CN204039533U - A kind of two-sided electrophoresis rack device - Google Patents
A kind of two-sided electrophoresis rack device Download PDFInfo
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- CN204039533U CN204039533U CN201420487058.9U CN201420487058U CN204039533U CN 204039533 U CN204039533 U CN 204039533U CN 201420487058 U CN201420487058 U CN 201420487058U CN 204039533 U CN204039533 U CN 204039533U
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- supporting plate
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Abstract
The utility model relates to two-sided GPP protective transistor chip production equipment, specifically the two-sided electrophoresis rack device of a kind of improved electrophoresis.Two-sided electrophoresis frame comprises crossbeam, negative plate, anode ring, supporting plate, strongback, slot and side plate, the both ends horizontal of its middle cross beam is fixed on the upper inner of biside plate, two strongbacks are separately fixed at the upper outside of biside plate, for the upper end of the side plate that the slot be connected with electrophoresis equipment power supply is fixed therein, the both ends horizontal of supporting plate is fixed on the lower inside of biside plate, and several negative plate and anode ring are alternately fixed on supporting plate successively.Use two-sided electrophoresis rack device, simultaneously electrophoresis consistence is good on silicon chip two sides, the problem that the silicon chip two sides glass coating variable thickness avoiding twice one side electrophoresis to cause causes, and electrophoresis is not fragile simultaneously on two sides, which thereby enhances product yield and reliability.
Description
Technical field
The utility model relates to two-sided GPP protective transistor chip production equipment, specifically the two-sided electrophoresis rack device of a kind of improved electrophoresis.
Background technology
At present, producing two-sided GPP protective transistor (diode, discharge tube etc.) chip two sides in semicon industry all needs to carry out glass passivation protection, and two-sided electrophoresis process adopts first electrophoresis one side usually, then the technique of electrophoresis another side.Prior art has problems: 1, twice electrophoresis causes the glass coating variable thickness on two sides to cause, and 2, after second time electrophoresis, find that the subregion glass of first time periphery, electrophoresis face comes off, produce that parameter is bad, yield is low and the problem such as poor reliability.
Summary of the invention
The purpose of this utility model, exactly for overcoming the deficiencies in the prior art, provides a kind of two-sided electrophoresis rack device.By using the two-sided electrophoresis rack device redesigned to carry out a two-sided electrophoresis process, yield and the reliability of product can be improved.
The technical scheme that the utility model is taked is: a kind of two-sided electrophoresis rack device, it is characterized in that: comprise crossbeam, negative plate, anode ring, supporting plate, strongback, slot and side plate, the both ends horizontal of its middle cross beam is fixed on the upper inner of biside plate, two strongbacks are separately fixed at the upper outside of biside plate, for the upper end of the side plate that the slot be connected with electrophoresis equipment power supply is fixed therein, the both ends horizontal of supporting plate is fixed on the lower inside of biside plate, and several negative plate and anode ring are alternately fixed on supporting plate successively.
The beneficial effect that the utility model produces is: use two-sided electrophoresis frame, silicon chip two sides simultaneously electrophoresis consistence is good, the problem that the silicon chip two sides glass coating variable thickness avoiding twice one side electrophoresis to cause causes, electrophoresis is not fragile simultaneously on two sides, which thereby enhances product yield and reliability.
Accompanying drawing explanation
Fig. 1 is the utility model one-piece construction schematic diagram;
Fig. 2 is anode ring structure side-looking partial enlarged drawing in Fig. 1;
Fig. 3 is anode plate floor map in Fig. 1;
Fig. 4 is side support board structure close-up schematic view;
Fig. 5 is middle support board structure close-up schematic view;
Fig. 6 is side, both sides supporting plate and middle supporting plate relative position close-up schematic view.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail:
With reference to Fig. 1, a kind of two-sided electrophoresis rack device comprises crossbeam 1, negative plate 2, anode ring 3, supporting plate 4, strongback 5, slot 6 and side plate 7, the both ends horizontal of its middle cross beam 1 is fixed on the upper inner of biside plate 7, two strongbacks 5 are separately fixed at the upper outside of biside plate 7, for the upper end of the side plate 7 that the slot 6 be connected with electrophoresis equipment power supply is fixed therein, the both ends horizontal of supporting plate 4 is fixed on the lower inside of biside plate 7, and several negative plate 2 and anode ring 3 are alternately fixed on supporting plate 4 successively.
With reference to Fig. 2 and Fig. 3, the negative plate 2 be fixed on supporting plate 4 comprises the negative pole plate body 2A and conducting wire connector 2B that are processed as one; The anode ring 3 be fixed on supporting plate 4 comprises the outer shroud 3A and inner ring 3B that are processed as one.
With reference to Fig. 4, Fig. 5 and Fig. 6, the supporting plate 4 of the present embodiment is Split type structure, comprise the side supporting plate 4A of both sides and middle supporting plate 4B, the side supporting plate 4A of both sides is alternately provided with several negative pole board slot 4A1 and positive pole annular groove 4A2 respectively successively, be provided with open holes 4A3 in the side at the supporting plate 4A two ends, side of both sides simultaneously, on middle supporting plate 4B, alternately correspondence is provided with several negative pole board slot 4B1 and Y type contact 4B2 successively, be provided with metallic channel 4B3 in the side of middle supporting plate 4B one end simultaneously, open holes 4B4 is provided with in the side at middle supporting plate 4B two ends, the both ends horizontal of middle supporting plate 4B is fixed on the lower inside of biside plate 7, the side supporting plate 4A symmetry of both sides is arranged in supporting plate about 4B top, and tilt to the inside and leave spacing, be separately fixed at the lower inside of biside plate 7, namely the side supporting plate 4A of both sides and middle supporting plate 4B forms arc.
Be located at reinforcing and Elevated section with reference to Fig. 4 and Fig. 6, the positive pole annular groove 4A2 on the side supporting plate 4A of both sides, the height of reinforcing and Elevated section is 2 ± 0.3mm, and width is 10 ± 0.3mm.Because anode ring plugs repeatedly, therefore heightening and consolidation is carried out to anode ring groove.
The present embodiment size: what use two-sided electrophoresis frame with 4 inch silicon wafer is designed to example: middle supporting plate 4B and both sides supporting plate 4A spacing are for 40 ± 0.3mm, both sides supporting plate 4A to the inside angle of inclination is 45 ± 2 °, negative pole plate body 2A circular portion diameter is 105 ± 0.3mm, thickness is 1 ± 0.05mm, conducting wire connector lug 2B width is 15 ± 0.3mm, length is ± 0.3mm, negative pole board slot 4A1 width is 1.1 ± 0.05mm mm, positive pole annular groove 4A2 width is 2.1 ± 0.05mm, outer shroud outside diameter is 105 ± 0.3mm, ring width (i.e. the difference of outside surface radius and internal surface radius) is 2 ± 0.05mm, thickness is 1 ± 0.05mm, in inner ring, circular diameter is 98 ± 0.3mm, thickness is 0.8 ± 0.05mm, negative plate 2 is 30 ± 5mm with the spacing of anode ring 3.
Two-sided electrophoresis rack device designs according to the size of processed silicon chip; circular diameter outside the inner ring of wherein anode ring is more bigger than silicon chip diameter; the circular diameter of inner side is more smaller than silicon chip diameter; the thickness difference of inner ring and outer shroud is less than silicon wafer thickness; ensure that silicon chip contacts with anode ring well; protect silicon chip, negative plate external diameter is equal with anode ring external diameter simultaneously.Supporting plate 4 scantlings of the structure then designs according to the size of negative plate and anode ring.
Principle of design of the present utility model and assembly relation as follows: the slot 6 being fixed on side side plate 7 upper end mates with the plug of electrophoresis equipment, both sides side plate 7 is connected with screw with crossbeam 1, strongback 5, locating dowel on electrophoresis equipment inserts the hole on strongback, and the position of electrophoresis frame and electrophoresis equipment is fixed.Supporting plate 4 by both sides supporting plate 4A and middle supporting plate 4B totally three blocks of supporting plates form, three pieces of supporting plate composition arcs, and use screw to be connected with the open holes 4B4 on middle supporting plate 4B with side plate 7 by the open holes 4A3 on the supporting plate 4A of both sides, negative plate 2 inserts in the negative pole board slot of the arc that three blocks of supporting plates (both sides supporting plate 4A and middle supporting plate 4B) are formed, the conducting wire connector 2B of negative plate 2, through the negative pole board slot 4B1 of middle supporting plate 4B, is connected with slot 6 by wire under middle supporting plate 4B.When carrying out two-sided electrophoresis, in the middle of the outer shroud 3A that needs the silicon chip of electrophoresis to be placed on anode ring 3 and inner ring 3B, then insert in the positive pole annular groove 4A2 of both sides supporting plate 4A, ensure and the Y type contact 4B2 good contact on middle supporting plate 4B simultaneously, electrophoresis frame is put into electrophoresis liquid and carries out electrophoresis, electrophoresis equipment plug is connected with slot 6, after energising, because silicon chip contacts with anode ring 3, silicon chip and anode ring 3 positively charged simultaneously, adjacent both sides negative plate is electronegative, and electrophoresis liquid can be made to move to silicon chip under the effect of electric field, be deposited on groove, form glass coating.
Negative plate of the present utility model, anode ring and strongback material are stainless steel, other structure material is tetrafluoroethylene.
Measured data after the two-sided electrophoresis of above 4 inch silicon wafer sees the following form (glass coating thickness piece typical value: 20 ± 3um):
Empirical tests: measured data all meets normal value.Prove that the utility model adopts two-sided electrophoresis rack device to achieve the two-sided electrophoresis of silicon chip and is once successfully completed, because silicon chip two sides is equal with the distance of negative plate, two sides electric field is identical, electrophoretic velocity is identical, therefore make the thickness of glass coating after the electrophoresis of silicon chip two sides identical, the problem that the electrophoresis surface glass powder simultaneously avoiding twice electrophoresis to bring comes off, thus improve yield and reliability.
According to the above description, scheme of the present utility model can be realized in conjunction with art technology.
Claims (4)
1. a two-sided electrophoresis rack device, it is characterized in that: comprise crossbeam (1), negative plate (2), anode ring (3), supporting plate (4), strongback (5), slot (6) and side plate (7), the both ends horizontal of its middle cross beam (1) is fixed on the upper inner of biside plate (7), two strongbacks (5) are separately fixed at the upper outside of biside plate (7), for the upper end of the side plate (7) that the slot (6) be connected with electrophoresis equipment power supply is fixed therein, the both ends horizontal of supporting plate (4) is fixed on the lower inside of biside plate (7), several negative plate (2) and anode ring (3) are alternately fixed on supporting plate (4) successively.
2. the two-sided electrophoresis rack device of one according to claim 1, is characterized in that: described in the negative plate (2) be fixed on supporting plate (4) comprise the negative pole plate body (2A) and conducting wire connector (2B) that are processed as one; The described anode ring (3) be fixed on supporting plate (4) comprises the outer shroud (3A) and inner ring (3B) that are processed as one.
3. the two-sided electrophoresis rack device of one according to claim 2, it is characterized in that: described supporting plate (4) is Split type structure, comprise side supporting plate (4A) and the middle supporting plate (4B) of both sides, the side supporting plate (4A) of both sides is alternately provided with several negative pole board slot (4A1) and positive pole annular groove (4A2) respectively successively, be provided with open holes (4A3) in the side at side supporting plate (4A) two ends of both sides simultaneously, on middle supporting plate (4B), alternately correspondence is provided with several negative pole board slot (4B1) and Y type contact (4B2) successively, be provided with metallic channel (4B3) in the side of middle supporting plate (4B) one end simultaneously, open holes (4B4) is provided with in the side at middle supporting plate (4B) two ends, the both ends horizontal of middle supporting plate (4B) is fixed on the lower inside of biside plate (7), side supporting plate (4A) symmetry of both sides is arranged in top, supporting plate (4B) left and right, and tilt to the inside and leave spacing, be separately fixed at the lower inside of biside plate (7), namely the side supporting plate (4A) of both sides and middle supporting plate (4B) form arc.
4. the two-sided electrophoresis rack device of one according to claim 3, it is characterized in that: the positive pole annular groove (4A2) on the side supporting plate (4A) of described both sides is located at reinforcing and Elevated section, the height of reinforcing and Elevated section is 2 ± 0.3mm, and width is 10 ± 0.3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420487058.9U CN204039533U (en) | 2014-08-27 | 2014-08-27 | A kind of two-sided electrophoresis rack device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420487058.9U CN204039533U (en) | 2014-08-27 | 2014-08-27 | A kind of two-sided electrophoresis rack device |
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| Publication Number | Publication Date |
|---|---|
| CN204039533U true CN204039533U (en) | 2014-12-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420487058.9U Withdrawn - After Issue CN204039533U (en) | 2014-08-27 | 2014-08-27 | A kind of two-sided electrophoresis rack device |
Country Status (1)
| Country | Link |
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| CN (1) | CN204039533U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178793A (en) * | 2014-08-27 | 2014-12-03 | 天津中环半导体股份有限公司 | Double-sided electrophoresis frame |
| CN105755521A (en) * | 2016-04-06 | 2016-07-13 | 天津中环半导体股份有限公司 | Electrophoresis device |
-
2014
- 2014-08-27 CN CN201420487058.9U patent/CN204039533U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178793A (en) * | 2014-08-27 | 2014-12-03 | 天津中环半导体股份有限公司 | Double-sided electrophoresis frame |
| CN104178793B (en) * | 2014-08-27 | 2016-10-05 | 天津中环半导体股份有限公司 | A kind of two-sided electrophoresis frame |
| CN105755521A (en) * | 2016-04-06 | 2016-07-13 | 天津中环半导体股份有限公司 | Electrophoresis device |
| CN105755521B (en) * | 2016-04-06 | 2018-05-01 | 天津中环半导体股份有限公司 | A kind of electrophoretic apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20141224 Effective date of abandoning: 20161005 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |