CN203333810U - Thermal insulation structure of sapphire single crystal furnace - Google Patents
Thermal insulation structure of sapphire single crystal furnace Download PDFInfo
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- CN203333810U CN203333810U CN2013202227491U CN201320222749U CN203333810U CN 203333810 U CN203333810 U CN 203333810U CN 2013202227491 U CN2013202227491 U CN 2013202227491U CN 201320222749 U CN201320222749 U CN 201320222749U CN 203333810 U CN203333810 U CN 203333810U
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- zirconium oxide
- oxide fibre
- thermal insulation
- zirconium
- insulation layer
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Abstract
The utility model provides a thermal insulation structure of a sapphire single crystal furnace, which comprises a furnace cover lower zirconia fiber brick thermal insulation structure, an upper heat shield zirconia fiber brick structure, a side heat shield zirconia fiber brick structure and a lower heat shield zirconia fiber brick structure. The structure provided by the utility model can effectively utilize the heat energy, reduce the heat loss, enhance the thermal insulation effect and establish a reasonable temperature gradient, so that a temperature field is easier to adjust and the problems that the utilization rate of heat energy is low in a single crystal furnace of a traditional kyropoulos method and an adopted molybdenum heat shield structure volatilizes and deforms in a high-temperature environment and has short service life and the like are solved.
Description
(1) technical field
The utility model relates to the thermal field structure in a kind of crystal growing furnace, is specifically related to the insulation construction in a kind of single crystal growing furnace of cold core shouldering micropulling method growing sapphire.
(2) background technology
Sapphire single-crystal has excellent optics, machinery, chemistry and electrical property, all there is higher optical transmittance from 0.190 ~ 5.5 mu m waveband, can under the mal-condition that approaches 2000 ℃ of high temperature, work, be widely used as the window material of various optical elements, infrared military installation, space vehicle and high intensity laser beam device.Especially because thering is excellent over-all properties, become the preferred material of current LED by semiconducter substrate.
Sapphire has stable performance, the huge market demand, comprehensive utilization ratio and added value of product high, becomes in recent years research and development and industrialization focus both at home and abroad.Along with scientific and technical development, people have higher requirement to sapphire quality and size, on the basis that guarantees crystals quality and yield rate, also must further reduce costs by all means.Whether the sapphire single-crystal product has the market competitiveness, and the design of crystal growth equipment is extremely important.
Equipment for growing sapphire single crystal is rational in infrastructure is the precondition of growing high quality, large-size sapphire single-crystal.Only have warm occasion reason, just likely effectively control the radial and axial thermograde of crystal, grow shape ideal, high-quality sapphire single-crystal that subsurface defect is few.For preventing heat loss, form rationally temperature, in single crystal growing furnace, all directions have all been carried out thermal protection, top, bottom, side insulation construction have been formed, certainly, from insulation construction, the improvement approach reduced production costs has two aspects, improve on the one hand the utilization ratio of heat energy by strengthening heat insulation effect, on the other hand by can effectively reducing costs the work-ing life that extends insulation construction.
(3) utility model content
The purpose of this utility model is to provide a kind of can effectively utilize heat energy, reduce calorific loss, strengthen heat insulation effect, set up the reasonable temperature gradient, make the temperature field more be easy to regulate, solve in traditional kyropoulos single crystal growing furnace heat utilization rate low, the molybdenum heat screen structure of use is volatilized, is out of shape under hot environment, work-ing life short problem the sapphire single-crystal furnace insulation construction.
The purpose of this utility model is achieved in that this sapphire single-crystal furnace insulation construction comprises Zirconium oxide fibre brick insulation construction under bell, upper thermoscreen Zirconium oxide fibre brick structure, side thermoscreen Zirconium oxide fibre brick structure and lower thermoscreen Zirconium oxide fibre brick structure, and under bell, Zirconium oxide fibre brick insulation construction comprises the Zirconium oxide fibre brick annulus thermal insulation layer be arranged under large bell; Upper thermoscreen Zirconium oxide fibre brick structure comprises circular support structure and top molybdenum heat screen, the top molybdenum heat screen is comprised of the multilayer molybdenum sheet, between circular support structure and molybdenum sheet, the first zirconium white thermal insulation layer identical with the molybdenum sheet diameter arranged, the first zirconium white thermal insulation layer is the annular block that fan-shaped Zirconium oxide fibre brick is spliced into; Side thermoscreen Zirconium oxide fibre brick structure comprises the zirconium white insulated tank of multilayer different diameter, and every layer of zirconium white insulated tank is comprised of the annulus of multilayer Zirconium oxide fibre brick ring lobe splicing on short transverse; Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, the bottom molybdenum heat screen is comprised of the multilayer molybdenum sheet, be provided with the zirconia ceramics ring of separating use between the second zirconium white thermal insulation layer and molybdenum sheet, the second zirconium white thermal insulation layer is comprised of the Zirconium oxide fibre brick, the second zirconium white thermal insulation layer and molybdenum sheet center are provided with manhole, and the zirconia ceramics ring is connect and formed by Zirconium oxide fibre brick group.
The utility model also has some features like this:
1, described Zirconium oxide fibre brick annulus thermal insulation layer external diameter is less than large bell, internal diameter is greater than small furnace cover inwall 5 ~ 30mm, Zirconium oxide fibre brick annulus thermal insulation layer is spliced by 2 ~ 4 Zirconium oxide fibre bricks, with 4 ~ 12 groups of screw rods, is fixed on large bell inner circle and cylindrical below.
2, described the first zirconium white thermal insulation layer is by 2 ~ 8 fan-shaped Zirconium oxide fibre brick splicing annular blocks, the circular support structure is circular stainless steel plate, circular stainless steel plate, the first zirconium white thermal insulation layer are connected and are fixed together with the molybdenum nut by the molybdenum bolt with the multilayer molybdenum sheet, molybdenum sheet is circular, totally 5 ~ 15 layers, inside be provided with the rule vision slit (specifically seeing patent 201120081033.5) of arranging.
3, described side thermoscreen Zirconium oxide fibre brick structure is comprised of 2 ~ 5 layers of zirconium white insulated tank, and the annulus group that the zirconium white insulated tank is spliced by 2 ~ 10 layers of Zirconium oxide fibre brick from top to bottom connects and forms, and every layer of annulus is spliced by 2 ~ 8 lobe Zirconium oxide fibre brick ring lobes.
4, described the second zirconium white thermal insulation layer is for to splice circular block by 2 ~ 8 fan-shaped Zirconium oxide fibre bricks, between the second zirconium white thermal insulation layer and molybdenum sheet, with 2 ~ 6 zirconia ceramics rings, separate, the zirconia ceramics ring is comprised of 2 ~ 8 Zirconium oxide fibre brick ring lobes, the second zirconium white thermal insulation layer and molybdenum sheet center are provided with than the manhole of the large 0.5 ~ 2mm of crucible supporting rod diameter, external diameter is than the little 0.5 ~ 2mm of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter, the bottom molybdenum heat screen is comprised of 5 ~ 15 layers of circular molybdenum sheet, inside be provided with the rule vision slit (specifically seeing patent 201120081033.5) of arranging.
5, be provided with 1 ~ 4 group of semicircle detent and locator protrusions matched between described Zirconium oxide fibre brick, detent and locator protrusions radius 5 ~ 10mm.
The beneficial effects of the utility model have:
1. the Zirconium oxide fibre brick adopted in the utility model has high temperature resistant, oxidation resistant advantage, and this structure is convenient to dismounting, and zirconia layer can be reused, effectively the work-ing life of prolong insulation screen.
2. adopt the parts of traditional molybdenum heat screen of the alternative and close heating element of Zirconium oxide fibre brick insulation construction in the utility model, the impact that can avoid molybdenum heat screen in the volatilization of high-temperature zone, the internal structures such as heating element, seed chuck to be caused, and avoided in crystal growing process introducing impurity.
3. in the utility model, the zirconium white thermal insulation layer is spliced by some Zirconium oxide fibre bricks, can avoid traditional molybdenum heat screen owing to producing thermoscreen upper and lower molybdenum sheet in heating, process of cooling because of regional temperature difference of living in, the degree difference of expanding with heat and contract with cold causes the deformation extent difference, and then brings the problem of inefficacy.
4. the utility model adopts the Zirconium oxide fibre brick to make thermal insulation layer to substitute and traditional molybdenum heat screen top number layer molybdenum sheet, be conducive to form uniform and stable temperature, temperature regulation is easy, guarantees reasonably radial and axial thermograde, meets the requirement of cold core shouldering micropulling method to warm field distribution.
5. the utility model adopts the Zirconium oxide fibre brick to make thermal insulation layer section or the alternative traditional molybdenum sheet thermoscreen structure of part, due to its excellent heat-insulation and heat-preservation characteristic, can effectively keep temperature in stove, high insulating effect, heat runs off few, and then reduced the growth required power consumption, more traditional molybdenum heat screen energy-conservation 10 ~ 20%.
Zirconium white has a series of good characteristics such as not volatile, pollution-free under use temperature high (maximum operation (service) temperature can reach 2200 ℃), thermal conductivity little (thermal conductivity is minimum in the middle of metal oxide), anti-oxidant, high temperature, aspect the ultrahigh-temperature thermal insulation applications, has unique advantage.The utility model adopts the Zirconium oxide fibre brick to make thermal insulation layer, and all or part of alternative traditional molybdenum sheet thermoscreen structure can effectively strengthen heat insulation effect in stove, prevents that heat runs off fast, forms rational temperature field structure.On the basis of the cold core shouldering micropulling method sapphire single crystal growth furnace insulation construction that the utility model is announced in early stage granted patent ZL200920100239.0 and ZL 201120081033.5, for effectively utilizing heat energy, reduce calorific loss, strengthen heat insulation effect, set up the reasonable temperature gradient, make temperature field more be easy to regulate, solve in traditional kyropoulos single crystal growing furnace heat utilization rate low, the molybdenum heat screen structure of using is volatilized, is out of shape the problem that work-ing life is short under hot environment.
(4) accompanying drawing explanation
Fig. 1 is the utility model structural representation;
Fig. 2-Fig. 3 is zirconium white heat insulation layer structure schematic diagram.
(5) embodiment
Below in conjunction with accompanying drawing, the utility model is elaborated.
In conjunction with Fig. 1-3, small furnace cover 1, large bell 2 are arranged on single crystal growing furnace in the present embodiment, and the sapphire single-crystal furnace insulation construction is comprised of Zirconium oxide fibre brick insulation construction 3, upper thermoscreen Zirconium oxide fibre brick structure 4, side thermoscreen Zirconium oxide fibre brick structure 5 and lower thermoscreen Zirconium oxide fibre brick structure 6 under bell.Under bell, Zirconium oxide fibre brick insulation construction 3 is the Zirconium oxide fibre brick annulus thermal insulation layer be comprised of 2 Zirconium oxide fibre bricks, and external diameter is less than large bell, and internal diameter is greater than small furnace cover inwall 10mm,, be fixed on large bell 2 belows with 4 groups of screw rods.Upper thermoscreen Zirconium oxide fibre brick structure 4 has increased and the first zirconium white thermal insulation layer between stainless steel circular support structure and top molybdenum heat screen 8.The first zirconium white thermal insulation layer is comprised of 4 fan-shaped Zirconium oxide fibre bricks, and top molybdenum heat screen 8 is comprised of 7 molybdenum sheets.Side thermoscreen Zirconium oxide fibre brick structure 5 adopts the molybdenum side thermoscreen of 3 layers of zirconium white insulated tank replace traditional structural, on zirconium white insulated tank short transverse, 6 annulus, consists of, and annulus is spliced by 4 Zirconium oxide fibre brick ring lobes.Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, and the bottom molybdenum heat screen is comprised of 6 layers of molybdenum sheet, with molybdenum screw rod and molybdenum nut, separates fixing.The second zirconium white thermal insulation layer is the hollow circular block by 4 Zirconium oxide fibre brick splicings, be provided with the zirconia ceramics ring 9 of separating use between the second zirconium white thermal insulation layer and molybdenum sheet, zirconia ceramics ring 9 is comprised of 4 lobe Zirconium oxide fibre brick ring lobes, and the seam of each ring lobe is positioned at the middle part of the second zirconium white thermal insulation layer Zirconium oxide fibre brick.The second zirconium white thermal insulation layer and molybdenum sheet center are provided with than the manhole of the large 1mm of crucible supporting rod diameter, and the second zirconium white thermal insulation layer and molybdenum sheet external diameter are than the little 1mm of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter.Above all Zirconium oxide fibre bricks junction army is provided with 1 ~ 4 group of locator protrusions matched and detent, and radius is respectively R1=5mm, R2=5.2mm.Be provided with the rule vision slit (specifically seeing patent 201120081033.5) of arranging in molybdenum sheet.
Claims (6)
1. a sapphire single-crystal furnace insulation construction, it is characterized in that it comprises Zirconium oxide fibre brick insulation construction under bell, upper thermoscreen Zirconium oxide fibre brick structure, side thermoscreen Zirconium oxide fibre brick structure and lower thermoscreen Zirconium oxide fibre brick structure, under bell, Zirconium oxide fibre brick insulation construction comprises the Zirconium oxide fibre brick annulus thermal insulation layer be arranged under large bell; Upper thermoscreen Zirconium oxide fibre brick structure comprises circular support structure and top molybdenum heat screen, the top molybdenum heat screen is comprised of the multilayer molybdenum sheet, between circular support structure and molybdenum sheet, the first zirconium white thermal insulation layer identical with the molybdenum sheet diameter arranged, the first zirconium white thermal insulation layer is the annular block that fan-shaped Zirconium oxide fibre brick is spliced into; Side thermoscreen Zirconium oxide fibre brick structure comprises the zirconium white insulated tank of multilayer different diameter, and every layer of zirconium white insulated tank is comprised of the annulus of multilayer Zirconium oxide fibre brick ring lobe splicing on short transverse; Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, the bottom molybdenum heat screen is comprised of the multilayer molybdenum sheet, be provided with the zirconia ceramics ring of separating use between the second zirconium white thermal insulation layer and molybdenum sheet, the second zirconium white thermal insulation layer is comprised of the Zirconium oxide fibre brick, the second zirconium white thermal insulation layer and molybdenum sheet center are provided with manhole, and the zirconia ceramics ring is connect and formed by Zirconium oxide fibre brick group.
2. a kind of sapphire single-crystal furnace insulation construction according to claim 1, it is characterized in that described Zirconium oxide fibre brick annulus thermal insulation layer external diameter is less than large bell, internal diameter is greater than small furnace cover inwall 5 ~ 30mm, Zirconium oxide fibre brick annulus thermal insulation layer is spliced by 2 ~ 4 Zirconium oxide fibre bricks, with 4 ~ 12 groups of screw rods, is fixed on large bell inner circle and cylindrical below.
3. a kind of sapphire single-crystal furnace insulation construction according to claim 2, it is characterized in that described the first zirconium white thermal insulation layer is for splicing the annular blocks by 2 ~ 8 fan-shaped Zirconium oxide fibre bricks, the circular support structure is circular stainless steel plate, circular stainless steel plate, the first zirconium white thermal insulation layer are connected and are fixed together with the molybdenum nut by the molybdenum bolt with the multilayer molybdenum sheet, molybdenum sheet is circular, totally 5 ~ 15 layers.
4. a kind of sapphire single-crystal furnace insulation construction according to claim 3, it is characterized in that described side thermoscreen Zirconium oxide fibre brick structure is comprised of 2 ~ 5 layers of zirconium white insulated tank, the annulus group that the zirconium white insulated tank is spliced by 2 ~ 10 layers of Zirconium oxide fibre brick from top to bottom connects and forms, and every layer of annulus is spliced by 2 ~ 8 lobe Zirconium oxide fibre brick ring lobes.
5. a kind of sapphire single-crystal furnace insulation construction according to claim 4, it is characterized in that described the second zirconium white thermal insulation layer is for to splice circular block by 2 ~ 8 fan-shaped Zirconium oxide fibre bricks, between the second zirconium white thermal insulation layer and molybdenum sheet, with 2 ~ 6 zirconia ceramics rings, separate, the zirconia ceramics ring is comprised of 2 ~ 8 Zirconium oxide fibre brick ring lobes, the second zirconium white thermal insulation layer and molybdenum sheet center are provided with than the manhole of the large 0.5 ~ 2mm of crucible supporting rod diameter, external diameter is than the little 0.5 ~ 2mm of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter, the bottom molybdenum heat screen is comprised of 5 ~ 15 layers of circular molybdenum sheet.
6. a kind of sapphire single-crystal furnace insulation construction according to claim 5, is characterized in that between described Zirconium oxide fibre brick being provided with 1 ~ 4 group of semicircle detent and locator protrusions matched, detent and locator protrusions radius 5 ~ 10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202227491U CN203333810U (en) | 2013-04-27 | 2013-04-27 | Thermal insulation structure of sapphire single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013202227491U CN203333810U (en) | 2013-04-27 | 2013-04-27 | Thermal insulation structure of sapphire single crystal furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215635A (en) * | 2013-04-27 | 2013-07-24 | 哈尔滨奥瑞德光电技术股份有限公司 | Heat insulation structure of sapphire single crystal furnace |
| CN107460548A (en) * | 2016-06-02 | 2017-12-12 | 济南瑰宝新材料有限公司 | A kind of composite metal coated insulation construction of Zirconium oxide fibre product |
-
2013
- 2013-04-27 CN CN2013202227491U patent/CN203333810U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215635A (en) * | 2013-04-27 | 2013-07-24 | 哈尔滨奥瑞德光电技术股份有限公司 | Heat insulation structure of sapphire single crystal furnace |
| CN103215635B (en) * | 2013-04-27 | 2016-03-16 | 哈尔滨奥瑞德光电技术有限公司 | A kind of Heat insulation structure of sapphire single crystal furnace |
| CN107460548A (en) * | 2016-06-02 | 2017-12-12 | 济南瑰宝新材料有限公司 | A kind of composite metal coated insulation construction of Zirconium oxide fibre product |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 150001 Nangang District, Heilongjiang, and Hing Road, No. 116, Harbin Patentee after: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 150001 Nangang District, Heilongjiang, and Hing Road, No. 116, Harbin Patentee before: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Heat insulation structure of sapphire single crystal furnace Effective date of registration: 20180929 Granted publication date: 20131211 Pledgee: Longjiang bank Limited by Share Ltd. Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200509 Granted publication date: 20131211 Pledgee: Longjiang bank Limited by Share Ltd. Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20131211 |
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| CX01 | Expiry of patent term |