CN107093949A - A kind of mesh electrode tandem electrohydrodynamic Micropump and method - Google Patents
A kind of mesh electrode tandem electrohydrodynamic Micropump and method Download PDFInfo
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- CN107093949A CN107093949A CN201710353934.7A CN201710353934A CN107093949A CN 107093949 A CN107093949 A CN 107093949A CN 201710353934 A CN201710353934 A CN 201710353934A CN 107093949 A CN107093949 A CN 107093949A
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- guide rod
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- supporting guide
- electrode
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000003491 array Methods 0.000 claims abstract description 21
- 238000009826 distribution Methods 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000007935 neutral effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K44/00—Machines in which the dynamo-electric interaction between a plasma or flow of conductive liquid or of fluid-borne conductive or magnetic particles and a coil system or magnetic field converts energy of mass flow into electrical energy or vice versa
- H02K44/02—Electrodynamic pumps
Abstract
The invention discloses a kind of mesh electrode tandem electrohydrodynamic Micropump and method；Including left electrode supporting guide rod, right electrode supporting guide rod；Along the axis direction of left electrode supporting guide rod, array, multiple mesh emitters are intervally distributed with；Along the axis direction of right electrode supporting guide rod, array, multiple netted colelctor electrodes are intervally distributed with；Mesh emitter and netted colelctor electrode are staggered each other, form the arrays of comb electrodes of the axially staggered arrangement of both positive and negative polarity；The vacant end that left electrode supporting guide rod and right electrode supporting guide rod are stretched out outside arrays of comb electrodes, is connected with power positive cathode respectively；The space that arrays of comb electrodes is surrounded, forms working region and the distribution channel of working medium of mesh emitter and netted colelctor electrode.Arrays of comb electrodes area is big, adds the scope of electrohydrodynamic effect, enhances ion and pulls effect, while acicular texture strengthens point discharge, improves the power effect of electrohydrodynamic Micropump.
Description
Technical field
The present invention relates to microelectronics radiating and micro fluidic control field, more particularly to a kind of mesh electrode tandem electric current
Body power Micropump and method.
Background technology
With electronic component miniaturization and high performance further development, the heat flow density of electronic component of future generation will
Improve constantly, but the reliability of microelectronic component is very sensitive to temperature, the raising of device temperature will cause under its reliability
Drop, existing gas cooling technology can not meet the radiating requirements of so high heat flow density, therefore in the urgent need to development
The liquid refrigeration technique of a new generation.
Face the future electronic product radiating narrow space, the features such as heater element heat flow density is high, microelectronic dissipate
Heat problem is causing the concern of researchers over nearly 10 years.On the other hand, Micrometer-Nanometer Processing Technology is ripe day by day, also makes micron
The making of the moving machinery component of level size is possibly realized.With the rise of MEMS technology, researcher is by MEMS and micro Process
Technology introduces manufacturing and designing for electrohydrodynamic Micropump, greatly reduces the overall dimensions and operating voltage of electrohydrodynamic pump,
So that the research work of electrohydrodynamic pump enters minute yardstick field.
Relative to tradition machinery pump, electrohydrodynamic Micropump has movement-less part, reliable, low energy consumption, easily system
The advantages of work and Maintenance free, and directly can be directly integrated with various base materials or runner, without separate space.Therefore electric current
Body power Micropump can extremely suit the requirement needed for electronic product radiating, while being also considered as solving high in microelectronic industry
One breakthrough of the cooling problem of hot-fluid device.
The content of the invention
It is an object of the invention to the shortcoming and defect for overcoming above-mentioned prior art, there is provided a kind of mesh electrode tandem electricity
Fluid dynamic Micropump and method.It is intended to improve the efficiency of existing electrohydrodynamic Micropump, change pump pressure is relatively low, and driving effect is poor
The problem of.
The present invention is achieved through the following technical solutions：
A kind of mesh electrode tandem electrohydrodynamic Micropump, including left electrode supporting guide rod 1, right electrode supporting guide rod 2；
Along the axis direction of left electrode supporting guide rod 1, array, multiple mesh emitters 3 are intervally distributed with；
Along the axis direction of right electrode supporting guide rod 2, array, multiple netted colelctor electrodes 4 are intervally distributed with；
Mesh emitter 3 and netted colelctor electrode 4 are staggered each other, form the pectination of the axially staggered arrangement of both positive and negative polarity
Electrod-array；
Arrays of comb electrodes is placed in Micropump cavity；Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 stretch out pectination electricity
Vacant end outside the array of pole, is connected with power positive cathode respectively；
The space that arrays of comb electrodes is surrounded, forms working region and the work of mesh emitter 3 and netted colelctor electrode 4
The distribution channel of matter.
Each grid intersection of the mesh emitter 3 is machined with the acicular texture 6 seamlessly transitted, forms multiple sharp
Projection.
The mesh emitter 3 and netted colelctor electrode 4 are fixed on a left side on the other side respectively by the circular arc support of opening
On electrode supporting guide rod 1 and right electrode supporting guide rod 2；
Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 are linear guide, and arranged in parallel.
Surrounded around the mesh emitter 3 and netted colelctor electrode 4 by annulus, at the edge of annulus provided with multiple convex
Structure 5 is played, bulge-structure 5 is entrenched in the annular groove 7 in circular arc support.
A kind of operation method of mesh electrode tandem electrohydrodynamic Micropump, comprises the following steps：
Step one：During work, the arrays of comb electrodes for combining complete is inserted in the Micropump cavity of corresponding size；
Step 2：Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 are stretched out vacant outside arrays of comb electrodes
End, respectively with the both positive and negative polarity connection of dc source, to constitute a complete mesh electrode tandem electrohydrodynamic Micropump；
Step 3：Mesh emitter 3 constitutes emitter stage, and netted colelctor electrode 4 constitutes colelctor electrode；Emitter stage is distinguished with colelctor electrode
It is connected with dc source both positive and negative polarity, in Micropump inside cavity formation highfield；
Step 4：The space that arrays of comb electrodes is surrounded, forms the workspace of mesh emitter 3 and netted colelctor electrode 4
Domain and the distribution channel of working medium；
Step 5：Distribution channel of the charged ion in working region and working medium under electric field action in dielectric fluid is determined
To movement, liquid flowing in neutral ion displacement, final driving Micropump cavity is dragged in its motion process.
The present invention has the following advantages and effect relative to prior art：
The space that arrays of comb electrodes of the present invention is surrounded, forms the working region of mesh emitter 3 and netted colelctor electrode 4
And the distribution channel of working medium.Netted comb electrode covers the working medium runner in whole Micropump cavity, makes the distribution of electric field line
Fill in entirely motion working medium, rather than be limited only to certain part, increase the area that electrohydrodynamic acts on liquid
Domain scope, enhances and pulls effect to the ion of working medium, increase substantially the power effect of Micropump (electrohydraulic dynamic pump), same to hour hands
Shape structure is conducive to strengthening point discharge, can also effectively improve the driving force of electrohydrodynamic Micropump, acicular texture and electrode
Between seamlessly transit so that liquid working substance pass in and out through hole drag reduction, energy loss reduction.
Brief description of the drawings
Fig. 1 is the arrays of comb electrodes structural representation of mesh electrode tandem electrohydrodynamic Micropump of the present invention.
Fig. 2 is left electrode supporting guide rod and its circular arc supporting structure schematic diagram.
Fig. 3 is right electrode supporting guide rod and its circular arc supporting structure schematic diagram.
Fig. 4 is mesh emitter structural representation.
Fig. 5 is netted collector structure schematic diagram.
Fig. 6 is circular arc stent inner surface groove structure schematic diagram.
Embodiment
The present invention is more specifically described in detail with reference to specific embodiment.
Embodiment
As shown in Figures 1 to 6.The invention discloses a kind of mesh electrode tandem electrohydrodynamic Micropump, including left electrode
Support guide rod 1, right electrode supporting guide rod 2；
Along the axis direction of left electrode supporting guide rod 1, array, multiple mesh emitters 3 are intervally distributed with；
Along the axis direction of right electrode supporting guide rod 2, array, multiple netted colelctor electrodes 4 are intervally distributed with；
Mesh emitter 3 and netted colelctor electrode 4 are staggered each other, form the pectination of the axially staggered arrangement of both positive and negative polarity
Electrod-array；
Arrays of comb electrodes is placed in Micropump cavity；Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 stretch out pectination electricity
Vacant end outside the array of pole, is connected with power positive cathode respectively；
The space that arrays of comb electrodes is surrounded, forms working region and the work of mesh emitter 3 and netted colelctor electrode 4
The distribution channel of matter.
Each grid intersection of the mesh emitter 3 is machined with the acicular texture 6 seamlessly transitted, forms multiple sharp
Projection.
The mesh emitter 3 and netted colelctor electrode 4 are fixed on a left side on the other side respectively by the circular arc support of opening
On electrode supporting guide rod 1 and right electrode supporting guide rod 2；
Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 are linear guide, and arranged in parallel.
Surrounded around the mesh emitter 3 and netted colelctor electrode 4 by annulus, at the edge of annulus provided with multiple convex
Structure 5 is played, bulge-structure 5 is entrenched in the annular groove 7 in circular arc support.
The netted comb electrode of the present invention covers the working medium runner in whole Micropump cavity, fills the distribution of electric field line
In whole motion working medium, rather than certain part is limited only to, increases the regional extent that electrohydrodynamic acts on liquid,
Enhance and effect is pulled to the ion of working medium, the power effect of Micropump (electrohydrodynamic pump) is increased substantially, while needle-like knot
Structure is conducive to strengthening point discharge, can also effectively improve the driving force of electrohydrodynamic Micropump, is put down between acicular texture and electrode
Slip over and cross so that liquid working substance passes in and out through hole drag reduction, energy loss reduction.
The operation method of mesh electrode tandem electrohydrodynamic Micropump of the present invention, can be achieved by the steps of：
Step one：During work, the arrays of comb electrodes for combining complete is inserted in the Micropump cavity of corresponding size；
Step 2：Left electrode supporting guide rod 1 and right electrode supporting guide rod 2 are stretched out vacant outside arrays of comb electrodes
End, respectively with the both positive and negative polarity connection of dc source, to constitute a complete mesh electrode tandem electrohydrodynamic Micropump；
Step 3：Mesh emitter 3 constitutes emitter stage, and netted colelctor electrode 4 constitutes colelctor electrode；Emitter stage is distinguished with colelctor electrode
It is connected with dc source both positive and negative polarity, in Micropump inside cavity formation highfield；
Step 4：The space that arrays of comb electrodes is surrounded, forms the workspace of mesh emitter 3 and netted colelctor electrode 4
Domain and the distribution channel of working medium；
Step 5：Distribution channel of the charged ion in working region and working medium under electric field action in dielectric fluid is determined
To movement, liquid flowing in neutral ion displacement, final driving Micropump cavity is dragged in its motion process.
As described above, the present invention can be better realized.
Embodiments of the present invention are simultaneously not restricted to the described embodiments, other any Spirit Essences without departing from the present invention
With the change made under principle, modification, replacement, combine, simplify, should be equivalent substitute mode, be included in the present invention
Within protection domain.
Claims (5)
1. a kind of mesh electrode tandem electrohydrodynamic Micropump, it is characterised in that：Including left electrode supporting guide rod (1), right electricity
Pole support guide rod (2)；
Along the axis direction of left electrode supporting guide rod (1), array, multiple mesh emitters (3) are intervally distributed with；
Along the axis direction of right electrode supporting guide rod (2), array, multiple netted colelctor electrodes (4) are intervally distributed with；
Mesh emitter (3) and netted colelctor electrode (4) are staggered each other, form the pectination of the axially staggered arrangement of both positive and negative polarity
Electrod-array；
Arrays of comb electrodes is placed in Micropump cavity；Left electrode supporting guide rod (1) and right electrode supporting guide rod (2) stretch out pectination electricity
Vacant end outside the array of pole, is connected with power positive cathode respectively；
The space that arrays of comb electrodes is surrounded, forms working region and the work of mesh emitter (3) and netted colelctor electrode (4)
The distribution channel of matter.
2. mesh electrode tandem electrohydrodynamic Micropump according to claim 1, it is characterised in that：The mesh emitter
(3) each grid intersection is machined with the acicular texture (6) seamlessly transitted, forms multiple sharp projections.
3. mesh electrode tandem electrohydrodynamic Micropump according to claim 1, it is characterised in that：The mesh emitter
(3) and netted colelctor electrode (4) is respectively by the circular arc support of opening, be fixed on left electrode supporting guide rod (1) on the other side and
On right electrode supporting guide rod (2)；
Left electrode supporting guide rod (1) and right electrode supporting guide rod (2) are linear guide, and arranged in parallel.
4. mesh electrode tandem electrohydrodynamic Micropump according to claim 3, it is characterised in that：The mesh emitter
(3) and around netted colelctor electrode (4) surrounded by annulus, multiple bulge-structures (5), bulge-structure are provided with the edge of annulus
(5) it is entrenched in the annular groove (7) in circular arc support Nei.
5. the operation method of mesh electrode tandem electrohydrodynamic Micropump described in claim 4, it is characterised in that including as follows
Step：
Step one：During work, the arrays of comb electrodes for combining complete is inserted in the Micropump cavity of corresponding size；
Step 2：Left electrode supporting guide rod (1) and right electrode supporting guide rod (2) are stretched out vacant outside arrays of comb electrodes
End, respectively with the both positive and negative polarity connection of dc source, to constitute a complete mesh electrode tandem electrohydrodynamic Micropump；
Step 3：Mesh emitter (3) constitutes emitter stage, and netted colelctor electrode (4) constitutes colelctor electrode；Emitter stage is distinguished with colelctor electrode
It is connected with dc source both positive and negative polarity, in Micropump inside cavity formation highfield；
Step 4：The space that arrays of comb electrodes is surrounded, forms the workspace of mesh emitter (3) and netted colelctor electrode (4)
Domain and the distribution channel of working medium；
Step 5：Charged ion in dielectric fluid is oriented under electric field action in the distribution channel of working region and working medium to be moved
It is dynamic, liquid flowing in neutral ion displacement, final driving Micropump cavity is dragged in its motion process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710353934.7A CN107093949A (en) | 2017-05-18 | 2017-05-18 | A kind of mesh electrode tandem electrohydrodynamic Micropump and method |
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| CN201710353934.7A CN107093949A (en) | 2017-05-18 | 2017-05-18 | A kind of mesh electrode tandem electrohydrodynamic Micropump and method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112855490A (en) * | 2020-12-17 | 2021-05-28 | 杭州未名信科科技有限公司 | Electroosmosis micropump device and electroosmosis micropump device set |
| CN113904521A (en) * | 2021-12-08 | 2022-01-07 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
| CN114640235A (en) * | 2022-05-09 | 2022-06-17 | 浙江大学 | Electromagnetic pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160298617A1 (en) * | 2013-12-04 | 2016-10-13 | Apr Technologies Ab | Microfluidic device |
| CN106130310A (en) * | 2016-08-15 | 2016-11-16 | 华南理工大学 | A kind of cylindrical current body power Micropump and manufacture method thereof |
| CN206834972U (en) * | 2017-05-18 | 2018-01-02 | 华南理工大学 | A kind of mesh electrode tandem electrohydrodynamic Micropump |
-
2017
- 2017-05-18 CN CN201710353934.7A patent/CN107093949A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160298617A1 (en) * | 2013-12-04 | 2016-10-13 | Apr Technologies Ab | Microfluidic device |
| CN106130310A (en) * | 2016-08-15 | 2016-11-16 | 华南理工大学 | A kind of cylindrical current body power Micropump and manufacture method thereof |
| CN206834972U (en) * | 2017-05-18 | 2018-01-02 | 华南理工大学 | A kind of mesh electrode tandem electrohydrodynamic Micropump |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112855490A (en) * | 2020-12-17 | 2021-05-28 | 杭州未名信科科技有限公司 | Electroosmosis micropump device and electroosmosis micropump device set |
| CN112855490B (en) * | 2020-12-17 | 2023-08-18 | 杭州未名信科科技有限公司 | Electroosmosis micropump device and electroosmosis micropump device group |
| CN113904521A (en) * | 2021-12-08 | 2022-01-07 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
| CN113904521B (en) * | 2021-12-08 | 2022-05-06 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
| CN114640235A (en) * | 2022-05-09 | 2022-06-17 | 浙江大学 | Electromagnetic pump |
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Application publication date: 20170825 |