CN104753309A - Multi-group electrode flush type electric hydrodynamic force micro-pump - Google Patents
Multi-group electrode flush type electric hydrodynamic force micro-pump Download PDFInfo
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- CN104753309A CN104753309A CN201510121793.7A CN201510121793A CN104753309A CN 104753309 A CN104753309 A CN 104753309A CN 201510121793 A CN201510121793 A CN 201510121793A CN 104753309 A CN104753309 A CN 104753309A
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Abstract
The invention discloses a multi-group electrode flush type electric hydrodynamic force micro-pump. The multi-group electrode flush type electric hydrodynamic force micro-pump comprises an electrode slice and a cavity covering plate covering on the electrode slice, wherein a periphery of the cavity cover plate is sealed and combined with the electrode slice; three groups of comb-shaped electrode arrays with the same structure are arranged on a combining face of the electrode slice and the cavity cover plate; 8-shaped grooves are arranged on the combining face of the cavity cover plate and the electrode slice; a fluid flow outlet and a fluid flow inlet are respectively arranged at the corresponding tail end and the beginning end of the electrode in the grooves. The fluid flow inlet on the cavity cover plate is used as a micro-pump inlet, so that the fluid is distributed between 8-shaped grooves, and between collectors and emitting electrodes of the three groups of the comb-shaped electrode arrays; through the fluid flow outlet, the joined outflow of fluid in parallel can be completed, the efficiency of the micro-pump is effectively improved, and the power effect of an electric hydrodynamic force pump is greatly promoted; and thereby the chip energy can be timely discharged; the multi-group electrode flush type electric hydrodynamic force micro-pump overcomes the shortcomings of being easy to damage and unstable in work in the prior art for the chip cannot radiate timely.
Description
Technical field
The present invention relates to microelectronics field of radiating and micro-fluidic field, particularly relate to a kind of multi-group electrode flush system electrohydrodynamic Micropump.
Background technology
At microelectronics field of radiating, along with the integrated level of electronic devices and components is more and more higher, the power density of electronic chip constantly increases, and its density of heat flow rate also starts remarkable increase.The temperature of chip greatly affects the life-span of chip, and for ensureing that chip can work in suitable temperature range, the heat that good Cooling Solution must be adopted to be produced is discharged in time.
In micro-channel heat sink, carry out forced convertion to working medium can make radiating effect significantly improve; And by finding the research of chip thermal source, 20% of total heat dissipation capacity is accounted for from chip top dispersed heat, 80% of total amount of heat is the bottom concentrating on chip, and air-cooled and traditional liquid cools technology the most frequently used at present is just dispelled the heat for local above chip, can not tackle the problem at its root.Therefore for meeting the radiating requirements of future electronic product, researcher proposes novel cooling scheme, namely prepare microchannel radiator structure for chip thermal source core, by chip and Micro Channel Architecture integrated, adopt the temperature of mode to chip of liquid cools to regulate and control.
But, liquid working substance flowing in Micro Channel Architecture can produce very high flow differential pressure, conventional fluid driving method (as conventional gear pumps, plunger displacement pump etc.) is inapplicable in microchannel, and integrated chip has again strict restriction to size simultaneously; This just needs one neither to take too many volume can provide sufficient power for fluid in fluid channel again, and the drive unit of steady operation is used as the power source of Working fluid flow.
Summary of the invention
The object of the invention is to the shortcoming and defect overcoming above-mentioned prior art, a kind of multi-group electrode flush system electrohydrodynamic Micropump is provided, solve in prior art, due to Micropump efficiency and power performance low, the heat of chip can not be discharged in time and cause chip very easily to damage, the shortcoming such as job insecurity.
The present invention is achieved through the following technical solutions:
A kind of multi-group electrode flush system electrohydrodynamic Micropump, comprise electrode slice 4 and cover the chamber cover plate 3 on electrode slice 4, the periphery of described chamber cover plate 3 and electrode slice 4 seal and combine;
With on the faying face of chamber cover plate 3 on electrode slice, tiled side by side by the electrode that three groups of structures are identical and form, often organize electrode to form by the collector and emitter that raises up, spaced and staggered between collector electrode and emitter, form three groups of comb-like electrode arrays 5; Often the collector and emitter end organized in comb-like electrode array 5 causes outside comb-like electrode array with wire respectively;
On chamber cover plate 3 with the faying face of electrode slice offers " day " font groove 3-1, in " day " font groove 3-1, corresponding to the end of electrode and position, top, offer liquid flowing outlet 1 and liquid inflow port 2 respectively.
Described " day ", font groove 3-1 and three group of comb-like electrode array formed three groups of parallel connection liquid chambers, and three groups of comb-like electrode arrays produce electric field simultaneously, act on chamber in parallel indoor liquid respectively; Liquid inflow port 2 on chamber cover plate 3, as Micropump entrance, makes liquid distribution between " day " font groove 3-1, between the collector electrode of three groups of comb-like electrode arrays 5 and emitter, and completes parallel connection liquid by liquid flowing outlet 1 and converge outflow.
In " day " font groove 3-1, groove difference corresponding one group of comb-like electrode array separately that upper, middle and lower three is parallel to each other; The groove that two, left and right is parallel to each other corresponds to the end of electrode and the end position at top respectively separately.
The emitter end of three groups of comb-like electrode arrays 5 all connects DC power anode, and collector electrode end all connects DC power cathode.
Groove width 3mm, the groove depth 0.3mm of described " day " font groove 3-1.
Described chamber cover plate 3 is made up of polytetrafluoroethylmaterial material.
The tube connector of described liquid inflow port 2 and liquid flowing outlet 1 is silicone tube.
The present invention, relative to prior art, has following advantage and effect:
" day " font groove on chamber cover plate and three groups of comb-like electrode arrays form three groups of parallel connection liquid chambers, and three groups of comb-like electrode arrays produce electric field simultaneously, act on chamber in parallel indoor liquid respectively, enhance the drag interaction of electric field to liquid intermediate ion; Liquid inflow port on chamber cover plate is as Micropump entrance, make liquid distribution between " day " font groove, between the collector electrode of three groups of comb-like electrode arrays and emitter, and complete parallel connection liquid by liquid flowing outlet and converge outflow, the efficiency of effective raising Micropump, can the power effect of significantly motor current body kinetic pump, for the timely heat radiation of chip provides guarantee.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the Pit cover plate structure schematic diagram in Fig. 1.
Fig. 3 is three groups of comb-like electrode array distribution structural representations in Fig. 1; Wherein, A represents emitter, and B represents collector electrode.
Fig. 4 is multi-group electrode flush system electrohydrodynamic Micropump liquid flow schematic diagram of the present invention.
Embodiment
Below in conjunction with specific embodiment, the present invention is more specifically described in detail.
Embodiment
As shown in Figures 1 to 4.A kind of multi-group electrode flush system of the present invention electrohydrodynamic Micropump, comprise electrode slice 4 and cover the chamber cover plate 3 on electrode slice 4, the periphery of described chamber cover plate 3 and electrode slice 4 seal and combine;
With on the faying face of chamber cover plate 3 on electrode slice, tiled side by side by the electrode that three groups of structures are identical and form, often organize electrode to form by the collector and emitter that raises up, spaced and staggered between collector electrode and emitter, form three groups of comb-like electrode arrays 5; Often the collector and emitter end organized in comb-like electrode array 5 causes outside comb-like electrode array with wire respectively;
Adjacent collector electrode and emitter form one pair of electrodes, and it is 24 right that electrode pair logarithm is.Electrode combs line live width in three groups of comb-like electrode arrays 5 is 0.3mm, and the distance between two comb lines of described electrode pair is 0.2mm, and the distance between electrode pair is 0.3mm.
On chamber cover plate 3 with the faying face of electrode slice offers " day " font groove 3-1, in " day " font groove 3-1, corresponding to the end of electrode and position, top, offer liquid flowing outlet 1 and liquid inflow port 2 respectively.The electrode part Outside Dimensions often organizing comb-like electrode array 5 is 26.1mm × 6.6mm, to ensure that often organizing electrode pair structure is covered with bottom corresponding " day " font groove 3-1.Between adjacent fingers shape electrod-array 5, interval width is 2.4mm.
Described " day ", font groove 3-1 and three group of comb-like electrode array formed three groups of parallel connection liquid chambers, and three groups of comb-like electrode arrays produce electric field simultaneously, act on chamber in parallel indoor liquid respectively; Liquid inflow port 2 on chamber cover plate 3, as Micropump entrance, makes liquid distribution between " day " font groove 3-1, between the collector electrode of three groups of comb-like electrode arrays 5 and emitter, and completes parallel connection liquid by liquid flowing outlet 1 and converge outflow.
In " day " font groove 3-1, groove difference corresponding one group of comb-like electrode array separately that upper, middle and lower three is parallel to each other; The groove that two, left and right is parallel to each other corresponds to the end of electrode and the end position at top respectively separately.
The emitter end of three groups of comb-like electrode arrays 5 all connects DC power anode, and collector electrode end all connects DC power cathode, utilizes DC power supply (500V) electrical hydrodynamic effect to drive liquid flow.
Groove width 3mm, the groove depth 0.3mm of described " day " font groove 3-1, along comb-like electrode array 5 length direction be 18mm, the groove interval width that is parallel to each other of upper, middle and lower three is 6mm.
Described chamber cover plate 3 is made up of polytetrafluoroethylmaterial material.
The tube connector of described liquid inflow port 2 and liquid flowing outlet 1 is silicone tube, and bore dia is 3mm, at top plan view projector distance 15mm.Silicone tube external diameter is 3mm, and internal diameter is 1mm.
As mentioned above, just the present invention can be realized preferably.
Embodiments of the present invention are not restricted to the described embodiments; other are any do not deviate from Spirit Essence of the present invention and principle under do change, modification, substitute, combine, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (7)
1. a multi-group electrode flush system electrohydrodynamic Micropump, it is characterized in that comprising electrode slice (4) and covering the chamber cover plate (3) on electrode slice (4), the periphery of described chamber cover plate (3) and electrode slice (4) seal and combine;
With on the faying face of chamber cover plate (3) on electrode slice, tiled side by side by the electrode that three groups of structures are identical and form, often organize electrode to form by the collector and emitter raised up, spaced and staggered between collector electrode and emitter, form three groups of comb-like electrode arrays (5); Often the collector and emitter end organized in comb-like electrode array (5) causes outside comb-like electrode array with wire respectively;
The faying face of and electrode slice upper at chamber cover plate (3) offers " day " font groove (3-1), " day " offer liquid flowing outlet (1) and liquid inflow port (2) respectively in font groove (3-1), corresponding to the end of electrode and position, top.
2. multi-group electrode flush system electrohydrodynamic Micropump according to claim 1, it is characterized in that: described " day " font groove (3-1) and three groups of comb-like electrode arrays form three groups of parallel connection liquid chambers, three groups of comb-like electrode arrays produce electric field simultaneously, act on chamber in parallel indoor liquid respectively; Liquid inflow port (2) on chamber cover plate (3) is as Micropump entrance, liquid distribution is existed " day " between font groove (3-1), between the collector electrode of three groups of comb-like electrode arrays (5) and emitter, and complete parallel connection liquid by liquid flowing outlet (1) and converge outflow.
3. multi-group electrode flush system electrohydrodynamic Micropump according to claim 1, is characterized in that: " day " in font groove (3-1), the groove that upper, middle and lower three is parallel to each other corresponding one group of comb-like electrode array separately respectively; The groove that two, left and right is parallel to each other corresponds to the end of electrode and the end position at top respectively separately.
4. multi-group electrode flush system electrohydrodynamic Micropump according to any one of claim 1 to 3, it is characterized in that: the emitter end of three groups of comb-like electrode arrays (5) all connects DC power anode, and collector electrode end all connects DC power cathode.
5. multi-group electrode flush system electrohydrodynamic Micropump according to claim 4, is characterized in that: described " day " groove width 3mm, the groove depth 0.3mm of font groove (3-1).
6. multi-group electrode flush system electrohydrodynamic Micropump according to claim 4, is characterized in that: described chamber cover plate (3) is made up of polytetrafluoroethylmaterial material.
7. multi-group electrode flush system electrohydrodynamic Micropump according to claim 4, is characterized in that: the tube connector of described liquid inflow port (2) and liquid flowing outlet (1) is silicone tube.
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| CN201510121793.7A CN104753309A (en) | 2015-03-19 | 2015-03-19 | Multi-group electrode flush type electric hydrodynamic force micro-pump |
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| CN201510121793.7A CN104753309A (en) | 2015-03-19 | 2015-03-19 | Multi-group electrode flush type electric hydrodynamic force micro-pump |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105406685A (en) * | 2015-12-15 | 2016-03-16 | 华南理工大学 | Electrohydrodynamic micropump with multiple electrode slices inserted |
| CN106098657A (en) * | 2016-08-15 | 2016-11-09 | 华南理工大学 | The small-scale liquid cooling system of a kind of electrohydraulic dynamic Micropump driving and method |
| CN110601497A (en) * | 2019-09-05 | 2019-12-20 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol traveling wave type micropump and working method |
| CN113904521A (en) * | 2021-12-08 | 2022-01-07 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
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| CN203457024U (en) * | 2013-09-25 | 2014-02-26 | 华南理工大学 | Flat electrofluid power micro-pump limiting electric fields |
| US20140219823A1 (en) * | 2011-04-06 | 2014-08-07 | Postech Academy-Industry Foundation | Micropump |
| CN204517632U (en) * | 2015-03-19 | 2015-07-29 | 华南理工大学 | A kind of multi-group electrode flush system electrohydrodynamic Micropump |
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| US20080118370A1 (en) * | 2006-11-20 | 2008-05-22 | Andrei Zoulkarneev | Electro-hydrodynamic micro-pump and method of operating the same |
| US20140219823A1 (en) * | 2011-04-06 | 2014-08-07 | Postech Academy-Industry Foundation | Micropump |
| CN203457024U (en) * | 2013-09-25 | 2014-02-26 | 华南理工大学 | Flat electrofluid power micro-pump limiting electric fields |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105406685A (en) * | 2015-12-15 | 2016-03-16 | 华南理工大学 | Electrohydrodynamic micropump with multiple electrode slices inserted |
| CN106098657A (en) * | 2016-08-15 | 2016-11-09 | 华南理工大学 | The small-scale liquid cooling system of a kind of electrohydraulic dynamic Micropump driving and method |
| CN106098657B (en) * | 2016-08-15 | 2018-09-14 | 华南理工大学 | A kind of small-sized liquid cooling system and method for the driving of electrohydraulic dynamic Micropump |
| CN110601497A (en) * | 2019-09-05 | 2019-12-20 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol traveling wave type micropump and working method |
| CN110601497B (en) * | 2019-09-05 | 2021-07-23 | 中国科学院力学研究所 | Alternating current electroosmosis driven ethanol traveling wave type micropump and working method |
| CN113904521A (en) * | 2021-12-08 | 2022-01-07 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
| CN113904521B (en) * | 2021-12-08 | 2022-05-06 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
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Application publication date: 20150701 |