CN203080055U - Device for fixing mask version on substrate - Google Patents

Device for fixing mask version on substrate Download PDF

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Publication number
CN203080055U
CN203080055U CN 201320053747 CN201320053747U CN203080055U CN 203080055 U CN203080055 U CN 203080055U CN 201320053747 CN201320053747 CN 201320053747 CN 201320053747 U CN201320053747 U CN 201320053747U CN 203080055 U CN203080055 U CN 203080055U
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CN
China
Prior art keywords
mask
substrate
base
pedestal
mask version
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Expired - Fee Related
Application number
CN 201320053747
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Chinese (zh)
Inventor
刘志斌
赵斌
黄海东
陈凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI LEAGUER PHOTOELECTRIC GRAPHENE APPLICATION RESEARCH AND DEVELOPMENT CENTER Co Ltd
LEAGUER OPTRONICS (WUXI) CO Ltd
Original Assignee
WUXI LEAGUER PHOTOELECTRIC GRAPHENE APPLICATION RESEARCH AND DEVELOPMENT CENTER Co Ltd
LEAGUER OPTRONICS (WUXI) CO Ltd
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Application filed by WUXI LEAGUER PHOTOELECTRIC GRAPHENE APPLICATION RESEARCH AND DEVELOPMENT CENTER Co Ltd, LEAGUER OPTRONICS (WUXI) CO Ltd filed Critical WUXI LEAGUER PHOTOELECTRIC GRAPHENE APPLICATION RESEARCH AND DEVELOPMENT CENTER Co Ltd
Priority to CN 201320053747 priority Critical patent/CN203080055U/en
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Publication of CN203080055U publication Critical patent/CN203080055U/en
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Abstract

The utility model relates to a device for fixing a mask version on a substrate. The device comprises a foundation bed, a base and a mask version placing frame, wherein the base is arranged on the foundation bed and used for placing the substrate; a plurality of magnets are arranged on the base and used for adsorbing the mask version with magnetism; and the mask version placing frame is movably connected with the foundation base and used for placing the mask version. The device for fixing the mask version on the substrate provided by the utility model can be used for fixing the mask version on a base plate with a transparent conductive film layer, so that a window contact area is completely covered by the mask version, and a lead wire electrode region is not covered by any part of the mask version, and therefore, the technical problems in a capacitive type touch screen preparation process using graphene as a transparent conductive film layer are solved. Besides, the device for fixing the mask version on the substrate is convenient to operate, high in efficiency and easy to control.

Description

A kind of on substrate the fixing device of mask
Technical field
The utility model relate to a kind of on substrate the fixing device of mask, be specifically related to a kind of on substrate the fixing device of mask.
Background technology
Touch-screen is a kind of input unit, can conveniently realize the interaction of people and computer and other portable mobile apparatus.In recent years, be widely used in mobile InterWorking Equipment based on the capacitance touch screen of transparent conductive film, as smart mobile phone, portable panel computer.
Touch-screen is divided into form Touch Zone 2 and lead-in wire electrode district 1 according to functional area, and lead-in wire electrode district 1 connects external structure (Fig. 1 is the functional area synoptic diagram of capacitive touch screen) by controller.Capacitive touch screen is from textural double-disk capacitance touch screen and the one chip capacitance touch screen of being divided into.But no matter the double-disk capacitance touch screen still is the one chip capacitance touch screen, and it all need plate the layer of transparent conductive film layer on substrate.And all need plate long and narrow electrode on four limits of transparent conductive film layer, so that in electrical conductor, form a low voltage alternating-electric field.When touch screen, because people's bulk electric field, can form a coupling capacity between finger and conductor layer, the electric current that four limit electrodes send can flow to the contact, be directly proportional with the distance of pointing electrode and electric current is strong and weak, be positioned at ratio and power that controller after the touch screen just can calculate electric current, accurately calculate touch point position.
In capacitive touch screen, can be the ITO(indium tin oxide as the material of transparent conductive film layer) or Graphene.The transparent conductive film layer that material preparation obtains for ITO, the fragility height is prone to crackle, comes off, and the life-span is short, and can't be used as the substrate of PET material, and the cost height.The ITO transparent conductive film layer can prepare by the mode of sputter coating.Yet, comprising glass sclerosis, ITO plated film, black film, gold-tinted etching, metal coating, wet etching and special-shaped cutting etc. based on the preparation technology of the capacitive touch screen of ITO transparent conductive film, cost is higher, and the yield of product is very low.
For the transparent conductive film layer of grapheme material preparation, its electric conductivity height, transmissivity is good, and graphene layer is colourless fully, can react the color of pattern itself comparatively really.But also there is following technical problem in the transparent conductive film layer of grapheme material preparation:
(1) owing to the Graphene stable in properties, common chemical etching method can't form the graphene conductive figure;
(2) in chemical etching, the removal process of metal level can be destroyed the integrity of graphene layer under the metal level, and this is because the thickness (less than 2nm) of graphene layer is far smaller than the metal level (cause of 200nm ~ 1000nm);
(3) utilizing mask directly to form the lead-in wire electrode district in the PVD process is a kind of easier method, but considers that the mask any part all can not block the lead-in wire electrode district, and therefore how fixedly mask is technological difficulties.If can not fix, mask can only horizontal positioned so, thereby the position of having limited the plated film sample has seriously reduced production efficiency.
The preparation of ITO transparent conductive film layer and metallic diaphragm generally adopts the mode of sputter coating to realize.Sputter coating is to utilize energetic ion impact material target, goes out particle and is deposited on film forming method on the workpiece surface from its surface sputtering.
In the preparation process of capacitive touch screen, be covered with the metallic diaphragm that only needs on the substrate of transparent conductive film layer at lead-in wire electrode district coated with conductive as the lead-in wire electrode, send the signal receiver of touch-screen to the touch point signal that the form Touch Zone is received.
Therefore, this area need develop a kind of on substrate the fixing device of mask, mask can be fixed on the substrate that is covered with transparent conductive film layer by described device, the form Touch Zone is hidden by mask fully, and the lead-in wire electrode district can not blocked in any position of mask.
Summary of the invention
At the deficiencies in the prior art, the purpose of this utility model be to provide a kind of on substrate the fixing device of mask.Described device can be fixed on mask on the substrate that is covered with transparent conductive film layer, and mask only blocks the form Touch Zone fully, does not block the lead-in wire electrode district fully.
The utility model is achieved by the following technical solution:
A kind of on substrate the fixing device of mask, described device comprises:
Pedestal;
Base is located on the pedestal, is used to place substrate; Establish some magnet on the base, be used to adsorb mask with magnetic;
The mask rack flexibly connects with pedestal, is used to place mask.
The device that the utility model provides is fixed on the position that does not need sputter coating by magnetic with mask, realizes the purpose of " described mask is only blocked the form Touch Zone fully, does not block the lead-in wire electrode district fully ".
The mode of connection of mask described in the utility model and pedestal can be that axle flexibly connects, or the some flexible connection or the like, any controlled active mode of connection of mask that can keep all can be used for the utility model.
The magnet that is provided with on mask described in the utility model and the base is the material that magnetic is inhaled mutually.Preferably, magnet on the described base is selected from the combination of any a kind or at least 2 kinds in the magnet material, the combination of any a kind or at least 2 kinds in further preferred Rhometal, Nd-Fe-B alloys, SmCo magnet, alnico magnet, ferrite magnet or the loadstone, described combination is Rhometal/alnico magnet, ferrite magnet/loadstone, Nd-Fe-B alloys/SmCo magnet, ferrite magnet/loadstone/Nd-Fe-B alloys etc. for example.
Material chosen from Fe magnetic substance with mask of magnetic described in the utility model, the combination of any a kind or at least 2 kinds in excellent chosen from Fe, nickel or its oxide compound, further be selected from the combination of any a kind or at least 2 kinds in silicon steel, pure iron, the ferrite, described combination is silicon steel/pure iron, ferrite/silicon steel, silicon steel/pure iron/ferrite etc. for example.
The effect of the magnet on the utility model base is that the mask that will have magnetic is fixed on the substrate.The utility model does not limit for the number of the magnet on the base, shape, size etc. are concrete, as long as can satisfy mask is fixed on purpose on the substrate.To achieve the above object, the magnetism between described magnet and mask at least should be greater than the gravity of mask.Being shaped as of typical but non-limiting magnet is cylindrical, and described columniform height is identical with the thickness of base, described magnet inlay with base in.
The material of pedestal described in the utility model, base, mask rack and set screw is independently selected from the combination of any a kind or at least 2 kinds in the nonferromugnetic material, the preferably combination of any a kind or at least 2 kinds in copper, copper alloy, aluminium, aluminium alloy, pottery, plastics, described combination is copper/copper alloy, aluminium/aluminium alloy, copper/aluminium alloy etc. for example.
As optimal technical scheme, base described in the utility model is the nonferromagnetic plate, and the adjacent both sides of nonferromagnetic plate have the first card edge, and described card forms along the edge extension by the nonferromagnetic plate, is 90 ° of angles with the nonferromagnetic plate, is used to block substrate;
Preferably, on the described base, on the Y direction, be provided with first set screw, be used to regulate the position of base Y direction on pedestal;
Preferably, described pedestal is provided with spring pinchcock, is used for fixing the position of substrate on directions X.
Preferably, described mask rack is the nonferromagnetic plate, and the adjacent both sides of nonferromagnetic plate have the second card edge, and described card forms along the edge extension by the nonferromagnetic plate, is 90 ° of angles with the nonferromagnetic plate, is used to block mask;
Preferably, on the described mask rack, on directions X, be provided with second set screw, be used to regulate the position of mask with respect to the pedestal directions X;
Preferably, described mask rack and pedestal axle active link.
Preferably, described mask rack is provided with releasing device, and releasing device is used to adsorb mask, and after mask arrives specified location, mask is released to specified location.
Described releasing device can be this area any one can realize adsorbing mask, and adsorption time is controlled, be transferred to specified location after, discharge mask to the device of specified location and all can be used for the utility model.
The example of described releasing device can be arranged on the electro-magnet on the mask rack: because mask has magnetic, can be by the polar adsorption mask of regulating magnet, and magnetic is removed in outage behind the arrival specified location, discharges mask.
Preferably, described releasing device is an air suction pipe, and described air suction pipe opening is on the mask rack.Air suction pipe is air-breathing, forms negative pressure in air suction pipe, holds mask; After arriving specified location, the air suction pipe ventilation, internal negative pressure discharges, and discharges mask.It may occur to persons skilled in the art that air suction pipe should be covered and mask can be adsorbed by mask at the opening on the mask rack when adsorbing mask.In addition,, then the resistance to air loss that gasket reaches air suction pipe inside can be set, thereby have enough strength to adsorb mask if the surface that the mask rack contacts with mask is level and smooth inadequately; Perhaps air-breathing section at air suction pipe is provided with sucker, keeps the resistance to air loss of air suction pipe inside.
Preferably, the suction end of described air suction pipe has sucker, so that better hold mask.
A kind of on substrate the fixing method of mask, the device that provides as the utility model is provided, comprise the steps:
(1) substrate is loaded in the first card edge of base, and uses the spring pinchcock stationary substrate;
(2) second card that mask is loaded in the mask rack along in, and by the fixing mask of releasing device;
(3) regulate the mask rack, mask is moved to the substrate top;
(4) regulate first set screw and second set screw, mask and substrate are adjusted to specified location;
(5) discharge mask, mask is fixed on the substrate under the effect of base magnet, and forming from the bottom to top, structure is the structure of base/substrate/mask.
Preferably, described substrate is the substrate that is covered with transparent conductive film layer; Preferably be covered with the substrate of ITO layer or graphene layer; Further preferably be covered with the substrate of graphene layer; Especially preferably be covered with the pet substrate of graphene layer or be covered with the glass substrate of graphene layer.
Preferably, described releasing device is the air suction pipe that has sucker;
Preferably, described releasing device is when fixing mask, and air suction pipe is air-breathing; When discharging mask, air suction pipe is given vent to anger.
A kind of method for preparing capacitive touch screen comprises the steps:
(1) adopt aforementioned " a kind of on substrate fixedly the method for mask " to be fixed the substrate of mask;
(2) will be from the bottom to top structure be that the structure of base/substrate/mask is suspended on the substrate frame of Sputting film-plating apparatus, carry out sputter coating;
(3) under the external force effect, mask is removed, obtained the substrate that sputter has metallic diaphragm;
(4) sputter there is the substrate of metallic diaphragm carry out the justifying patterning, obtains capacitive touch screen.
Preferably, the described external force of step (3) is selected from the adsorptive power of releasing device, preferably the suction that produces from air suction pipe.
Preferably, the mode of the described sputter coating of step (2) is selected from magnetron sputtering plating, vacuum sputtering coating, ion film plating, the vacuum magnetic-control sputtering plated film any a kind.
Preferably, the mode of the described patterning of step (4) is a laser direct-writing formula etching.
Compared with prior art, the utlity model has following beneficial effect:
The fixing device of mask on substrate that the utility model provides, mask can be fixed on the substrate that is covered with transparent conductive film layer (ITO layer or graphene layer), the form Touch Zone is hidden by mask fully, and the lead-in wire electrode district can not blocked in any position of mask; Solved the technical problem that exists with in the capacitive touch screen preparation process of Graphene as transparent conductive film layer; In follow-up patterning step, can carry out the patterning of justifying by laser direct-writing formula etching, easy to operate, the efficient height, and be easy to control.
Description of drawings
Fig. 1 for a kind of embodiment of the utility model described on substrate the fixing structural representation of the device of mask;
Fig. 2 for a kind of embodiment of the utility model described on substrate the fixing device use synoptic diagram of mask;
Fig. 3 for the another kind of embodiment of the utility model described on substrate the fixing structural representation of the device of mask;
Fig. 4 for the another kind of embodiment of the utility model described on substrate the fixing skeleton view of mask;
Fig. 5 for the another kind of embodiment of the utility model described on substrate the fixing synoptic diagram of the device use of mask;
Wherein, 101-pedestal; The 102-base; 107-magnet; The 110-limited block; The 111-limited screw; The 112-substrate; The 113-mask; The X-X direction; The Y-Y direction;
The 201-pedestal; The 202-base; 203-mask rack; 204-first set screw; 205-second set screw; The 206-releasing device; 207-magnet; The 208-spring pinchcock; The 212-substrate; The 213-mask; The 215-second card edge; The 216-first card edge; The X-X direction; The Y-Y direction.
Embodiment
For ease of understanding the utility model, it is as follows that the utility model is enumerated embodiment.Those skilled in the art should understand that described embodiment helps to understand the utility model, should not be considered as concrete restriction of the present utility model.
Embodiment 1
A kind of on substrate the fixing device of mask, described device comprises:
Pedestal 101, pedestal are provided with two limited blocks;
Base 102 is located on the pedestal, limits the position by the limited block on the pedestal, is used to place substrate; Establish 4 ~ 20 cylindrical Rhometal magnet 107 on the base, be used to adsorb mask with magnetic; The height of cylinder-shaped magnet is identical with base thickness;
Mask rack (not shown) flexibly connects with pedestal, is used to place mask.
Described on the substrate fixedly the use of the device of mask be: the glass substrate that substrate 113(is covered with graphene layer) place on the base 102, the limited screw 111 of adjusting limited block 110 is fixing with base 102; The mask 113 of iron material matter is positioned over the specified location of substrate 112, and mask is fixed by 107 magnetic attraction of the magnet on the base, thereby is fixed the substrate of mask, its structure have down from be followed successively by base/substrate/graphene layer/mask.
Described on the substrate fixedly the structure of the device of mask as shown in Figure 1 (Fig. 1 for present embodiment described on substrate the fixing structural representation of the device of mask); Structure in the use of described device as shown in Figure 2 (Fig. 2 for present embodiment described on substrate the fixing structural representation of the device use of mask).
Embodiment 2
A kind of on substrate the fixing device of mask, described device comprises:
Pedestal 201 is provided with spring pinchcock 208;
Base 202 is located on the pedestal 201, is used to place substrate 212; Establish 30 cylinder-shaped magnets 207 on the base 202, be used to adsorb mask 213 with magnetic; The height of cylinder-shaped magnet 207 is identical with base 202 thickness; Described base 202 is the copper coin of nonferromagnetic, and the adjacent both sides of copper coin have first card along 216, and described card forms along the edge extension by copper coin, and is vertical with copper coin, is used to block substrate; On the Y of base 202 direction, be provided with first set screw 204, be used to regulate the position of base 202 Y direction on pedestal 201;
Mask rack 203 with 201 flexible connections of pedestal, is used to place mask 213; Described mask rack 203 is the nonferromagnetic aluminium sheet, and the adjacent both sides of aluminium sheet have second card along 215, and described card forms along the edge extension by aluminium sheet, and is vertical with aluminium sheet, is used to block mask; The directions X of described mask rack 203 is provided with second set screw 205, is used to regulate the position of mask with respect to the pedestal directions X;
Releasing device 206 is air suction pipe, and the air suction pipe opening is on the mask rack.
Described on the substrate fixedly the structure of the device of mask as shown in Figure 3 (Fig. 3 for present embodiment described on substrate the fixing structural representation of the device of mask); Described on the substrate fixedly the perspective structure of the device of mask as shown in Figure 4 (Fig. 4 for present embodiment described on substrate the fixing skeleton view of mask).
Described on substrate fixedly the use of the device of mask be:
(1) substrate 212(is covered with the glass substrate of graphene layer) place on the base 202, adjust first set screw 204 and regulate bases 202 and substrate 212 position in the Y direction;
(2) when mask 213 is placed on the mask rack 203, the suction end of air suction pipe is made the inner negative pressure that forms of air suction pipe by shutoff, firmly adsorbs mask 213; Rotate mask rack 203, mask 213 is transferred to directly over the substrate 212, adjust second set screw 205, regulate the position of mask 213 with respect to the substrate directions X; Concrete structure as shown in Figure 5 (Fig. 5 for present embodiment described on substrate the fixing synoptic diagram of the device use of mask);
(3) treat that mask is adjusted to specified location after, air suction pipe discharges negative pressure, mask 213 is released, under gravity and the magneticaction, mask 213 firmly is fixed on the substrate 212, thereby be fixed the substrate of mask, its structure have down from be followed successively by base/substrate/graphene layer/mask.
Embodiment 3
A kind of method for preparing capacitive touch screen comprises the steps:
(1) structure that is base/substrate/mask with embodiment 1 or 2 described structures from the bottom to top is suspended on the substrate frame of Sputting film-plating apparatus, carry out sputter coating, be coated with metallic diaphragm, obtain the form Touch Zone from the bottom to top structure be base/substrate/mask/metallic diaphragm, the lead-in wire electrode district from the bottom to top structure be the structure of base/substrate/metallic diaphragm;
(2) structure that step (1) is obtained is under the suction of suction gun, with mask and substrate separation, remove mask and base, the electrode district sputter that obtains going between has the substrate of metallic diaphragm, its structure is: the form Touch Zone is followed successively by graphene layer/substrate from the bottom to top, and lead-in wire electrode district structure from the bottom to top is the structure of graphene layer/substrate/metallic diaphragm;
(4) sputter there is the substrate of metallic diaphragm carry out the justifying patterning, obtains capacitive touch screen.
Applicant's statement, the utility model illustrates detailed structure of the present utility model by the foregoing description, but the utility model is not limited to above-mentioned detailed structure, does not mean that promptly the utility model must rely on above-mentioned detailed structure and could implement.The person of ordinary skill in the field should understand; to any improvement of the present utility model; to the interpolation of the equivalence replacement of each raw material of the utility model product and ancillary component, the selection of concrete mode etc., all drop within protection domain of the present utility model and the open scope.

Claims (10)

1. fixing device of mask on substrate is characterized in that described device comprises:
Pedestal;
Base is located on the pedestal, is used to place substrate; Establish some magnet on the base, be used to adsorb mask with magnetic;
The mask rack flexibly connects with pedestal, is used to place mask.
2. device as claimed in claim 1 is characterized in that, described base is the nonferromagnetic plate, the adjacent both sides of nonferromagnetic plate have the first card edge, described card forms along the edge extension by the nonferromagnetic plate, is 90 ° of angles with the nonferromagnetic plate, is used to block substrate.
3. device as claimed in claim 2 is characterized in that, on the described base, is provided with first set screw in the Y direction, is used to regulate the position of base Y direction on pedestal.
4. device as claimed in claim 1 is characterized in that, described mask rack is the nonferromagnetic plate, the adjacent both sides of nonferromagnetic plate have the second card edge, described card forms along the edge extension by the nonferromagnetic plate, is 90 ° of angles with the nonferromagnetic plate, is used to block mask.
5. device as claimed in claim 4 is characterized in that, on the described mask rack, is provided with second set screw on directions X, is used to regulate the position of mask with respect to the pedestal directions X.
6. device as claimed in claim 4 is characterized in that, described mask rack is provided with releasing device, and releasing device is used to adsorb mask, and after mask arrives specified location, mask is released to specified location.
7. device as claimed in claim 6 is characterized in that, described releasing device is an air suction pipe, and described air suction pipe opening is on the mask rack.
8. device as claimed in claim 7 is characterized in that the suction end of described air suction pipe has sucker.
9. device as claimed in claim 1 is characterized in that described pedestal is provided with spring pinchcock, is used for fixing the position of substrate on directions X.
10. device as claimed in claim 1 is characterized in that, described mask rack and pedestal axle active link.
CN 201320053747 2013-01-30 2013-01-30 Device for fixing mask version on substrate Expired - Fee Related CN203080055U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320053747 CN203080055U (en) 2013-01-30 2013-01-30 Device for fixing mask version on substrate

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Application Number Priority Date Filing Date Title
CN 201320053747 CN203080055U (en) 2013-01-30 2013-01-30 Device for fixing mask version on substrate

Publications (1)

Publication Number Publication Date
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103116428A (en) * 2013-01-30 2013-05-22 无锡力合光电传感技术有限公司 Device, usage method and application for fixing masking film plate on substrate
CN105568224A (en) * 2016-01-28 2016-05-11 京东方科技集团股份有限公司 Shielding device used for evaporation and evaporation equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103116428A (en) * 2013-01-30 2013-05-22 无锡力合光电传感技术有限公司 Device, usage method and application for fixing masking film plate on substrate
CN105568224A (en) * 2016-01-28 2016-05-11 京东方科技集团股份有限公司 Shielding device used for evaporation and evaporation equipment

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Granted publication date: 20130724

Termination date: 20150130

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