CN113904521A - Multi-stage electroosmosis micropump - Google Patents

Multi-stage electroosmosis micropump Download PDF

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Publication number
CN113904521A
CN113904521A CN202111491900.7A CN202111491900A CN113904521A CN 113904521 A CN113904521 A CN 113904521A CN 202111491900 A CN202111491900 A CN 202111491900A CN 113904521 A CN113904521 A CN 113904521A
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China
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porous
electrode
lead
cover plate
electrode lead
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CN202111491900.7A
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CN113904521B (en
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高猛
章泽波
叶乐
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Advanced Institute of Information Technology AIIT of Peking University
Hangzhou Weiming Information Technology Co Ltd
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Advanced Institute of Information Technology AIIT of Peking University
Hangzhou Weiming Information Technology Co Ltd
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Publication of CN113904521A publication Critical patent/CN113904521A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K44/00Machines in which the dynamo-electric interaction between a plasma or flow of conductive liquid or of fluid-borne conductive or magnetic particles and a coil system or magnetic field converts energy of mass flow into electrical energy or vice versa
    • H02K44/02Electrodynamic pumps

Abstract

The invention belongs to the technical field of electroosmosis micropumps, and provides a multistage electroosmosis micropump which comprises a shell, a plurality of first porous electrodes, a plurality of second porous electrodes, a plurality of porous medium films, a first guide piece and a second guide piece, wherein a cavity is formed in the shell, a first electric interface, a second electric interface, a liquid inlet and a liquid outlet are arranged on the shell, an electroosmosis driving module consisting of the first porous electrodes, the porous medium films and the second porous electrodes is axially arranged in the cavity, the cavity is communicated with the liquid inlet and the liquid outlet through a flow channel on the shell, the first guide piece is assembled on the shell, and the first porous electrodes are electrically connected with the first electric interface through the first guide piece; the second guide is assembled on the shell, and the second porous electrode is electrically connected with the second electrical interface through the second guide, so that the internal and external electrical interconnection and fluid intercommunication of the pump are realized. The structure can enable the structure of the multistage electroosmosis micropump to be more compact and smaller, and can also enable the multistage electroosmosis micropump to be more reliably packaged.

Description

Multi-stage electroosmosis micropump
Technical Field
The invention belongs to the technical field of electroosmosis micropumps, and particularly relates to a multistage electroosmosis micropump.
Background
This section provides background information related to the present disclosure only and is not necessarily prior art.
Under the microscopic scale, a specific electric double-layer structure is formed on the inner wall surface of the micro/nano channel in the micro/nano channel, and when voltage is loaded along the micro/nano channel, the electric double-layer structure slides under the driving of electric field force and drags peripheral fluid to flow forwards under the action of fluid viscosity to form electroosmotic flow. The electroosmosis micropump is a microfluid driving device for realizing active fluid transportation by utilizing the phenomenon, and in order to increase the driving flow of microfluid, the micropump mostly adopts a porous medium film as a driving source to generate electroosmosis flow. A large number of micro/nano channels which are arranged in parallel are integrated on the porous medium film, so that the flow can be greatly improved.
However, the flow rate obtained by the traditional porous medium film electroosmosis micropump per minute under the low-voltage driving of below 10V can only reach dozens of microliter levels to hundreds of microliter levels, and the high-flow fluid transportation requirements, such as the transportation of macromolecular drugs such as insulin, are difficult to meet. The increase of the driving voltage is one of the common methods for increasing the electroosmotic flow, but the high voltage can destroy the molecular structure of the drug, and the electrolysis reaction is easily generated on the surface of the electrode to form bubbles and electrolysis byproducts, which cause danger to human body. Increasing the effective area of the porous medium film electroosmosis drive is another common method, for example, increasing the effective pore density of the micro/nano channel on the porous medium film, or arranging a plurality of porous medium films in parallel to increase the effective area of the electroosmosis drive, but the film obtained by the former method has weak strength and is easy to break when the micropump is assembled, and the high-density micro/nano channel has very high preparation difficulty, and the latter method can increase the volume of the micropump pump body, which is not only not beneficial to the miniaturization integration of the micropump pump body, but also can increase the difficulty of fluid extraction and electrical extraction.
Disclosure of Invention
The invention aims to at least solve the problem that the electroosmotic micropump in the prior art is not compact enough, and the aim is realized by the following technical scheme:
the invention provides a multistage electroosmosis micropump, which comprises:
the liquid outlet device comprises a shell, a liquid outlet and a liquid inlet, wherein a cavity is formed in the shell, a first electrical interface, a second electrical interface, a liquid inlet and a liquid outlet are arranged on the shell, the first electrical interface is used for connecting one electrode of a power supply, and the second electrical interface is used for connecting the other electrode of the power supply;
a plurality of first porous electrodes, each of the first porous electrodes being arranged at intervals along an axial direction of the cavity;
the second porous electrodes are arranged in the cavity and positioned between two adjacent first porous electrodes, the second porous electrodes and the first porous electrodes are arranged at intervals, the cavity is divided into a plurality of fluid cavities by the first porous electrodes and the second porous electrodes, one of the two adjacent fluid cavities is communicated with the liquid inlet, and the other fluid cavity is communicated with the liquid outlet;
the porous medium films are arranged at one axial end of the first porous electrode and one axial end of the second porous electrode in a one-to-one corresponding mode;
a first lead mounted on the housing, the first porous electrode being in electrical connection with the first electrical interface through the first lead;
a second lead mounted on the housing, the second porous electrode being in electrical connection with the second electrical interface through the second lead.
The multistage electroosmosis micropump integrates the first guide piece and the second guide piece which are arranged on the shell and connected with the anode and the cathode of a power supply, and integrates the fluid inlet and outlet channels, the anode and the cathode of each electroosmosis micropump are respectively and electrically connected with the first guide piece and the second guide piece, and the fluid inlet and the fluid outlet of each electroosmosis micropump are respectively communicated with the fluid inlet and the fluid outlet channels, so that the interconnection of the electricity inside and outside the pumps and the communication of the fluid are realized. Therefore, the switching of the high-density parallel electrodes and the fluid inlet and outlet in the pump is realized through the leads and the fluid channel integrated on the shell, so that the multistage electroosmosis micropump has a more compact structure and a smaller volume, and the multistage electroosmosis micropump can be packaged more reliably.
In addition, the multistage electroosmotic micropump according to the present invention may also have the following additional technical features:
in some embodiments of the present invention, the housing includes a pump housing base, a first adapter cover plate and a second adapter cover plate, the pump housing base is provided with the cavity, the first adapter cover plate is covered at an opening end of the pump housing base, the second adapter cover plate is connected to the first adapter cover plate, the guide is clamped between the first adapter cover plate and the second adapter cover plate, a flow channel is formed between the first adapter cover plate and the second adapter cover plate, and the flow channel is communicated with the liquid inlet or the liquid outlet through the flow channel.
In some embodiments of the present invention, the flow channels include a first flow channel and a second flow channel, the first flow channel is communicated with the liquid inlet, the second flow channel is communicated with the liquid outlet, the first adapter cover plate is provided with a plurality of through holes, the through holes are communicated with the fluid chamber in a one-to-one correspondence manner, the first flow channel is communicated with the fluid chamber for inlet liquid through a part of the through holes, and the second flow channel is communicated with the fluid chamber for outlet liquid through another part of the through holes.
In some embodiments of the present invention, the first lead includes a first electrode lead and a plurality of second electrode leads, the first electrode lead is embedded between the first adapter cover plate and the second adapter cover plate, the second electrode lead is embedded between the first adapter cover plate and the second adapter cover plate, the second electrode lead is electrically connected with the first porous electrode in a one-to-one correspondence, the second electrode lead is electrically connected with the first electrical interface through the first electrode lead, the second lead includes a third electrode lead and a plurality of fourth electrode leads, the third electrode lead is embedded between the first and second transit cover plates, the fourth electrode lead is electrically connected with the second porous electrode in a one-to-one correspondence manner, and the fourth electrode lead is electrically connected with the second electrical interface through the third electrode lead.
In some embodiments of the present invention, a plurality of first locking grooves are formed in an inner wall of the pump housing base, a plurality of second locking grooves are formed in an end of the first adaptor cover plate facing the pump housing base, positions of the second locking grooves correspond to positions of the first locking grooves, the first porous electrode is inserted into the first locking grooves and the second locking grooves, and the second porous electrode is inserted into the first locking grooves and the second locking grooves.
In some embodiments of the present invention, the first electrode lead and the third electrode lead are each of a metal sheet type structure, the first electrode lead and the third electrode lead are each disposed along an axial direction of the case, and the second electrode lead and the fourth electrode lead are each of a metal wire structure.
In some embodiments of the present invention, a plurality of lead holes are formed in the first adaptor cover plate, the lead holes are located in the second clamping groove, and the lead holes are used for the second electrode lead and the fourth electrode lead to pass through.
In some embodiments of the present invention, the cavity has a rectangular parallelepiped shape, and the radial cross sections of the first porous electrode, the second porous electrode, and the porous dielectric film are all rectangular.
In some embodiments of the present invention, the first flow passage and the second flow passage are both arranged in an axial direction of the housing.
In some embodiments of the present invention, the multistage electroosmotic micropump further comprises a connection gel disposed between the porous medium membrane and the first porous electrode and between the porous medium membrane and the second porous electrode.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like parts are designated by like reference numerals throughout the drawings. In the drawings:
FIG. 1 shows a schematic structural view of a multistage electroosmotic micro-pump according to an embodiment of the invention;
FIG. 2 shows a first exploded view of a multi-stage electroosmotic micropump in accordance with an embodiment of the present invention (top view-pump housing base and adaptor cover exploded view);
FIG. 3 is a second exploded view of the multi-stage electroosmotic micropump in accordance with an embodiment of the present invention (bottom-pump housing base and adapter cover exploded view);
FIG. 4 is a third exploded view of the multi-stage electroosmotic micropump in accordance with an embodiment of the present invention (top view-first and second adaptor cover plates exploded view);
FIG. 5 is a fourth exploded view of the multi-stage electroosmotic micropump in accordance with an embodiment of the present invention (bottom view-first and second adaptor cover plates exploded view);
FIG. 6 is a fifth exploded view of the multi-stage electroosmotic micropump in accordance with an embodiment of the present invention (top view-first adaptor cover plate, second adaptor cover plate and pump housing base exploded view);
fig. 7 is a sixth exploded view (bottom-up-first transfer cover plate, second transfer cover plate and pump housing base exploded view) of the multistage electroosmotic micropump according to the embodiment of the present invention;
FIG. 8 is a schematic diagram illustrating a pump housing base of a multistage electroosmotic micropump in accordance with an embodiment of the present invention;
FIG. 9 is a schematic diagram showing the structure of a porous electrode of a multistage electroosmotic micropump according to an embodiment of the present invention;
FIG. 10 is a schematic view showing the assembly of a porous electrode and a porous media membrane of a multistage electroosmotic micropump according to an embodiment of the present invention;
FIG. 11 is a schematic diagram illustrating the electrical and fluid extraction principles of a multi-stage electroosmotic micropump, in accordance with an embodiment of the present invention.
The reference symbols in the drawings denote the following:
10: cavity, 11: first electrical interface, 12: second electrical interface, 13: liquid inlet, 14: liquid outlet, 15: first porous electrode, 16: second porous electrode, 17: fluid chamber, 18: porous medium film, 19: pump housing base, 20: first transfer cover, 21: second transfer cover, 22: first flow passage, 23: second flow passage, 24: through hole, 25: first electrode lead, 26: second electrode lead, 27: third electrode lead, 28: fourth electrode lead, 29: first card slot, 30: second card slot, 31: and a lead hole.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" may be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless specifically identified as an order of performance. It should also be understood that additional or alternative steps may be used.
Although the terms, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "second" and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, an element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.
For convenience of description, spatially relative terms, such as "inner", "outer", "inner", "side", "lower", "below", "upper", "above", and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" or "over" the other elements or features. Thus, the example term "below … …" can include both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
As shown in fig. 1 to 11, the axial directions are all the directions indicated by the arrow a in fig. 1, and the present invention provides a multistage electroosmotic micropump, comprising:
the liquid injection device comprises a shell, wherein a cavity 10 is formed in the shell, a first electrical interface 11, a second electrical interface 12, a liquid inlet 13 and a liquid outlet 14 are arranged on the shell, the first electrical interface 11 is used for connecting one electrode of a power supply, and the second electrical interface 12 is used for connecting the other electrode of the power supply;
a plurality of first porous electrodes 15, each of the first porous electrodes 15 being arranged at intervals in an axial direction of the chamber 10;
a plurality of second porous electrodes 16, wherein the second porous electrodes 16 are arranged in the cavity 10 and located between two adjacent first porous electrodes 15, the second porous electrodes 16 are arranged at intervals with the first porous electrodes 15, the cavity 10 is divided into a plurality of fluid cavities 17 by the first porous electrodes 15 and the second porous electrodes 16, one of the two adjacent fluid cavities 17 is communicated with the fluid inlet 13, and the other one is communicated with the fluid outlet 14;
the porous medium films 18 are arranged at one axial end of the first porous electrode 15 and one axial end of the second porous electrode 16 in a one-to-one corresponding mode;
a first guide fitted on the casing, the first porous electrode 15 being electrically connected to the first electrical interface 11 through the first guide;
a second lead fitted to the housing, the second porous electrode 16 being electrically connected to the second electrical interface 12 via the second lead.
It should be noted that the porous medium film 18 can be made of materials such as polycarbonate, polyimide, polyethylene terephthalate, polyester, polytetrafluoroethylene, quartz glass, or ceramic, and is prepared by laser etching, track etching, wet etching, or other processes, the pore size of the film can be preferably dozens of nanometers to several micrometers, and the thickness of the film can be preferably several micrometers to several hundred micrometers;
the porous electrode can be made of materials such as stainless steel, copper, titanium, gold, platinum, alloys and the like, and is prepared by processes such as metal wire weaving, metal sheet mechanical stamping, metal sheet laser drilling and the like.
The porous electrode can also be prepared by electroplating or sputtering or depositing the metal film on a porous sheet made of materials such as glass or ceramics, preferably the plating metal is platinum or gold.
In order to increase the corrosion resistance and the long-term stability of the electrode, when the electrode is prepared by selecting metals with higher activity, such as stainless steel, copper, titanium and the like, a layer of platinum or gold serving as a coating can be modified on the surface of the electrode through processes, such as electroplating and the like.
The pore size of the porous electrode is not smaller than the pore size of the porous medium film 18, and preferably the pore size of the porous electrode can be designed to be 3-5 times of the pore size of the porous medium film 18, so that the electrode can reduce the local resistance influence of the porous electrode on electroosmotic flow as much as possible while generating an evenly distributed electric field in the pore of the porous medium film 18.
The porous electrode has proper thickness to ensure that deformation cannot occur when the micro pump is assembled and the micro pump pumps fluid to flow, so as to ensure that an electric field with parallel, uniform distribution and stable strength is generated in the pore channel of the porous medium film 18 and obtain electroosmotic flow with stable driving force; preferably, the porous electrode thickness is selected in the range of 0.5-2 mm.
Preferably, the porous medium film 18 can be directly fixed on one side of the porous electrode, and the porous electrode is used to support and fix the porous medium film 18, so that the porous medium film 18 is not easy to deform, vibrate, drift or the like along with the flow of the fluid, and the porous medium film 18 generates stable electroosmotic flow; alternatively, the porous medium film 18 may be fixed by adhesion with an adhesive such as silicone rubber or epoxy resin on one side of the porous electrode; this also facilitates accurate alignment assembly and fixation of the porous media membrane 18 within the pump housing.
The first guide piece and the second guide piece are used for electrically interconnecting the porous electrode with an external power supply, and can be made of the same material and the same process as the porous electrode synchronously, or can be connected with the porous electrode by adopting a metal wire through ultrasonic welding, resistance spot welding, tin soldering and other processes;
four-level parallel integration is taken as an example, four porous medium films 18 are fixed on a porous electrode and are arranged side by side, and a porous electrode is arranged at the downstream of the porous medium films; in the order from left to right as shown in FIG. 11, the first, third, and fifth porous electrodes are applied with a positive potential V +, and the second and fourth porous electrodes are applied with a negative potential V-; with four porous medium films 18 as interfaces, five regions can be formed in the cavity 10; if the zeta potential of the driven fluid on the porous medium film 18 pore wall surface is negative, the first, third and fifth regions (the fluid side loaded with the positive potential V +) are the fluid inlet and the second and fourth regions (the fluid side loaded with the negative potential V-) are the fluid outlet in the left-to-right sequence, so that parallel electroosmotic driving is formed in the compact micro-channel to improve the micro-pump flow. According to the four-stage driving principle, the electroosmosis micropump device provided by the invention can also integrate a parallel driving mode of not less than two stages.
The multistage electroosmosis micropump integrates the first guide piece and the second guide piece which are arranged on the shell and connected with the anode and the cathode of a power supply, and integrates the fluid inlet and outlet channels, the anode and the cathode of each electroosmosis micropump are respectively and electrically connected with the first guide piece and the second guide piece, and the fluid inlet and the fluid outlet of each electroosmosis micropump are respectively communicated with the fluid inlet and the fluid outlet channels, so that the interconnection of the electricity inside and outside the pumps and the communication of the fluid are realized. Therefore, the switching of the high-density parallel electrodes and the fluid inlet and outlet in the pump is realized through the leads and the fluid channel integrated on the shell, so that the multistage electroosmosis micropump has a more compact structure and a smaller volume, and the multistage electroosmosis micropump can be packaged more reliably.
In some embodiments of the present invention, the housing includes a pump housing base 19, a first adapter cover plate 20 and a second adapter cover plate 21, the pump housing base 19 is provided with the cavity 10, the first adapter cover plate 20 covers an opening end of the pump housing base 19, the second adapter cover plate 21 is connected to the first adapter cover plate 20, the guide is sandwiched between the first adapter cover plate 20 and the second adapter cover plate 21, a flow channel is formed between the first adapter cover plate 20 and the second adapter cover plate 21, and the fluid cavity 17 is communicated with the fluid inlet 13 or the fluid outlet 14 through the flow channel.
The first adaptor cover 20 and the pump housing base 19 may be sealed by surface metallization, thermocompression bonding, or gluing, for example.
In some embodiments of the present invention, the flow channel includes a first flow channel 22 and a second flow channel 23, the first flow channel 22 is communicated with the liquid inlet 13, the second flow channel 23 is communicated with the liquid outlet 14, the first adaptor cover 20 is provided with a plurality of through holes 24, the through holes 24 are communicated with the fluid chambers 17 in a one-to-one correspondence manner, the first flow channel 22 is communicated with the fluid chamber 17 for liquid inlet through a part of the through holes 24, and the second flow channel 23 is communicated with the fluid chamber 17 for liquid outlet through another part of the through holes 24. The flow channel can be prepared by mechanical or laser or etching processes.
In some embodiments of the present invention, the first lead includes a first electrode lead 25 and a plurality of second electrode leads 26, the first electrode lead 25 is embedded between the first transfer cover plate 20 and the second transfer cover plate 21, the second electrode lead 26 is embedded between the first transfer cover plate 20 and the second transfer cover plate 21, the second electrode leads 26 are electrically connected with the first porous electrode 15 in a one-to-one correspondence manner, the second electrode leads 26 are electrically connected with the first electrical interface 11 through the first electrode lead 25, the second lead includes a third electrode lead 27 and a plurality of fourth electrode leads 28, the third electrode lead 27 is embedded between the first transfer cover plate 20 and the second transfer cover plate 21, the fourth electrode leads 28 are electrically connected with the second porous electrode 16 in a one-to-one correspondence manner, and the fourth electrode leads 28 are electrically connected with the second electrical interface 12 through the third electrode lead 27.
In some embodiments of the present invention, a plurality of first locking grooves 29 are formed on the inner wall of the pump housing base 19, a plurality of second locking grooves 30 are formed on the end of the first adaptor cover plate 20 facing the pump housing base 19, the positions of the second locking grooves 30 correspond to the positions of the first locking grooves 29, the first porous electrode 15 is inserted into the first locking grooves 29 and the second locking grooves 30, and the second porous electrode 16 is inserted into the first locking grooves 29 and the second locking grooves 30.
It can be understood that, the first card slot 29 and the second card slot 30 are arranged at equal intervals and are used for placing and fixing the electroosmosis micro-driving module formed by integrating the porous electrode and the porous medium film 18, after the electroosmosis micro-driving module is placed in the groove, the gap in the groove is filled with adhesives such as silicon rubber or epoxy resin, on one hand, the electroosmosis micro-driving module is fixed, and on the other hand, the gap is sealed to prevent the driving liquid from leaking from the gap of the groove;
in addition, after the electroosmosis micro-driving module is assembled in the groove of the shell, a porous electrode is required to be arranged at the downstream end, so that the porous electrodes are arranged on two sides of all the porous medium films 18, and a driving electric field is formed in the pore channels of the porous medium films 18;
the first groove on the pump housing base 19 may be manufactured by processes such as mechanical cutting, laser etching, or 3D printing, and is preferably made of quartz glass, ceramic, polytetrafluoroethylene, or polymethyl methacrylate.
Adjacent lead holes 31 on the first transfer cover plate 20 are not arranged at the same end, so that a certain distance is kept between two electrode leads on the first transfer cover plate 20;
wherein, the two sides of the second clamping groove 30 on the lower side of the first adapter cover plate 20 are not contacted, and are close to the middle position of the first adapter cover plate 20, and the through holes 24 which are not contacted are arranged as the fluid inlet and outlet, and are communicated with the first channel and the second channel arranged on the lower side of the upper thin cover plate to realize the fluid inlet and outlet of the cavity 10.
In some embodiments of the present invention, the first electrode lead 25 and the third electrode lead 27 are each of a metal sheet type structure, the first electrode lead 25 and the third electrode lead 27 are each disposed along an axial direction of the case, and the second electrode lead 26 and the fourth electrode lead 28 are each of a metal wire structure.
The first adaptor cover plate 20 is provided with a plurality of lead holes 31, the lead holes 31 are located in the second clamping grooves 30, and the lead holes 31 are used for the second electrode lead 26 and the fourth electrode lead 28 to pass through.
Specifically, the lower surface of the second adapter cover plate 21 integrates the first electrode lead 25 and the third electrode lead 27, and may be formed by plating through metal deposition, sputtering, electroplating or other processes, or may be formed by directly fixing a metal wire or a metal sheet by gluing; the second electrode lead 26 and the fourth electrode lead 28 pass through the lead hole 31 of the first adapter cover plate 20 to enter the metal lead terminal on the lower surface of the cover plate of the second adapter cover plate 21 to contact with the metal lead terminal, the conductive adhesive or the metal solder is filled to realize the electrical contact between the second electrode lead 26 and the metal lead terminal, and then the groove of the second adapter cover plate 21 is filled with the adhesive such as silicon rubber or epoxy resin to cover on the pump shell base 19, and the pump shell base 19 is precisely aligned with the electroosmosis micro-driving module in the pump shell base 19 and then sealed.
The second electrode lead 26 and the fourth electrode lead 28 may be made of the same material and by the same process as the porous electrode, or may be connected to the porous electrode by using one wire through ultrasonic welding, resistance spot welding, soldering, or the like.
In some embodiments of the present invention, chamber 10 is rectangular in shape, and the radial cross-sections of first porous electrode 15, second porous electrode 16, and porous dielectric film 18 are rectangular.
It should be noted that the cross section of the cavity 10 may be designed as a rectangular groove, a circular groove or an elliptical groove, and the pump housing base 19 may also be designed as a rectangular parallelepiped, a cylinder, a serpentine folded structure, a spiral ring structure, or the like, so as to meet the application requirements of different scenarios.
In some embodiments of the invention, the first flow passage 22 and the second flow passage 23 are both arranged in the axial direction of the housing such that the flow passages.
In some embodiments of the present invention, the multistage electroosmotic micropump further includes a connection paste disposed between the porous medium film 18 and the first porous electrode 15 and between the porous medium film 18 and the second porous electrode 16 to enhance the reliability of the connection.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A multistage electroosmotic micropump, comprising:
the liquid outlet device comprises a shell, a liquid outlet and a liquid inlet, wherein a cavity is formed in the shell, a first electrical interface, a second electrical interface, a liquid inlet and a liquid outlet are arranged on the shell, the first electrical interface is used for connecting one electrode of a power supply, and the second electrical interface is used for connecting the other electrode of the power supply;
a plurality of first porous electrodes, each of the first porous electrodes being arranged at intervals along an axial direction of the cavity;
the second porous electrodes are arranged in the cavity and positioned between two adjacent first porous electrodes, the second porous electrodes and the first porous electrodes are arranged at intervals, the cavity is divided into a plurality of fluid cavities by the first porous electrodes and the second porous electrodes, one of the two adjacent fluid cavities is communicated with the liquid inlet, and the other fluid cavity is communicated with the liquid outlet;
the porous medium films are arranged at one axial end of the first porous electrode and one axial end of the second porous electrode in a one-to-one corresponding mode;
a first lead mounted on the housing, the first porous electrode being in electrical connection with the first electrical interface through the first lead;
a second lead mounted on the housing, the second porous electrode being in electrical connection with the second electrical interface through the second lead.
2. The multistage electroosmotic micropump of claim 1, wherein the housing comprises a pump housing base, a first adapter cover plate and a second adapter cover plate, the pump housing base is provided with the cavity, the first adapter cover plate is covered on an opening end of the pump housing base, the second adapter cover plate is connected with the first adapter cover plate, the first guide piece and the second guide piece are clamped between the first adapter cover plate and the second adapter cover plate, a flow channel is formed between the first adapter cover plate and the second adapter cover plate, and the fluid cavity is communicated with the liquid inlet or the liquid outlet through the flow channel.
3. The multistage electroosmotic micropump of claim 2, wherein said flow channels comprise a first flow channel and a second flow channel, said first flow channel communicating with said liquid inlet, said second flow channel communicating with said liquid outlet, said first adapter plate being provided with a plurality of through holes, said through holes communicating with said fluid chambers in a one-to-one correspondence, said first flow channel communicating with said fluid chambers for inlet of liquid through a part of said through holes, said second flow channel communicating with said fluid chambers for outlet of liquid through another part of said through holes.
4. The multistage electroosmotic micropump of claim 2, wherein said first guide comprises a first electrode lead and a plurality of second electrode leads, the first electrode lead is embedded between the first adapter cover plate and the second adapter cover plate, the second electrode lead is embedded between the first adapter cover plate and the second adapter cover plate, the second electrode lead is electrically connected with the first porous electrode in a one-to-one correspondence, the second electrode lead is electrically connected with the first electrical interface through the first electrode lead, the second lead includes a third electrode lead and a plurality of fourth electrode leads, the third electrode lead is embedded between the first and second transit cover plates, the fourth electrode lead is electrically connected with the second porous electrode in a one-to-one correspondence manner, and the fourth electrode lead is electrically connected with the second electrical interface through the third electrode lead.
5. The multistage electroosmotic micropump of claim 4, wherein a plurality of first clamping grooves are formed on the inner wall of the pump housing base, a plurality of second clamping grooves are formed on one end, facing the pump housing base, of the first adapter cover plate, the positions of the second clamping grooves correspond to the positions of the first clamping grooves, the first porous electrodes are inserted into the first clamping grooves and the second clamping grooves, and the second porous electrodes are inserted into the first clamping grooves and the second clamping grooves.
6. The multistage electroosmotic micropump of claim 4, wherein said first electrode lead and said third electrode lead are each of a metal sheet type structure, said first electrode lead and said third electrode lead are each disposed along an axial direction of said casing, and said second electrode lead and said fourth electrode lead are each of a metal wire structure.
7. The multistage electroosmotic micropump of claim 5, wherein said first adaptor cap plate has a plurality of lead holes therein, said lead holes being located in said second clamping grooves, said lead holes being adapted to pass said second electrode lead and said fourth electrode lead therethrough.
8. The multistage electroosmotic micropump of claim 1, wherein said cavity has a rectangular parallelepiped shape, and said first porous electrode, said second porous electrode and said porous medium membrane each have a rectangular radial cross section.
9. The multistage electroosmotic micropump of claim 3, wherein said first flow channel and said second flow channel are both disposed along an axial direction of said housing.
10. The multistage electroosmotic micropump of any one of claims 1 to 9, further comprising a coupling gel disposed between said porous media membrane and said first porous electrode and between said porous media membrane and said second porous electrode.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114699920A (en) * 2022-04-15 2022-07-05 北京大学 Electroosmosis pump and application thereof
CN114748727A (en) * 2022-04-15 2022-07-15 北京大学 Electroosmosis pump and insulin pump system

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
US6443704B1 (en) * 2001-03-02 2002-09-03 Jafar Darabi Electrohydrodynamicly enhanced micro cooling system for integrated circuits
CA2418642A1 (en) * 2003-02-13 2004-08-13 Michel English Multiple channel magnetostrictive micropump
CN104753309A (en) * 2015-03-19 2015-07-01 华南理工大学 Multi-group electrode flush type electric hydrodynamic force micro-pump
CN105406685A (en) * 2015-12-15 2016-03-16 华南理工大学 Electrohydrodynamic micropump with multiple electrode slices inserted
CN107093949A (en) * 2017-05-18 2017-08-25 华南理工大学 A kind of mesh electrode tandem electrohydrodynamic Micropump and method
CN213723893U (en) * 2020-08-28 2021-07-20 杭州未名信科科技有限公司 Electroosmosis driving module and implantable electroosmosis micropump device
CN113153683A (en) * 2021-04-12 2021-07-23 杭州未名信科科技有限公司 Multi-stage electroosmosis micropump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146103A (en) * 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
US6443704B1 (en) * 2001-03-02 2002-09-03 Jafar Darabi Electrohydrodynamicly enhanced micro cooling system for integrated circuits
CA2418642A1 (en) * 2003-02-13 2004-08-13 Michel English Multiple channel magnetostrictive micropump
CN104753309A (en) * 2015-03-19 2015-07-01 华南理工大学 Multi-group electrode flush type electric hydrodynamic force micro-pump
CN105406685A (en) * 2015-12-15 2016-03-16 华南理工大学 Electrohydrodynamic micropump with multiple electrode slices inserted
CN107093949A (en) * 2017-05-18 2017-08-25 华南理工大学 A kind of mesh electrode tandem electrohydrodynamic Micropump and method
CN213723893U (en) * 2020-08-28 2021-07-20 杭州未名信科科技有限公司 Electroosmosis driving module and implantable electroosmosis micropump device
CN113153683A (en) * 2021-04-12 2021-07-23 杭州未名信科科技有限公司 Multi-stage electroosmosis micropump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114699920A (en) * 2022-04-15 2022-07-05 北京大学 Electroosmosis pump and application thereof
CN114748727A (en) * 2022-04-15 2022-07-15 北京大学 Electroosmosis pump and insulin pump system

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