CN103558415B - With the mems accelerometer of temperature-compensating - Google Patents

With the mems accelerometer of temperature-compensating Download PDF

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CN103558415B
CN103558415B CN201310585144.3A CN201310585144A CN103558415B CN 103558415 B CN103558415 B CN 103558415B CN 201310585144 A CN201310585144 A CN 201310585144A CN 103558415 B CN103558415 B CN 103558415B
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temperature
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acceleration transducer
mems
fitting
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CN103558415A (en
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王晓臣
鞠莉娜
张斌
王甫
高玉霞
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Huadong Photoelectric Integrated Device Research Institute
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China North Industries Group Corp No 214 Research Institute Suzhou R&D Center
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Abstract

The present invention relates to a kind of mems accelerometer with temperature-compensating, comprise acceleration transducer, temperature sensor, temperature-compensated chip, acceleration transducer and temperature sensor are connected with temperature-compensated chip. The temperature compensation that temperature-compensated chip adopts is: (1) measures zero partially and one group of output valve of scale factor fit to fitting surface and obtain a series of fitting coefficients and be arranged in coefficient matrix under multiple temperature spots; (2) the output signal modeling of the output signal of degree of will speed up sensor and temperature sensor be expressed as model matrix; (3) coefficient matrix and model matrix are done to dot product and obtain the output formula of acceleration transducer after temperature-compensating; (4) fitting coefficient being write to temperature-compensated chip with output formula calculates. The present invention by curved surface 3 D Quasi and and calculate after compensate, effectively reduced the impact on system of error that accelerometer produces in assembling and installation process.

Description

With the mems accelerometer of temperature-compensating
Technical field
The present invention relates to a kind of mems accelerometer, especially a kind of with temperature compensation functionMems accelerometer.
Background technology
MEMS(MicroElectro-MechanicalSystem) accelerometer is microminiature inertial navigation systemOne of important sensor in system, the quality of its performance has directly affected the navigation accuracy of inertial navigation system.Mems accelerometer is measured output error and is mainly derived from manufacturing process, installation method, external environment condition etc.Several respects, the impact that wherein environment temperature is measured output to mems accelerometer is particularly outstanding, and it also becomesFor a key issue in the application of micro-acceleration gauge engineering.
At present, conventional local temperature control and software approach are realized temperature-compensating. Local temperature control conventionally need change and addInternal structure, material or the increase temperature control system of speedometer, realize complexity, so more in engineeringEmploying software scenario compensates, and can make acceleration analysis stability improve 5-20 doubly after compensation. Software is mendedThe scheme of repaying to be to obtain ACTE model as prerequisite, conventionally need design specialized temp. controlling box orComplicated testing equipment is carried out Model Distinguish experiment, as designs independently high precision temperature control box, and by dividingThe temperature model of degree platform identification accelerometer; Or employing temperature control turntable and circular dividing table identification accelerometerTemperature model etc.
For example, the static models of accelerometer are as the formula (1):
y=K0+K1ai+K2ai 2+K3aia0（1）
Wherein, y: accelerometer output (V); K0: the zero-bit output (V) of accelerometer; K1：The scale factor (V/gn) of accelerometer; K2: second order nonlinear coefficient (V/gn 2）；K3Cross-couplingsCoefficient (V/gn 2）；ai: the acceleration (g that is parallel to input axis of accelerometern）；a0: transverse acceleration（gn). The accelerometer adopting for test, due to K2And K3Be generally 10－4Magnitude, it causesNonlinearity erron be less than 0.5%, therefore can ignore the nonlinear terms in accelerometer output and intersect and disturb, and then can adopt formula (2) to export and obtain real accekeration according to accelerometer measures:
ai=（y－K0）/K1（2）
Traditional temperature compensation, the essence of accelerometer being carried out to Temperature Modeling is exactly to determine accelerationThe zero-bit output K of meter0With scale factor K1And the relation between temperature. Accelerate under different temperatures if obtainedThe K of degree meter0And K1, can adopt the method for a curve to obtain temperature model, as the formula (3):
K0=K00+K01TK1=K10+K11T（3）
Wherein, T is environment temperature, K00、K01、K10、K11For undetermined coefficient.
From formula (3), we can find out, traditional temperature compensation is zero-bit and the mark to accelerometerThe degree factor separately compensates.
So traditional accelerometer is not only assembled and installation requirement ratio accelerometer in the time of temperature-compensatingHigher, and need to separately compensate the zero-bit of accelerometer and scale factor.
Summary of the invention
The object of this invention is to provide a kind of without zero-bit and scale factor are separated to the band temperature-compensating of consideringMems accelerometer.
For achieving the above object, the technical solution used in the present invention is:
With a mems accelerometer for temperature-compensating, comprise MEMS acceleration transducer, it also wrapsDraw together temperature sensor, temperature-compensated chip, the output of described MEMS acceleration transducer and described inThe output of temperature sensor be connected with the input of described temperature-compensated chip through A/D passage respectivelyConnect, the output of described temperature-compensated chip is the described mems accelerometer with temperature-compensatingOutput;
The temperature compensation that described temperature-compensated chip adopts is: (1) circulates in many by high low temperatureUnder individual temperature spot, measure described MEMS acceleration transducer zero partially and the output valve of scale factor and gettingObtain one group of data, this group data fitting is obtained to its fitting surface, obtain and meet by described fitting surfaceA series of fitting coefficients that matching order is required, and described a series of fitting coefficients are arranged in to coefficient squareBattle array; (2) by the output signal N of described MEMS acceleration transducerRWith described temperature sensorOutput signal T is modeled asAnd be expressed as model matrix, wherein n is matching order; (3) by instituteThe coefficient matrix of stating and described model matrix do dot product and obtain MEMS acceleration described within the scope of total temperatureThe output formula of degree sensor after temperature-compensating; (4) by described a series of fitting coefficients and total temperature modelEnclose the output formula of interior described MEMS acceleration transducer after temperature-compensating and write described temperature benefitRepay in chip, by the output signal N of described MEMS acceleration transducerRWith described temperature sensorOutput signal T after formula calculates, obtain the described mems accelerometer output with temperature-compensatingAccekeration.
Preferably, obtain its fitting surface by one group of data described in least square fitting.
Preferably, described matching order is 5 rank.
Preferably, described a series of fitting coefficients are 21, are respectively C0-C20, its arrangement formsCoefficient matrix is
C 0 C 2 C 5 C 9 C 14 C 20 C 1 C 4 C 8 C 13 C 19 0 C 3 C 7 C 12 C 18 0 0 C 6 C 11 C 17 0 0 0 C 10 C 16 0 0 0 0 C 15 0 0 0 0 0 ;
Described model matrix is
1 T T 2 T 3 T 4 T 5 N R N R T N R T 2 N R T 3 N R T 4 0 N R 2 N R 2 T N R 2 T 2 N R 2 T 3 0 0 N R 3 N R 3 T N R 3 T 2 0 0 0 N R 4 N R 4 T 0 0 0 0 N R 5 0 0 0 0 0 ;
The output public affairs of MEMS acceleration transducer described within the scope of described total temperature after temperature-compensatingFormula is
g ( T ) = C 0 + C 1 N R + C 2 T + C 3 N R 2 + C 4 N R T + C 5 T 2 + C 6 N R 3 + C 7 N R 2 T + C 8 N R T 2 + C 9 T 3 + C 10 N R 4 + C 11 N R 3 T + C 12 N R 2 T 2 + C 13 N R T 3 + C 14 T 3 + C 15 N R 5 + C 16 N R 4 T + C 17 N R 3 T 2 + C 18 N R 2 T 3 + C 19 N R T 4 + C 20 T 5 .
Preferably, described MEMS acceleration transducer, described temperature sensor are in same heatIn.
Because technique scheme is used, the present invention compared with prior art has following advantages: the present inventionMems accelerometer time its zero-bit and scale factor are not separately considered in compensation, but logicalCross curved surface 3 D Quasi and and calculate after compensate, effectively reduced accelerometer assembling and installedThe impact of the error producing in journey on system.
Brief description of the drawings
The schematic block circuit diagram that accompanying drawing 1 is the mems accelerometer with temperature-compensating of the present invention.
Accompanying drawing 2 is the mems accelerometer with temperature-compensating of the present invention institute matching in compensation methodCurved surface schematic diagram.
Accompanying drawing 3 is the datagram of the lower output-1g～+ 1g of the full temperature of the mems accelerometer before compensating.
Accompanying drawing 4 is the datagram of the lower output-30g～+ 30g of the full temperature of the mems accelerometer before compensating.
Accompanying drawing 5 is the graph of a relation of the lower output-1g～+ 1g of the full temperature of the mems accelerometer after compensating and temperature.
The magnitude of voltage figure that accompanying drawing 6 is converted into for the g value of the lower output of the full temperature of the mems accelerometer after compensatingGraph of a relation with temperature.
Detailed description of the invention
Below in conjunction with embodiment shown in the drawings, the invention will be further described.
Embodiment mono-: shown in accompanying drawing 1. With a mems accelerometer for temperature-compensating, compriseMEMS acceleration transducer, temperature sensor and temperature-compensated chip. MEMS acceleration transducerThe output of output and temperature sensor is connected with the input of temperature-compensated chip through A/D passage respectivelyConnect, the output of temperature-compensated chip is the output of the mems accelerometer with temperature-compensating. MEMSAcceleration transducer adopts temperature sensors of high precision LM20, in temperature-compensated chip to collectingAcceleration information is processed and temperature-compensating, and compensation result is exported. Meanwhile, for the ease of demarcate,Ensure that MEMS acceleration transducer and temperature sensor are in a heat field, as by temperature sensorAfter bonding on a pcb board with MEMS acceleration transducer, then be assembled in an aluminium alloy shell.The main performance index of this mems accelerometer with temperature-compensating is: operating voltage is 5V; Work electricityStream is 10mA; Range is variable, and maximum measurement category is ± 30g.
The temperature compensation that temperature-compensated chip adopts is as follows:
(1), in experiment, circulate in and under multiple temperature spots, measure MEMS acceleration sensing by high low temperatureDevice zero partially and the output valve of scale factor and obtain one group of data, these group data are utilized to least square method planClose and obtain its fitting surface. Obtain and meet the required a series of fitting coefficients of matching order by fitting surface,And a series of fitting coefficients are arranged in to coefficient matrix.
Fit to example with 5 rank, a series of fitting coefficients are 21, are respectively C0-C20, be arranged inFor coefficient matrix
C 0 C 2 C 5 C 9 C 14 C 20 C 1 C 4 C 8 C 13 C 19 0 C 3 C 7 C 12 C 18 0 0 C 6 C 11 C 17 0 0 0 C 10 C 16 0 0 0 0 C 15 0 0 0 0 0 - - - ( 4 )
Visible, in above-mentioned coefficient matrix, each fitting coefficient is arranged in the counter-diagonal of matrix and divides and formUpper triangle in.
(2) by the output signal N of MEMS acceleration transducerRBuild with the output signal T of temperature sensorMould becomesAnd be expressed as model matrix, wherein n is matching order.
Still fit to example with 5 rank, the model matrix of formation is
1 T T 2 T 3 T 4 T 5 N R N R T N R T 2 N R T 3 N R T 4 0 N R 2 N R 2 T N R 2 T 2 N R 2 T 3 0 0 N R 3 N R 3 T N R 3 T 2 0 0 0 N R 4 N R 4 T 0 0 0 0 N R 5 0 0 0 0 0 - - - ( 5 )
This model matrix has the structure corresponding with coefficient matrix, and wherein each element is also arranged in squareThe counter-diagonal of battle array is divided in the upper triangle forming.
(3) coefficient matrix formula (4) and model matrix formula (5) being done to dot product obtains within the scope of total temperatureThe output formula of MEMS acceleration transducer after temperature-compensating;
g ( T ) = C 0 + C 1 N R + C 2 T + C 3 N R 2 + C 4 N R T + C 5 T 2 + C 6 N R 3 + C 7 N R 2 T + C 8 N R T 2 + C 9 T 3 + C 10 N R 4 + C 11 N R 3 T + C 12 N R 2 T 2 + C 13 N R T 3 + C 14 T 3 + C 15 N R 5 + C 16 N R 4 T + C 17 N R 3 T 2 + C 18 N R 2 T 3 + C 19 N R T 4 + C 20 T 5 - - - ( 6 )
The curved surface of its matching is illustrated as accompanying drawing 2, the output signal (N that wherein X-axis is accelerometerR），Y-axis is the output (T) of temperature sensor, the accekeration (g) that Z axis is actual measurement. When with collectedThe data of accelerometer total temperature scope gamut fit after, this accelerometer is at arbitrary temp in theoryArbitrary accekeration of point has all been included in the curved surface fitting, and just can obtain by the calculating of formula (6)Go out the true accekeration of accelerometer at any temperature spot.
(4) by MEMS acceleration transducer within the scope of a series of fitting coefficients and total temperature in temperature-compensatingAfter output formula write in temperature-compensated chip, by the output signal N of MEMS acceleration transducerRWithThe output signal T of temperature sensor obtains with the mems accelerometer of temperature-compensating defeated after formula calculatesThe accekeration going out.
Adopt NI6281 data collecting card to divide to the mems accelerometer not carrying out after the assembling of temperature-compensatingNot-40 DEG C ,-10 DEG C ,+25 DEG C ,+55 DEG C ,+85 DEG C gather it-data of 1g～+ 1g, after collectionDatagram is shown in accompanying drawing 3, and wherein abscissa is time (S), and ordinate is magnitude of voltage (V), the song of series 2Line is the output of temperature sensor, and temperature sensor is negative temperature coefficient, therefore series 2 curve by a left side toRight 5 ladders represent respectively-40 DEG C ,-10 DEG C ,+25 DEG C ,+55 DEG C ,+85 DEG C, the curve of series 1 byLeft-to-right 5 ladders represent that respectively accelerometer is-40 DEG C ,-10 DEG C ,+25 DEG C ,+55 DEG C ,+85 DEG C of temperatureUnder degree, the output of-1g～+ 1g. As seen from the figure, under low temperature condition, the output shift amount of accelerometerStill larger because temporarily do not have equipment can testing acceleration meter defeated within the scope of full temperature gamutGo out, therefore the output of accelerometer within the scope of full temperature gamut only has zero-bit and the mark by different temperature pointsThe degree factor is derived and is gone out, and the datagram after derivation is shown in accompanying drawing 4.
And carrying out least square fitting by software, the fitting coefficient being compensated is
- 203.222 845.874 - 1029.087 615.967 - 183.663 21.671 12.289 - 105.471 100.329 - 40.267 5.93 0 0.736 - 0.645 0.319 - 0.061 0 0 - 0.128 0.025 - 0.003 0 0 0 0.015 0 0 0 0 0 - 0.001 0 0 0 0 0
This coefficient is write in temperature-compensated chip, in temperature-compensated chip, by computing, finally defeatedAccekeration after going out to calculate, Output rusults is shown in accompanying drawing 5 and accompanying drawing 6.
From the contrast of accompanying drawing 6 and accompanying drawing 3, can find out, before temperature compensation in the situation of-40 DEG C, accelerometerZero drift 500mV nearly, be converted into g value and be 10g nearly, and after temperature compensation, zero drift narrows down to1g left and right, being converted into magnitude of voltage is the about 50mV that drifted about, as can be seen here, the temperature of accelerometer is floated reducedAn order of magnitude.
Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow is familiar with thisThe personage of technology can understand content of the present invention and implement according to this, can not limit protection of the present invention with thisScope. All equivalences that Spirit Essence is done according to the present invention change or modify, and all should be encompassed in guarantor of the present inventionWithin protecting scope.

Claims (4)

1. the mems accelerometer with temperature-compensating, comprises MEMS acceleration transducer, itsBe characterised in that: it also comprises temperature sensor, temperature-compensated chip described MEMS acceleration sensingThe output of the output of device and described temperature sensor is respectively through A/D passage and described temperature-compensatingThe input of chip is connected, and the output of described temperature-compensated chip is described with temperature-compensatingThe output of mems accelerometer; Described MEMS acceleration transducer, described temperature sensorIn same heat field, described temperature sensor and described MEMS acceleration transducer bond toAfter on a pcb board, then be assembled in an aluminium alloy shell;
The temperature compensation that described temperature-compensated chip adopts is: (1) circulates in many by high low temperatureUnder individual temperature spot, measure described MEMS acceleration transducer zero partially and the output valve of scale factor and gettingObtain one group of data, this group data fitting is obtained to its fitting surface, obtain and meet by described fitting surfaceA series of fitting coefficients that matching order is required, and described a series of fitting coefficients are arranged in to coefficient squareBattle array; (2) by the output signal N of described MEMS acceleration transducerRWith described temperature sensorOutput signal T is modeled asAnd be expressed as model matrix, wherein n is matching order; (3) by instituteThe coefficient matrix of stating and described model matrix do dot product and obtain MEMS acceleration described within the scope of total temperatureThe output formula of degree sensor after temperature-compensating; (4) by described a series of fitting coefficients and total temperature modelEnclose the output formula of interior described MEMS acceleration transducer after temperature-compensating and write described temperature benefitRepay in chip, by the output signal N of described MEMS acceleration transducerRWith described temperature sensorOutput signal T after formula calculates, obtain the described mems accelerometer output with temperature-compensatingAccekeration.
2. the mems accelerometer with temperature-compensating according to claim 1, is characterized in that:Obtain its fitting surface by one group of data described in least square fitting.
3. the mems accelerometer with temperature-compensating according to claim 1, is characterized in that:Described matching order is 5 rank.
4. the mems accelerometer with temperature-compensating according to claim 3, is characterized in that:Described a series of fitting coefficients are 21, are respectively C0-C20, the coefficient matrix that its arrangement forms is
C 0 C 2 C 5 C 9 C 14 C 20 C 1 C 4 C 8 C 13 C 19 0 C 3 C 7 C 12 C 18 0 0 C 6 C 11 C 17 0 0 0 C 10 C 16 0 0 0 0 C 15 0 0 0 0 0 ;
Described model matrix is
1 T T 2 T 3 T 4 T 5 N R N R T N R T 2 N R T 3 N R T 4 0 N R 2 N R 2 T N R 2 T 2 N R 2 T 3 0 0 N R 3 N R 3 T N R 3 T 2 0 0 0 N R 4 N R 4 T 0 0 0 0 N R 5 0 0 0 0 0 ;
The output public affairs of MEMS acceleration transducer described within the scope of described total temperature after temperature-compensatingFormula is
g ( T ) = C 0 + C 1 N R + C 2 T + C 3 N R 2 + C 4 N R T + C 5 T 2 + C 6 N R 3 + C 7 N R 2 T + C 8 N R T 2 + C 9 T 3 + C 10 N R 4 + C 11 N R 3 T + C 12 N R 2 T 2 + C 13 N R T 3 + C 14 T 3 + C 15 N R 5 + C 16 N R 4 T + C 17 N R 3 T 2 + C 18 N R 2 T 3 + C 19 N R T 4 + C 20 T 5 .
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