CN204442148U - The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece - Google Patents
The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece Download PDFInfo
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- CN204442148U CN204442148U CN201520156755.0U CN201520156755U CN204442148U CN 204442148 U CN204442148 U CN 204442148U CN 201520156755 U CN201520156755 U CN 201520156755U CN 204442148 U CN204442148 U CN 204442148U
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Abstract
The utility model discloses the stacked electrohydrodynamic Micropump of a kind of multi-pole-piece, comprise and setting gradually from top to bottom: the formations such as upper cover plate, upper, middle and lower three layers of pellosil, upper, middle and lower triple electrode sheet; Collector and emitter on upper lower floor electrode slice forms comb-like electrode array; All process round rectangle groove in the middle of described three layers of pellosil, form " S " type micro pump chamber with triple electrode sheet through hole after assembling.During use, first liquid inflow pipe is connected with external circulating system with liquid effuser, allows liquid be full of whole chamber.Then connect 500V DC power supply, utilize electrical hydrodynamic effect to drive liquid flow.This electrohydrodynamic Micropump adopts multi-pole-piece stacked structure, and three layers of chamber utilize through hole to be connected, and form " series connection " fluid passage.Triple electrode sheet produces electric field simultaneously, enhances the drag interaction to ion, has increased substantially the power effect of electrohydrodynamic pump.
Description
Technical field
The utility model relates to microelectronics field of radiating and micro-fluidic field, particularly relates to the stacked electrohydrodynamic Micropump of a kind of multi-pole-piece.
Background technology
At microelectronics field of radiating, along with the integrated level of electronic devices and components is more and more higher, the power density of electronic chip constantly increases, and its density of heat flow rate also starts remarkable increase.The temperature of chip greatly affects the life-span of chip, and for ensureing that chip can work in suitable temperature range, the heat that good Cooling Solution must be adopted to be produced is discharged in time.
In micro-channel heat sink, carry out forced convertion to working medium can make radiating effect generation significantly improve; And by finding the research of chip thermal source, 20% of total heat dissipation capacity is accounted for from chip top dispersed heat, 80% of total amount of heat is the bottom concentrating on chip, and air-cooled and traditional liquid cools technology the most frequently used at present is just dispelled the heat for local above chip, can not tackle the problem at its root.Therefore for meeting the radiating requirements of future electronic product, researcher proposes novel cooling scheme, namely prepare microchannel radiator structure for chip thermal source core, by chip and Micro Channel Architecture integrated, adopt the temperature of mode to chip of liquid cools to regulate and control.
But, liquid working substance flowing in Micro Channel Architecture can produce very high flow differential pressure, conventional fluid driving method (as conventional gear pumps, plunger displacement pump etc.) is inapplicable in microchannel, and integrated chip has again strict restriction to size simultaneously; This just needs one neither to take too many volume can provide sufficient power for fluid in fluid channel again, and the drive unit of steady operation is used as the power source of Working fluid flow.
Summary of the invention
The purpose of this utility model is the shortcoming and defect overcoming above-mentioned prior art, provides a kind of multi-pole-piece stacked electrohydrodynamic Micropump.The power effect solving prior art electrohydrodynamic pump is low, causes the technical problem of radiating effect difference.
The utility model is achieved through the following technical solutions:
The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece, comprises and to set gradually from top to bottom and edge seals combination mutually: upper cover plate 2, upper layer of silicon glued membrane 3, upper electrode sheet 4, middle level pellosil 5, middle level electrode slice 6, lower floor's pellosil 7 and lower electrode sheet 8;
Described upper electrode sheet 4, middle level electrode slice 6 and lower electrode sheet 8 upper surface, formed by the collector and emitter that raises up, spaced and staggered between collector electrode and emitter, forms comb-like electrode array; The end of collector and emitter causes outside comb-like electrode array with wire respectively;
An end of described upper electrode sheet 4, lower electrode sheet 8 and middle level electrode slice 6 offers liquid through-hole 8-1 respectively; Wherein, it is contrary that the liquid through-hole liquid through-hole be adjacent on layer electrode slice on every layer of electrode slice offers position; The middle part of described upper layer of silicon glued membrane 3, middle level pellosil 5 and lower floor's pellosil 7 all offers slotted eye, and the slotted eye that the liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with;
Correspond to this end of collector and emitter end at described upper cover plate 2, offer liquid outflow port 2-1.
The rectangular shaped slot that liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with, and liquid is flowed out by the liquid outflow port 2-1 on upper cover plate 2 after being entered by the liquid through-hole on lower electrode sheet 8 again, forms " S " type series connection fluid passage; Collector electrode end on every layer of electrode slice connects DC power cathode, and emitter end connects DC power anode.
Described upper electrode sheet 4 is contrary with the collector electrode of lower electrode sheet 8 and the distributing order of emitter distributing order and middle level electrode slice 6.
The comb-like electrode of described upper electrode sheet 4 and lower electrode sheet 8, is followed successively by emitter, collector electrode by comb-like electrode top to the distributing order of end.
The comb-like electrode of described middle level electrode slice 6, is followed successively by collector electrode, emitter by comb-like electrode top to the distributing order of end.
In described comb-like electrode array, adjacent collector electrode and emitter form one pair of electrodes, and the logarithm of this electrode pair is 24 right.
Described slotted eye is round rectangle slotted eye, slotted eye length 18mm, width 3mm.
The liquid outflow port 2-1 of described upper cover plate 2 connects liquid effuser 1; The liquid through-hole 8-1 of described lower electrode sheet 8 connects liquid inflow pipe 9.
The utility model, relative to prior art, has following advantage and effect:
Upper, middle and lower triple electrode sheet upper surface, spaced, staggered by the collector and emitter raised up, form comb-like electrode array; Achieve the chamber that triple electrode sheet is formed by comb-like electrode array, each chamber series connection, the electric field simultaneously produced, constitute " S " type fluid passage in vertical, add electrical hydrodynamic effect and act on time on liquid, enhance the drag interaction to ion, increase substantially the power effect of electrohydrodynamic Micropump.
The utility model electrohydrodynamic pump have movement-less part, reliable, low consumption, easily make and Maintenance free, volume little, the advantage such as low in energy consumption; And can directly with chip or runner integrated, without the need to separate space, adopt DC driven (but and not all), do not produce complementary field, electronic component work can not be disturbed.This kind of Micropump is not only recognized a breakthrough of the cooling problem being high hot-fluid device in solution microelectronic industry, can also be used in microfluid cooling system, the field such as drug delivery and MEMS (micro electro mechanical system).
The utility model electrohydrodynamic pump has unique use value and wide application prospect at micro fluid dynamcis.
Accompanying drawing explanation
Fig. 1 is the utility model multi-pole-piece stacked electrohydrodynamic Micropump exploded perspective view.
Fig. 2 is Fig. 1 pellosil structural representation.
Fig. 3 is layer electrode slice structural representation upper and lower shown in Fig. 1.
Fig. 4 is the electrode slice structural representation of middle level shown in Fig. 1.
Fig. 5 is the utility model multi-pole-piece stacked electrohydrodynamic Micropump liquid flow schematic diagram; After assembling, the fluid passage on triple electrode sheet and comb-like electrode array, slotted eye jointly form " S " type series connection liquid and lead to, i.e. " S " type micro pump chamber.
Note: in Fig. 3 and Fig. 4, A represents collector electrode, B represents emitter.
Embodiment
Below in conjunction with specific embodiment, the utility model is more specifically described in detail.
Embodiment
As shown in Fig. 1 to 5.The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece of the utility model, comprises and to set gradually from top to bottom and edge seals combination mutually: upper cover plate 2, upper layer of silicon glued membrane 3, upper electrode sheet 4, middle level pellosil 5, middle level electrode slice 6, lower floor's pellosil 7 and lower electrode sheet 8;
Described upper electrode sheet 4, middle level electrode slice 6 and lower electrode sheet 8 upper surface, formed by the collector and emitter that raises up, spaced and staggered between collector electrode and emitter, forms comb-like electrode array; The end of collector and emitter causes outside comb-like electrode array with wire respectively;
An end of described upper electrode sheet 4, lower electrode sheet 8 and middle level electrode slice 6 offers liquid through-hole 8-1 (diameter 3mm, through hole is at top plan view projector distance 15mm) respectively; Wherein, it is contrary that the liquid through-hole liquid through-hole be adjacent on layer electrode slice on every layer of electrode slice offers position; The middle part of described upper layer of silicon glued membrane 3, middle level pellosil 5 and lower floor's pellosil 7 all offers slotted eye, and the slotted eye that the liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with;
Correspond to this end of collector and emitter end at described upper cover plate 2, offer liquid outflow port 2-1.
As shown in Figure 1, shown in Figure 5.The rectangular shaped slot that liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with, and liquid is flowed out by the liquid outflow port 2-1 on upper cover plate 2 after being entered by the liquid through-hole on lower electrode sheet 8 again, forms " S " type series connection fluid passage; Collector electrode end on every layer of electrode slice connects DC power cathode, and emitter end connects DC power anode, connects 500V DC power supply, utilizes electrical hydrodynamic effect to drive liquid flow.
Described upper electrode sheet 4 is contrary with the collector electrode of lower electrode sheet 8 and the distributing order of emitter distributing order and middle level electrode slice 6.
The comb-like electrode of described upper electrode sheet 4 and lower electrode sheet 8, is followed successively by emitter, collector electrode by comb-like electrode top to the distributing order of end.
The comb-like electrode of described middle level electrode slice 6, is followed successively by collector electrode, emitter by comb-like electrode top to the distributing order of end.
In described comb-like electrode array, adjacent collector electrode and emitter form one pair of electrodes, and the logarithm of this electrode pair is 24 right.
Above-mentioned triple electrode plate electrode comb line live width is 0.3mm, and the distance between two comb lines of described electrode pair is 0.2mm, and the distance between electrode pair is 0.3mm.Electrode part (comb-like electrode array) Outside Dimensions is 25.8mm × 6.6mm.
Described slotted eye is round rectangle slotted eye, slotted eye length 18mm, width 3mm.
The liquid outflow port 2-1 (diameter is 3mm) of described upper cover plate 2 connects liquid effuser 1; The liquid through-hole 8-1 (diameter is 3mm) of described lower electrode sheet 8 connects liquid inflow pipe 9.
In use, first liquid inflow pipe 9 is connected with external circulating system with liquid effuser 1, allows liquid be full of whole " S " type micro pump chamber.Then connect 500V DC power supply, utilize electrical hydrodynamic effect to drive liquid flow.This electrohydrodynamic Micropump adopts multi-pole-piece stacked structure, and three layers of chamber utilize liquid through-hole to be connected, and form " series connection " fluid passage.Triple electrode sheet produces electric field simultaneously, enhances the drag interaction to ion, has increased substantially the power effect of electrohydrodynamic pump.
As mentioned above, just the utility model can be realized preferably.
Execution mode of the present utility model is not restricted to the described embodiments; other are any do not deviate from Spirit Essence of the present utility model and principle under do change, modification, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection range of the present utility model.
Claims (9)
1. the stacked electrohydrodynamic Micropump of multi-pole-piece, it is characterized in that, comprise and to set gradually from top to bottom and edge seals combination mutually: upper cover plate (2), upper layer of silicon glued membrane (3), upper electrode sheet (4), middle level pellosil (5), middle level electrode slice (6), lower floor's pellosil (7) and lower electrode sheet (8);
Described upper electrode sheet (4), middle level electrode slice (6) and lower electrode sheet (8) upper surface, form by the collector and emitter raised up, spaced and staggered between collector electrode and emitter, form comb-like electrode array; The end of collector and emitter causes outside comb-like electrode array with wire respectively;
An end of described upper electrode sheet (4), lower electrode sheet (8) and middle level electrode slice (6) offers liquid through-hole (8-1) respectively; Wherein, it is contrary that the liquid through-hole liquid through-hole be adjacent on layer electrode slice on every layer of electrode slice offers position; The middle part of described upper layer of silicon glued membrane (3), middle level pellosil (5) and lower floor's pellosil (7) all offers slotted eye, and the slotted eye that the liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with;
At described upper cover plate (2) this end corresponding to collector and emitter end, offer liquid outflow port (2-1).
2. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 1, it is characterized in that, the rectangular shaped slot that liquid through-hole on every layer of electrode slice is all adjacent on pellosil is communicated with, liquid is flowed out by the liquid outflow port (2-1) on upper cover plate (2) after being entered by the liquid through-hole on lower electrode sheet (8) again, forms " S " type series connection fluid passage; Collector electrode end on every layer of electrode slice connects DC power cathode, and emitter end connects DC power anode.
3. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 1, it is characterized in that, described upper electrode sheet (4) is contrary with the collector electrode of lower electrode sheet (8) and the distributing order of emitter distributing order and middle level electrode slice (6).
4. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 1, it is characterized in that, the comb-like electrode of described upper electrode sheet (4) and lower electrode sheet (8), is followed successively by emitter, collector electrode by comb-like electrode top to the distributing order of end.
5. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 1, is characterized in that, the comb-like electrode in described middle level electrode slice (6), is followed successively by collector electrode, emitter by comb-like electrode top to the distributing order of end.
6. the stacked electrohydrodynamic Micropump of multi-pole-piece according to any one of claim 1 to 5, is characterized in that, in described comb-like electrode array, adjacent collector electrode and emitter form one pair of electrodes, and the logarithm of this electrode pair is 24 right.
7. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 6, is characterized in that, described slotted eye is round rectangle slotted eye.
8. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 6, is characterized in that, described slotted eye length 18mm, width 3mm.
9. the stacked electrohydrodynamic Micropump of multi-pole-piece according to claim 1, is characterized in that, the liquid outflow port (2-1) of described upper cover plate (2) connects liquid effuser (1); The liquid through-hole (8-1) of described lower electrode sheet (8) connects liquid inflow pipe (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201520156755.0U CN204442148U (en) | 2015-03-19 | 2015-03-19 | The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece |
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| CN201520156755.0U CN204442148U (en) | 2015-03-19 | 2015-03-19 | The stacked electrohydrodynamic Micropump of a kind of multi-pole-piece |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104795963A (en) * | 2015-03-19 | 2015-07-22 | 华南理工大学 | Multi-electrode-plate laminating type electrofluid dynamic micro-pump |
-
2015
- 2015-03-19 CN CN201520156755.0U patent/CN204442148U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104795963A (en) * | 2015-03-19 | 2015-07-22 | 华南理工大学 | Multi-electrode-plate laminating type electrofluid dynamic micro-pump |
| CN104795963B (en) * | 2015-03-19 | 2017-08-29 | 华南理工大学 | A kind of stacked electrohydrodynamic Micropump of multi-pole-piece |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150701 Effective date of abandoning: 20170829 |
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| AV01 | Patent right actively abandoned |