CN103215635B - A kind of Heat insulation structure of sapphire single crystal furnace - Google Patents
A kind of Heat insulation structure of sapphire single crystal furnace Download PDFInfo
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- CN103215635B CN103215635B CN201310151940.6A CN201310151940A CN103215635B CN 103215635 B CN103215635 B CN 103215635B CN 201310151940 A CN201310151940 A CN 201310151940A CN 103215635 B CN103215635 B CN 103215635B
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Abstract
The invention provides a kind of Heat insulation structure of sapphire single crystal furnace.This Heat insulation structure of sapphire single crystal furnace comprises Zirconium oxide fibre brick insulation construction, upper thermoscreen Zirconium oxide fibre brick structure, side thermoscreen Zirconium oxide fibre brick structure and lower thermoscreen Zirconium oxide fibre brick structure under bell.The present invention effectively can utilize heat energy, reduces calorific loss, strengthens heat insulation effect, set up reasonable temperature gradient, make warm field more be easy to regulate, solve heat utilization rate in traditional kyropoulos single crystal growing furnace low, the molybdenum heat screen structure used is volatilized in high temperature environments, is out of shape, the problems such as work-ing life is short.
Description
(1) technical field
The present invention relates to the thermal field structure in a kind of crystal growing furnace, be specifically related to the insulation construction in a kind of single crystal growing furnace of cold core float die growing sapphire.
(2) background technology
Sapphire single-crystal has excellent optics, machinery, chemistry and electrical property, from 0.190 ~ 5.5 mu m waveband, all there is higher optical transmittance, can work under the mal-condition close to 2000 DEG C of high temperature, be widely used as the window material of various optical element, infrared military installation, space vehicle and high intensity laser beam device.Especially because having excellent over-all properties, the preferred material of current LED semiconducter substrate is become.
Sapphire has stable performance, the huge market demand, comprehensive utilization ratio and added value of product high, becomes in recent years research and development and industrialization focus both at home and abroad.Along with the development of science and technology, people have higher requirement to sapphire quality and size, on the basis ensureing crystals quality and yield rate, also must reduce costs further by all means.Whether sapphire single-crystal product has the market competitiveness, and the design of crystal growth equipment is extremely important.
Equipment for growing sapphire single crystal is rational in infrastructure is the precondition of growing high quality, large-size sapphire single-crystal.Only have warm occasion to manage, just likely effectively control the radial and axial thermograde of crystal, grow shape ideal, high-quality sapphire single-crystal that subsurface defect is few.For preventing heat loss, form reasonable temperature field, in single crystal growing furnace, all directions have all carried out thermal protection, define top, bottom, side insulation construction, certainly, from insulation construction, the Ways to improve reducing production cost has two aspects, improve the utilization ratio of heat energy on the one hand by strengthening heat insulation effect, the work-ing life on the other hand by extending insulation construction can effectively reduce costs.
(3) summary of the invention
The object of the present invention is to provide one effectively can utilize heat energy, reduce calorific loss, strengthen heat insulation effect, set up reasonable temperature gradient, warm field is made more to be easy to regulate, solve heat utilization rate in traditional kyropoulos single crystal growing furnace low, the molybdenum heat screen structure of use is volatilized in high temperature environments, is out of shape, work-ing life short problem Heat insulation structure of sapphire single crystal furnace.
The object of the present invention is achieved like this: this Heat insulation structure of sapphire single crystal furnace comprises Zirconium oxide fibre brick insulation construction, upper thermoscreen Zirconium oxide fibre brick structure, side thermoscreen Zirconium oxide fibre brick structure and lower thermoscreen Zirconium oxide fibre brick structure under bell, and under bell, Zirconium oxide fibre brick insulation construction comprises the Zirconium oxide fibre brick annulus thermal insulation layer be arranged under large bell; Upper thermoscreen Zirconium oxide fibre brick structure comprises circular support structure and top molybdenum heat screen, top molybdenum heat screen is made up of multilayer molybdenum sheet, circular support structure with have the first zirconium white thermal insulation layer identical with molybdenum sheet diameter between molybdenum sheet, the first zirconium white thermal insulation layer is the annular block that fan-shaped Zirconium oxide fibre brick is spliced into; Side thermoscreen Zirconium oxide fibre brick structure comprises the zirconium white insulated tank of multilayer different diameter, and every layer of zirconium white insulated tank is made up of the annulus of multilayer Zirconium oxide fibre brick ring lobe splicing in the height direction; Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, bottom molybdenum heat screen is made up of multilayer molybdenum sheet, the zirconia ceramics ring separated is provided with between the second zirconium white thermal insulation layer and molybdenum sheet, second zirconium white thermal insulation layer is made up of Zirconium oxide fibre brick, second zirconium white thermal insulation layer and molybdenum sheet center are provided with manhole, and zirconia ceramics ring is connect by Zirconium oxide fibre brick group and forms.
The present invention also has some features like this:
1, described Zirconium oxide fibre brick annulus thermal insulation layer external diameter is less than large bell, internal diameter is greater than small furnace cover inwall 5 ~ 30mm, Zirconium oxide fibre brick annulus thermal insulation layer is spliced by 2 ~ 4 pieces of Zirconium oxide fibre bricks, is fixed on below large bell inner circle and cylindrical with 4 ~ 12 groups of screw rods.
2, the first described zirconium white thermal insulation layer is splice annular block by 2 ~ 8 pieces of fan-shaped Zirconium oxide fibre bricks, circular support structure is circular stainless steel plate, circular stainless steel plate, the first zirconium white thermal insulation layer and multilayer molybdenum sheet to be connected with molybdenum nut by molybdenum bolt and to be fixed together, molybdenum sheet is circular, totally 5 ~ 15 layers, be inside provided with rule arrangement vision slit (specifically seeing patent 201120081033.5).
3, described side thermoscreen Zirconium oxide fibre brick structure is made up of 2 ~ 5 layers of zirconium white insulated tank, and the annulus group that zirconium white insulated tank is spliced by 2 ~ 10 layers of Zirconium oxide fibre brick from top to bottom connects and forms, and every layer of annulus is spliced by 2 ~ 8 lobe Zirconium oxide fibre brick ring lobes.
4, the second described zirconium white thermal insulation layer is for splice circular block by 2 ~ 8 pieces of fan-shaped Zirconium oxide fibre bricks, separate with 2 ~ 6 zirconia ceramics rings between the second zirconium white thermal insulation layer and molybdenum sheet, zirconia ceramics ring is made up of 2 ~ 8 Zirconium oxide fibre brick ring lobes, second zirconium white thermal insulation layer and molybdenum sheet center are provided with the manhole of 0.5 ~ 2mm larger than crucible supporting rod diameter, external diameter 0.5 ~ 2mm less of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter, bottom molybdenum heat screen is made up of 5 ~ 15 layers of circular molybdenum sheet, inside be provided with rule arrangement vision slit (specifically seeing patent 201120081033.5).
1 ~ 4 group of half round locating grooves and locator protrusions matched is provided with, detent and locator protrusions radius 5 ~ 10mm between 5, described Zirconium oxide fibre brick.
Beneficial effect of the present invention has:
1. the Zirconium oxide fibre brick adopted in the present invention has high temperature resistant, oxidation resistant advantage, this structure be convenient to dismounting, zirconia layer can be reused, can effectively prolong insulation shield work-ing life.
2. in the present invention, adopt Zirconium oxide fibre brick insulation construction to substitute and the parts of traditional molybdenum heat screen near heating element, the impact that molybdenum heat screen causes the internal structure such as heating element, seed chuck in the volatilization of high-temperature zone can be avoided, and avoid in crystal growing process and introduce impurity.
3. in the present invention, zirconium white thermal insulation layer is spliced by some pieces of Zirconium oxide fibre bricks, traditional molybdenum heat screen can be avoided owing to producing thermoscreen upper and lower molybdenum sheet because of residing regional temperature difference in heating, process of cooling, the degree difference of expanding with heat and contract with cold causes deformation extent different, and then brings the problem of inefficacy.
4. the present invention adopt Zirconium oxide fibre brick make thermal insulation layer substitute with traditional molybdenum heat screen top number layer molybdenum sheet, be conducive to forming uniform and stable warm field, temperature regulates easily, ensures reasonably radial and axial thermograde, meets the requirement of cold core float die to warm field distribution.
5. the present invention adopts Zirconium oxide fibre brick to make thermal insulation layer portion or Some substitute tradition molybdenum sheet thermoscreen structure, due to the heat-insulation and heat-preservation characteristic of its excellence, effectively can keep in-furnace temperature, high insulating effect, heat losses is few, and then decrease the required power consumption of growth, more traditional molybdenum heat screen energy-conservation 10 ~ 20%.
Zirconium white is a series of good characteristic such as not volatile, pollution-free under having use temperature high (maximum operation (service) temperature can reach 2200 DEG C), thermal conductivity little (thermal conductivity is minimum in the middle of metal oxide), anti-oxidant, high temperature, in ultrahigh-temperature thermal insulation applications, have unique advantage.The present invention adopts Zirconium oxide fibre brick to make thermal insulation layer, and all or part of alternative traditional molybdenum sheet thermoscreen structure, effectively can strengthen stove inside holding effect, prevent heat to run off fast, form rational temperature field structure.On the basis of the cold core float die sapphire single crystal growth furnace insulation construction that the present invention announced in granted patent ZL200920100239.0 and ZL201120081033.5 in early stage, for effectively utilizing heat energy, reduce calorific loss, strengthen heat insulation effect, set up reasonable temperature gradient, make warm field more be easy to regulate, solve heat utilization rate in traditional kyropoulos single crystal growing furnace low, the molybdenum heat screen structure used is volatilized in high temperature environments, is out of shape, the problem that work-ing life is short.
(4) accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2-Fig. 3 is zirconium white heat insulation layer structure schematic diagram.
(5) embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
Composition graphs 1-3, in the present embodiment, single crystal growing furnace has small furnace cover 1, large bell 2, Heat insulation structure of sapphire single crystal furnace is made up of Zirconium oxide fibre brick insulation construction 3, upper thermoscreen Zirconium oxide fibre brick structure 4, side thermoscreen Zirconium oxide fibre brick structure 5 and lower thermoscreen Zirconium oxide fibre brick structure 6 under bell.Under bell, Zirconium oxide fibre brick insulation construction 3 is the Zirconium oxide fibre brick annulus thermal insulation layer be made up of 2 Zirconium oxide fibre bricks, and external diameter is less than large bell, and internal diameter is greater than small furnace cover inwall 10mm, be fixed on below large bell 2 with 4 groups of screw rods.Upper thermoscreen Zirconium oxide fibre brick structure 4 adds and the first zirconium white thermal insulation layer between stainless steel circular support structure and top molybdenum heat screen 8.First zirconium white thermal insulation layer is made up of 4 pieces of fan-shaped Zirconium oxide fibre bricks, and top molybdenum heat screen 8 is made up of 7 molybdenum sheets.Side thermoscreen Zirconium oxide fibre brick structure 5 adopts 3 layers of zirconium white insulated tank to substitute the molybdenum side thermoscreen of traditional structure, and zirconium white insulated tank short transverse is made up of 6 annulus, and annulus is spliced by 4 Zirconium oxide fibre brick ring lobes.Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, and bottom molybdenum heat screen is made up of 6 layers of molybdenum sheet, separates fixing with molybdenum screw rod and molybdenum nut.Second zirconium white thermal insulation layer is the hollow circular block spliced by 4 pieces of Zirconium oxide fibre bricks, the zirconia ceramics ring 9 separated is provided with between the second zirconium white thermal insulation layer and molybdenum sheet, zirconia ceramics ring 9 is made up of 4 lobe Zirconium oxide fibre brick ring lobes, and the seam of each ring lobe is positioned at the middle part of the second zirconium white thermal insulation layer Zirconium oxide fibre brick.Second zirconium white thermal insulation layer and molybdenum sheet center are provided with the manhole of 1mm larger than crucible supporting rod diameter, the second zirconium white thermal insulation layer and molybdenum sheet external diameter 1mm less of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter.All Zirconium oxide fibre brick junction armies are provided with 1 ~ 4 group of locator protrusions and detent matched above, and radius is respectively R1=5mm, R2=5.2mm.Rule arrangement vision slit (specifically seeing patent 201120081033.5) is provided with in molybdenum sheet.
Claims (1)
1. a Heat insulation structure of sapphire single crystal furnace, it is characterized in that it comprises Zirconium oxide fibre brick insulation construction, upper thermoscreen Zirconium oxide fibre brick structure, side thermoscreen Zirconium oxide fibre brick structure and lower thermoscreen Zirconium oxide fibre brick structure under bell, under bell, Zirconium oxide fibre brick insulation construction comprises the Zirconium oxide fibre brick annulus thermal insulation layer be arranged under large bell; Upper thermoscreen Zirconium oxide fibre brick structure comprises circular support structure and top molybdenum heat screen, top molybdenum heat screen is made up of multilayer molybdenum sheet, circular support structure with have the first zirconium white thermal insulation layer identical with molybdenum sheet diameter between molybdenum sheet, the first zirconium white thermal insulation layer is the annular block that fan-shaped Zirconium oxide fibre brick is spliced into; Side thermoscreen Zirconium oxide fibre brick structure comprises the zirconium white insulated tank of multilayer different diameter, and every layer of zirconium white insulated tank is made up of the annulus of multilayer Zirconium oxide fibre brick ring lobe splicing in the height direction; Lower thermoscreen Zirconium oxide fibre brick structure comprises the second zirconium white thermal insulation layer and bottom molybdenum heat screen, bottom molybdenum heat screen is made up of multilayer molybdenum sheet, the zirconia ceramics ring separated is provided with between the second zirconium white thermal insulation layer and molybdenum sheet, second zirconium white thermal insulation layer is made up of Zirconium oxide fibre brick, second zirconium white thermal insulation layer and molybdenum sheet center are provided with manhole, and zirconia ceramics ring is connect by Zirconium oxide fibre brick group and forms; Zirconium oxide fibre brick annulus thermal insulation layer external diameter is less than large bell, and internal diameter is greater than small furnace cover inwall 5 ~ 30mm, and Zirconium oxide fibre brick annulus thermal insulation layer is spliced by 2 ~ 4 pieces of Zirconium oxide fibre bricks, is fixed on below large bell inner circle and cylindrical with 4 ~ 12 groups of screw rods; The first described zirconium white thermal insulation layer is splice annular block by 2 ~ 6 pieces of fan-shaped Zirconium oxide fibre bricks, circular support structure is circular stainless steel plate, circular stainless steel plate, the first zirconium white thermal insulation layer and multilayer molybdenum sheet to be connected with molybdenum nut by molybdenum bolt and to be fixed together, molybdenum sheet is circular, totally 5 ~ 7 layers; Described side thermoscreen Zirconium oxide fibre brick structure is made up of 2 ~ 3 layers of zirconium white insulated tank, and the annulus group that zirconium white insulated tank is spliced by 2 ~ 6 layers of Zirconium oxide fibre brick from top to bottom connects and forms, and every layer of annulus is spliced by 2 ~ 4 lobe Zirconium oxide fibre brick ring lobes; The second described zirconium white thermal insulation layer is for splice circular block by 2 ~ 4 pieces of fan-shaped Zirconium oxide fibre bricks, separate with 2 ~ 6 zirconia ceramics rings between the second zirconium white thermal insulation layer and molybdenum sheet, zirconia ceramics ring is made up of 2 ~ 4 Zirconium oxide fibre brick ring lobes, second zirconium white thermal insulation layer and molybdenum sheet center are provided with the manhole of 0.5 ~ 2mm larger than crucible supporting rod diameter, external diameter 0.5 ~ 2mm less of side thermoscreen Zirconium oxide fibre brick structure innermost layer diameter, bottom molybdenum heat screen is made up of 5 ~ 6 layers of circular molybdenum sheet.
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| CN103451724B (en) * | 2013-08-28 | 2016-03-02 | 江苏国晶光电科技有限公司 | The insulation construction of the kyropoulos Sapphire Crystal Growth that a kind of cold heart is adjustable |
| CN103422162A (en) * | 2013-09-03 | 2013-12-04 | 无锡鼎晶光电科技有限公司 | Single crystal furnace thermal field structure for square sapphire generation |
| CN103643291B (en) * | 2013-11-23 | 2016-08-17 | 中山兆龙光电科技有限公司 | A kind of Single crystal furnace heat shield and preparation method thereof |
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| CN104178813A (en) * | 2014-09-15 | 2014-12-03 | 同方国芯电子股份有限公司 | Kyropoulos-process sapphire single-crystal growth furnace thermal-insulation side screen |
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