CN203333745U - Continuous type vacuum evaporation coating device - Google Patents
Continuous type vacuum evaporation coating device Download PDFInfo
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- CN203333745U CN203333745U CN2013202887487U CN201320288748U CN203333745U CN 203333745 U CN203333745 U CN 203333745U CN 2013202887487 U CN2013202887487 U CN 2013202887487U CN 201320288748 U CN201320288748 U CN 201320288748U CN 203333745 U CN203333745 U CN 203333745U
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Abstract
The utility model discloses a continuous type vacuum evaporation coating device. The vacuum evaporation coating device comprises a coating chamber, a workpiece rest and a coating material rest, wherein one end of the coating chamber is communicated with a first transition chamber; the other end of the coating chamber is communicated with a second transition chamber; the first transition chamber, the coating chamber and the second transition chamber are respectively and internally provided with a first track and a second track; the two ends of the first transition chamber and the two ends of the second transition chamber are respectively provided with a gate valve; the first transition chamber, the coating chamber and the second transition chamber are respectively provided with an independent exhaustion system. In the running of the vacuum evaporation coating device, only are the workpiece rest and a coating material required to be manually loaded and unloaded, while the other operations are all automatically done by the device, the coating efficiency is enhanced greatly and the uniformity of a product coating layer is ensured. Meanwhile, a high vacuum state can be maintained inside the coating chamber, fewer impurity gases are generated, and coating material steam can be effectively prevented from being polluted by the impurity gases, so that a coating layer with good quality can be obtained.
Description
Technical field
The utility model relates to the coating technique field, especially relates to a kind of continuous vacuum evaporation coating device.
Background technology
Vacuum vapor plating (abbreviation evaporation) technology is the PVD(physical vapor deposition) in technology development the earliest, the coating technique that Application Areas is very wide.Its principle of work: the evaporation source (be used for heating film material make it the device of steam raising) that the film material is placed in to vacuum coating film equipment, make it evaporation by evaporation source heating film material and form steam under high vacuum condition, after the substrate surface that steam arrival is plated, because base material temperature is lower, steam just condenses in substrate surface and forms film.
At present widespread use be box evaporation coating machine, this box evaporation coating owner will adopt resistance heating evaporation source and two kinds, electron beam heating evaporation source (being comprised of electron beam gun and crucible) evaporation source.This coating equipment mainly comprises: vacuum chamber, air-bleed system, evaporation source, membrane thickness measuring system, ion source, well heater etc.
Existing box evaporation coating machine to the basic procedure of base material plated film processing is: a, loading (by base material loaded to be deposited to work rest); B, added (work rest that will install base material is installed in vacuum chamber); C, bleed and (close the vacuum chamber gate, by vacuum pump, vacuum chamber is bled until the vacuum pressure value, to set(ting)value, as is better than 10
-2pa); D, heating (base material heating, until base material temperature arrives set(ting)value, is required also can not heat according to plated film in addition); E, Ion Cleaning (the rotational workpieces frame, cleaned base material by ion source, requires also can not clean according to plated film in addition); F, plated film (open evaporation source and realize plated film, until thickness reaches set(ting)value); G, shutdown (stopping heating, the work rest that stops the rotation, vacuum chamber amplification gas); H, undercarriage (open door for vacuum chamber, the base material work rest after plated film is taken out); Then return to a step and carry out next Production Flow Chart.
Above-mentioned this box evaporation coating machine carries out to base material that in coating process, there are the following problems:
1, due to its mode cycle work by start-shut down-start; in this working cycle, the related coating process condition of different cycles is as in full accord in vacuum pressure, Heating temperature, the speed of evacuation, chamber body are exitted, the chamber body pollution is difficult to each processing condition; and only has a rare change of processing condition; all will cause the variation of film quality, the film quality consistence that therefore this coating equipment is produced is difficult to be guaranteed.
2, generally adopt the air-bleed system of oil diffusion pump+lobe pump+oil seal type sliding vane rotary pump due to above-mentioned this coating equipment, oil vapour is known from experience certain pollution is arranged vacuum chamber, and then meeting pollution film layer quality; In addition in actual procedure owing to wanting to obtain high vacuum tightness environment, the time of bleeding can be very long, comprehensive evaporation requires and the consideration of production efficiency, general control vacuum tightness is 10
-2about Pa, now also residual in vacuum chamber have a more H
2o, CO
2, O
2, N
2, the gases such as organic vapor, in coating process, these gases can be adsorbed or combination together with evaporation particle, pollute in film, and then affect film layer quality.
The utility model content
Main purpose of the present utility model is to provide a kind of continuous vacuum evaporation coating device, improves plated film efficiency, guarantees the consistence of product rete, prevents that rete from being polluted by foreign gas, obtains the more excellent rete of quality.
The utility model proposes a kind of continuous vacuum evaporation coating device, comprising: coating chamber, work rest and coating materials frame;
Described coating chamber one end is communicated with the First Transition chamber, and the other end is communicated with the second transition chamber;
Be respectively equipped with the first track that transmits described work rest and the second track that transmits described coating materials frame in described First Transition chamber, coating chamber, the second transition chamber;
But two ends, described First Transition chamber and the second transition chamber two ends are respectively equipped with the push-pull valve for separation gas of switch;
Described First Transition chamber, coating chamber, the second transition chamber dispose respectively independently air-bleed system.
Preferably, the first track of described First Transition chamber and the first track of coating chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped; The first track of coating chamber and the first track of the second transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped;
The second track of described First Transition chamber and the second track of coating chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped; The second track of coating chamber and the second track of the second transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped.
Preferably, described First Transition chamber comprises: upper First Transition chamber, the lower First Transition chamber be communicated with upper First Transition chamber; Upper First Transition is indoor is provided with described the first track; Described lower First Transition is indoor is provided with described the second track;
Described the second transition chamber comprises: upper the second transition chamber, lower the second transition chamber be communicated with upper the second transition chamber; Be provided with described the first track in upper the second transition chamber; Be provided with described the second track in described lower the second transition chamber.
Preferably, described push-pull valve comprises: upper push-pull valve and lower plugboard valve;
Described two ends, upper First Transition chamber and upper the second transition chamber two ends are provided with push-pull valve;
Described two ends, lower First Transition chamber and lower the second transition chamber two ends are provided with the lower plugboard valve.
Preferably, described the first track comprises: the first pulley, and a side of this first pulley is provided with the first gear;
Described work rest comprises: the work rest body, and the top of this work rest body is provided with the first slide block with described the first pulley adaptation, and this first slide block one side is provided with the first tooth bar with described the first gear engagement.
Preferably, described the second track comprises: the second pulley, and a side of this second pulley is provided with the second gear; Described coating materials frame comprises: coating materials frame body, and the bottom of this coating materials frame body is provided with the second slide block with described the second pulley adaptation, and a side of described the second slide block is provided with the second tooth bar with described the second gear engagement.
Preferably, the continuous vacuum evaporation coating device also comprises the first underframe, pan carriage, and for transporting the second underframe of pan carriage; Described First Transition chamber, coating chamber and the second transition chamber are placed on described the first underframe; Described the second underframe two ends connect respectively at the two ends of described the first underframe, and the outer surface of cupular part of the two is on same level;
Be respectively arranged with the first track and the second track on described pan carriage; When described pan carriage is placed on the second underframe while with the first underframe, being provided with the end that an end of First Transition chamber is connected, the first track of described pan carriage and the first track of First Transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped.
Preferably, the continuous vacuum evaporation coating device also comprises:
For evaporating the vaporizer of coating materials;
For the well heater to upper First Transition chamber, coating chamber;
For the ion bombardment device that base material is cleaned.
Preferably, the continuous vacuum evaporation coating device also comprises:
For monitoring the film thickness monitoring instrument of base material coating film thickness;
For monitoring the compound vacuum gauge of vacuum tightness of First Transition chamber, coating chamber, the second transition chamber.
A kind of continuous vacuum evaporation coating device provided by the utility model, described coating chamber one end is communicated with the First Transition chamber, and the other end is communicated with the second transition chamber; Be respectively equipped with first and second track of transmission work rest, coating materials frame in First Transition chamber, coating chamber, the second transition chamber; Two ends, First Transition chamber and the second transition chamber two ends are equipped with push-pull valve; First Transition chamber, coating chamber, the second transition chamber dispose respectively the independently mode of air-bleed system, described device is in service, and except the handling employing of work rest and coating materials is artificial, other operations are completed automatically by device, greatly improve plated film efficiency, guaranteed the consistence of product rete.Can keep high vacuum state in coating chamber, foreign gas is few, can effectively prevent that the coating materials steam from being polluted by foreign gas, thereby can obtain the more excellent rete of quality simultaneously.
The accompanying drawing explanation
Fig. 1 is the perspective view of continuous vacuum evaporation coating device one embodiment of the present utility model;
Fig. 2 is the main view principle schematic diagram of continuous vacuum evaporation coating device of the present utility model;
Fig. 3 is the principle schematic of overlooking of continuous vacuum evaporation coating device of the present utility model;
Fig. 4 is the first track of coating chamber of the present utility model and the fit structure schematic diagram of work rest;
Fig. 5 is the structural representation of work rest of the present utility model;
Fig. 6 is the first track of coating chamber of the present utility model and another fit structure schematic diagram of work rest;
Fig. 7 is the structural representation of coating materials frame of the present utility model;
Fig. 8 is the fit structure schematic diagram of coating materials frame of the present utility model and the second track.
The realization of the utility model purpose, functional characteristics and advantage, in connection with embodiment, are described further with reference to accompanying drawing.
Embodiment
Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
Referring to Fig. 1, a kind of continuous vacuum evaporation coating device 100 1 embodiment of the present utility model are proposed, comprise: coating chamber 110, work rest 120 and coating materials frame 130, described coating chamber 110 1 ends are communicated with First Transition chamber 140, and the other end is communicated with the second transition chamber 150.Be respectively equipped with the first track 160 that transmits described work rest 120 and the second track 170 that transmits described coating materials frame 130 in described First Transition chamber 140, coating chamber 110, the second transition chamber 150.But 140 two ends, described First Transition chamber and the second transition chamber 150 two ends are provided with the push-pull valve for separation gas (Fig. 1 is not shown) of switch.Described First Transition chamber 140, coating chamber 110, the second transition chamber 150 dispose respectively independently air-bleed system.
In the course of the work, described work rest 120 and coating materials frame 130 transporting directions are First Transition chamber 140 → coating chamber 110 → the second transition chambers 150 to the device 100 that the present embodiment provides.Described coating chamber 110 is for the coating materials on evaporating film bin 130, realizes the base material in work rest 120 is carried out the working space of plated film.
Described push-pull valve, for cutting off or being communicated with First Transition chamber 140, coating chamber 110 and the second transition chamber 150, has made the conversion of First Transition chamber 140 and the second transition chamber 150 atmospheric environments and vacuum environment.Guarantee the vacuum environment of the vacuum ranges in setting all the time of coating chamber 110 described in described device 100 working process.
Described First Transition chamber 140 is for making work rest 120 and coating materials frame 130 be changed to vacuum environment by atmospheric environment.The second transition chamber 150 is for making work rest 120 and coating materials frame 130 be changed to atmospheric environment by vacuum environment.
In the present embodiment, the air-bleed system of the configuration of described First Transition chamber 140 and the second transition chamber 150 is identical, dry pump+lobe pump unit (for slightly taking out), turbomolecular pump+direct connection sliding vane rotary pump unit (taking out for essence) have all been adopted, pump group intermittent type is bled, and completes the conversion between First Transition chamber 140 and the second transition chamber 150 atmospheric environments and vacuum environment.And the air-bleed system of described coating chamber 110 configurations has adopted turbomolecular pump+direct connection sliding vane rotary pump unit (taking out for essence), the pump group continues to bleed, and makes coating chamber 110 keep high vacuum environment always, the better quality of rete during with the assurance plated film.Due to described First Transition chamber 140, the second transition chamber 150, and the off-gas pump that coating chamber 110 adopts is without oily oil-sealed rotary pump, can be to First Transition chamber 140, the second transition chamber 150, and coating chamber 110 causes oil pollution, base material is plated film under clean vacuum environment, can obtain the rete that quality is higher.
Further, referring to Fig. 2, Fig. 3, in above-mentioned continuous vacuum evaporation coating device 100 embodiment, described push-pull valve comprises: the push-pull valve VS40 of the push-pull valve VS30 between the push-pull valve VS20 between the push-pull valve VS10 of the end that First Transition chamber 140 is not connected with coating chamber 110, First Transition chamber 140 and coating chamber 110, coating chamber 110 and the second transition chamber 150, the end that the second transition chamber 150 is not connected with coating chamber 110.The first track 160 of wherein said First Transition chamber 140 is with the first track 160 of coating chamber 110 by the space isolation that accommodates push-pull valve VS20, and the two prolongation is overlapped.The first track 160 of coating chamber 110 and the first track 160 of the second transition chamber 150 are by the space isolation that accommodates push-pull valve VS30, and the two prolongation is overlapped.The second track 170 of described First Transition chamber 140 is with the second track 170 of coating chamber 110 by the space isolation that accommodates push-pull valve VS20, and the two prolongation is overlapped.The second track 170 of coating chamber 110 and the second track 170 of the second transition chamber 150 are by the space isolation that accommodates push-pull valve VS30, and the two prolongation is overlapped.Guaranteed that first track 160, the second transition chamber 150 first tracks 160 of the first track 160, the coating chamber 110 of described First Transition chamber 140 are on same straight line; Work rest 120 runs on the first track 160 of coating chamber 110 on the first track 160 by First Transition chamber 140 reposefully, on the first track 160 of second transition chamber 150 that reruns.In like manner guaranteed that second track 170 of the second track 170, the second transition chamber 150 of the second track 170, the coating chamber 110 of described First Transition chamber 140 is on same straight line, coating materials frame 130 runs on the second track 170 of coating chamber 110 on the second track 170 by First Transition chamber 140 reposefully, on the second track 170 of second transition chamber 150 that reruns.
Further, referring to Fig. 1 and Fig. 2, above-mentioned continuous vacuum evaporation coating device 100 embodiment, described First Transition chamber 140 comprises: upper First Transition chamber 141, the lower First Transition chamber 142 be communicated with upper First Transition chamber 141; Be provided with described the first track 160 in upper First Transition chamber 141; Be provided with described the second track 170 in described lower First Transition chamber 142.Described the second transition chamber 150 comprises: upper the second transition chamber 151, lower the second transition chamber 152 be communicated with upper the second transition chamber 151; Be provided with described the first track 160 in upper the second transition chamber 151; Be provided with described the second track 170 in described lower the second transition chamber 152.
Further, above-mentioned continuous vacuum evaporation coating device 100 embodiment, described push-pull valve comprises push-pull valve and lower plugboard valve, 141 two ends, wherein said upper First Transition chamber and upper the second transition chamber 151 two ends are provided with push-pull valve; 142 two ends, described lower First Transition chamber and lower the second transition chamber 152 two ends are provided with the lower plugboard valve.Referring to Fig. 2 and Fig. 3, the push-pull valve VS40 of the push-pull valve VS30 between the push-pull valve VS20 between the push-pull valve VS10, First Transition chamber 140 that described push-pull valve comprises the end that First Transition chamber 140 is not connected with coating chamber 110 and coating chamber 110, coating chamber 110 and the second transition chamber 150, the end that the second transition chamber 150 is not connected with coating chamber 110.Described VS10 comprises push-pull valve VS11 and lower plugboard valve VS12.Described VS20 comprises push-pull valve VS21 and lower plugboard valve VS22.Described VS30 comprises push-pull valve VS31 and lower plugboard valve VS32.Described VS40 comprises push-pull valve VS41 and lower plugboard valve VS42.110 of 110 of described upper First Transition chamber 141 and coating chambers, upper the second transition chamber 151 and coating chambers, and the end that is not communicated with described coating chamber 110 of upper First Transition chamber 141, the end that upper the second transition chamber 151 is not communicated with described coating chamber 110 are respectively arranged with upper push-pull valve VS11, VS21, VS31, VS41.110 of described lower First Transition chamber 142 and coating chambers, lower the second transition chamber 152 and 110 of coating chambers, and the end that is not communicated with described coating chamber 110 of lower First Transition chamber 142, an end that descends the second transition chamber 142 not to be communicated with described coating chamber 110 are provided with lower plugboard valve VS12, VS22, VS32, VS42.
Further, referring to Fig. 4, Fig. 5, Fig. 6, in above-mentioned continuous vacuum evaporation coating device 100 embodiment, described the first track 160 comprises: the first pulley 161, a side of this first pulley 161 is provided with the first gear 162.Described work rest 120 comprises: work rest 120 bodies 121, and the top of these work rest 120 bodies 121 is provided with the first slide block 122 with described the first pulley 161 adaptations, and these the first slide block 122 1 sides are provided with the first tooth bar 123 with described the first gear 162 engagements.After work rest 120 is mounted on the first track 160, described the first pulley 161 and the first slide block 122 slide adaptive, described the first gear 162 and the first tooth bar 123 engagements, described the first gear 162 rotates under the driving of motor, the first tooth bar 123 drives described work rest 120 and moves along the length direction of the first tooth bar 123 along with the first gear 162 rotates, thereby reaches the purpose of the described work rest 120 of transportation.
In addition, referring to Fig. 4 and Fig. 6, in the present embodiment, the first slide block 122 top center positions of described work rest 120 are provided with the first revolving gear 124, described the first revolving gear 124 is fixed with described work rest 120 bodies, be that described work rest 120 synchronously rotates with the first revolving gear 124, be provided with the second revolving gear 163 with described the first revolving gear 124 engagements in the first track 160 of described coating chamber 110.While starting plated film is carried out in the basis on work rest 120 after described work rest 120 is transported to coating chamber 110 desired locations, described the second revolving gear 163 rotates under the startup of motor, the first revolving gear 124 is along with described the second revolving gear 163 rotates and rotates, thereby make work rest 120 along with the second revolving gear 163 rotates and rotates, make the plated film even film layer on base material.
Further, referring to Fig. 7 and Fig. 8, in above-mentioned continuous vacuum evaporation coating device 100 embodiment, described the second track 170 comprises: the second pulley 171, and a side of this second pulley 171 is provided with the second gear 172; Described coating materials frame 130 comprises: coating materials frame 130 bodies 131, the bottom of these coating materials frame 130 bodies 131 is provided with the second slide block 132 with described the second pulley 171 adaptations, and a side of described the second slide block 132 is provided with the second tooth bar 133 with described the second gear 172 engagements.After coating materials frame 130 is mounted on the second track 170, described the second pulley 171 and the second slide block 132 slide adaptive, described the second gear 172 and the second tooth bar 133 engagements, described the second gear 172 rotates under the driving of motor, due to the second tooth bar 133 and described the second gear 172 engagements, therefore described coating materials frame 130 moves along the length direction of the second tooth bar 133, thereby reaches the purpose of the described coating materials frame 130 of transportation.
In the present embodiment, what described the first gear 162 and the second gear 172 adopted is that reducing motor drives, and can change the travelling speed of work rest 120 and coating materials frame 130 by regulating motor speed.The connection of the connection of the first adjacent gear 162, the second adjacent gear 172 adopts respectively Timing Belt to connect, and therefore can guarantee the consistence that all the first gears rotate, and the consistence of all the second gear rotations.Make work rest 120 and 130 transmissions of coating materials frame smooth and easy, steady.
In addition, in the present embodiment, the clutch of described the first gear 162 and the first tooth bar 123 and the second gear 172 and the second tooth bar 133 all adopts electromagnetic clutch to control, thereby makes the first gear 162 and the first tooth bar 123, the second gear 172 and the second tooth bar 133 mesh smooth and easy.This accuracy of mesh is high, makes the operation of work rest 120 and coating materials frame 130 very steady, can not produce the situation that base material or coating materials drop.
Further, referring to Fig. 1, in above-mentioned continuous vacuum evaporation coating device 100 embodiment, said apparatus 100 also comprises the first underframe 101, pan carriage 102, for transporting the second underframe 103 of pan carriage 102.First Transition chamber 140, coating chamber 110 and the second transition chamber 150 are placed on described the first underframe 101.Described the second underframe 103 two ends are connected with the two ends of described the first underframe 101 respectively, and the outer surface of cupular part of the two is on same level.Be respectively arranged with the first track 160 and the second track 170 on described pan carriage 102.When described pan carriage 102 is placed on the second underframe 103 while with the first underframe 101, being provided with the end that an end of First Transition chamber 140 is connected, the first track 160 of described pan carriage 102 is with the first track 160 of First Transition chamber 140 by the space isolation that accommodates push-pull valve VS10, and the two prolongation is overlapped.
The device 100 that this enforcement provides needs two described pan carriage 102, one of them is not connected with coating materials frame 130 mounted work rest 120 end of coating chamber 110 in First Transition chamber 140, then pan carriage 102, meanwhile is transported to coating materials frame 130 on the second track 170 of First Transition chamber 140 by the second track 170 on the first track 160 of work rest 120 transportation First Transition chambers 140 by the first track 160.After base material plated film on described work rest 120 completes, described work rest 120 is entered on the first track 160 on another empty pan carriage 102 by the first track 160 transportations of the second transition chamber 150; Meanwhile described coating materials frame 130 is entered on the second track 170 on another empty pan carriage 102 by the second track 170 transportations of the second transition chamber 150.
Further, in above-mentioned continuous vacuum evaporation coating device 100 embodiment, described device 100 also comprises for making the vaporizer (scheming not shown) of coating materials evaporation, described vaporizer is resistance-type evaporation source or electron beam evaporation source, if adopt the resistance-type evaporation source,, after described coating materials frame 130 enters coating chamber 110, adopt the evaporation boat connection circuit of the electrode communication apparatus of air cylinder driven to the resistance-type evaporation source.Described electron beam evaporation source comprises two kinds of structures: electron beam gun and crucible integral type, electron beam gun and crucible are split type.When the little coating materials of plated film amount adopts the electron beam evaporation source of electron beam gun and crucible integral type; The coating materials that the plated film amount is large adopts electron beam gun and the split type electron beam evaporation source of crucible.
In the present embodiment, described device 100, for First Transition chamber 140, coating chamber 110, the second transition chamber 150 dispose respectively compound vacuum gauge (scheming not shown), is respectively used to monitor in real time the vacuum tightness of First Transition chamber 140, coating chamber 110, the second transition chamber 150.
In the present embodiment, described device 100 also disposes respectively well heater (scheming not shown) for upper First Transition chamber 141, coating chamber 110.The well heater of the present embodiment can adopt stainless steel tubulose well heater, and this well heater can be realized the big area homogeneous heating, and working stability, long service life.Wherein, described well heater adopts the PID temperature control module to control, and control accuracy can reach ± and 2.5 ℃.
In the present embodiment, described device 100 also comprises the film thickness monitoring instrument (scheming not shown) for monitoring the base material coating film thickness, and described monitor can adopt the quartz crystal probe.Wherein, according to the difference of base material plated film thicknesses of layers, the quartz crystal probe can be selected single probe, two probe or many probes (two more than probe, as six probes).
In the present embodiment, described device 100 also comprises the ion bombardment device (scheming not shown) for base material is cleaned, and described ion bombardment device can be ion source.
Below 100 pairs of base material coating process of device of providing by above-described embodiment be that example is further detailed the utility model.Referring to Fig. 2 and Fig. 3,100 pairs of base material coating process of described device are specific as follows:
One, start
Open the direct connection sliding vane rotary pump, open molecular pump foreline valve (FV1-FV7); The molecular pump forvacuum is opened molecular pump after reaching the molecular pump trigger pressure.
Start First Transition chamber 140, the second transition chamber 150, coating chamber 110 internal heaters, make it to reach respectively design temperature (setting according to coating process).
Dry pumping set starts.
Two, advance frame
Open push-pull valve VS11, lower plugboard valve VS12, close and close push-pull valve VS21, lower plugboard valve VS22, make First Transition chamber 141, lower First Transition chamber 142 in the atmospheric environment state.
By unit one frame 120 and coating materials frame 130 respectively left end pan carriage 102 linear running enter in upper First Transition chamber 141, lower First Transition chamber 142 and stop, closing and close push-pull valve VS11, lower plugboard valve VS12.
After pan carriage has been carried unit one frame 120 and coating materials frame 130, receive second work rest 120 and coating materials frame 130 from 103 of spill circulations, and wait on upper First Transition chamber 141, lower First Transition chamber 142 outer holding fixs.
Three, vacuum transition
Control heater is to base material heating on the unit one frame 120 in upper First Transition chamber 141.
Open the dry pumping set of First Transition chamber 140 correspondences and slightly take out valve RV1, dry pumping set bleeds to upper First Transition chamber 141, lower First Transition chamber 142, makes its vacuum pressure reach set(ting)value and (is generally 10
-1the handkerchief order of magnitude).
Close dry pumping set and slightly take out valve RV1, open the molecular pump essence and take out valve HV1, HV2; Molecular pump is bled to upper First Transition chamber 141, lower First Transition chamber 142, makes its vacuum pressure reach set(ting)value and (is generally 10
-3the Pa order of magnitude).
Open push-pull valve VS21 and lower plugboard valve VS22, unit one frame 120 and coating materials frame 130 respectively from First Transition chamber 141, lower First Transition chamber 142 linear runnings enter in coating chamber 110 and stop, closing and close push-pull valve VS21, lower plugboard valve VS22.
Pass is closed the molecular pump essence of First Transition chamber 141, lower First Transition chamber 142 correspondences and is taken out valve HV1, HV2, opens the purging valve of First Transition chamber 141, lower First Transition chamber 142, is exitted to atmospheric condition in upper First Transition chamber 141, lower First Transition chamber 142.
Open push-pull valve VS11, lower plugboard valve VS12, second work rest 120 and coating materials frame 130 respectively pan carriage 102 linear running enter in upper First Transition chamber 141, lower First Transition chamber 142 and stop, closing and close push-pull valve VS11, lower plugboard valve VS12.After this repeat unit one frame 120 and 130 actions of coating materials frame.
Four, plated film
The second revolving gear 163 engagements in the unit one frame 120 of arrival coating chamber 110 on the first track 160 of the first revolving gear 124 and coating chamber 110, open electric motor starting the second revolving gear 163 and rotate, work rest 120 starts to do rotation movement in coating chamber 110.
Arrive first coating materials frame 130 and location, the interior evaporation source of coating chamber 110 position of coating chamber 110, wherein the electrode communication apparatus is to the evaporation boat connection circuit.
After base material cleans and finishes, according to the coating process needs, by resistance-type evaporation source or the evaporation of electron beam evaporation source coating materials, realize the base material plated film.
Five, vacuum transition
Close and slightly take out valve RV2, open the molecular pump essence and take out valve HV3, HV4, make the second transition chamber 151, lower the second transition chamber 152 in vacuumizing state; Molecular pump is bled to upper the second transition chamber 151, lower the second transition chamber 152, makes its vacuum pressure reach set(ting)value and (is generally 10
-3the Pa order of magnitude).
After plated film finishes, unit one frame 120 stops spinning motion.
Open push-pull valve VS31, lower plugboard valve VS32, unit one frame 120 and coating materials frame 130 enter in the second transition chamber 151, lower the second transition chamber 152 and stop from the coating chamber linear running, close and close push-pull valve VS31, lower plugboard valve VS32.
Open push-pull valve VS21, lower plugboard valve VS22, second work rest 120 and coating materials frame 130 from First Transition chamber 141, lower First Transition chamber 142 linear runnings enter in coating chamber and stop, closing and close push-pull valve VS21, lower plugboard valve VS22.After this repeat unit one frame 120 and 130 actions of coating materials frame.
Six, go out frame
Treat that unit one frame 120 and coating materials frame 130 enter respectively the second transition chamber 151, lower the second transition chamber 152, close and close push-pull valve VS31, lower plugboard valve VS32, then closure molecule pump essence is taken out valve HV3, HV4.
Open the purging valve of the second transition chamber 151, lower the second transition chamber 152, upper the second transition chamber 151, lower the second transition chamber 152 are exitted to atmospheric condition.
Open push-pull valve VS41, lower plugboard valve VS42, unit one frame 120 and coating materials frame 130 respectively from the second transition chamber 151, lower the second transition chamber 152 linear runnings to pan carriage, close and close push-pull valve VS41, lower plugboard valve VS42.
Open the dry pumping set of the second transition chamber 151, lower the second transition chamber 1520 correspondences and slightly take out valve RV2, dry pumping set bleeds to upper the second transition chamber 151, lower the second transition chamber 152, makes vacuum pressure reach set(ting)value and (is generally 10
-1the Pa order of magnitude).
Close dry pumping set and slightly take out valve RV2, open the molecular pump essence and take out valve HV3, HV4; Molecular pump is bled to upper the second transition chamber 151, lower the second transition chamber 152, makes vacuum pressure reach set(ting)value and (is generally 10
-3the Pa order of magnitude).
Upper the second transition chamber 151, lower the second transition chamber 152, in high vacuum state, wait for that second work rest 120 and coating materials frame 130 plated films complete.
Seven, frame is walked in circulation
Unit one frame 120 and coating materials frame 130, by the transmission mechanism of pan carriage underframe 103, move to left end pan carriage 102 from right-hand member pan carriage 102.
On left end pan carriage 102, the workman takes off the work rest 120 that base material has plated, changes a work rest 120 that installs base material to be plated.
On left end pan carriage 102, the workman is to the evaporation boat on coating materials frame 130 or crucible adds or the replacing coating materials.
On left end pan carriage 102 ready work rest 120 and coating materials frame 130 in upper First Transition chamber 141, the 142 outer waits of lower First Transition chamber enter.
For guaranteeing that described device 100 can continuous operation, according to the difference of work tempo, the number of work rest and coating materials frame can be respectively two or more; The quantity of minimum work rest or the configuration of coating materials frame=single work rest or the circular flow of coating materials frame time ÷ work tempo (being that adjacent two work rests or coating materials frame are by the timed interval of production line same position) once.
Each operation steps in said apparatus 100, by the PLC time variable control, adopts industrial computer to control interface, and the user can arrange processing parameter and plated film formula separately.
As from the foregoing: continuous vacuum evaporation coating device 100 provided by the utility model is in operation, except the handling employing of work rest and coating materials is artificial, other operations are completed automatically by device, have greatly improved plated film efficiency, have guaranteed the consistence of product rete.Can keep high vacuum state in coating chamber, foreign gas is few, can effectively prevent that the coating materials steam from being polluted by foreign gas, thereby can obtain the more excellent rete of quality simultaneously.
Should be understood that; these are only preferred embodiment of the present utility model; can not therefore limit the scope of the claims of the present utility model; every equivalent structure or conversion of equivalent flow process that utilizes the utility model specification sheets and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in scope of patent protection of the present utility model.
Claims (9)
1. a continuous vacuum evaporation coating device comprises: coating chamber, work rest and coating materials frame, it is characterized in that,
Described coating chamber one end is communicated with the First Transition chamber, and the other end is communicated with the second transition chamber;
Be respectively equipped with the first track that transmits described work rest and the second track that transmits described coating materials frame in described First Transition chamber, coating chamber, the second transition chamber;
But two ends, described First Transition chamber and the second transition chamber two ends are respectively equipped with the push-pull valve for separation gas of switch;
Described First Transition chamber, coating chamber, the second transition chamber dispose respectively independently air-bleed system.
2. continuous vacuum evaporation coating device according to claim 1, is characterized in that,
The first track of described First Transition chamber and the first track of coating chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped; The first track of coating chamber and the first track of the second transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped;
The second track of described First Transition chamber and the second track of coating chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped; The second track of coating chamber and the second track of the second transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped.
3. continuous vacuum evaporation coating device according to claim 2, is characterized in that, described First Transition chamber comprises: upper First Transition chamber, the lower First Transition chamber be communicated with upper First Transition chamber; Upper First Transition is indoor is provided with described the first track; Described lower First Transition is indoor is provided with described the second track;
Described the second transition chamber comprises: upper the second transition chamber, lower the second transition chamber be communicated with upper the second transition chamber; Be provided with described the first track in upper the second transition chamber; Be provided with described the second track in described lower the second transition chamber.
4. continuous vacuum evaporation coating device according to claim 3, is characterized in that, described push-pull valve comprises: upper push-pull valve and lower plugboard valve;
Described two ends, upper First Transition chamber and upper the second transition chamber two ends are provided with push-pull valve;
Described two ends, lower First Transition chamber and lower the second transition chamber two ends are provided with the lower plugboard valve.
5. according to the described continuous vacuum evaporation coating device of claim 1 to 4 any one, it is characterized in that, described the first track comprises: the first pulley, and a side of this first pulley is provided with the first gear;
Described work rest comprises: the work rest body, and the top of this work rest body is provided with the first slide block with described the first pulley adaptation, and this first slide block one side is provided with the first tooth bar with described the first gear engagement.
6. according to the described continuous vacuum evaporation coating device of claim 1 to 4 any one, it is characterized in that, described the second track comprises: the second pulley, and a side of this second pulley is provided with the second gear; Described coating materials frame comprises: coating materials frame body, and the bottom of this coating materials frame body is provided with the second slide block with described the second pulley adaptation, and a side of described the second slide block is provided with the second tooth bar with described the second gear engagement.
7. according to the described continuous vacuum evaporation coating device of claim 1 to 4 any one, it is characterized in that, also comprise the first underframe, pan carriage, and for transporting the second underframe of pan carriage; Described First Transition chamber, coating chamber and the second transition chamber are placed on described the first underframe; Described the second underframe two ends are connected with the two ends of described the first underframe respectively, and the outer surface of cupular part of the two is on same level;
Be respectively arranged with the first track and the second track on described pan carriage; When described pan carriage is placed on the second underframe while with the first underframe, being provided with the end that an end of First Transition chamber is connected, the first track of described pan carriage and the first track of First Transition chamber are by the space isolation that accommodates push-pull valve, and the two prolongation is overlapped.
8. continuous vacuum evaporation coating device according to claim 7, is characterized in that, also comprises:
For evaporating the vaporizer of coating materials;
For the well heater to upper First Transition chamber, coating chamber;
For the ion bombardment device that base material is cleaned.
9. continuous vacuum evaporation coating device according to claim 7, is characterized in that, also comprises:
For monitoring the film thickness monitoring instrument of base material coating film thickness;
For monitoring the compound vacuum gauge of vacuum tightness of First Transition chamber, coating chamber, the second transition chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202887487U CN203333745U (en) | 2013-05-23 | 2013-05-23 | Continuous type vacuum evaporation coating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202887487U CN203333745U (en) | 2013-05-23 | 2013-05-23 | Continuous type vacuum evaporation coating device |
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|---|---|
| CN203333745U true CN203333745U (en) | 2013-12-11 |
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| CN2013202887487U Expired - Fee Related CN203333745U (en) | 2013-05-23 | 2013-05-23 | Continuous type vacuum evaporation coating device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290364A (en) * | 2013-05-23 | 2013-09-11 | 深圳市生波尔机电设备有限公司 | Continuous vacuum evaporation film coating device |
| CN110653921A (en) * | 2019-10-26 | 2020-01-07 | 林有艺 | Environment-friendly water drill processing technology |
| CN115558888A (en) * | 2022-11-09 | 2023-01-03 | 泰州远鹏吊索具有限公司 | Petrochemical is with C shape hoist surface rust-resistant treatment device |
-
2013
- 2013-05-23 CN CN2013202887487U patent/CN203333745U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290364A (en) * | 2013-05-23 | 2013-09-11 | 深圳市生波尔机电设备有限公司 | Continuous vacuum evaporation film coating device |
| CN103290364B (en) * | 2013-05-23 | 2015-11-18 | 深圳市生波尔机电设备有限公司 | Continuous vacuum evaporation coating device |
| CN110653921A (en) * | 2019-10-26 | 2020-01-07 | 林有艺 | Environment-friendly water drill processing technology |
| CN110653921B (en) * | 2019-10-26 | 2020-07-28 | 义乌市霞飞包装材料有限公司 | Environment-friendly water drill processing technology |
| CN115558888A (en) * | 2022-11-09 | 2023-01-03 | 泰州远鹏吊索具有限公司 | Petrochemical is with C shape hoist surface rust-resistant treatment device |
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Granted publication date: 20131211 Termination date: 20160523 |