CN105755521A - Electrophoresis device - Google Patents
Electrophoresis device Download PDFInfo
- Publication number
- CN105755521A CN105755521A CN201610211124.3A CN201610211124A CN105755521A CN 105755521 A CN105755521 A CN 105755521A CN 201610211124 A CN201610211124 A CN 201610211124A CN 105755521 A CN105755521 A CN 105755521A
- Authority
- CN
- China
- Prior art keywords
- main body
- body frame
- ultrasonic
- inside groove
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001962 electrophoresis Methods 0.000 title abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 16
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 32
- 229910000831 Steel Inorganic materials 0.000 claims description 17
- 239000010959 steel Substances 0.000 claims description 17
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000725 suspension Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 6
- 230000005622 photoelectricity Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000009529 body temperature measurement Methods 0.000 abstract 1
- 230000009347 mechanical transmission Effects 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 230000002746 orthostatic effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/22—Servicing or operating apparatus or multistep processes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/12—Electrophoretic coating characterised by the process characterised by the article coated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention provides an electrophoresis device which comprises a main body frame, wherein a base is arranged at the bottom end in the main body frame; a plurality of ultrasonic grooves are formed in the upper end of the base; a mechanical transmission device comprises a lifting substrate which is arranged outside the ultrasonic grooves; two guide rods which extend along the length direction of the lifting substrate are placed on the lifting substrate in parallel; the upper end of each guide rod is fixed on the bottom surface of a lifting bracket support plate; a lifting bracket which extends along the directions of the ultrasonic grooves is arranged on the side surface of one end, close to the ultrasonic grooves, of the lifting bracket support plate; and the positions of the ultrasonic grooves in the front end surface of the main body frame are opened and closed through a movable door. A fire-fighting device and the movable door are additionally arranged to the electrophoresis device, and real-time monitoring is carried out through a temperature measurement sensor and an acetone concentration detection device, so that a fire hazard is prevented or eliminated; and the movable door can be automatically closed before the fire-fighting device is started, so that the inside of the equipment is sealed, and the fire-fighting device is prevented from acting to harm a person.
Description
Technical field
The invention belongs to semiconductor equipment manufacturing technology field, especially relate to a kind of electrophoretic apparatus.
Background technology
Along with developing rapidly of semi-conductor industry, the application of glass passivation process is more and more general, coating glass mainly has three kinds of methods at present: the medical operation skill in using a kitchen knife in cookery, electrophoresis method and the even coating of rotation, controlled compared to other two kinds of method electrophoresis method glass coating thickness and evenly, existing electrophoresis machine mostly when solution is on fire without counter-measure, and the poor stability of mechanical driving device, it is reliable that this is accomplished by a kind of motion, and meets the electrophoretic apparatus of fire-fighting and environmental requirement.
Summary of the invention
In view of this, it is contemplated that it is reliable to propose one motion, and the electrophoretic apparatus of fire-fighting and environmental requirement is met.
For reaching above-mentioned purpose, the technical scheme is that and be achieved in that:
A kind of electrophoretic apparatus, including main body frame, ultrasonic tank, mechanical driving device and dodge gate, described main body frame inner bottom is provided with base, and described base upper end is provided with several described ultrasonic tank；nullDescribed mechanical driving device includes the lifting substrate being arranged at outside described ultrasonic tank，On described lifting substrate parallel be placed with two along described lifting zig direction extend guide posts，The top of every guide post and middle part are fixed by bearing A，It is fixed with counter-jib between described two guide post stage casings，The upper end, middle part of described counter-jib is fixed with lifting connecting rod，Described lifting connecting rod top is fixed by bearing B，Rectify under described counter-jib and described lifting connecting rod place is provided with electricity cylinder，The upper end of described guide post and lifting connecting rod is fixed on the bottom surface of hoisting frame support plate，Described hoisting frame support plate is provided with the lifting bracket extended along described ultrasonic tank direction near the side of ultrasonic tank one end，Described lifting bracket is positioned at the surface of described ultrasonic tank，Described lifting substrate is additionally provided with photoelectricity mounting seat，Described photoelectricity mounting seat is provided with photoswitch；The rear end face of described main body frame is provided with rear shrouding, the two sides of described main body frame are provided with side seal board, being positioned at place above and below ultrasonic tank on the front end face of described main body frame and be provided with front shrouding, the ultrasonic tank position of described main body frame front end face is opened and closed by dodge gate；It is rectangular dodge gate main body that described dodge gate includes longitudinal section, the both sides of the edge place in described dodge gate body rear face is provided with guide channel, steel wire rope fixture block it is provided with in the middle part of described guide channel, several rollers it are provided with in described guide channel, described main body frame is provided with and is available for the slideway that described roller slides up and down, described steel wire rope fixture block is connected with steel wire rope one end, the described steel wire rope other end is connected with the weight upper end at main body frame rear after being arranged at the fixed pulley on main body frame top through at least two, described weight lower end is connected with the piston rod of cylinder, described cylinder is arranged on cylinder supports frame；Described main body frame side is provided with electrical control cubicles, and described main body frame opposite side is provided with fire plant；Described ultrasonic tank, mechanical driving device, dodge gate are all connected with electrical control cubicles with fire plant.
Further, described ultrasonic tank includes water jacket, described water jacket is internally provided with inside groove, being provided with several ultrasonic vibrators being evenly arranged in the bottom outer wall of described inside groove, described inner tank interior is provided with several quartz curette bases, and described internal groove side wall is provided with water inlet and inside groove outlet, described water inlet connects with external water source, described inside groove outlet leads in water jacket, and described external groove sidevall is provided with Overflow drainage mouth, and described Overflow drainage mouth leads to outside water jacket.
Further, the number of described ultrasonic vibrator is 13, and point three row are uniformly fixed in inside groove bottom outer wall.
Further, described water inlet is arranged on the sidewall of described inside groove, and described inside groove outlet is arranged on the bottom surface of described inside groove.
Further, described weight upper end is provided with suspension ring, and described steel wire rope is connected on suspension ring.
Further, weight cushion pad it is provided with between described cylinder piston rod and weight.
Further, described main body frame is provided with wind path passage and waterway channel.
Further, the external bottom end of described main body frame is provided with several brake casters.
Further, described fire plant includes temperature sensor, acetone concentration measuring cell and fire extinguisher.
Relative to prior art, electrophoretic apparatus of the present invention has the advantage that and adds fire plant and dodge gate, monitored in real time by temperature transducer and acetone concentration detecting device, prevention eliminates disaster hidden-trouble, and dodge gate can be automatically switched off before fire plant starts, device interior is made to close, it is prevented that people is damaged by fire plant action.
Accompanying drawing explanation
The accompanying drawing constituting the part of the present invention is used for providing a further understanding of the present invention, and the schematic description and description of the present invention is used for explaining the present invention, is not intended that inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the front view of the present invention；
Fig. 2 is the side view of the present invention；
Fig. 3 is the front view of mechanical driving device of the present invention；
Fig. 4 is the side view of mechanical driving device of the present invention；
Fig. 5 is the front view of dodge gate of the present invention；
Fig. 6 is the side view of dodge gate of the present invention；
Fig. 7 is the front view of ultrasonic tank of the present invention；
Fig. 8 is the side view of ultrasonic tank of the present invention.
Description of reference numerals:
null1-main body frame，2-base，3-ultrasonic tank，301-water jacket，302-inside groove，303-ultrasonic vibrator，304-water inlet，305-inside groove outlet，306-Overflow drainage mouth，307-quartz curette base，4-mechanical driving device，401-promotes substrate，402-bearing A，403-guide post，404-promotes connecting rod，405-electricity cylinder，406-hoisting frame support plate，407-counter-jib，408-photoelectricity mounting seat，409-photoswitch，410-lifting bracket，5-dodge gate，501-dodge gate main body，502-steel wire rope，503-weight，504-cylinder，505-cylinder supports frame，506-fixed pulley，507-suspension ring，508-weight cushion pad，6-electrical control cubicles，7-fire plant，8-brake caster.
Detailed description of the invention
It should be noted that when not conflicting, the embodiment in the present invention and the feature in embodiment can be mutually combined.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, it is for only for ease of the description present invention and simplifies description, rather than the device of instruction or hint indication or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not considered as limiting the invention.Additionally, term " first ", " second " etc. are only for descriptive purposes, and it is not intended that indicate or imply relative importance or the implicit quantity indicating indicated technical characteristic.Thus, the feature defining " first ", " second " etc. can express or implicitly include one or more these features.In describing the invention, except as otherwise noted, " multiple " are meant that two or more.
In describing the invention, it is necessary to explanation, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, for instance, it is possible to it is fixing connection, it is also possible to be removably connect, or connect integratedly；Can be mechanically connected, it is also possible to be electrical connection；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, it is possible to be the connection of two element internals.For the ordinary skill in the art, it is possible to understand above-mentioned term concrete meaning in the present invention by concrete condition.
Describe the present invention below with reference to the accompanying drawings and in conjunction with the embodiments in detail.
As shown in figures 1-8, a kind of electrophoretic apparatus, including main body frame 1, ultrasonic tank 3, mechanical driving device 4 and dodge gate 5, described main body frame 1 inner bottom is provided with base 2, and described base 2 upper end is provided with several described ultrasonic tank 3；
Described ultrasonic tank 3 includes water jacket 301, described water jacket 301 is internally provided with inside groove 302, the bottom outer wall of described inside groove 302 is provided with several ultrasonic vibrators 303 being evenly arranged, the number of described ultrasonic vibrator 303 is 13, three row are divided uniformly to be fixed in inside groove 302 bottom outer wall, described inside groove 302 is internally provided with several quartz curette bases 307, quartz curette is placed on described quartz curette base 307, the electrophoresis frame being placed with silicon chip is placed in quartz curette, electrophoresis mixed liquor in quartz curette can be shaken by ultrasonic vibrator 303, glass particle is suspended in quartz curette as much as possible, effectively prevent the phenomenon that glass particle sinking is piled up；
Described internal groove side wall is provided with water inlet 304 and inside groove outlet 305, described water inlet 304 is arranged on the sidewall of described inside groove 302, described inside groove outlet 305 is arranged on the bottom surface of described inside groove 302, described water inlet 304 connects with external water source, carry out ultrasonic before, water pump is needed to provide water source as the flowing of medium, described inside groove outlet 305 leads in water jacket, described external groove sidevall is provided with Overflow drainage mouth 306, described Overflow drainage mouth 306 leads to outside water jacket, inside groove 302 provides places quartz curette, water jacket 301 is used for the discharge of the outer spilling water of inside groove 302, by water inlet 304, the cooperation of inside groove discharge outlet 305 and Overflow drainage mouth 306, reach the circulation of aqueous medium, avoid the temperature rising that water quality produces because of vibrations；
nullDescribed mechanical driving device 4 includes being arranged at the lifting substrate 401 outside described ultrasonic tank 3，On described lifting substrate 401 parallel be placed with two along described lifting substrate 401 length direction extend guide posts 403，The top of every guide post 403 and middle part are fixed by bearing A402，It is fixed with counter-jib 407 between two guide post 403 stage casings，The upper end, middle part of described counter-jib 407 is fixed with lifting connecting rod 404，Described lifting connecting rod 404 top is fixed by bearing B，Described counter-jib 407 times is rectified described lifting connecting rod 404 place is provided with electricity cylinder 405，The upper end of described guide post 403 and lifting connecting rod 404 is fixed on the bottom surface of hoisting frame support plate 406，Described hoisting frame support plate 406 is provided with the lifting bracket 410 extended along described ultrasonic tank 3 direction near the side of ultrasonic tank 3 one end，Described lifting bracket 410 is positioned at the surface of described ultrasonic tank 3，Described lifting substrate 401 is additionally provided with photoelectricity mounting seat 408，Described photoelectricity mounting seat 408 is provided with photoswitch 409；
Electrophoresis frame is placed on lifting bracket 410, after placing, start electricity cylinder 405, electricity cylinder 405 drives counter-jib 407 to rise or fall, counter-jib 407 drives guide post 403 and lifting connecting rod 404 to move up and down, and then drive hoisting frame support plate 406 to rise or fall, the guide post 403 promoting connecting rod 404 both sides can play the effect of stable support hoisting frame support plate 406, the photoswitch 409 promoted on substrate 401 is used for detecting whether motion puts in place simultaneously, detection signal is sent to controller, controller controls the stopping of electricity cylinder 405, realize mechanical driving device and drive electrophoresis frame turnover ultrasonic tank 3；
The rear end face of described main body frame 1 is provided with rear shrouding, the two sides of described main body frame 1 are provided with side seal board, being positioned at place above and below ultrasonic tank 3 on the front end face of described main body frame 1 and be provided with front shrouding, ultrasonic tank 3 position of described main body frame 1 front end face is opened and closed by dodge gate 5；
It is rectangular dodge gate main body 501 that described dodge gate 5 includes longitudinal section, the both sides of the edge place of described dodge gate main body 501 rear end face is provided with guide channel, steel wire rope fixture block it is provided with in the middle part of described guide channel, several rollers it are provided with in described guide channel, described main body frame 1 is provided with and is available for the slideway that described roller slides up and down, described steel wire rope fixture block is connected with steel wire rope 502 one end, described steel wire rope 502 other end is connected with weight 503 upper end at main body frame rear after being arranged at the fixed pulley 506 on main body frame top through at least two, described weight 503 lower end is connected with the piston rod of cylinder 504, described cylinder 504 is arranged on cylinder supports frame 505；
Further, described weight 503 upper end is provided with suspension ring 507, and described steel wire rope 502 is connected on suspension ring 507, is provided with weight cushion pad 508 between described cylinder 504 piston rod and weight 503；
Described main body frame 1 side is provided with electrical control cubicles 6, described main body frame 1 opposite side is provided with fire plant 7, described fire plant 7 includes temperature sensor, acetone concentration measuring cell and fire extinguisher, and described ultrasonic tank 3, mechanical driving device 4, dodge gate 5 are all connected with electrical control cubicles 6 with fire plant 7；
Under normal circumstances, counterweight according to the weight 503 arranged, can so that weight 503 and dodge gate main body 501 reach a dynamic equilibrium, in the absence of external forces, dodge gate is equivalent to the orthostatic front end being suspended on electrophoresis machine main body frame 1, when fire plant 7 detects flame or detects that acetone concentration exceeds standard, signal is given to fire control box, fire control box controls cylinder 504 and starts, jack-up weight 503, the slideway slide downward that steel wire rope fixture block and roller are arranged along electrophoresis machine front end, thus driving dodge gate main body 501 slide downward, dodge gate main body 501 is closed rapidly, play protection operator and the effect of isolation air；
Further, described main body frame 1 being provided with wind path passage and waterway channel, the external bottom end of described main body frame 1 is provided with several brake casters 8.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all within the spirit and principles in the present invention, any amendment of making, equivalent replacement, improvement etc., should be included within protection scope of the present invention.
Claims (9)
1. an electrophoretic apparatus, it is characterized in that: include main body frame (1), ultrasonic tank (3), mechanical driving device (4) and dodge gate (5), described main body frame (1) inner bottom is provided with base (2), and described base (2) upper end is provided with several described ultrasonic tank (3)；
nullDescribed mechanical driving device (4) includes being arranged at the lifting substrate (401) that described ultrasonic tank (3) is outside，Described lifting substrate (401) is above parallel is placed with two guide posts (403) extended along described lifting substrate (401) length direction，The top of every guide post (403) and middle part are fixed by bearing A (402)，Counter-jib (407) it is fixed with between two guide posts (403) stage casing，The upper end, middle part of described counter-jib (407) is fixed with lifting connecting rod (404)，Described lifting connecting rod (404) top is fixed by bearing B，Rectify under described counter-jib (407) and described lifting connecting rod (404) place is provided with electricity cylinder (405)，The upper end of described guide post (403) and lifting connecting rod (404) is fixed on the bottom surface of hoisting frame support plate (406)，Described hoisting frame support plate (406) is provided with the lifting bracket (410) extended along described ultrasonic tank (3) direction near the side of ultrasonic tank (3) one end，Described lifting bracket (410) is positioned at the surface of described ultrasonic tank (3)，Described lifting substrate (401) is additionally provided with photoelectricity mounting seat (408)，Described photoelectricity mounting seat (408) is provided with photoswitch (409)；
The rear end face of described main body frame (1) is provided with rear shrouding, the two sides of described main body frame (1) are provided with side seal board, being positioned at place above and below ultrasonic tank (3) on the front end face of described main body frame (1) and be provided with front shrouding, ultrasonic tank (3) position of described main body frame (1) front end face is opened and closed by dodge gate (5)；
It is rectangular dodge gate main body (501) that described dodge gate (5) includes longitudinal section, the both sides of the edge place of described dodge gate main body (501) rear end face is provided with guide channel, steel wire rope fixture block it is provided with in the middle part of described guide channel, several rollers it are provided with in described guide channel, described main body frame (1) is provided with and is available for the slideway that described roller slides up and down, described steel wire rope fixture block is connected with steel wire rope (502) one end, the fixed pulley (506) that described steel wire rope (502) other end is arranged at main body frame top through at least two is connected with weight (503) upper end at main body frame rear afterwards, described weight (503) lower end is connected with the piston rod of cylinder (504), described cylinder (504) is arranged on cylinder supports frame (505)；
Described main body frame (1) side is provided with electrical control cubicles (6), and described main body frame (1) opposite side is provided with fire plant (7)；
Described ultrasonic tank (3), mechanical driving device (4), dodge gate (5) are all connected with electrical control cubicles (6) with fire plant (7).
2. electrophoretic apparatus according to claim 1, it is characterized in that: described ultrasonic tank (3) includes water jacket (301), described water jacket (301) is internally provided with inside groove (302), the bottom outer wall of described inside groove (302) is provided with several ultrasonic vibrators being evenly arranged (303), described inside groove (302) is internally provided with several quartz curette bases (307), described internal groove side wall is provided with water inlet (304) and inside groove outlet (305), described water inlet (304) connects with external water source, described inside groove outlet (305) is led in water jacket, described external groove sidevall is provided with Overflow drainage mouth (306), described Overflow drainage mouth (306) is led to outside water jacket.
3. electrophoretic apparatus according to claim 2, it is characterised in that: the number of described ultrasonic vibrator (303) is 13, and point three row are uniformly fixed in inside groove (302) bottom outer wall.
4. electrophoretic apparatus according to claim 3, it is characterized in that: described water inlet (304) is arranged on the sidewall of described inside groove (302), described inside groove outlet (305) is arranged on the bottom surface of described inside groove (302).
5. electrophoretic apparatus according to claim 1 and 2, it is characterised in that: described weight (503) upper end is provided with suspension ring (507), and described steel wire rope (502) is connected on suspension ring (507).
6. electrophoretic apparatus according to claim 1 and 2, it is characterised in that: it is provided with weight cushion pad (508) between described cylinder (504) piston rod and weight (503).
7. electrophoretic apparatus according to claim 1 and 2, it is characterised in that: described main body frame is provided with wind path passage and waterway channel on (1).
8. electrophoretic apparatus according to claim 1 and 2, it is characterised in that: the external bottom end of described main body frame (1) is provided with several brake casters (8).
9. electrophoretic apparatus according to claim 1 and 2, it is characterised in that: described fire plant (7) includes temperature sensor, acetone concentration measuring cell and fire extinguisher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610211124.3A CN105755521B (en) | 2016-04-06 | 2016-04-06 | A kind of electrophoretic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610211124.3A CN105755521B (en) | 2016-04-06 | 2016-04-06 | A kind of electrophoretic apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105755521A true CN105755521A (en) | 2016-07-13 |
| CN105755521B CN105755521B (en) | 2018-05-01 |
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ID=56334346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610211124.3A Active CN105755521B (en) | 2016-04-06 | 2016-04-06 | A kind of electrophoretic apparatus |
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| Country | Link |
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| CN (1) | CN105755521B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102041546A (en) * | 2011-01-27 | 2011-05-04 | 南通富士通微电子股份有限公司 | Electroplating hanging rack system of semiconductor packing products |
| CN202610374U (en) * | 2012-04-27 | 2012-12-19 | 河南奔马股份有限公司 | Electrophoresis bracket of sheet metal parts |
| CN203569223U (en) * | 2013-09-30 | 2014-04-30 | 东莞市良顺五金制品有限公司 | Vertical electrophoresis line device |
| CN104178793A (en) * | 2014-08-27 | 2014-12-03 | 天津中环半导体股份有限公司 | Double-sided electrophoresis frame |
| CN204039533U (en) * | 2014-08-27 | 2014-12-24 | 天津中环半导体股份有限公司 | A kind of two-sided electrophoresis rack device |
-
2016
- 2016-04-06 CN CN201610211124.3A patent/CN105755521B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102041546A (en) * | 2011-01-27 | 2011-05-04 | 南通富士通微电子股份有限公司 | Electroplating hanging rack system of semiconductor packing products |
| CN202610374U (en) * | 2012-04-27 | 2012-12-19 | 河南奔马股份有限公司 | Electrophoresis bracket of sheet metal parts |
| CN203569223U (en) * | 2013-09-30 | 2014-04-30 | 东莞市良顺五金制品有限公司 | Vertical electrophoresis line device |
| CN104178793A (en) * | 2014-08-27 | 2014-12-03 | 天津中环半导体股份有限公司 | Double-sided electrophoresis frame |
| CN204039533U (en) * | 2014-08-27 | 2014-12-24 | 天津中环半导体股份有限公司 | A kind of two-sided electrophoresis rack device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105755521B (en) | 2018-05-01 |
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