CN203741458U - Square thermal field structure of sapphire single crystal furnace - Google Patents
Square thermal field structure of sapphire single crystal furnace Download PDFInfo
- Publication number
- CN203741458U CN203741458U CN201420050091.5U CN201420050091U CN203741458U CN 203741458 U CN203741458 U CN 203741458U CN 201420050091 U CN201420050091 U CN 201420050091U CN 203741458 U CN203741458 U CN 203741458U
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- Prior art keywords
- square
- molybdenum
- thermoscreen
- zirconium oxide
- thermal field
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- 239000013078 crystal Substances 0.000 title claims abstract description 37
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 29
- 239000010980 sapphire Substances 0.000 title claims abstract description 29
- 238000009413 insulation Methods 0.000 claims abstract description 18
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 10
- 239000010937 tungsten Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052802 copper Inorganic materials 0.000 claims abstract description 4
- 239000010949 copper Substances 0.000 claims abstract description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 55
- 229910052750 molybdenum Inorganic materials 0.000 claims description 41
- 239000011733 molybdenum Substances 0.000 claims description 41
- 239000011449 brick Substances 0.000 claims description 28
- 239000000835 fiber Substances 0.000 claims description 28
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 28
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 28
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 6
- 230000007547 defect Effects 0.000 abstract description 3
- 230000008646 thermal stress Effects 0.000 abstract description 3
- 238000010276 construction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a square thermal field structure of a sapphire single crystal furnace. The thermal field structure comprises an upper heat shield, a side heat shield, a lower heat shield, a crucible cover and a square heating body structure, wherein the square heating body structure is formed by connecting a square crucible made of metallic tungsten, a square tray, a circular support, a right-angle copper conductive plate and a tungsten bar. The thermal field structure has the advantages that the furnace body structure has a good heat insulation effect and is stable in temperature field and reasonable in temperature gradient; and produced sapphire crystals have few internal defects and small in thermal stress.
Description
(1) technical field
The utility model relates to a kind of sapphire single-crystal furnace thermal field structure, is specifically related to a kind of square sapphire single-crystal furnace thermal field structure.
(2) background technology
Sapphire single-crystal has unique crystalline network, the mechanical property of excellence and good thermal property, can under the mal-condition that approaches 2000 DEG C of high temperature, work,, hardness high with its intensity is large, resistance to erosion, the features such as excellent over-all properties are widely used in science and technology, space vehicle, the window of high intensity laser beam device, national defence and civilian industry, etc. many fields of electronic technology, also become the preferred material in current LED market simultaneously.
Along with scientific and technical development, market not only requires sapphire to have higher quality and larger size, also needs Chang Jing enterprise constantly to reduce by every means manufacturing cost simultaneously, only in this way just likely on market, establishes oneself in an unassailable position.Therefore, low cost, growing large-size sapphire single-crystal has become the urgent task that current Chang Jing enterprise faces in high quality.Reducing manufacturing cost can start with from many aspects, as reduced material cost, shortening the process time, and conservation of power cost, but from the viewpoint of crystal processing, need according to product size and shape, sapphire crystal to be designed.
Growth method of sapphire single crystal is a variety of, and kyropoulos (KY) is for commercially producing at present one of main method of high-quality, large-size sapphire single-crystal.Harbin Aurora Optoelectronics Technology Co., Ltd. has the improvement kyropoulos of independent intellectual property right---and " cold core shouldering micropulling method " is although be greatly improved at more traditional kyropoulos aspect manufacturing cost and yield rate, but, for square material, pyriform crystal ingot volume recovery is still lower.Therefore, be necessary to research and develop a kind of can be for the equipment of growing large-size, the square sapphire single-crystal of high-quality.
(3) summary of the invention
The utility model provides the one square sapphire crystal that is suitable for growing, furnace binding high insulating effect, temperature are stable, thermograde rationally, the sapphire crystal subsurface defect that grows is few, the square sapphire single-crystal furnace thermal field structure that thermal stresses is little.
The purpose of this utility model is achieved in that it comprises thermoscreen, side thermoscreen, lower thermoscreen, crucible cover, and the square crucible of being made by tungsten, square pallet, circular pillar, the square heating member structure that right angle copper conducting plates and tungsten bar are formed by connecting, upper thermoscreen is molybdenum heat screen and Zirconium oxide fibre brick thermal insulation layer, side thermoscreen is made up of interior screen and outer screen two portions, interior screen is the right angle bridging arrangement of multilayer molybdenum plate, outer screen is square Zirconium oxide fibre brick insulated tank structure, side thermoscreen top is taken and is put one deck annular Zirconium oxide fibre brick structure, lower thermoscreen is made up of square molybdenum sheet thermoscreen and Zirconium oxide fibre brick heat insulation layer structure, and the manhole matching with circular strut diameter is left at lower thermoscreen center, all there is arc angling on the inner each limit of square crucible, there is the circular draw-in groove with stanchions square tray bottom.
The utility model also has some features like this:
1, described upper thermoscreen is made up of molybdenum heat screen and the Zirconium oxide fibre brick thermal insulation layer of stainless steel stent and same size, and entirety is connected and fixed with molybdenum bolt and matching nut, and Bing leaves vision slit in center, and molybdenum heat screen is made up of square molybdenum sheet.
2, the annular Zirconium oxide fibre brick structure at described side thermoscreen top is formed by 4 ~ 8 Zirconium oxide fibre brick mosaic splicings.
3, described crucible cover is formed by connecting with molybdenum filament by the measure-alike square molybdenum sheet of multilayer, and vision slit is left at molybdenum sheet center, and aperture reduces from top to bottom gradually.
4, the interior screen of described side thermoscreen is made up of 5 ~ 10 layers of coaxial square molybdenum bucket, every layer of molybdenum bucket formed by 2 thick right angle molybdenum plate overlap joints, and be connected and fixed with molybdenum filament, between adjacent molybdenum bucket, for seamed edge place, the molybdenum sheet of same radian supports, and the overlap joint notch portion of adjacent molybdenum bucket is not overlapping.
5, the outer screen of described side thermoscreen is made up of 2 ~ 6 Zirconium oxide fibre bricks, and adjacent Zirconium oxide fibre brick is fixed by detent and projection, and its splicing interface does not overlap with interior screen outermost layer molybdenum bucket interface, and outer screen and interior screen are with high.
6, the square molybdenum sheet thermoscreen of described lower thermoscreen is formed by connecting by molybdenum filament by 10 ~ 18 layers of square molybdenum sheet, and the manhole matching with circular pillar is left at center.
7, described square heating member is to be formed by connecting by two right angle square-shaped electrode and several tungsten bar, the profile birdcage shape that is square, and bottom centre leaves the square hole through circular pillar.
The utility model is on the basis of the cold core shouldering micropulling method sapphire single crystal growth furnace structure announced in granted patent ZL200920100239.0 in early stage, by thermal field structure of single crystal furnace is carried out to particular design, to form the single crystal furnace structure of the square sapphire crystal that is suitable for growing.The beneficial effects of the utility model have: this furnace binding high insulating effect, temperature are stablized, thermograde is reasonable, sapphire crystal subsurface defect that grow is few, and thermal stresses is little.
1. the square crystal that the long brilliant furnace superintendent of square sapphire goes out is conducive to improve the volume recovery of square products, has reduced tooling cost, has met the demand of sapphire application market to low cost, the square material of high-quality (as Mobile phone screen).
2. in insulation construction, multilayer molybdenum barrel structure for interior screen, Zirconium oxide fibre brick insulated tank for outer screen, both can utilize Zirconium oxide fibre brick to strengthen heat insulation effect, can prevent that again Zirconium oxide fibre brick is because of the excessive formation cracking of internal-external temperature difference.
3. in insulation construction, every layer of molybdenum bucket of interior screen formed by the vertical overlap joint of molybdenum plate, and adjacent molybdenum bucket overlap joint interface is not overlapping, is conducive to obtain temperature uniformly, has reduced the probability of interior screen distortion.
4. in insulation construction, the annular Zirconium oxide fibre brick structure design at the Zirconium oxide fibre brick thermal insulation layer at upper thermoscreen top and side thermoscreen top has strengthened top heat insulation effect, prevent that heat runs off fast, increased the radian of crystal shoulder simultaneously, make the right angle of square crystal become round and smooth, avoid stress concentration.
5. in insulation construction, the design of circular pillar, in ensureing square crystal shape, makes crystal bottom become round and smooth, is beneficial to the discharge of bubble and avoids stress concentration.
6. in insulation construction, the chamfer design of the each seamed edge of square crucible inwall makes four jiaos, crystal become rounder and more smooth, prevents the excessive cracking that causes of angular edge stress.
(4) brief description of the drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is side thermoscreen vertical view;
Fig. 3 is square crucible vertical view.
(5) embodiment
Below in conjunction with accompanying drawing, the utility model is elaborated.
In conjunction with Fig. 1, the present embodiment comprises thermoscreen, side thermoscreen and lower thermoscreen, crucible cover 9, and the square crucible 12 of being made by tungsten, square pallet 11, circular pillar 10, the square heating member composition that right angle copper conducting plates 4 and tungsten bar 5 are formed by connecting.Upper thermoscreen is made up of molybdenum heat screen 1 and Zirconium oxide fibre brick insulation construction 2 and stainless steel stent 3, in in side thermoscreen, screen 6 is the right angle bridging arrangement of multilayer molybdenum plate, outer screen is square Zirconium oxide fibre brick insulated tank structure 7, side thermoscreen top is taken and is put one deck annular Zirconium oxide fibre brick structure 8, lower thermoscreen is made up of with Zirconium oxide fibre brick heat insulation layer structure 14 square molybdenum sheet thermoscreen 13, and the manhole 9 matching with circular pillar 10 diameters is left at lower thermoscreen center.All there is arc angling R on the inner each limit of square crucible, and there is the circular draw-in groove with stanchions square tray bottom.
Fig. 2-Fig. 3 is side thermoscreen structure and square crucible structure.Interior screen 6 is made up of the square molybdenum bucket of multilayer, and between adjacent molybdenum bucket, seamed edge place supports with the molybdenum sheet 15 of same radian.Molybdenum bucket is formed by 2 thick right angle molybdenum plate overlap joints, and every layer of molybdenum bucket has two overlap joint seamed edges 16 in diagonal position, and the overlap joint mouth of adjacent molybdenum bucket is not overlapping.In outer screen 7, the overlap joint mouth 17 of Zirconium oxide fibre brick insulated tank structure, not in square edge place, to guarantee not overlap salty closing with any molybdenum bucket, improves heat insulation effect.The inner each seamed edge of square crucible has arc angling to a certain degree, to reduce stress concentration, avoids crystal cleavage.
Claims (8)
1. a square sapphire single-crystal furnace thermal field structure, it is characterized in that it comprises thermoscreen, side thermoscreen, lower thermoscreen, crucible cover, and the square crucible of being made by tungsten, square pallet, circular pillar, the square heating member structure that right angle copper conducting plates and tungsten bar are formed by connecting, upper thermoscreen is molybdenum heat screen and Zirconium oxide fibre brick thermal insulation layer, side thermoscreen is made up of interior screen and outer screen two portions, interior screen is the right angle bridging arrangement of multilayer molybdenum plate, outer screen is square Zirconium oxide fibre brick insulated tank structure, side thermoscreen top is taken and is put one deck annular Zirconium oxide fibre brick structure, lower thermoscreen is made up of square molybdenum sheet thermoscreen and Zirconium oxide fibre brick heat insulation layer structure, and the manhole matching with circular strut diameter is left at lower thermoscreen center, all there is arc angling on the inner each limit of square crucible, there is the circular draw-in groove with stanchions square tray bottom.
2. the square sapphire single-crystal furnace thermal field structure of one according to claim 1, it is characterized in that described upper thermoscreen is made up of molybdenum heat screen and the Zirconium oxide fibre brick thermal insulation layer of stainless steel stent and same size, entirety is connected and fixed with molybdenum bolt and matching nut, Bing leaves vision slit in center, and molybdenum heat screen is made up of square molybdenum sheet.
3. the square sapphire single-crystal furnace thermal field structure of one according to claim 2, is characterized in that the annular Zirconium oxide fibre brick structure at described side thermoscreen top is formed by 4 ~ 8 Zirconium oxide fibre brick mosaic splicings.
4. the square sapphire single-crystal furnace thermal field structure of one according to claim 3, is characterized in that described crucible cover is formed by connecting by the measure-alike square molybdenum sheet molybdenum filament of multilayer, and vision slit is left at molybdenum sheet center, and aperture reduces from top to bottom gradually.
5. the square sapphire single-crystal furnace thermal field structure of one according to claim 4, the interior screen that it is characterized in that described side thermoscreen is made up of 5 ~ 10 layers of coaxial square molybdenum bucket, every layer of molybdenum bucket formed by 2 thick right angle molybdenum plate overlap joints, and be connected and fixed with molybdenum filament, between adjacent molybdenum bucket, seamed edge place supports with the molybdenum sheet of same radian, and the overlap joint notch portion of adjacent molybdenum bucket is not overlapping.
6. the square sapphire single-crystal furnace thermal field structure of one according to claim 5, the outer screen that it is characterized in that described side thermoscreen is made up of 2 ~ 6 Zirconium oxide fibre bricks, adjacent Zirconium oxide fibre brick is fixed by detent and projection, its splicing interface does not overlap with interior screen outermost layer molybdenum bucket interface, and outer screen and interior screen are with high.
7. the square sapphire single-crystal furnace thermal field structure of one according to claim 6, the square molybdenum sheet thermoscreen that it is characterized in that described lower thermoscreen is formed by connecting by molybdenum filament by 10 ~ 18 layers of square molybdenum sheet, and the manhole matching with circular pillar is left at center.
8. the square sapphire single-crystal furnace thermal field structure of one according to claim 7, it is characterized in that described square heating member is to be formed by connecting by two right angle square-shaped electrode and several tungsten bar, the profile birdcage shape that is square, bottom centre leaves the square hole through circular pillar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420050091.5U CN203741458U (en) | 2014-01-26 | 2014-01-26 | Square thermal field structure of sapphire single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420050091.5U CN203741458U (en) | 2014-01-26 | 2014-01-26 | Square thermal field structure of sapphire single crystal furnace |
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| CN203741458U true CN203741458U (en) | 2014-07-30 |
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| CN201420050091.5U Expired - Fee Related CN203741458U (en) | 2014-01-26 | 2014-01-26 | Square thermal field structure of sapphire single crystal furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178813A (en) * | 2014-09-15 | 2014-12-03 | 同方国芯电子股份有限公司 | Kyropoulos-process sapphire single-crystal growth furnace thermal-insulation side screen |
| CN104805501A (en) * | 2014-01-26 | 2015-07-29 | 哈尔滨奥瑞德光电技术股份有限公司 | Square sapphire monocrystal furnace heat field structure |
| CN107460548A (en) * | 2016-06-02 | 2017-12-12 | 济南瑰宝新材料有限公司 | A kind of composite metal coated insulation construction of Zirconium oxide fibre product |
-
2014
- 2014-01-26 CN CN201420050091.5U patent/CN203741458U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805501A (en) * | 2014-01-26 | 2015-07-29 | 哈尔滨奥瑞德光电技术股份有限公司 | Square sapphire monocrystal furnace heat field structure |
| CN104805501B (en) * | 2014-01-26 | 2018-02-09 | 哈尔滨奥瑞德光电技术有限公司 | A kind of square sapphire single-crystal furnace thermal field structure |
| CN104178813A (en) * | 2014-09-15 | 2014-12-03 | 同方国芯电子股份有限公司 | Kyropoulos-process sapphire single-crystal growth furnace thermal-insulation side screen |
| CN107460548A (en) * | 2016-06-02 | 2017-12-12 | 济南瑰宝新材料有限公司 | A kind of composite metal coated insulation construction of Zirconium oxide fibre product |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 150001 Harbin, Nangang, West District, large straight street, No. 357 Patentee after: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 150001 Harbin, Nangang, West District, large straight street, No. 357 Patentee before: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Square sapphire monocrystal furnace heat field structure Effective date of registration: 20180929 Granted publication date: 20140730 Pledgee: Longjiang bank Limited by Share Ltd. Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200509 Granted publication date: 20140730 Pledgee: Longjiang bank Limited by Share Ltd. Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140730 |