CN203011605U - Machine oil MEMS pressure sensor based on internal sealing structure - Google Patents
Machine oil MEMS pressure sensor based on internal sealing structure Download PDFInfo
- Publication number
- CN203011605U CN203011605U CN 201220740716 CN201220740716U CN203011605U CN 203011605 U CN203011605 U CN 203011605U CN 201220740716 CN201220740716 CN 201220740716 CN 201220740716 U CN201220740716 U CN 201220740716U CN 203011605 U CN203011605 U CN 203011605U
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- ring
- machine oil
- web member
- mems pressure
- type seals
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Abstract
The utility model discloses a machine oil MEMS pressure sensor based on an internal sealing structure. The machine oil MEMS pressure sensor based on the internal sealing structure comprises a shell and a connecting member. The connecting member is arranged inside the shell, and two concentric ring-cutting grooves are arranged on the contact surface of the connecting member and the shell. A first annular seal ring is inlaid in the ring-cutting groove at the inner side, and a second annular seal ring is inlaid in the ring-cutting groove at the outer side; the diameter of the second annular seal ring is greater than that of the first annular seal ring, and the cross sections of the first and second annular seal rings are both elliptic. The two sealing structures are arranged on the contact surfaces of the connecting member and the shell, so that the machine oil MEMS pressure sensor based on the internal sealing structure can have a very good sealing effect; and by the action of an external press ring, the sealing effect is enhanced.
Description
Technical field
The utility model relates to a kind of car force sensor, and particularly a kind of volume with MEMS technology development is little, lightweight, response is fast, highly sensitive, be easy to batch production, engine oil pressure pickup cheaply.
Background technology
Automobile sensor as the information source of Auto Electronic Controlled System, is the critical component of Auto Electronic Controlled System, is also one of core content of technical field of automotive electronics research.Automobile sensor carries out in real time, measures accurately and control various information such as temperature, pressure, position, rotating speed, acceleration and vibrations.The key of weighing modern sedan limousine control system level just is quantity and the level of its sensor.
Microelectromechanical systems (MEMS) technology of coming from the SIC (semiconductor integrated circuit) technical development is day by day ripe, utilize this technology can make various microsensors, volume and the energy consumption of these sensors are little, can realize many brand-new functions, be convenient in enormous quantities and made with high precision, cost per unit is low, easily consists of extensive and multifunctional array, is highly suitable on automobile and uses.
Because the MEMS sensor has irreplaceable advantage, traditional pressure sensor for automobile will progressively be replaced by it.MEMS Lubricant of Automobile Engine and abs pressure sensor are by the domestic cumulative year after year of current needs, maturation along with domestic MEMS car force sensor technology, having the MEMS pressure transducer of the characteristics such as microminiaturization, low-power consumption, high sensitivity, high reliability, will be the focus of Global Auto transducer market product demand.
At present, can provide automobile MEMS pressure transducer mainly take offshore company as main, the companies such as U.S. Kai Leer, extraordinary measurement, SSI, Fei Erke, Texas Instrument, German Bosch, Japan electric coating are arranged, annual production is more than 2,000,000.The automobile MEMS pressure transducer of the international renowned company Development and Production such as external Motorola, Infineon, GE adopts folded silicon technology mostly, the technologies such as bulk silicon technological, have highly sensitive, the precision high, range 50 to 1400KPa, precision 0.03%FS, but also have in some aspects complex manufacturing technology, high-precision capacitance pressure transducer, easily is subjected to environmental interference, and the problem such as easily is subject to disturbing between the pollution of environment and many signals.
As shown in Figure 1, adopt the side seal at web member between the interconnect of the MEMS pressure transducer of prior art and housing, and be the structure of individual layer O-ring seal, sealing effectiveness is relatively poor.
The utility model content
The purpose of this utility model is to provide a kind of interior seal structure machine oil MEMS pressure transducer, solves between sensor housing and web member and adopts side seal, and then bring the poor problem of sealing.
The purpose of this utility model is to be achieved through the following technical solutions:
A kind of interior seal structure machine oil MEMS pressure transducer, comprise housing, web member, described web member is arranged on the inside of housing, be provided with two concentric ring cutting grooves between the surface of contact of described web member and housing, be inlaid with the first grommet type seals in the ring cutting groove of inboard, be inlaid with the second grommet type seals in the ring cutting groove in the outside, the diameter of described the second grommet type seals is greater than the diameter of the first grommet type seals, and the cross section of the first grommet type seals and the second grommet type seals is ellipse.
Further, also comprise pressure ring, be threaded connection between described pressure ring and housing, the maximum gauge of web member is less than the maximum gauge of pressure ring, and the inner face of pressure ring holds out against the outer face of web member.
The utility model can play good sealing effectiveness by be provided with the two seals structure on the surface of contact of web member and housing, and the effect by outside pressure ring, can the enhanced leaktightness effect.
Description of drawings
The below is described in further detail the utility model according to drawings and embodiments.
Fig. 1 is the structural drawing of prior art engine oil pressure pickup.
Fig. 2 is the structural drawing of the described interior seal structure machine oil MEMS pressure transducer of the utility model embodiment.
Embodiment
As shown in Figure 2, the described interior seal structure machine oil MEMS pressure transducer of the utility model embodiment, comprise housing 1, web member 2, described web member 2 is arranged on the inside of housing 1, be provided with two concentric ring cutting grooves between the surface of contact of described web member 2 and housing, be inlaid with the first grommet type seals 3 in the ring cutting groove of inboard, be inlaid with the second grommet type seals 4 in the ring cutting groove in the outside, the diameter of described the second grommet type seals 4 is greater than the diameter of the first grommet type seals 3, and the cross section of the first grommet type seals 3 and the second grommet type seals 4 is ellipse.
Further, also comprise pressure ring 5, be threaded connection between described pressure ring 5 and housing 1, the maximum gauge of web member 2 is less than the maximum gauge of pressure ring 5, and the inner face of pressure ring 5 holds out against the outer face of web member 2.
The utility model can play good sealing effectiveness by be provided with the two seals structure on the surface of contact of web member and housing, and the effect by outside pressure ring, can the enhanced leaktightness effect.
Claims (2)
1. seal structure machine oil MEMS pressure transducer in a kind, it is characterized in that, comprise housing, web member, described web member is arranged on the inside of housing, be provided with two concentric ring cutting grooves between the surface of contact of described web member and housing, be inlaid with the first grommet type seals in the ring cutting groove of inboard, be inlaid with the second grommet type seals in the ring cutting groove in the outside, the diameter of described the second grommet type seals is greater than the diameter of the first grommet type seals, and the cross section of the first grommet type seals and the second grommet type seals is ellipse.
2. interior seal structure machine oil MEMS pressure transducer as claimed in claim 1, it is characterized in that, also comprise pressure ring, be threaded connection between described pressure ring and housing, the maximum gauge of web member is less than the maximum gauge of pressure ring, and the inner face of pressure ring holds out against the outer face of web member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220740716 CN203011605U (en) | 2012-12-31 | 2012-12-31 | Machine oil MEMS pressure sensor based on internal sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220740716 CN203011605U (en) | 2012-12-31 | 2012-12-31 | Machine oil MEMS pressure sensor based on internal sealing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203011605U true CN203011605U (en) | 2013-06-19 |
Family
ID=48603188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220740716 Expired - Lifetime CN203011605U (en) | 2012-12-31 | 2012-12-31 | Machine oil MEMS pressure sensor based on internal sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203011605U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111964898A (en) * | 2020-07-16 | 2020-11-20 | 国网宁夏电力有限公司检修公司 | Pressure relief valve detection device |
-
2012
- 2012-12-31 CN CN 201220740716 patent/CN203011605U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111964898A (en) * | 2020-07-16 | 2020-11-20 | 国网宁夏电力有限公司检修公司 | Pressure relief valve detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Lv Miao Inventor after: Sun Haixin Inventor after: Ni Xingping Inventor before: Zheng Shiliang |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHENG SHILIANG TO: LV MIAO SUN HAIXIN NI XINGPING |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130619 |