CN203838473U - Masking granularity detecting device - Google Patents
Masking granularity detecting device Download PDFInfo
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- CN203838473U CN203838473U CN201420138725.2U CN201420138725U CN203838473U CN 203838473 U CN203838473 U CN 203838473U CN 201420138725 U CN201420138725 U CN 201420138725U CN 203838473 U CN203838473 U CN 203838473U
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- mask
- granularity
- granule detecting
- detecting device
- granule
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- 230000000873 masking effect Effects 0.000 title abstract 4
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 239000008187 granular material Substances 0.000 claims description 87
- 230000001360 synchronised effect Effects 0.000 claims description 16
- 239000000428 dust Substances 0.000 claims description 15
- 230000007613 environmental effect Effects 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000012423 maintenance Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 7
- 230000033001 locomotion Effects 0.000 abstract description 5
- 238000010521 absorption reaction Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The utility model provides a masking granularity detecting device. The masking granularity detecting device comprises a mask, an absorption table, a granularity exchange mechanism, a granularity detecting device and an environment protecting device, wherein the granularity exchange mechanism performs lifting motion to convey the mask to a granularity detecting station, the mask is subjected to vacuum absorption and fixing by the absorption table, the granularity detection is performed by the granularity detecting device, and the environment protecting device is used for isolating the granularity detecting device from the outside environment. Motion accuracy and repeatability are guaranteed by the granularity exchange mechanism, the safety problem of material exchange during granularity detection is solved through an effective safety interlock mechanism, and the working environment problem of the granularity detecting device is solved through the environment protecting device. By means of the detecting process of the masking granularity detecting device, high accuracy, high stability, high safety and clean working environment of the granularity detecting device can be simultaneously achieved.
Description
Technical field
The utility model relates to field of mechanical technique, particularly a kind of mask granule detecting device.
Background technology
Lithographic equipment be a kind of by mask pattern exposure image to the equipment on silicon chip or glass substrate.Mask transmission system is responsible for the transmission of material between exposure image unit (mask platform) and version box (material interface), and mask transmission system is the important component part of lithographic equipment.Mask is in the process of exposure, and the particle on mask is to have a certain impact to measuring, in the time that granularity is greater than 100 microns, can wipe away, in the time that granularity is less than 10 microns, to measure be do not have influential, but when granularity is at 10-100 micron time, wipe to walk.Therefore in order, to detecting 10-100 micron particles on its mask, to carry out granule detecting to mask.
Granule detecting unit in mask transmission system, in order to detect the particle of mask upper surface and lower surface, on mask, large-sized particle reduces to 0 by the yield of litho machine, and undersized particle affects the performance of device speed and reliability aspect in affecting image quality reduction yield.
In the granule detecting cell operation flow process of existing mask transmission system, first, the version fork of exchange version mechanical arm is placed on mask the handing-over station of granularity connecting mechanism, and granularity connecting mechanism joins; Then, mask is placed to granule detecting equipment Inspection station, granule detecting equipment carries out granule detecting; Finally, after having detected, meet at granularity connecting mechanism and be sent to exchange version mechanical arm, then be handover to mask platform by exchange version mechanical arm.
Can find from above-mentioned flow process, in mask transmitting procedure, increase granule detecting, can effectively increase the yield of litho machine.A good granule detecting equipment, can improve whole mask transfer efficiency, and the exposure quality of litho machine is protected.But existing granule detecting equipment is using link, more to the demand of environment, by the kinematic axis particle producing that move, tend to bring equipment failure to granule detecting equipment, affect equipment use; Mask need to move to detection station, need to carry out the mobile unit of high precision, high stability and high security.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of mask granule detecting device, comprising: mask, suction bed, granularity connecting mechanism, granule detecting equipment and environmental protection device; Wherein,
Described granularity connecting mechanism moves up and down described mask is transported to a granule detecting station, is fixed by described suction bed vacuum suction, carries out granule detecting by described granule detecting equipment;
Described environmental protection device, for isolating described granule detecting equipment and external environment.
Further, in described mask granule detecting device, described suction bed comprises: inhale bed face, vacuum interface and mask and have inductor;
Described suction bed face carries described vacuum interface and mask exists inductor;
Described vacuum interface, for vacuum suction fixing described mask;
Whether there is inductor in described mask, exist for responding to described mask.
Further, in described mask granule detecting device, described granularity connecting mechanism comprises: spline, leading screw, direct current generator and synchronous pulley; Wherein, described direct current generator drives described synchronous pulley, leading screw to carry out transmission, thereby described spline is led.
Further, in described mask granule detecting device, described granularity connecting mechanism also comprises: scrambler, feeds back for the lifting precision to the kinematic axis being made up of described direct current generator, synchronous pulley, leading screw and spline.
Further, in described mask granule detecting device, described granularity connecting mechanism also comprises: whether station sensor, move to described granule detecting station for responding to the described kinematic axis being made up of described direct current generator, synchronous pulley, leading screw and spline.
Further, in described mask granule detecting device, described environmental protection device comprises:
Timing Belt, described Timing Belt both sides are provided with synchronous pulley;
Straight line cylinder, is connected with described Timing Belt by a fixed head, is arranged on described Timing Belt one side;
Dust cover, is connected with described Timing Belt by a connection piece, is arranged on described Timing Belt opposite side;
Guiding rail, is connected with described dust cover;
Folding detecting sensor, is arranged at a side of described dust cover;
Described Timing Belt, straight line cylinder, dust cover, guiding rail and folding detecting sensor are arranged in a dustproof framework.
Further, in described mask granule detecting device, described dustproof framework comprises: take out particle interface.
Further, in described mask granule detecting device, also comprise granule detecting maintenance unit, with described granule detecting equipment connection.
Further, in described mask granule detecting device, comprising:
Pulling slide rail mechanism, with described granule detecting equipment connection;
Location self-locking structure, is oppositely arranged with described pulling slide rail mechanism.
The mask granule detecting device that the utility model provides, has following beneficial effect: ensured kinematic accuracy and repeatability by granularity connecting mechanism; Solve and join the safety problem of material while carrying out granule detecting by effective safety interlock mechanism; Solve the working environment problem of granule detecting equipment by environmental protection device.The testing process of the present utility model passing through makes granule detecting equipment have high precision, high stability, high security and cleaner working environment simultaneously.
Brief description of the drawings
Fig. 1 is the utility model mask granule detecting device and exchange version mechanical arm handing-over schematic diagram;
Fig. 2 is the schematic diagram of the utility model embodiment mask granule detecting device;
Fig. 3 is the suction bed schematic diagram of the utility model embodiment mask granule detecting device;
Fig. 4 is the granularity connecting mechanism schematic diagram of the utility model embodiment mask granule detecting device;
Fig. 5-6th, the environmental protection device schematic diagram of the utility model embodiment mask granule detecting device;
Fig. 7 is the granule detecting maintenance unit schematic diagram of the utility model embodiment mask granule detecting device;
Fig. 8 is the workflow diagram of the utility model embodiment mask granule detecting device.
Embodiment
Below in conjunction with the drawings and specific embodiments, the mask granule detecting device the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
As shown in Figure 1, transport carrying out a mask platform adjustment of the printing plate process exchange version mechanical arm 2, in this transportation, set up a granule detecting link, therefore the utility model provides a kind of mask granule detecting device 1, the version fork of described mask granule detecting device 1 and described exchange version mechanical arm 2 is joined, and installation frame 3 provides platform for described mask granule detecting device 1 and a described exchange edition mechanical arm 2.
Please refer to Fig. 2, it is the schematic diagram of the utility model embodiment mask granule detecting device.As shown in Figure 2, described mask granule detecting device comprises: mask (not shown), suction bed 1b, granularity connecting mechanism 1c, environmental protection device 1d and granule detecting equipment 1e; Wherein,
Described granularity connecting mechanism 1c moves up and down described mask is transported to a granule detecting station, is fixed by described suction bed 1b vacuum suction, carries out granule detecting by described granule detecting equipment 1e; Described environmental protection device 1d, for isolating described granule detecting equipment 1e and external environment.
Please refer to Fig. 3, it is the suction bed schematic diagram of the utility model embodiment mask granule detecting device.As shown in Figure 3, described suction bed comprises: inhale bed face 1b-1, vacuum interface 1b-2 and mask and have inductor 1b-3; Described suction bed face 1b-1 carries described vacuum interface 1b-2 and mask exists inductor 1b-3; Described vacuum interface 1b-2, for vacuum suction fixing described mask; Whether there is inductor 1b-3 in described mask, exist for responding to described mask.In the time that mask arrives granule detecting station, whether described mask exists inductor 1b-3 to detect described mask and exists effectively, if effectively, described vacuum interface 1b-2 opens and carries out vacuum suction, ensures the location of mask and fixes.
Please refer to Fig. 4, it is the granularity connecting mechanism schematic diagram of the utility model embodiment mask granule detecting device.As shown in Figure 4, described granularity connecting mechanism comprises: spline 1c-1, leading screw 1c-2, direct current generator 1c-3 and synchronous pulley 1c-4; Wherein, described direct current generator 1c-3 drives described synchronous pulley 1c-4, leading screw 1c-2 to carry out transmission, thereby described spline 1c-1 is led.The kinematic axis being made up of described direct current generator 1c-3, synchronous pulley 1c-4, leading screw 1c-2 and spline 1c-1 has completed the required straight line elevating movement of handing-over motion.
Further, described granularity connecting mechanism also comprises: scrambler 1c-5, in this enforcement, select incremental encoder, lifting precision to the kinematic axis being made up of described direct current generator 1c-3, synchronous pulley 1c-4, leading screw 1c-2 and spline 1c-1 is fed back, form effective closed-loop control system, ensure repeatability and the handing-over precision of kinematic axis.
Further, described granularity connecting mechanism also comprises: whether station sensor 1c-7, move to described granule detecting station for responding to the described kinematic axis being made up of described direct current generator, synchronous pulley, leading screw and spline.The station sensor 1c-7 of kinematic axis is in overall flow, and with other station flow processs, the safety interlock in composition workflow, provides the security of handing-over.
Further, described granularity connecting mechanism also comprises: mechanical position limitation 1c-6, has carried out spacing to the movement locus of described kinematic axis.
Please refer to Fig. 5, it is the environmental protection device schematic diagram of the utility model embodiment mask granule detecting device.As shown in Figure 5, described environmental protection device comprises:
Timing Belt 1d-8, described Timing Belt 1d-8 both sides are provided with synchronous pulley 1d-9;
Straight line cylinder 1d-5, is connected with described Timing Belt 1d-8 by a fixed head 1d-7, is arranged on described Timing Belt 1d-8 mono-side;
Dust cover 1d-4, is connected with described Timing Belt 1d-8 by a connection piece 1d-6, is arranged on described Timing Belt 1d-8 opposite side;
Guiding rail 1d-3, is connected with described dust cover 1d-4;
Folding detecting sensor 1d-2, is arranged at a side of described dust cover 1d-4;
Described straight line cylinder 1d-5 drives described dust cover 1d-4 to move on guiding rail 1d-3, reaches the object of folding, and the folding of described folding detecting sensor 1d-2 detection dust cover 1d-4 exists validity.
Described Timing Belt 1d-8, straight line cylinder 1d-5, dust cover 1d-4, guiding rail 1d-3 and folding detecting sensor 1d-2 are arranged in a dustproof framework 1d-1.
Further as shown in Figure 6, described dustproof framework comprises: take out particle interface 1d-1-1, for granularity delivery position seals, provide good testing environment.
Preferably, in embodiment of the present utility model, described granule detecting equipment 1e need to carry out periodic maintenance according to maintenance period, in order to maintain easily, as shown in Figure 7, in a side of described granule detecting equipment 1e, one granule detecting maintenance unit is set, described granule detecting maintenance unit comprises the 3a of pulling slide rail mechanism and location self-locking structure 3b, and the described pulling slide rail 3a of mechanism is connected with described granule detecting equipment 1e; Described location self-locking structure 3b and the described pulling slide rail 3a of mechanism are oppositely arranged.In the time that needs are safeguarded, location self-locking structure 3b opens, and by the 3a of pulling slide rail mechanism, granule detecting equipment 1e pull is arrived to servicing area, after maintenance, returns; In the time of pushed home, location self-locking structure 3b locks, and has ensured the accuracy of handing-over station.
Mask granule detecting device workflow provided by the utility model as shown in Figure 8, in the time that handing-over version manipulator clamping mask moves to handing-over station, the dust cover of environmental protection device is opened, after detection puts in place, granularity connecting mechanism rises, arrive the handing-over station with exchange version mechanical arm, after station sensor is effective, the mask of inhaling bed exists sensor to detect effectively, open vacuum interface absorption mask, by mask positioning and fixing, the version fork of exchange version mechanical arm is opened, granularity connecting mechanism moves to detection station, station sensor is effective, granule detecting equipment Inspection mask exists, vacuum interface is closed.Granule detecting equipment detects mask, after detection, has gone up equal order, is handover to exchange version mechanical arm, is finally transported to mask platform, completes mask transmission.
Foregoing description is only the description to the utility model preferred embodiment; the not any restriction to the utility model scope; any change, modification that the those of ordinary skill in the utility model field does according to above-mentioned disclosure, all belong to the protection domain of claims.
Claims (9)
1. a mask granule detecting device, is characterized in that, comprising: mask, suction bed, granularity connecting mechanism, granule detecting equipment and environmental protection device; Wherein,
Described granularity connecting mechanism moves up and down described mask is transported to a granule detecting station, and described mask is fixed by described suction bed vacuum suction, carries out granule detecting by described granule detecting equipment;
Described environmental protection device, for isolating described granule detecting equipment and external environment.
2. mask granule detecting device as claimed in claim 1, is characterized in that, described suction bed comprises: inhale bed face, vacuum interface and mask and have inductor;
Described suction bed face carries described vacuum interface and mask exists inductor;
Described vacuum interface, for vacuum suction fixing described mask;
Whether there is inductor in described mask, exist for responding to described mask.
3. mask granule detecting device as claimed in claim 1, is characterized in that, described granularity connecting mechanism comprises: spline, leading screw, direct current generator and synchronous pulley; Wherein, described direct current generator drives described synchronous pulley, leading screw to carry out transmission, thereby described spline is led.
4. mask granule detecting device as claimed in claim 3, is characterized in that, described granularity connecting mechanism also comprises: scrambler, feeds back for the lifting precision to the kinematic axis being made up of described direct current generator, synchronous pulley, leading screw and spline.
5. mask granule detecting device as claimed in claim 3, it is characterized in that, described granularity connecting mechanism also comprises: whether station sensor, move to described granule detecting station for responding to the described kinematic axis being made up of described direct current generator, synchronous pulley, leading screw and spline.
6. mask granule detecting device as claimed in claim 1, is characterized in that, described environmental protection device comprises:
Timing Belt, described Timing Belt both sides are provided with synchronous pulley;
Straight line cylinder, is connected with described Timing Belt by a fixed head, is arranged on described Timing Belt one side;
Dust cover, is connected with described Timing Belt by a connection piece, is arranged on described Timing Belt opposite side;
Guiding rail, is connected with described dust cover;
Folding detecting sensor, is arranged at a side of described dust cover;
Described Timing Belt, straight line cylinder, dust cover, guiding rail and folding detecting sensor are arranged in a dustproof framework.
7. mask granule detecting device as claimed in claim 6, is characterized in that, described dustproof framework comprises: take out particle interface.
8. mask granule detecting device as claimed in claim 1, is characterized in that, also comprises granule detecting maintenance unit, with described granule detecting equipment connection.
9. mask granule detecting device as claimed in claim 8, is characterized in that, described granule detecting maintenance unit comprises:
Pulling slide rail mechanism, with described granule detecting equipment connection;
Location self-locking structure, is oppositely arranged with described pulling slide rail mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420138725.2U CN203838473U (en) | 2014-03-25 | 2014-03-25 | Masking granularity detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420138725.2U CN203838473U (en) | 2014-03-25 | 2014-03-25 | Masking granularity detecting device |
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| Publication Number | Publication Date |
|---|---|
| CN203838473U true CN203838473U (en) | 2014-09-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420138725.2U Expired - Lifetime CN203838473U (en) | 2014-03-25 | 2014-03-25 | Masking granularity detecting device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105807574A (en) * | 2014-12-30 | 2016-07-27 | 上海微电子装备有限公司 | Mask transmission device, exposure device and mask transmission method |
| CN110361936A (en) * | 2018-03-26 | 2019-10-22 | 上海微电子装备（集团）股份有限公司 | Mask thickness detection apparatus, storing mechanism, transmission mechanism and lithography system |
| TWI696885B (en) * | 2018-08-14 | 2020-06-21 | 台灣積體電路製造股份有限公司 | Method for handling mask and lithography apparatus |
-
2014
- 2014-03-25 CN CN201420138725.2U patent/CN203838473U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105807574A (en) * | 2014-12-30 | 2016-07-27 | 上海微电子装备有限公司 | Mask transmission device, exposure device and mask transmission method |
| CN105807574B (en) * | 2014-12-30 | 2018-03-02 | 上海微电子装备（集团）股份有限公司 | Mask transmitting device, exposure device and mask transmission method |
| CN110361936A (en) * | 2018-03-26 | 2019-10-22 | 上海微电子装备（集团）股份有限公司 | Mask thickness detection apparatus, storing mechanism, transmission mechanism and lithography system |
| TWI696885B (en) * | 2018-08-14 | 2020-06-21 | 台灣積體電路製造股份有限公司 | Method for handling mask and lithography apparatus |
| US10877382B2 (en) | 2018-08-14 | 2020-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for handling mask and lithography apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140917 |
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| CX01 | Expiry of patent term |