CN204054378U - 用于丝锯装置的马达单元和丝锯装置 - Google Patents
用于丝锯装置的马达单元和丝锯装置 Download PDFInfo
- Publication number
- CN204054378U CN204054378U CN201420375658.6U CN201420375658U CN204054378U CN 204054378 U CN204054378 U CN 204054378U CN 201420375658 U CN201420375658 U CN 201420375658U CN 204054378 U CN204054378 U CN 204054378U
- Authority
- CN
- China
- Prior art keywords
- motor unit
- silk saw
- axle
- saw device
- silk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005096 rolling process Methods 0.000 claims abstract description 72
- 239000004519 grease Substances 0.000 claims description 39
- 239000002826 coolant Substances 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000007774 longterm Effects 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 239000012530 fluid Substances 0.000 description 12
- 238000005266 casting Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000033001 locomotion Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000001788 irregular Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 230000002688 persistence Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 210000000056 organ Anatomy 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000013523 data management Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000012384 transportation and delivery Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D59/00—Accessories specially designed for sawing machines or sawing devices
- B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Motor Or Generator Frames (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Motor Or Generator Cooling System (AREA)
- Sawing (AREA)
Abstract
Description
Claims (36)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14166016.7 | 2014-04-25 | ||
EP14166016.7A EP2937165A1 (en) | 2014-04-25 | 2014-04-25 | Motor unit for a wire saw device and wire saw device employing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
CN204054378U true CN204054378U (zh) | 2014-12-31 |
Family
ID=50543514
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410323259.XA Pending CN104999575A (zh) | 2014-04-25 | 2014-07-08 | 用于丝锯装置的马达单元、丝锯装置和马达单元的使用 |
CN201420375658.6U Expired - Fee Related CN204054378U (zh) | 2014-04-25 | 2014-07-08 | 用于丝锯装置的马达单元和丝锯装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410323259.XA Pending CN104999575A (zh) | 2014-04-25 | 2014-07-08 | 用于丝锯装置的马达单元、丝锯装置和马达单元的使用 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2937165A1 (zh) |
JP (1) | JP2015216838A (zh) |
CN (2) | CN104999575A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104999575A (zh) * | 2014-04-25 | 2015-10-28 | 应用材料瑞士有限责任公司 | 用于丝锯装置的马达单元、丝锯装置和马达单元的使用 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3466629B1 (en) * | 2017-10-05 | 2021-08-04 | Precision Surfacing Solutions GmbH | Wafer cutting wire saw |
WO2020085532A1 (ko) * | 2018-10-22 | 2020-04-30 | 웅진에너지 주식회사 | 잉곳절단장치 |
DE102019207719A1 (de) * | 2019-05-27 | 2020-12-03 | Siltronic Ag | Verfahren zum Abtrennen einer Vielzahl von Scheiben von Werkstücken während einer Anzahl von Abtrennvorgängen mittels einer Drahtsäge und Halbleiterscheibe aus einkristallinem Silizium |
EP4220093A1 (en) * | 2022-01-28 | 2023-08-02 | Leine & Linde Ab | Rotary encoder and a method for monitoring operation of the rotary encoder |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH687301A5 (fr) * | 1992-01-22 | 1996-11-15 | W S Technologies Ltd | Dispositif de sciage par fil. |
JP3211930B2 (ja) * | 1994-05-16 | 2001-09-25 | 株式会社東京精密 | ワイヤーソー |
DE19700001C2 (de) * | 1997-01-01 | 1999-01-14 | Keller Gmbh | Maschine zum seitlichen Planieren mittels Schleifwerkzeugen od. dgl. Planierwerkzeugen von im Kalibriermaß unterschiedlich großen Ziegelei- und Feuerfest-Produkten |
JP2000042893A (ja) * | 1998-07-22 | 2000-02-15 | Tokyo Seimitsu Co Ltd | ワイヤソーのグルーブローラ支持装置 |
JP2000218507A (ja) * | 1999-01-28 | 2000-08-08 | Tokyo Seimitsu Co Ltd | ワイヤソーのグルーブローラ支持装置 |
JP2001205619A (ja) * | 2000-01-27 | 2001-07-31 | Mitsubishi Materials Corp | 穴あけ装置及び穴あけ方法 |
US20020062637A1 (en) * | 2000-11-28 | 2002-05-30 | Romeo Pohn | Opening cylinder for an open-end spinning device |
CN201287404Y (zh) * | 2008-10-07 | 2009-08-12 | 广东工业大学 | 一种感应式超声电主轴 |
EP2546014A1 (en) * | 2011-07-15 | 2013-01-16 | Meyer Burger AG | Apparatus for driving a wire or wire-like objects |
CN102328357A (zh) * | 2011-10-08 | 2012-01-25 | 陕西汉江机床有限公司 | 数控多线硅片切割机床活动可调式导丝辊主轴装置 |
EP2638999B1 (de) * | 2012-03-14 | 2015-05-20 | Siemens Aktiengesellschaft | Drahtsägeanordnung |
EP2937165A1 (en) * | 2014-04-25 | 2015-10-28 | Applied Materials Switzerland Sàrl | Motor unit for a wire saw device and wire saw device employing the same |
-
2014
- 2014-04-25 EP EP14166016.7A patent/EP2937165A1/en not_active Withdrawn
- 2014-07-08 CN CN201410323259.XA patent/CN104999575A/zh active Pending
- 2014-07-08 CN CN201420375658.6U patent/CN204054378U/zh not_active Expired - Fee Related
-
2015
- 2015-04-23 JP JP2015088489A patent/JP2015216838A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104999575A (zh) * | 2014-04-25 | 2015-10-28 | 应用材料瑞士有限责任公司 | 用于丝锯装置的马达单元、丝锯装置和马达单元的使用 |
Also Published As
Publication number | Publication date |
---|---|
EP2937165A1 (en) | 2015-10-28 |
CN104999575A (zh) | 2015-10-28 |
JP2015216838A (ja) | 2015-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN204054378U (zh) | 用于丝锯装置的马达单元和丝锯装置 | |
EP2799167B1 (en) | Spindle device | |
CN100518981C (zh) | 具有多槽旋转部件的吐线机 | |
CN103056977B (zh) | 用于线锯的线引导件的夹具组件 | |
JP2023047276A (ja) | マルチワイヤソー用主軸のアンロード装置及びその作業方法 | |
WO2011018014A1 (zh) | 可调节磁场气隙间距和耦合面积的筒型传动轴永磁耦合器 | |
US6216977B1 (en) | Direct-drive coiler | |
JP3010437B2 (ja) | ワイヤソー及びその使用方法 | |
CN209379931U (zh) | 一种气浮电主轴 | |
JP6353301B2 (ja) | ワイヤソーデバイスおよびその製造方法 | |
JP2000127033A (ja) | 研磨装置 | |
CN202225070U (zh) | 一种套筒式主轴回转装置及加工设备 | |
CN204933402U (zh) | 制粒机构的轴冷却装置 | |
CN207312500U (zh) | 一种动力调心托辊 | |
CN210550910U (zh) | 一种管路更换吊架 | |
CN114593350A (zh) | 一种用于切片机的大扭矩高转速自驱动轴承箱 | |
CN102259284A (zh) | 一种套筒式主轴回转装置及加工设备 | |
CN201979375U (zh) | 用于加工剖分轴承座内、外球面的角度定位板 | |
JPH04187750A (ja) | 溶融メッキ浴中のロール支持装置 | |
CN205057193U (zh) | 内嵌式轴承切削工具 | |
CN109365837A (zh) | 一种气浮电主轴 | |
CN114669625B (zh) | 导向装置及弧形导槽结构 | |
CN109403110B (zh) | 在线加润滑油的捻股装置 | |
CN213256277U (zh) | 一种高线精轧机辊箱内外滑环结构 | |
CN210214255U (zh) | 一种摩擦收卷机构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160429 Address after: American California Patentee after: Applied Materials Inc. Address before: Lausanne Patentee before: Applied Materials Switzerland Sarl |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20161026 Address after: Hiroshima County Patentee after: Toyo Advanced Machine Tool Co., Ltd. Address before: American California Patentee before: Applied Materials Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141231 Termination date: 20180708 |