CN204022995U - A kind of novel ingot furnace thermal field structure - Google Patents
A kind of novel ingot furnace thermal field structure Download PDFInfo
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- CN204022995U CN204022995U CN201420469825.3U CN201420469825U CN204022995U CN 204022995 U CN204022995 U CN 204022995U CN 201420469825 U CN201420469825 U CN 201420469825U CN 204022995 U CN204022995 U CN 204022995U
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- heat
- insulation cage
- heater
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- heating unit
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Abstract
The utility model relates to a kind of novel ingot furnace thermal field structure, comprises ingot casting body of heater, heat-insulation cage, heat-insulation cage lifting gear, heat exchange platform, plumbago crucible, top heating unit, side heat device, end heating unit, pull plate and bottom Forced water cooling device; Described heat-insulation cage is positioned at ingot casting body of heater; Described heat-insulation cage lifting gear is installed on the top of ingot casting body of heater, between itself and heat-insulation cage, by suspension rod, connects; Described heat exchange platform is supported on some graphite columns of ingot casting body of heater; Described plumbago crucible is placed on heat exchange platform; Described top heating unit is positioned at the top of plumbago crucible, and side heat device is between plumbago crucible and heat-insulation cage, and end heating unit is positioned at heat exchange platform bottom; Described pull plate is placed in heat-insulation cage below, is connected with lead screw transmission mechanism on it; Described bottom Forced water cooling device is arranged on ingot casting bottom of furnace body.Novel ingot furnace thermal field structure of the present utility model has saving energy, and thermal field optimization is applicable to the plurality of advantages such as large size silicon ingot production.
Description
Technical field
The utility model relates to a kind of composition structure of ingot furnace, is specifically related to a kind of novel ingot furnace thermal field structure, belongs to production of polysilicon equipment technical field.
Background technology
Ingot furnace is the key equipment in polysilicon chip production process, the silicon ingot weight of existing market main flow is between 500～800KG, single ingot can be cut quantity and be commonly called as G6 in 6x6(industry), adopt 4 or 5 graphite heater heating, by promoting heat-insulation cage or falling heat insulation bottom board mode and come cooling, it exists silicon ingot larger, and it is more difficult that thermal field is controlled, the uneven impartial problem of the overstepping the bounds of propriety cloth of thermoisopleth.
According to state-of-art and crystalline silicon self physics-chem characteristic and polysilicon industrial development trend judge in the world at present, the production development trend of polycrystalline silicon ingot or purifying furnace is toward large specification (1000～1200KG), less energy-consumption (it is following that per kilogram silicon ingot consumes electric energy 7 degree), high-quality future development.So the research and development of G7 (even G8) silicon ingot are also brought into schedule.
Therefore, for solving the problems of the technologies described above, necessaryly provide a kind of novel ingot furnace thermal field structure, to overcome described defect of the prior art.
Utility model content
For addressing the above problem, the purpose of this utility model is to provide a kind of saving energy, is applicable to the novel ingot furnace thermal field structure that six heating units were produced and had to large size silicon ingot.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of novel ingot furnace thermal field structure, and it comprises ingot casting body of heater, heat-insulation cage, heat-insulation cage lifting gear, heat exchange platform, plumbago crucible, top heating unit, side heat device, end heating unit, pull plate and bottom Forced water cooling device; Wherein, described heat-insulation cage is positioned at ingot casting body of heater; Described heat-insulation cage lifting gear is installed on the top of ingot casting body of heater, between itself and heat-insulation cage, by suspension rod, is connected heat-insulation cage can be promoted; Described heat exchange platform is supported on some graphite columns of ingot casting body of heater; Described plumbago crucible is placed on heat exchange platform; Described top heating unit is positioned at the top of plumbago crucible, and side heat device is between plumbago crucible and heat-insulation cage, and end heating unit is positioned at heat exchange platform bottom; Described pull plate is placed in the below of heat-insulation cage, is connected with lead screw transmission mechanism on it; Described bottom Forced water cooling device is arranged on the bottom of ingot casting body of heater.
Novel ingot furnace thermal field structure of the present utility model is further set to: on described ingot casting body of heater, be connected with a trivet, this trivet stands on ground.
Novel ingot furnace thermal field structure of the present utility model is also set to: described top heating unit, side heat device are placed in heat-insulation cage by being fixed on first copper electrode at ingot casting body of heater top; Heating unit of the described end is located by being fixed on the second copper electrode of ingot casting bottom of furnace body.
Compared with prior art, the utlity model has following beneficial effect:
1. output is large, and single ingot output can reach 1200kg, (main flow silicon ingot weight 800kg at present);
2. saving energy, per kilogram current consumption is at 6 degree electricity/kg, (traditional main flow current consumption per kilogram is more than 7 °);
3. the thermal field design of optimizing (three transformers are controlled respectively six heating systems and added the cooling mode that heat-insulation cage promotes and the switching of insulation base plate combines), in conjunction with the crystal growing technology of optimizing, guarantee that silicon ingot is in long brilliant process, the vertical-growth of crystal, reduce the phenomenon of crystallite and grain size inequality, the quality product that guarantees silicon chip, the cut rate of G7 silicon ingot can maintain on 75%.
Accompanying drawing explanation
Fig. 1 is the structural representation of novel ingot furnace thermal field structure of the present utility model.
Embodiment
Refer to shown in Figure of description 1, the utility model is a kind of novel ingot furnace thermal field structure, and it is comprised of several parts such as ingot casting body of heater 1, heat-insulation cage 2, heat-insulation cage lifting gear 3, heat exchange platform 4, plumbago crucible 5, top heating unit 6, side heat device 7, end heating unit 8, pull plate 9 and bottom Forced water cooling devices 10.
Wherein, described ingot casting body of heater 1 is large size ingot-casting body of heater, and it is applicable to the production of large size silicon ingot G7, also upgrading research and development on this platform of G8 in the future.On this ingot casting body of heater 1, be connected with a trivet 11, this trivet 11 stands on ground.
Described heat-insulation cage 2 is positioned at ingot casting body of heater 1, its built-in heat insulation material.Described heat-insulation cage lifting gear 3 is installed on the top of ingot casting body of heater 1, between itself and heat-insulation cage 2, by suspension rod 12, is connected heat-insulation cage 2 can be promoted, and by promoting heat-insulation cage 2, realizes cooling long brilliant.
Described heat exchange platform 4 is supported on some graphite columns 13 of ingot casting body of heater 1, and it is mainly made with the graphite material of good heat conductivity, is convenient to heat radiation when long crystalline substance.Described plumbago crucible 5 is placed on heat exchange platform 4.
Described top heating unit 6, side heat device 7, end heating unit 8 forms 6 heating systems, and it provides omnibearing thermal source supply for large size silicon ingot.Wherein, described top heating unit 6 is positioned at the top of plumbago crucible 5, and side heat device 7 is between plumbago crucible 5 and heat-insulation cage 2, and end heating unit 8 is positioned at heat exchange platform 4 bottoms.Further, described top heating unit 6, side heat device 7 are placed in heat-insulation cage 2 by being fixed on first copper electrode 14 at ingot casting body of heater 1 top; Heating unit of the described end 8 is by being fixed on the second copper electrode 15 location of ingot casting body of heater 1 bottom.Described top heating unit 6, side heat device 7, end heating unit 8 are controlled thermal value by one group of transformer by certain power ratio respectively, the top to silicon ingot respectively, and 6 heating are realized in surrounding and bottom, greatly shorten the heat fused time of silicon material.
Described pull plate 9 is placed in the below of heat-insulation cage 2, is connected with lead screw transmission mechanism 16 on it, and pull plate 9 and lead screw transmission mechanism 16 form bottom drawing device.Pull plate 9 is realized and is split movement by lead screw transmission mechanism 16, and when two pull plates 9 close up, whole heat-insulation cage 2, in sealing, guarantees that heat does not run off in ingot casting process; When two pull plates 9 are opened, heat distributes from heat-insulation cage 2 bottoms, realizes cooling; Eliminate large size silicon ingot colder drawback in partial heat both sides in the middle of the long brilliant initial stage, guarantee silicon ingot in long brilliant process to the smooth control of thermoisopleth.
Described bottom Forced water cooling device 10 is arranged on the bottom of ingot casting body of heater 1, and it is made by the good oxygenless copper material of heat conductivility, guarantees the cooling safety of body of heater.
The principle of design of novel ingot furnace thermal field structure of the present utility model is as follows: actual ingot casting process is divided into heating, and fusing is long brilliant, annealing, cooling 5 stages;
In the heating and melting stage, heat-insulation cage 2 and pull plate 9 are in zero-bit, (heat-insulation cage 2 zero-bits refer to heat-insulation cage 3 lower surfaces and pull plate 9 upper surface laminatings, pull plate 9 refers to that in zero-bit left and right two pull plates 9 are in closure state), whole heat-insulation cage 2 is at air-tight state, by 6 heating systems, to silicon material three-dimensional heating, greatly shorten the fusing time of silicon material.
The long brilliant stage: heat-insulation cage lifting gear 3 and bottom drawing device coordinate operation according to the processing parameter of program setting, heat-insulation cage lifting gear 3 promotes heat-insulation cage 2 and slowly promotes, heat distributes to surrounding by heat exchange platform 4, through furnace wall water-cooled, heat is taken away, lead screw transmission mechanism 16 is taken out out 9 pairs of pull plates, heat is crossed heat exchange platform 4 and is distributed to bottom, in conjunction with 10 heat radiations of bottom Forced water cooling device.
Annealing stage: heat-insulation cage 2 and pull plate 9 are got back to zero-bit, in closed environment, silicon ingot is eliminated internal stress with certain annealing temperature, while reducing rear road cutting action, cracks.
Cooling stages: after annealing finishes, 6 heating systems are closed, stops heating, and heat-insulation cage 2 and pull plate 9 arrive respectively program setting technique position, carry out cooling.
Above embodiment is only the preferred embodiment of this creation, not in order to limit this creation, any modification of making, is equal to replacement, improvement etc., within all should being included in the protection domain of this creation within all spirit in this creation and principle.
Claims (3)
1. a novel ingot furnace thermal field structure, is characterized in that: comprise ingot casting body of heater, heat-insulation cage, heat-insulation cage lifting gear, heat exchange platform, plumbago crucible, top heating unit, side heat device, end heating unit, pull plate and bottom Forced water cooling device; Wherein, described heat-insulation cage is positioned at ingot casting body of heater; Described heat-insulation cage lifting gear is installed on the top of ingot casting body of heater, between itself and heat-insulation cage, by suspension rod, is connected heat-insulation cage can be promoted; Described heat exchange platform is supported on some graphite columns of ingot casting body of heater; Described plumbago crucible is placed on heat exchange platform; Described top heating unit is positioned at the top of plumbago crucible, and side heat device is between plumbago crucible and heat-insulation cage, and end heating unit is positioned at heat exchange platform bottom; Described pull plate is placed in the below of heat-insulation cage, is connected with lead screw transmission mechanism on it; Described bottom Forced water cooling device is arranged on the bottom of ingot casting body of heater.
2. novel ingot furnace thermal field structure as claimed in claim 1, is characterized in that: on described ingot casting body of heater, be connected with a trivet, this trivet stands on ground.
3. novel ingot furnace thermal field structure as claimed in claim 1, is characterized in that: described top heating unit, side heat device are placed in heat-insulation cage by being fixed on first copper electrode at ingot casting body of heater top; Heating unit of the described end is located by being fixed on the second copper electrode of ingot casting bottom of furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420469825.3U CN204022995U (en) | 2014-08-20 | 2014-08-20 | A kind of novel ingot furnace thermal field structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420469825.3U CN204022995U (en) | 2014-08-20 | 2014-08-20 | A kind of novel ingot furnace thermal field structure |
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| CN204022995U true CN204022995U (en) | 2014-12-17 |
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| CN201420469825.3U Expired - Fee Related CN204022995U (en) | 2014-08-20 | 2014-08-20 | A kind of novel ingot furnace thermal field structure |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106087045A (en) * | 2016-08-19 | 2016-11-09 | 西安华晶电子技术股份有限公司 | A kind of polysilicon fritting ingot casting melt and crystal growing technology |
| CN106119956A (en) * | 2016-08-19 | 2016-11-16 | 西安华晶电子技术股份有限公司 | A kind of polysilicon fritting casting ingot method |
| TWI580919B (en) * | 2015-10-14 | 2017-05-01 | 國立清華大學 | Composite structures of multi-crucibles and their high-temperature adiabatic heating method in vacuum arc melting process |
| CN107699943A (en) * | 2017-11-16 | 2018-02-16 | 江苏协鑫硅材料科技发展有限公司 | Prepare the heater and ingot furnace of crystalline silicon ingot |
| CN108588825A (en) * | 2018-07-06 | 2018-09-28 | 浙江精功科技股份有限公司 | A kind of moveable ingot furnace of side heater and its casting ingot process |
| CN108866622A (en) * | 2018-07-31 | 2018-11-23 | 宜昌南玻硅材料有限公司 | The heating system and its operation method of polycrystalline ingot furnace |
| CN113755945A (en) * | 2021-09-09 | 2021-12-07 | 扬州晶樱光电科技有限公司 | Polycrystalline ingot furnace body for oversized silicon ingot |
| CN114959890A (en) * | 2022-06-19 | 2022-08-30 | 扬州晶樱光电科技有限公司 | Heat exchange system for polycrystalline ingot furnace of silicon ingot and use method of heat exchange system |
-
2014
- 2014-08-20 CN CN201420469825.3U patent/CN204022995U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI580919B (en) * | 2015-10-14 | 2017-05-01 | 國立清華大學 | Composite structures of multi-crucibles and their high-temperature adiabatic heating method in vacuum arc melting process |
| CN106087045A (en) * | 2016-08-19 | 2016-11-09 | 西安华晶电子技术股份有限公司 | A kind of polysilicon fritting ingot casting melt and crystal growing technology |
| CN106119956A (en) * | 2016-08-19 | 2016-11-16 | 西安华晶电子技术股份有限公司 | A kind of polysilicon fritting casting ingot method |
| CN107699943A (en) * | 2017-11-16 | 2018-02-16 | 江苏协鑫硅材料科技发展有限公司 | Prepare the heater and ingot furnace of crystalline silicon ingot |
| CN108588825A (en) * | 2018-07-06 | 2018-09-28 | 浙江精功科技股份有限公司 | A kind of moveable ingot furnace of side heater and its casting ingot process |
| CN108588825B (en) * | 2018-07-06 | 2024-03-15 | 浙江精工集成科技股份有限公司 | Ingot furnace with movable side heater and ingot casting process thereof |
| CN108866622A (en) * | 2018-07-31 | 2018-11-23 | 宜昌南玻硅材料有限公司 | The heating system and its operation method of polycrystalline ingot furnace |
| CN113755945A (en) * | 2021-09-09 | 2021-12-07 | 扬州晶樱光电科技有限公司 | Polycrystalline ingot furnace body for oversized silicon ingot |
| CN114959890A (en) * | 2022-06-19 | 2022-08-30 | 扬州晶樱光电科技有限公司 | Heat exchange system for polycrystalline ingot furnace of silicon ingot and use method of heat exchange system |
| CN114959890B (en) * | 2022-06-19 | 2023-09-26 | 扬州晶樱光电科技有限公司 | Heat exchange system for polycrystalline ingot furnace of silicon ingot and use method thereof |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141217 Termination date: 20200820 |