CN203032032U - ITO (indium tin oxide) glass for capacitive touch screen - Google Patents
ITO (indium tin oxide) glass for capacitive touch screen Download PDFInfo
- Publication number
- CN203032032U CN203032032U CN 201220688693 CN201220688693U CN203032032U CN 203032032 U CN203032032 U CN 203032032U CN 201220688693 CN201220688693 CN 201220688693 CN 201220688693 U CN201220688693 U CN 201220688693U CN 203032032 U CN203032032 U CN 203032032U
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- Prior art keywords
- ito
- touch screen
- glass
- rete
- glass substrate
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Abstract
The utility model discloses ITO (indium tin oxide) glass for a capacitive touch screen. The ITO glass comprises a glass substrate, a niobium pentoxide film, a silicon dioxide film and an indium tin oxide film which are sequentially combined with one another in a stacked manner. The ITO glass for the capacitive touch screen has the advantages that owing to the additional niobium pentoxide (Nb<2>O<5>) film used as an antireflection layer, the reflectivity is reduced according to an optical interference effect of the multiple films, the transmittance is improved, bottom shadow of patterns on the ITO glass is eliminated, and the display definition of the touch screen is improved.
Description
Technical field
The utility model belongs to the touch screen technology field, relates in particular to a kind of capacitive touch screen ito glass.
Background technology
The capacitive touch screen ito glass is a kind of transparent conducting glass, and is on glass in sodium calcium type or silicon boron type, and the method by magnetron sputtering plates indium oxide layer tin film (ITO).When capacitive touch screen is used for mobile phone, GPS terminal device, in order to stop the sodium ion liquid crystal diffusion in the LCD box on the sodium lime glass, also can before plating ITO film, plate layer of silicon dioxide (SiO
2) barrier layer.
Usually, capacitive touch screen uses the single face ito coated glass, form pattern after etching, but the reflectivity of single face ito glass is higher, has shadow phenomenon at the bottom of the ITO pattern, has a strong impact on outward appearance and the properties of product of touch-screen.
The utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, provides a kind of and can eliminate shadow at the bottom of the ITO pattern, improves the capacitive touch screen ito glass of touch-screen display resolution and display effect.
The utility model is achieved in that a kind of capacitance touch screen ito glass, comprise glass substrate and stack gradually on the surface of described glass substrate being combined with silica coating and tin indium oxide rete, also comprise the stacked niobium pentaoxide rete that is combined between described glass substrate and the silica coating.
Preferably, the thickness of described niobium pentaoxide film is
Preferably, the thickness of described silicon dioxide film is
Preferably, the thickness of described indium oxide tin film is
The capacitance touch screen that the utility model provides passes through to increase one deck niobium pentaoxide (Nb with ito glass between glass substrate and silica coating
2O
5) as anti-reflection layer, according to the optical interference of multilayer film, reflectivity is reduced, improve transmitance, thereby shadow at the bottom of the elimination ITO pattern improves display resolution and display effect that this capacitive touch screen is used ito glass.
Description of drawings
Fig. 1 is the capacitance touch screen that provides of the utility model embodiment with the structural representation of ito glass.
The specific embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
The utility model embodiment provides a kind of can eliminate shadow at the bottom of the ITO pattern, improves the capacitive touch screen ito glass of touch-screen display resolution and display effect.This capacitive touch screen with the structure of ito glass as shown in Figure 1, it comprises glass substrate 1, niobium pentaoxide rete 4, silica coating 2 and the tin indium oxide rete 3 that stacks gradually combination.Like this, this capacitance touch screen with ito glass by between glass substrate 1 and silica coating 2, having increased the niobium pentaoxide (Nb as anti-reflection layer
2O
5) rete 4, according to the optical interference of multilayer film, reflectivity is reduced, improve transmitance, thus shadow at the bottom of the elimination ITO pattern, display resolution and the display effect of raising touch-screen.
As the utility model preferred embodiment, the thickness of above-mentioned niobium pentaoxide rete 4 shown in Figure 1 is
The thickness of silica coating 2 is
The thickness of tin indium oxide rete 3 is
In this embodiment, by adjusting the thickness of each rete, make that the optical interference performance between each layer is extremely best, further reduce its reflex to light, improve the transmitance of light, reach the better effects if of eliminating shadow at the bottom of the ITO pattern, make that the display resolution of touch-screen and display effect are better.
In addition, above-mentioned niobium pentaoxide rete 4, silica coating 2 and tin indium oxide rete 3 can stack gradually combination on arbitrary surface of above-mentioned glass substrate 1, also can stack gradually combination on two surfaces of above-mentioned glass substrate 1 respectively, form the two-sided shadow ito glass that disappears.
As specific embodiment, above-mentioned capacitance touch screen is as follows with the preparation method of ito glass, and key step is:
(1) glass substrate being carried out flat board cleans, dries up;
(2) glass is put on the shelf load;
(3) adopt vacuum magnetic-control sputtering to plate niobium pentaoxide rete 4, silica coating 2 and tin indium oxide rete 3 successively, obtain this capacitive touch screen ito glass.
Particularly, in the above-mentioned steps (1) glass substrate being carried out dull and stereotyped method of cleaning gets final product according to the existing conventional method.
The used equipment of above-mentioned steps (3) vacuum magnetic-control sputtering can be vertical full-automatic continuous magnetron sputtering coating machine, and its parameters arranges as follows: 180 ℃ ~ 280 ℃ of coating temperatures; Coating chamber transmission beat 120 seconds; Use 1 Nb
2O
5Target plating Nb
2O
5Rete 4 uses 3 SiO
2Target plating SiO
2Rete 2 uses 2 ITO target plating ITO retes 3, wherein Nb
2O
5Sputtering power is 4.5kW～9kW, SiO
2Sputtering power is 10kW～50kW, and the ITO sputtering power is 10kW～50kW; O
2Flow 100～130Sccm, Ar flow 200～220Sccm, vacuum 1.0 * 10
-1Pa～4.5 * 10
-1Pa, total gas pressure 0.40～0.45Pa.
Below further specify the utility model by specific embodiment.
Embodiment 1:
A kind of capacitance touch screen ito glass comprises the half tempered glass substrate, stacks gradually on a surface of this half tempered glass substrate and is combined with niobium pentaoxide (Nb
2O
5) rete, silica (SiO
2) rete and tin indium oxide (ITO) rete.Wherein, this Nb
2O
5Thickness is
SiO
2Thickness is
The ITO thickness is
This capacitance touch screen is as follows with the ito glass preparation method:
At first, the half tempered glass substrate being carried out flat board cleans, dries up; Then, half tempered glass is put on the shelf load; The coating machine parameter is set, on a surface of half tempered glass, plates niobium pentaoxide rete, silica coating and tin indium oxide rete successively.
Wherein, plate each rete and adopt vertical full-automatic continuous magnetron sputtering coating machine, 280 ℃ of half tempered glass substrate heating-up temperatures; Coating chamber transmission beat 120 seconds; Use 1 Nb
2O
5Target plating Nb
2O
5Film uses 3 SiO
2Target plating SiO
2Film uses 2 ITO target plating ITO films, wherein plates Nb
2O
5Sputtering power 5kW, plating SiO
2Sputtering power 15kW, plating ITO sputtering power 20kW; O
2Flow 100Sccm, Ar flow 200Sccm, vacuum 2 * 10
-1Pa, total gas pressure 0.4Pa.
Single face capacitance touch screen in above-mentioned preparation is used in the ito glass, is coated with Nb on glass substrate successively
2O
5Rete and SiO
2Transmitance during rete is measured during for 550nm for the 90.5%(wavelength, and the following stated transmitance is under this wavelength condition and measures); Transmitance when being coated with the ITO rete separately on glass substrate is that 89.0%, ITO rete surface resistance is 80 Ω/; The single face capacitance touch screen of above-mentioned preparation is 91% with the transmitance of ito glass.Human eye can not significantly be seen ITO pattern on glass, has namely eliminated shadow at the bottom of the ITO pattern substantially.
Embodiment 2:
A kind of capacitance touch screen ito glass comprises the half tempered glass substrate, stacks gradually on a surface of this half tempered glass substrate and is combined with niobium pentaoxide (Nb
2O
5) rete, silica (SiO
2) rete and tin indium oxide (ITO) rete.Wherein, this Nb
2O
5Thickness is
SiO
2Thickness is
The ITO thickness is
This capacitance touch screen is as follows with the ito glass preparation method:
At first, the half tempered glass substrate being carried out flat board cleans, dries up; Then, half tempered glass is put on the shelf load; The coating machine parameter is set, on a surface of half tempered glass, plates niobium pentaoxide rete, silica coating and tin indium oxide rete successively.
Wherein, plate each rete and adopt vertical full-automatic continuous magnetron sputtering coating machine, 280 ℃ of half tempered glass substrate heating-up temperatures; Coating chamber transmission beat 120 seconds; Use 1 Nb
2O
5Target plating Nb
2O
5Film uses 3 SiO
2Target plating SiO
2Film uses 2 ITO target plating ITO films, wherein plates Nb
2O
5Sputtering power 5kW, plating SiO
2Sputtering power 10kW, plating ITO sputtering power 22kW; O
2Flow 110Sccm, Ar flow 200Sccm, vacuum 2 * 10
-1Pa, total gas pressure 0.4Pa.
Single face capacitance touch screen in above-mentioned preparation is used in the ito glass, is coated with Nb on glass substrate successively
2O
5Rete and SiO
2Transmitance during rete is 90.1%; Transmitance when being coated with the ITO rete separately on glass substrate is that 89.0%, ITO rete surface resistance is 60 Ω/; The single face capacitance touch screen of above-mentioned preparation is 90.5% with the transmitance of ito glass.Human eye can not significantly be seen ITO pattern on glass, has namely eliminated shadow at the bottom of the ITO pattern substantially.
Embodiment 3:
A kind of capacitance touch screen ito glass comprises the half tempered glass substrate, stacks gradually on a surface of this half tempered glass substrate and is combined with niobium pentaoxide (Nb
2O
5) rete, silica (SiO
2) rete and tin indium oxide (ITO) rete.Wherein, this Nb
2O
5Thickness is
SiO
2Thickness is
The ITO thickness is
This capacitance touch screen is as follows with the ito glass preparation method:
At first, the half tempered glass substrate being carried out flat board cleans, dries up; Then, half tempered glass is put on the shelf load; The coating machine parameter is set, on a surface of half tempered glass, plates niobium pentaoxide rete, silica coating and tin indium oxide rete successively.
Wherein, plate each rete and adopt vertical full-automatic continuous magnetron sputtering coating machine, 280 ℃ of half tempered glass substrate heating-up temperatures; Coating chamber transmission beat 120 seconds; Use 1 Nb
2O
5Target plating Nb
2O
5Film uses 3 SiO
2Target plating SiO
2Film uses 2 ITO target plating ITO films, wherein plates Nb
2O
5Sputtering power 6kW, plating SiO
2Sputtering power 12kW, plating ITO sputtering power 25kW; O
2Flow 120Sccm, Ar flow 200Sccm, vacuum 2 * 10
-1Pa, total gas pressure 0.4Pa.
Single face capacitance touch screen in above-mentioned preparation is used in the ito glass, is coated with Nb on glass substrate successively
2O
5Rete and SiO
2Transmitance during rete is 90.3%; Transmitance when being coated with the ITO rete separately on glass substrate is that 88.0%, ITO rete surface resistance is 50 Ω/; The single face capacitance touch screen of above-mentioned preparation is 90.5% with the transmitance of ito glass.Human eye can not significantly be seen ITO pattern on glass, has namely eliminated shadow at the bottom of the ITO pattern substantially.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace or improvement etc., all should be included within the protection domain of the present utility model.
Claims (4)
1. capacitance touch screen ito glass, comprise glass substrate and stack gradually on the surface of described glass substrate being combined with silica coating and tin indium oxide rete, it is characterized in that: also comprise the stacked niobium pentaoxide rete that is combined between described glass substrate and the silica coating.
2. capacitance touch screen ito glass as claimed in claim 1, it is characterized in that: the thickness of described niobium pentaoxide rete is
3. capacitance touch screen ito glass as claimed in claim 1, it is characterized in that: the thickness of described silica coating is
4. capacitance touch screen ito glass as claimed in claim 1, it is characterized in that: the thickness of described tin indium oxide rete is
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220688693 CN203032032U (en) | 2012-12-13 | 2012-12-13 | ITO (indium tin oxide) glass for capacitive touch screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220688693 CN203032032U (en) | 2012-12-13 | 2012-12-13 | ITO (indium tin oxide) glass for capacitive touch screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203032032U true CN203032032U (en) | 2013-07-03 |
Family
ID=48684172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220688693 Expired - Fee Related CN203032032U (en) | 2012-12-13 | 2012-12-13 | ITO (indium tin oxide) glass for capacitive touch screen |
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|---|---|
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503646A (en) * | 2014-12-30 | 2015-04-08 | 深圳力合光电传感股份有限公司 | Touch panel and manufacturing method thereof |
| CN108732211A (en) * | 2017-04-18 | 2018-11-02 | 中山大学 | SOLUTION PROPERTIES sensor and its manufacturing method |
| CN110863185A (en) * | 2019-12-06 | 2020-03-06 | 天津美泰真空技术有限公司 | Low-reflection high-transmission film and preparation method thereof |
| CN115220607A (en) * | 2022-07-27 | 2022-10-21 | 四川省利任元创新科技有限责任公司 | OGS capacitive touch screen and manufacturing method thereof |
-
2012
- 2012-12-13 CN CN 201220688693 patent/CN203032032U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503646A (en) * | 2014-12-30 | 2015-04-08 | 深圳力合光电传感股份有限公司 | Touch panel and manufacturing method thereof |
| CN108732211A (en) * | 2017-04-18 | 2018-11-02 | 中山大学 | SOLUTION PROPERTIES sensor and its manufacturing method |
| CN110863185A (en) * | 2019-12-06 | 2020-03-06 | 天津美泰真空技术有限公司 | Low-reflection high-transmission film and preparation method thereof |
| CN110863185B (en) * | 2019-12-06 | 2023-09-22 | 天津美泰真空技术有限公司 | Low-reflection high-transmission film and preparation method thereof |
| CN115220607A (en) * | 2022-07-27 | 2022-10-21 | 四川省利任元创新科技有限责任公司 | OGS capacitive touch screen and manufacturing method thereof |
| CN115220607B (en) * | 2022-07-27 | 2022-11-29 | 四川省利任元创新科技有限责任公司 | OGS capacitive touch screen and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130703 Termination date: 20181213 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |