CN204442149U - A kind of electrohydrodynamic Micropump based on bipolar sheets compound field - Google Patents
A kind of electrohydrodynamic Micropump based on bipolar sheets compound field Download PDFInfo
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- CN204442149U CN204442149U CN201520156839.4U CN201520156839U CN204442149U CN 204442149 U CN204442149 U CN 204442149U CN 201520156839 U CN201520156839 U CN 201520156839U CN 204442149 U CN204442149 U CN 204442149U
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Abstract
The utility model discloses a kind of electrohydrodynamic Micropump based on bipolar sheets compound field, comprise and to set gradually from top to bottom and edge seals the upper electrode sheet of combination, pellosil and lower electrode sheet mutually; The forward surface of levels electrode slice has comb-like electrode array; The middle part of pellosil offers slotted eye; The upper electrode sheet at two ends corresponding to upper comb dent shape electrod-array offers liquid inflow port and liquid outflow port respectively; Liquid inflow port is all communicated with slotted eye with liquid outflow port; Slotted eye and up and down comb-like electrode array form micro pump chamber; Upper and lower comb-like electrode array is staggered relatively, produces electric field simultaneously, forms compound field, thus effectively improves electric field strength.Compound field acts on the liquid in micro pump chamber, enhances the drag interaction to ion in liquid, significantly improves the power effect of electrohydrodynamic Micropump.
Description
Technical field
The utility model relates to microelectronics field of radiating and micro-fluidic field, particularly relates to a kind of electrohydrodynamic Micropump based on bipolar sheets compound field.
Background technology
At microelectronics field of radiating, along with the integrated level of electronic devices and components is more and more higher, the power density of electronic chip constantly increases, and its density of heat flow rate also starts remarkable increase.The temperature of chip greatly affects the life-span of chip, and for ensureing that chip can work in suitable temperature range, the heat that good Cooling Solution must be adopted to be produced is discharged in time.
In micro-channel heat sink, carry out forced convertion to working medium can make radiating effect significantly improve; And by finding the research of chip thermal source, 20% of total heat dissipation capacity is accounted for from chip top dispersed heat, 80% of total amount of heat is the bottom concentrating on chip, and air-cooled and traditional liquid cools technology the most frequently used at present is just dispelled the heat for local above chip, can not tackle the problem at its root.Therefore for meeting the radiating requirements of future electronic product, researcher proposes novel cooling scheme, namely prepare microchannel radiator structure for chip thermal source core, by chip and Micro Channel Architecture integrated, adopt the temperature of mode to chip of liquid cools to regulate and control.
But, liquid working substance flowing in Micro Channel Architecture can produce very high flow differential pressure, conventional fluid driving method (as conventional gear pumps, plunger displacement pump etc.) is inapplicable in microchannel, and integrated chip has again strict restriction to size simultaneously; This just needs one neither to take too many volume can provide sufficient power for fluid in fluid channel again, and the drive unit of steady operation is used as the power source of Working fluid flow.
Summary of the invention
The purpose of this utility model is the shortcoming and defect overcoming above-mentioned prior art, provides a kind of electrohydrodynamic Micropump based on bipolar sheets compound field that effectively can promote the power performance of Micropump.
The utility model is achieved through the following technical solutions:
Based on an electrohydrodynamic Micropump for bipolar sheets compound field, comprise and to set gradually from top to bottom and edge seals the upper electrode sheet 3 of combination, pellosil 4 and lower electrode sheet 5 mutually;
The forward surface of described upper electrode sheet 3 and lower electrode sheet 5, the collector and emitter by projection is formed, spaced and staggered between collector electrode and emitter, forms upper and lower comb-like electrode array 3-1,5-1; The end of collector and emitter causes outside comb-like electrode array with wire respectively;
The middle part of described pellosil 4 offers slotted eye 4-1; The upper electrode sheet 3 at two ends corresponding to upper comb dent shape electrod-array 3-1 offers liquid inflow port 1 and liquid outflow port 2 respectively; Liquid inflow port 1 is all communicated with slotted eye 4-1 with liquid outflow port 2; Slotted eye 4-1 and up and down comb-like electrode array form micro pump chamber;
Upper and lower comb-like electrode array produces electric field simultaneously, acts on liquid in micro pump chamber respectively; Liquid inflow port 1, as Micropump entrance, makes in liquid distribution micro pump chamber, and is flowed out by liquid outflow port 2.
The entire length of described lower comb-like electrode array 5-1 is greater than the entire length of upper comb dent shape electrod-array 3-1.
In described upper and lower comb-like electrode array 3-1,5-1, each adjacent collector electrode and emitter form one pair of electrodes, and the electrode pair logarithm in upper comb dent shape electrod-array 3-1 is 11 right, and the electrode pair in lower comb-like electrode array 5-1 is 24 right to logarithm.
Emitter end in described upper and lower comb-like electrode array 3-1,5-1 all connects DC power anode, and collector electrode end all connects DC power cathode.
Described slotted eye 4-1 is round rectangle slotted eye.
Described round rectangle slotted eye length is 18mm, and width is 3mm.
The electrode combs line live width of described upper and lower comb-like electrode array 3-1,5-1 is 0.3mm, and the distance between two comb lines of electrode pair is 0.2mm, and the distance between electrode pair is 0.3mm.
Described upper comb dent shape electrod-array 3-1 Outside Dimensions is 11.8mm × 6.6mm, and lower comb-like electrode array 5-1 Outside Dimensions is 26.1mm × 6.6mm.
Described pellosil 4 thickness is 0.3mm.
The utility model, relative to prior art, has following advantage and effect:
The forward surface of the utility model upper electrode sheet and lower electrode sheet, the collector and emitter by projection is formed, spaced and staggered between collector electrode and emitter, forms upper and lower comb-like electrode array; Upper and lower comb-like electrode array is staggered relatively, produces electric field simultaneously, forms compound field, thus effectively improves electric field strength.Compound field acts on the liquid in micro pump chamber, enhances the drag interaction to ion in liquid, significantly improves the power effect of electrohydrodynamic Micropump.
Accompanying drawing explanation
Fig. 1 is electrohydrodynamic Micropump (unassembled before) structural representation of the utility model based on bipolar sheets compound field.
Fig. 2 is the structural representation of pellosil shown in Fig. 1.
Fig. 3 is the chip architecture of upper electrode shown in Fig. 1 schematic diagram.
Fig. 4 is the chip architecture of lower electrode shown in Fig. 1 schematic diagram.
Note: in Fig. 3, Fig. 4, A represents emitter, B presenting set electrode.
Embodiment
Below in conjunction with specific embodiment, the utility model is more specifically described in detail.
Embodiment
As shown in Figures 1 to 4.A kind of electrohydrodynamic Micropump based on bipolar sheets compound field of the utility model, comprises and to set gradually from top to bottom and edge seals the upper electrode sheet 3 of combination, pellosil 4 and lower electrode sheet 5 mutually;
The forward surface of described upper electrode sheet 3 and lower electrode sheet 5, the collector and emitter by projection is formed, spaced and staggered between collector electrode and emitter, forms upper and lower comb-like electrode array 3-1,5-1; The end of collector and emitter causes outside comb-like electrode array with wire respectively;
The middle part of described pellosil 4 offers slotted eye 4-1; The upper electrode sheet 3 at two ends corresponding to upper comb dent shape electrod-array 3-1 offers liquid inflow port 1 and liquid outflow port 2 respectively; Liquid inflow port 1 is all communicated with slotted eye 4-1 with liquid outflow port 2; Slotted eye 4-1 and up and down comb-like electrode array form micro pump chamber;
Upper and lower comb-like electrode array produces electric field simultaneously, acts on liquid in micro pump chamber respectively; Liquid inflow port 1, as Micropump entrance, makes in liquid distribution micro pump chamber, and is flowed out by liquid outflow port 2.
The entire length of described lower comb-like electrode array 5-1 is greater than the entire length of upper comb dent shape electrod-array 3-1.
In described upper and lower comb-like electrode array 3-1,5-1, each adjacent collector electrode and emitter form one pair of electrodes, and the electrode pair logarithm in upper comb dent shape electrod-array 3-1 is 11 right, and the electrode pair in lower comb-like electrode array 5-1 is 24 right to logarithm.
Emitter end in described upper and lower comb-like electrode array 3-1,5-1 all connects DC power anode, and collector electrode end all connects DC power cathode.
Described slotted eye 4-1 is round rectangle slotted eye.
Described round rectangle slotted eye length is 18mm, and width is 3mm.
The electrode combs line live width of described upper and lower comb-like electrode array 3-1,5-1 is 0.3mm, and the distance between two comb lines of electrode pair is 0.2mm, and the distance between electrode pair is 0.3mm.
Described upper comb dent shape electrod-array 3-1 Outside Dimensions is 11.8mm × 6.6mm, and lower comb-like electrode array 5-1 Outside Dimensions is 26.1mm × 6.6mm.
Described pellosil 4 thickness is 0.3mm.
During use, liquid inflow port 1 and liquid outflow port 2 connect external circulating system by silicone tube 1-1,1-2 respectively as Micropump entrance and exit, allow liquid be full of whole micro pump chamber.The emitter end of upper and lower two-layer electrode slice is connected with positive source, and collector electrode end is connected with power cathode, utilizes electrical hydrodynamic effect to drive liquid flow in micro pump chamber.Power supply is 500V adjustable DC power supply.
As mentioned above, just the utility model can be realized preferably.
Execution mode of the present utility model is not restricted to the described embodiments; other are any do not deviate from Spirit Essence of the present utility model and principle under do change, modification, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection range of the present utility model.
Claims (9)
1., based on an electrohydrodynamic Micropump for bipolar sheets compound field, it is characterized in that comprising and to set gradually from top to bottom and edge seals the upper electrode sheet (3) of combination, pellosil (4) and lower electrode sheet (5) mutually;
The forward surface of described upper electrode sheet (3) and lower electrode sheet (5), collector and emitter by projection is formed, spaced and staggered between collector electrode and emitter, form upper and lower comb-like electrode array (3-1,5-1); The end of collector and emitter causes outside comb-like electrode array with wire respectively;
The middle part of described pellosil (4) offers slotted eye (4-1); The upper electrode sheet (3) at two ends corresponding to upper comb dent shape electrod-array (3-1) offers liquid inflow port (1) and liquid outflow port (2) respectively; Liquid inflow port (1) is all communicated with slotted eye (4-1) with liquid outflow port (2); Slotted eye (4-1) and up and down comb-like electrode array form micro pump chamber;
Upper and lower comb-like electrode array produces electric field simultaneously, acts on liquid in micro pump chamber respectively; Liquid inflow port (1), as Micropump entrance, makes in liquid distribution micro pump chamber, and is flowed out by liquid outflow port (2).
2. electrohydrodynamic Micropump according to claim 1, is characterized in that: the entire length of described lower comb-like electrode array (5-1) is greater than the entire length of upper comb dent shape electrod-array (3-1).
3. electrohydrodynamic Micropump according to claim 1, it is characterized in that: in described upper and lower comb-like electrode array (3-1,5-1), each adjacent collector electrode and emitter form one pair of electrodes, electrode pair logarithm in upper comb dent shape electrod-array (3-1) is 11 right, and the electrode pair in lower comb-like electrode array (5-1) is 24 right to logarithm.
4. electrohydrodynamic Micropump according to any one of claim 1 to 3, it is characterized in that: the emitter end in described upper and lower comb-like electrode array (3-1,5-1) all connects DC power anode, and collector electrode end all connects DC power cathode.
5. electrohydrodynamic Micropump according to claim 4, is characterized in that: described slotted eye (4-1) is round rectangle slotted eye.
6. electrohydrodynamic Micropump according to claim 5, is characterized in that: described round rectangle slotted eye length is 18mm, and width is 3mm.
7. electrohydrodynamic Micropump according to claim 4, it is characterized in that: the electrode combs line live width of described upper and lower comb-like electrode array (3-1,5-1) is 0.3mm, distance between two comb lines of electrode pair is 0.2mm, and the distance between electrode pair is 0.3mm.
8. electrohydrodynamic Micropump according to claim 4, it is characterized in that: described upper comb dent shape electrod-array (3-1) Outside Dimensions is 11.8mm × 6.6mm, lower comb-like electrode array (5-1) Outside Dimensions is 26.1mm × 6.6mm.
9. electrohydrodynamic Micropump according to claim 4, is characterized in that: described pellosil (4) thickness is 0.3mm.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104767354A (en) * | 2015-03-19 | 2015-07-08 | 华南理工大学 | Electrofluid power micropump based on double-pole-piece composite electric field |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN104767354A (en) * | 2015-03-19 | 2015-07-08 | 华南理工大学 | Electrofluid power micropump based on double-pole-piece composite electric field |
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Granted publication date: 20150701 Termination date: 20180319 |
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