CN203200374U - Heat field structure of polycrystalline silicon ingot furnace - Google Patents
Heat field structure of polycrystalline silicon ingot furnace Download PDFInfo
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- CN203200374U CN203200374U CN 201320089783 CN201320089783U CN203200374U CN 203200374 U CN203200374 U CN 203200374U CN 201320089783 CN201320089783 CN 201320089783 CN 201320089783 U CN201320089783 U CN 201320089783U CN 203200374 U CN203200374 U CN 203200374U
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Abstract
The utility model provides a heat field structure of a polycrystalline silicon ingot furnace, which is applicable to the field of the polycrystalline silicon ingot furnace. The heat field structure comprises a furnace body, a heat field box arranged inside the furnace body, a crucible arranged inside the heat field box, a heater arranged between the inner wall of the heat field box and the outer wall of the crucible, and a heat exchange platform arranged at the bottom of the crucible, wherein the heat field box comprises a heat insulation cage and a heat preservation shell; the heat preservation shell comprises heat preservation side plates, a heat preservation top plate and a heat preservation bottom plate; the heat preservation side plates cling to and are fixed on the inner side walls of the heat insulation cage; and the bottom of the furnace body is also provided with a lifting rod for driving the heat preservation bottom plate to lift, so that the heat preservation bottom plate can cling to and seal or is separated from a bottom end opening of the heat preservation side boards. During crystallization production, the heat preservation bottom plate can be driven to descend by means of controlling the lifting rod, a gap for radiating heat can be formed between the heat insulation cage and the heat preservation bottom plate, so that melt polycrystalline silicon forms a longitudinal temperature gradient, and by longitudinal gradual crystallization, a polycrystalline silicon ingot is finally formed.
Description
Technical field
The utility model belongs to the polycrystalline silicon ingot or purifying furnace technical field, relates in particular to a kind of jumbo thermal field structure of polycrystalline silicon casting furnace.
Background technology
Along with the continuous minimizing of traditional energy, the development and use of new forms of energy have become a kind of focus that solves energy problem.Sun power is as a kind of novel energy, because it has the characteristics such as inexhaustible usefulness it is without cease, environmental protection, and enjoys people's favor, and obtained Devoting Major Efforts To Developing and use.The opto-electronic conversion utilization is exactly a typical sun power utilization, and we know, during opto-electronic conversion is used, needs a large amount of silion cells that use, and has caused thus the heavy demand of photovoltaic rank polysilicon.
Polycrystalline silicon ingot or purifying furnace is that a kind of silicon raw material heavily melts equipment, be used for low cost production solar-grade polysilicon ingot casting, its principle of work is with the technique of silicon raw material according to setting, after the stages such as heating and melting, crystallographic orientation, annealing, cooling, makes it become the in a certain direction polycrystal silicon ingot of growth.
In the prior art, in the production process of polycrystal silicon ingot, it is motionless that well heater and crucible keep, and by upwards promoting the method for heat-insulation cage, makes between heat-insulation cage and the insulation base plate to have certain gap, like this, the heat of heat-insulation cage inside flows out from the gap, the crucible bottom cooling, thus make the polysilicon after the fusing form longitudinal temperature gradient, vertically gradually crystallization finally forms polycrystalline silicon ingot casting.In the environment of repeatedly heating, the phenomenon that heat-insulation cage easily deforms, thus easily make the phenomenon that bumps and cause heat-insulation cage to damage with inboard wall of furnace body in the heat-insulation cage lifting process, like this, caused the high maintenance cost expenditure of heat-insulation cage; Simultaneously, we know, in the maintenance process of heat-insulation cage, can waste the production time of polycrystal silicon ingot, like this, will greatly reduce the production capacity of polycrystal silicon ingot.
The utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, and a kind of thermal field structure of polycrystalline silicon casting furnace is provided, the problem that it is intended to solve in the prior art in the heat-insulation cage lifting process easily and body of heater bumps.
The utility model is achieved in that a kind of thermal field structure of polycrystalline silicon casting furnace, comprise body of heater, be located at the thermal field case in the described body of heater, be located at the crucible in the described thermal field case, be located at well heater and the heat exchange platform of being located at described crucible bottom between described thermal field chamber interior wall and the described crucible outer wall, described thermal field case comprises heat-insulation cage and insulating shell, described insulating shell comprises around the insulation side board that fits on the described heat-insulation cage inner side-wall, cover insulation top board and the movable insulation base plate of being located at described insulation side board bottom end opening place of the described insulation side board top end opening of sealing, described bottom of furnace body also is provided be used to driving the lifting of described insulation base plate so that described insulation base plate gluing, sealing or break away from the elevating lever of described insulation side board bottom end opening.
Particularly, described bottom of furnace body offers the through hole that matches with described elevating lever, and the bottom of described elevating lever passes in described through hole outside the described body of heater and with external drive mechanism and is connected, and the top of described elevating lever is fixedly connected with described insulation base plate.
Particularly, described insulation base plate upwards is provided with boss, and described insulation side board bottom end opening place correspondence is provided with described boss and matches for the draw-in groove of the slotting location of described boss card.
Further, also comprise the first electrode, lifting rod and pillar stiffener, described well heater hangs by described the first electrode and is fixed on the described body of heater, described heat-insulation cage hangs by described lifting rod and is fixed on the described body of heater, described insulation side board is fixed on the inwall of described heat-insulation cage, the bottom of described pillar stiffener is fixedly connected with the bottom of described body of heater, and the top is fixedly connected with described heat exchange platform.
Particularly, described well heater comprises the top firing assembly of being located at described crucible top, be located at described crucible sidepiece and the sidepiece heating component that is connected in parallel with described top firing assembly and be divided into described top firing assembly with described sidepiece heating component above a plurality of the second electrodes, described top firing assembly be connected the sidepiece heating component and connect described the first electrode by described the second electrode respectively.
More specifically, described top firing assembly comprises the top firing spare and the top contiguous block that is connected connecting two described top firing spares of two Curveds, and described top firing spare is provided with described the second electrode.
Particularly, described sidepiece heating component comprises the sidepiece heating member of Curved, and described sidepiece heating member upwards is provided with the electrode contiguous block, and described electrode contiguous block top is provided with described the second electrode.
Particularly, described heat-insulation cage is square, and its sidepiece is formed by connecting by welding or fastening piece by rod member or plate or pipe fitting.
Particularly, described crucible is square, and its length is 1000-1050mm, and width is 1000-1050mm, highly is 440-940mm.
The thermal field structure of polycrystalline silicon casting furnace that the utility model body provides, it can realize driving the purpose that the decline of insulation base plate breaks away from insulation side board and rising applying insulation side board by at bottom of furnace body added lifting bar.In the concrete production process, well heater, crucible, heat-insulation cage, insulation side board keep motionless, driving the insulation base plate by elevating lever descends, make between heat-insulation cage and the insulation base plate to have certain gap, like this, the heat of heat-insulation cage inside flows out from the gap, the crucible bottom cooling, thereby make the polysilicon after the fusing form longitudinal temperature gradient, vertically gradually crystallization finally forms polycrystalline silicon ingot casting.It has greatly reduced distortion, the damage phenomenon of heat-insulation cage, thereby has reduced the maintenance cost of heat-insulation cage, has reduced the failure rate in the polycrystalline silicon ingot casting production process, and then has greatly improved production capacity.
Description of drawings
Fig. 1 is the main pseudosection of the thermal field structure of polycrystalline silicon casting furnace that provides of the utility model embodiment;
Fig. 2 is the structural representation of the well heater that provides of the utility model embodiment.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
As shown in Figure 1, a kind of thermal field structure of polycrystalline silicon casting furnace that the utility model embodiment provides, comprise body of heater 1, be located at thermal field case 2 in the body of heater 1, be located at crucible 3 in the thermal field case 2, be located at the well heater 4 between thermal field case 2 inwalls and crucible 3 outer walls and be located at the heat exchange platform 5 of crucible 3 bottoms, crucible 3 is mainly used in holding silicon material 6, and thermal field case 2 is used for the control of thermal field structure heat, the input of well heater 4 main thermal field structure heats, heat exchange platform 5 is used for the exchange of crucible 3 bottom heats.Thermal field case 2 comprises heat-insulation cage 21 and insulating shell 22, insulating shell 22 comprises the insulation side board 221 with top end opening and bottom end opening, the insulation top board 223 that covers sealing thermal insulation side plate 221 top end openings and the movable insulation base plate 222 of being located at insulation side board 221 bottom end opening places, insulation side board 221 is around on the inner side-wall that fits in heat-insulation cage 21, and body of heater 1 bottom also is provided with for driving insulation base plate 222 liftings so that the elevating lever 7 of insulation base plate 222 gluing, sealings or disengaging insulation side board 221 bottom end openings.Be appreciated that ground, insulation side board 221 encloses insulating shell 22 sidepieces of both ends open, and it can be connected on the inner side-wall of heat-insulation cage 21 by welding or screw, in the heat-processed, insulating shell 22 is in sealed state, namely be incubated the top end opening of top board 223 sealing thermal insulation side plates 221, the bottom end opening of insulation base plate 222 sealing thermal insulation side plates 221, and when the needs crystallographic orientation, operation by control elevating lever 7 can drive the bottom end opening that insulation base plate 222 breaks away from insulation side board 221, and make heat-insulation cage 21 and insulation have certain gap between the base plate 222, thereby can make the heat of heat-insulation cage 21 inside outside the gap is distributed to heat-insulation cage 21, like this, the temperature of crucible 3 bottoms will be lower than its head temperature, and the temperature of the polysilicon in the crucible 3 is longitudinal temperature gradient and distributes, and then can make the vertically gradually crystallization of polysilicon after having melted in the crucible 3, finally forms polycrystalline silicon ingot casting.In its crystallisation process, owing to need not promote heat-insulation cage 21, like this, when having avoided effectively repeatedly that heat-insulation cage 21 promotes in the heat-processed because the phenomenon that the heat-insulation cage distortion causes the heat-insulation cage 21 to break, thereby reduced the maintenance cost of heat-insulation cage 21, reduce the failure rate in the polycrystalline silicon ingot casting production process, improved production efficiency and production capacity.
Further, in the inwall of insulating shell 22 one deck film sticking plate (not shown) that has been sticked, film sticking plate preferentially adopts the CFC plate, like this, can promote heat insulation effect on the one hand, can improve on the other hand the degree of protection of insulating shell 22, to guarantee the work-ing life of product.
Particularly, body of heater 1 bottom offers the through hole (not shown) that matches with elevating lever 7, and the bottom of elevating lever 7 passes in through hole outside the body of heater 1 and is connected with external drive mechanism (not shown), and the top of elevating lever 7 is fixedly connected with insulation base plate 222.In concrete the application, the outside raising legs mechanism that be used for to drive heat-insulation cage 21 liftings in the prior art can be rectified and improved so that it can be used as for the external drive mechanism that drives elevating lever 7 up-and-down movement, like this, can reach the purpose of making rational use of resources, and greatly reduce the Design and Machining cost.Be appreciated that ground, under the prerequisite that satisfies requirement of strength, elevating lever 7 can only arrange one, and the through hole correspondence of body of heater 1 bottom only arranges one; And when an elevating lever 7 can't better satisfy requirement of strength, it is a plurality of that elevating lever 7 also can arrange, and the quantity of body of heater 1 bottom through-hole is identical with the quantity of elevating lever 7.
Particularly, as shown in Figure 1, insulation base plate 222 upwards is provided with boss 2221, and the bottom end opening place correspondence of insulation side board 221 is provided with boss 2221 and matches for the draw-in groove 2211 of the slotting location of boss 2221 cards.The setting of boss 2221 can make insulation base plate 222 whole stepped, when utilizing insulating shell 22 to be incubated, insulation base plate 222 seals by the inner side-wall of boss 2221 outer side walls and draw-in groove 2211 on the one hand, seal by cascaded surface and insulation side board 221 bottom end faces on the other hand, like this, can play the effect of double seal, thereby promote the sealing effectiveness between insulation side board 221 and the insulation base plate 222, and then promote the heat insulation effect of insulating shell 22.
Further, as shown in Figure 1, the utility model embodiment, also comprise the first electrode 10, lifting rod 8 and pillar stiffener 9, well heater 4 hangs by the first electrode 10 and is fixed on the body of heater 1, and heat-insulation cage 21 hangs by lifting rod 8 and is fixed on the body of heater 1, insulation side board 221 is connected and fixed on the inwall of heat-insulation cage 21 by welding or screw, particularly, heat-insulation cage 21 tops are provided with body of rod permanent seat (not shown), and lifting rod 8 bottoms are fixedly connected with body of rod permanent seat; The bottom of pillar stiffener 9 is fixedly connected with the bottom of body of heater 1, and the top is fixedly connected with heat exchange platform 5.Particularly, the top that the top of body of heater 1 is provided be used to electrode permanent seat 101, the first electrodes 10 of fixing the first electrode 10 is fixedly connected with electrode permanent seat 101, and the bottom is fixedly connected with well heater 4.The arranging of the first electrode 10 can be realized on the one hand being electrically connected of well heater 4 and outside electrical control system, like this, can drive well heater 4 by outside electrical control system and outwards discharge heats; The physical connection between well heater 4 and the body of heater 1 can be realized on the other hand, like this, the purpose of supporting and location well heater 4 can be reached.Preferably, the first electrode 10 is made of copper.The setting of lifting rod 8 can realize the supporting and location to heat-insulation cage 21, and pillar stiffener 9 can be realized the supporting and location to heat exchange platform 5.Be the reliability that guarantees to support, lifting rod 8 and pillar stiffener 9 all should be provided with a plurality of, and its concrete quantity can be carried out specific design according to its concrete weight that will support.
Particularly, as depicted in figs. 1 and 2, well heater 4 comprises the top firing assembly 41 of being located at crucible 3 tops, be located at crucible 3 sidepieces and the sidepiece heating component 42 that is connected in parallel with top firing assembly 41 and a plurality of the second electrode 43, the second electrodes 43 of being divided into top firing assembly 41 and sidepiece heating component 42 tops can adopt machining graphite to make.Top firing assembly 41 is connected with the sidepiece heating component respectively by the second electrode 43 connections the first electrode 10.Be appreciated that ground, second electrode 43 of each the first electrode 10 corresponding connection, like this, the quantity of the first electrode 10 is identical with the quantity of the second electrode 43.Being connected in parallel of top heater 4 and sidepiece well heater 4 can make top heater 4 have identical driving voltage with sidepiece well heater 4, thereby reaches the purpose of homogeneous heating.In concrete the application, being connected in parallel of top heater 4 and sidepiece well heater 4 can realize by each first electrode 10 and the connection mode of outside electrical control system.
Particularly, as depicted in figs. 1 and 2, top firing assembly 41 comprises the top firing spare 411 and the top contiguous block 412 that is connected connecting two top firing spares 411 of two Curveds, and top firing spare 411 can adopt CFC or graphite material to make.Top firing assembly 41 of the prior art generally is spliced by three top firing spares 411 at least, among the utility model embodiment, only adopts two top firing spares 411, like this, has reduced number of components, brings great convenience for its dismounting.Top firing spare 411 is provided with the second electrode 43, and top firing spare 411 connects the first electrode 10 by the second electrode 43 that sets firmly thereon.
Particularly, as depicted in figs. 1 and 2, sidepiece heating component 42 comprises the sidepiece heating member 421 of Curved, and sidepiece heating member 421 can adopt CFC or graphite material to make.For each sidepiece that guarantees crucible 3 is heated evenly, sidepiece heating member 421 should be appreciated that ground around the outer side wall setting of crucible 3, the different amts of sidepiece heating member 421, and then its layout shape is just different.In concrete the application, the quantity of sidepiece heating member 421 and shape can design as the case may be.Among the utility model embodiment, crucible 3 is square, therefore, preferably, sidepiece heating member 421 is provided with four, and four respectively all round sidewall settings of corresponding crucible 3 of sidepiece heating member 421, two adjacent sidepiece heating members 421 connect by corner connector 422, like this, both can guarantee that each sidepiece of crucible 3 was heated evenly, can be convenient to again dismounting, the processing of each sidepiece heating member 421.Sidepiece heating member 421 upwards is provided with for the electrode contiguous block 44 that supports the second electrode 43, and the top of institute's electrode contiguous block 44 is provided with the second electrode 43, and electrode contiguous block 44 connects the first electrode 10 by the second electrode 43 that sets firmly thereon.Arranging of electrode contiguous block 44 mainly is to have identical length in order to be used in the first electrode 10 that connects top heater 4 and sidepiece well heater 4, like this, is convenient on the one hand the Uniting of the first electrode 10, is convenient on the other hand install.
Particularly, heat-insulation cage 21 is square, and its sidepiece is formed by connecting by welding or fastening piece by rod member or plate or pipe fitting, like this, each building block material source of heat-insulation cage 21 is extensive, and tooling cost is low, the preferred screw of its fastening piece, screw easy accessibility, fastening reliable.
Further, as shown in Figure 1, the utility model embodiment also comprises backplate 106 at the bottom of crucible side guard plate 107 and the crucible, the outer side wall setting of crucible side guard plate 107 applying crucibles 3, and backplate 106 is located between the bottom and heat exchange platform 5 of crucible 3 at the bottom of the crucible.Crucible 3 can be effectively protected in the setting of backplate 106 at the bottom of crucible side guard plate 107 and the crucible, effectively avoids breaking in heat-insulation cage 21 lifting process phenomenon of crucible 3.Also be provided with the air channel (not shown) on the crucible side guard plate 107, like this, can accelerate the process of cooling of thermal field structure, enhance productivity.Air channel can be Polygons semicircle or square or trilateral or tetragon or other shape, and the quantity of air channel can be 1-4.
Further, as shown in Figure 1, the utility model embodiment also comprises inlet pipe 103, inlet pipe 103 wears in the heat-insulation cage 21 from top and the insulation top board 223 of body of heater 1, also be arranged with insulation quilt piece 104 on the inlet pipe 103, and insulation quilt piece 104 press on the insulation top board 223 end face, like this, but the tolerance clearance between effective sealing inlet pipe 103 and the insulation top board 223 has on the one hand prevented distributing of heat that heat-insulation cage 21 is interior.
Further, as shown in Figure 1, the utility model embodiment also comprises for the first thermocouple (not shown) of measuring body of heater 1 head temperature with for the second thermocouple (not shown) of measuring body of heater 1 bottom temp, the first thermocouple is mounted on the top of body of heater 1 by the first thermocouple mounting pipe 105, the second thermocouple is mounted on the bottom of body of heater 1 by the second thermocouple mounting pipe (not shown).
Particularly, the utility model embodiment can be applicable to crucible 3 capacity and is the above thermal field structure of polycrystalline silicon casting furnace of 800KG, and is certain, and it is the following thermal field structure of polycrystalline silicon casting furnace of 800KG that the utility model also can be applicable to crucible 3 capacity.The crucible 3 of the present embodiment is square, and its length is between 1000-1050mm, and width is between 1000-1050mm, and height is between 440-940mm.Existing crucible 3 capacity mostly are greatly 240KG-450KG, and the utility model embodiment carries out improvedly at existing thermal field structure, like this, on the one hand reduced the Design and Machining cost, has avoided the unnecessary wasting of resources; Improve on the other hand the production capacity of equipment, and improved production efficiency.Its concrete improved procedure is as follows: highly can be 10-60mm by the height of regulating pillar stiffener 9 to reduce heat exchange platform 5 to the height of body of heater 1 bottom, to reduce; Simultaneously, the electrode permanent seat 101 usefulness electrode column rebounds 102 of the first electrode 10 are increased 10-100mm, like this, the first electrode 10 will upwards improve 10-100mm, be fixed on so on the first electrode 10 the second electrode 43 also with on move 10-100mm, cause on the top thermal insulator that is placed on the second electrode 43 and move 20-100mm, perhaps change the first electrode 10, make the short 10-100mm of length of its Length Ratio prior art, electrode column rebound 102 can adopt copper or iron or aluminium or steel or its alloy to make; Simultaneously, the first thermocouple mounting pipe 105 and the second thermocouple mounting pipe lengthen 10-100mm with electrode column rebound 102 respectively, perhaps the second thermocouple mounting pipe also can not add long process, and adopts the mode of changing the Y-tube that links to each other with the second thermocouple mounting pipe to improve; Simultaneously, redesign strengthen heat-insulation cage 21 geomery, and carry out consolidation process, certainly, along with the change of heat-insulation cage 21 sizes, the size of insulation side board 221 is also improved adjustment relatively, heat-insulation cage 21 inner side-walls so that insulation side board 221 can be fitted fully; By above improvement, can make crucible 3 have enough spaces and increase, finally can make the length of crucible 3 and width all can be enlarged to 1000-1050mm, highly can increase to 440-940mm.Only slightly increase than the thermal field structure of 450KG through its power consumption of thermal field structure after improving, the technological process time only slightly increases than the thermal field structure of 450KG, like this, power consumption and technological process time substantially without large changing conditions under, obtained high-grade polycrystalline silicon ingot casting, yield has also been improved widely, has improved greatly production capacity, provides cost savings.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace or improvement etc., all should be included within the protection domain of the present utility model.
Claims (9)
1. thermal field structure of polycrystalline silicon casting furnace, comprise body of heater, be located at the thermal field case in the described body of heater, be located at the crucible in the described thermal field case, be located at well heater and the heat exchange platform of being located at described crucible bottom between described thermal field chamber interior wall and the described crucible outer wall, it is characterized in that: described thermal field case comprises heat-insulation cage and insulating shell, described insulating shell comprises around the insulation side board that fits on the described heat-insulation cage inner side-wall, cover insulation top board and the movable insulation base plate of being located at described insulation side board bottom end opening place of the described insulation side board top end opening of sealing, described bottom of furnace body also is provided be used to driving the lifting of described insulation base plate so that described insulation base plate gluing, sealing or break away from the elevating lever of described insulation side board bottom end opening.
2. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 1, it is characterized in that: described bottom of furnace body offers the through hole that matches with described elevating lever, the bottom of described elevating lever passes in described through hole outside the described body of heater and with external drive mechanism and is connected, and the top of described elevating lever is fixedly connected with described insulation base plate.
3. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 1, it is characterized in that: described insulation base plate upwards is provided with boss, and described insulation side board bottom end opening place correspondence is provided with to match with described boss inserts the draw-in groove of location for described boss card.
4. such as each described thermal field structure of polycrystalline silicon casting furnace of claims 1 to 3, it is characterized in that: also comprise the first electrode, lifting rod and pillar stiffener, described well heater hangs by described the first electrode and is fixed on the described body of heater, described heat-insulation cage hangs by described lifting rod and is fixed on the described body of heater, described insulation side board is fixed on the inwall of described heat-insulation cage, the bottom of described pillar stiffener is fixedly connected with the bottom of described body of heater, and the top is fixedly connected with described heat exchange platform.
5. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 4, it is characterized in that: described well heater comprises the top firing assembly of being located at described crucible top, be located at described crucible sidepiece and the sidepiece heating component that is connected in parallel with described top firing assembly and be divided into described top firing assembly with described sidepiece heating component above a plurality of the second electrodes, described top firing assembly be connected the sidepiece heating component and connect described the first electrode by described the second electrode respectively.
6. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 5, it is characterized in that: described top firing assembly comprises the top firing spare and the top contiguous block that is connected connecting two described top firing spares of two Curveds, and described top firing spare is provided with described the second electrode.
7. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 5, it is characterized in that: described sidepiece heating component comprises the sidepiece heating member of Curved, described sidepiece heating member upwards is provided with the electrode contiguous block, and described electrode contiguous block top is provided with described the second electrode.
8. such as each described thermal field structure of polycrystalline silicon casting furnace of claims 1 to 3, it is characterized in that: described heat-insulation cage is square, and its sidepiece is formed by connecting by welding or fastening piece by rod member or plate or pipe fitting.
9. such as each described thermal field structure of polycrystalline silicon casting furnace of claims 1 to 3, it is characterized in that: described crucible is square, and its length is 1000-1050mm, and width is 1000-1050mm, highly is 440-940mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320089783 CN203200374U (en) | 2013-02-27 | 2013-02-27 | Heat field structure of polycrystalline silicon ingot furnace |
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| CN 201320089783 CN203200374U (en) | 2013-02-27 | 2013-02-27 | Heat field structure of polycrystalline silicon ingot furnace |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN116575116A (en) * | 2023-05-23 | 2023-08-11 | 吉利硅谷(谷城)科技有限公司 | Polycrystalline silicon ingot furnace |
| CN116926657A (en) * | 2023-08-24 | 2023-10-24 | 清电光伏科技有限公司 | Thermal field mechanism and single crystal furnace with same |
-
2013
- 2013-02-27 CN CN 201320089783 patent/CN203200374U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN116575116A (en) * | 2023-05-23 | 2023-08-11 | 吉利硅谷(谷城)科技有限公司 | Polycrystalline silicon ingot furnace |
| CN116926657A (en) * | 2023-08-24 | 2023-10-24 | 清电光伏科技有限公司 | Thermal field mechanism and single crystal furnace with same |
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Owner name: SHENZHEN GOLD STONE TECHNOLOGY STOCK CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. |
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| CP03 | Change of name, title or address |
Address after: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee after: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. Address before: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee before: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. |
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| CX01 | Expiry of patent term |
Granted publication date: 20130918 |
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| CX01 | Expiry of patent term |