chamber and discharge chamber
Cylinder, third group driving drum, the 4th group of driving drum, the 5th group of driving drum, the third group driving drum is set to one can
In the horizontal plane in the rotary disk member of 360 ° of rotations, the passback mechanism includes being set to the 6th group of transmission rolling of lower layer support frame
Cylinder, the charging elevating mechanism include can oscilaltion charging crane and the 7th group of biography being set in charging crane
Dynamic roller, the discharging elevating mechanism include can oscilaltion discharging crane and be set to the 8th to discharge on crane
Group driving drum.
More specifically, the charging elevating mechanism is provided with the first driving mechanism that driving charging crane moves up and down,
The discharging elevating mechanism is provided with the second driving mechanism that driving discharging support block frame moves up and down.
More specifically, the rolling of each group of driving drum of the transmitting device be all by independent drum drive come
Driving.
More specifically, be connected with can be around the rotating arm that z-axis rotates for the bottom of the rotary disk member, and the rotating arm is by
Three driving mechanisms rotate to drive.
It more specifically, further include a controller, the controller is electrically connected with the first, second, third driving mechanism, institute
Drum drive is stated to be electrically connected with the controller.
There are advantage and good effects for the utility model:
The utility model is a kind of continuity plasma-based nanometer film deposition apparatus, and wherein rack is upper and lower structures, and reduction accounts for
Ground area, and both sides are provided with elevating mechanism, guarantee automatic continuous production, it can be with automatic cycle plated film, plated film cavity
In driving drum the uniformity that can guarantee workpiece plated film in rotary disk member is set.
Detailed description of the invention
Fig. 1 is the front view of embodiment continuity plasma-based nanometer film deposition apparatus.
Fig. 2 is the structural schematic diagram that embodiment rotary disk member is overlooked.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing, but the utility model
Embodiment is not limited to this.
As shown in Figure 1 and Figure 2, embodiment is a kind of continuity plasma-based nanometer film deposition apparatus, including rack, coating apparatus
And transmitting device, wherein coating apparatus concatenates for five plated film cavitys, including sequentially connected feed space 1, feed surge
Room 2, vacuum film coating chamber 3, discharging surge chamber 4 and discharge chamber 5, plated film cavity front and back end are both provided with feed inlet and discharging
Mouthful, and inlet port and outlet port are both provided with vacuum valve (not shown) to be opened/closed, the movement of the vacuum valve is logical
Cylinder driving is crossed, and is controlled by the controller by solenoid valve, controller preferably uses the FX3GA series of Mitsubishi Corporation of Japan
PLC controller.
And each plated film cavity side is connected separately with the vacuum pump (not shown) for extracting vacuum, the machine
Frame is Dual-layer structure, including upper layer support frame 10 and lower layer support frame 6, and wherein coating apparatus is fixedly installed in upper layer support
Frame 10, the transmitting device include the transport mechanism for being set to upper layer support frame 10, the returning machine for being set to lower layer support frame 6
Structure, the charging elevating mechanism 7 for being set to front end of rack and the discharging elevating mechanism 8 for being set to rear end of rack, the transport mechanism
First group of biography including being set in turn in feed space 1, feed surge room 2, vacuum film coating chamber 3, discharge surge chamber 4 and discharge chamber 5
Dynamic 11, second groups of driving drums 21 of roller, 31, the 4th groups of driving drums 41 of third group driving drum, the 5th group of driving drum 51,
The third group driving drum 31 is set to one can be in the horizontal plane in the rotary disk member 90 of 360 ° of rotations, wherein rotary disk member 90
Be connected with can be around the rotating arm (not shown) that z-axis rotates for bottom, and rotating arm is driven by third driving mechanism 93
Rotation, the passback mechanism includes the 6th group of driving drum 61 for being set to lower layer support frame 6, and the charging elevating mechanism 7 wraps
The 7th group of driving drum 71 for including charging crane 72 and being set in charging crane 72, discharging elevating mechanism 8 include
Material crane 82 and the 8th group of driving drum 81 being set on discharging crane 82, wherein charging elevating mechanism 7, discharging rise
The first driving mechanism 91, second that descending mechanism 8 is respectively arranged with driving charging crane 72, discharging crane 82 moves up and down is driven
The rolling of motivation structure 92, each group of driving drum of transmitting device is driven by independent drum drive, institute
Stating the first, second driving mechanism is servo electrode and spindle gear, and the charging crane 72, discharging crane 82 are equal
What is matched is set on spindle gear, and the third driving mechanism and drum drive are servo motor and transmission dress
It sets (or gear set or belt etc.), the working principle of above-mentioned each driving mechanism and corresponding transmission device is the prior art,
This is not repeated them here, and first, second, third driving mechanism and drum drive are electrically connected with above-mentioned PLC controller.
Working principle: after the vacuum break valve of feed space, the pallet of workpiece is loaded with by the 7th of charging elevating mechanism 7
Feed space 1 is sent into the effect of group driving drum 71 (initial position), and then the vacuum valve of feed space 1 is closed, in feed space 1
Vacuumize pretreatment (vacuum degree is lower), the vacuum break valve between subsequent feed space 1 and feed surge room 2 passes through
Workpiece is sent into feed surge room 2 by the effect of 1 first group of driving drum 11 of feed space, and vacuum valve carries out taking out true again after closing
(vacuum degree is higher) is managed in vacancy, and subsequent pallet enters vacuum film coating chamber 3, the workpiece in plated film on third group driving drum 3
Pallet can with rotary disk member 90 occur 360 degree rotate, keep plated film more uniform with it is consistent, after the completion of plated film, pallet again successively into
Enter to discharge surge chamber 4 and discharge chamber 5 carries out dropping vacuum degree processing accordingly, tray for work pieces is sent to discharging elevating mechanism 8 later
The 8th group of driving drum 81 on, staff carries out discharging herein, and pallet unloaded later is transported to by discharging crane 82
The plane of lower layer support frame 6, empty pallet are sent on the 6th group of driving drum 61, the 6th group of driving drum 61 and charging crane
Empty pallet is transported to initial position again by 72, by manually unloading, and after the pallet of workpiece is filled in initial position placement, is repeated
Above-mentioned steps.
Although the foregoing describe specific embodiment of the present utility model, it will be appreciated by those of skill in the art that
These are merely examples, and the protection scope of the utility model is defined by the appended claims.Those skilled in the art
Member can make numerous variations or be repaired to these embodiments under the premise of without departing substantially from the principles of the present invention and essence
Change, but these change and modification each fall within the protection scope of the utility model.
Claims (5)
1. a kind of continuity plasma-based nanometer film deposition apparatus, including rack, coating apparatus and transmitting device, the coating apparatus are
Five plated film cavitys concatenate, including sequentially connected feed space, feed surge room, vacuum film coating chamber, discharging surge chamber and
Discharge chamber, plated film cavity front and back end are both provided with inlet port and outlet port, and the inlet port and outlet port are both provided with can
The vacuum valve of opening and closing, and each plated film cavity side is connected separately with the vacuum pump for extracting vacuum, which is characterized in that
The rack is Dual-layer structure, including upper layer support frame and lower layer support frame, and wherein coating apparatus is fixedly installed in upper layer
Support frame, the transmitting device include the transport mechanism for being set to upper layer support frame, the passback mechanism for being set to lower layer support frame,
Be set to the charging elevating mechanism of front end of rack and be set to the discharging elevating mechanism of rear end of rack, the transport mechanism include according to
Secondary first group of driving drum, second for being set to feed space, feed surge room, vacuum film coating chamber, discharge surge chamber and discharge chamber
Group driving drum, third group driving drum, the 4th group of driving drum and the 5th group of driving drum, the third group driving drum are set
Being placed in one can be in the horizontal plane in the rotary disk member of 360 ° of rotations, and the passback mechanism includes be set to lower layer support frame the 6
Group driving drum, it is described charging elevating mechanism include can oscilaltion charging crane and be set in charging crane
7th group of driving drum, it is described discharging elevating mechanism include can oscilaltion discharging crane and be set to discharging crane
On the 8th group of driving drum.
2. a kind of continuity plasma-based nanometer film deposition apparatus according to claim 1, which is characterized in that the charging lifting
Mechanism is provided with the first driving mechanism that driving charging crane moves up and down, and the discharging elevating mechanism is provided with driving discharging
The second driving mechanism for supporting block frame to move up and down.
3. a kind of continuity plasma-based nanometer film deposition apparatus according to claim 1, which is characterized in that the transmitting device
The rolling of each group of driving drum is driven by independent drum drive.
4. a kind of continuity plasma-based nanometer film deposition apparatus according to claim 1, which is characterized in that the rotary disk member
Bottom be connected with and can drive rotation by third driving mechanism around the rotating arm that z-axis rotates, the rotating arm.
5. any continuity plasma-based nanometer film deposition apparatus described in -4 according to claim 1, which is characterized in that further include one
A controller, the controller are electrically connected with the first, second, third driving mechanism, the drum drive and controller electricity
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821052733.XU CN208378995U (en) | 2018-07-04 | 2018-07-04 | A kind of continuity plasma-based nanometer film deposition apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821052733.XU CN208378995U (en) | 2018-07-04 | 2018-07-04 | A kind of continuity plasma-based nanometer film deposition apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN208378995U true CN208378995U (en) | 2019-01-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821052733.XU Active CN208378995U (en) | 2018-07-04 | 2018-07-04 | A kind of continuity plasma-based nanometer film deposition apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114875376A (en) * | 2022-04-16 | 2022-08-09 | 黄石全洋光电科技有限公司 | Continuous vacuum coating production line and coating process |
| CN116435408A (en) * | 2023-05-05 | 2023-07-14 | 上海迪伐新能源设备制造有限公司 | Roller type laminating machine for continuous lamination |
-
2018
- 2018-07-04 CN CN201821052733.XU patent/CN208378995U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114875376A (en) * | 2022-04-16 | 2022-08-09 | 黄石全洋光电科技有限公司 | Continuous vacuum coating production line and coating process |
| CN116435408A (en) * | 2023-05-05 | 2023-07-14 | 上海迪伐新能源设备制造有限公司 | Roller type laminating machine for continuous lamination |
| CN116435408B (en) * | 2023-05-05 | 2023-10-10 | 上海迪伐新能源设备制造有限公司 | Roller type laminating machine for continuous lamination |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190321 Address after: 518000 B903 Shenzhen National Engineering Laboratory Building, No. 20 South Seven Road, Yuehai Street, Nanshan District, Shenzhen City, Guangdong Province Patentee after: Shenzhen hi-tech Mstar Technology Ltd Address before: 518000 Guangdong Nanshan Science Park International Student Pioneering Building Phase 1 1304 Patentee before: Liu Zhenbo |