CN202499900U - Sputtering target of ion sputtering instrument - Google Patents
Sputtering target of ion sputtering instrument Download PDFInfo
- Publication number
- CN202499900U CN202499900U CN2012200934830U CN201220093483U CN202499900U CN 202499900 U CN202499900 U CN 202499900U CN 2012200934830 U CN2012200934830 U CN 2012200934830U CN 201220093483 U CN201220093483 U CN 201220093483U CN 202499900 U CN202499900 U CN 202499900U
- Authority
- CN
- China
- Prior art keywords
- sputtering
- target
- target head
- upper cover
- cover plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 37
- 238000005477 sputtering target Methods 0.000 title claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 19
- 210000004907 gland Anatomy 0.000 claims description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200934830U CN202499900U (en) | 2012-03-14 | 2012-03-14 | Sputtering target of ion sputtering instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200934830U CN202499900U (en) | 2012-03-14 | 2012-03-14 | Sputtering target of ion sputtering instrument |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202499900U true CN202499900U (en) | 2012-10-24 |
Family
ID=47036520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012200934830U Expired - Fee Related CN202499900U (en) | 2012-03-14 | 2012-03-14 | Sputtering target of ion sputtering instrument |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202499900U (en) |
-
2012
- 2012-03-14 CN CN2012200934830U patent/CN202499900U/en not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202499900U (en) | Sputtering target of ion sputtering instrument | |
CN204288169U (en) | A kind of new type superthin glass induction chip contact panel | |
CN108544952A (en) | New-energy automobile charging pile protective device | |
CN202495577U (en) | Grounding structure for display screen of digital product | |
CN202259728U (en) | Antitheft electrolytic ion grounding plate | |
CN205564499U (en) | Power transformer noise and electromagnetic radiation shield assembly | |
CN204302462U (en) | A kind of novel great current cell short-circuit test machine | |
IN2014CN03126A (en) | ||
CN201472085U (en) | tyre | |
CN202564618U (en) | Shield connector | |
CN202705457U (en) | Target material for vacuum sputtering | |
CN204302318U (en) | A kind of big current polymer battery clamp | |
CN201577250U (en) | Rainproof shield | |
CN202559812U (en) | Wire pole for preventing cables from being stolen | |
CN203150451U (en) | Illuminated toggle switch | |
CN202101691U (en) | Heat-conducting cover structure of sensor | |
CN204516516U (en) | A kind of colorful insulation sheet of flame-proof abrasion-resistant | |
CN202998635U (en) | Device for reducing noise produced during adhesive tape tearing | |
CN201466472U (en) | Electrical element model of high-voltage complete-set switch cabinet | |
CN202758762U (en) | Silver contact | |
CN202503196U (en) | 24-kV switch cabinet | |
CN202931419U (en) | Handset horn | |
CN202110962U (en) | Welding seat for capacitor bracket | |
CN202940512U (en) | Instrument cubicle and front lower chamber structure of high-voltage switch cabinet | |
CN203415459U (en) | A nickel-plated metal dome |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: NANJING NANDA INSTRUMENT CO., LTD. Free format text: FORMER NAME: NANJING NANDA INSTRUMENT PLANT |
|
CP03 | Change of name, title or address |
Address after: 210038, No. 20, Guang Lu Road, Qixia street, Nanjing Economic Development Zone, Jiangsu Patentee after: NANJING NANDA INSTRUMENT PLANT Address before: 210038 3B01-2 block, Nanjing economic and Technological Development Zone, Nanjing, Jiangsu Patentee before: Nanjing NanDa Instrument Plant |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121024 Termination date: 20210314 |
|
CF01 | Termination of patent right due to non-payment of annual fee |