CN103674120B - A kind of compound gas flow metering device and its measuring method based on MEMS sensing elements - Google Patents
A kind of compound gas flow metering device and its measuring method based on MEMS sensing elements Download PDFInfo
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Abstract
A kind of gas flow metering device and its measuring method based on MEMS sensing elements.The device has reached the MEMS flow sensor of scheduled measurement required precision and MEMS calibration sensors, circuit system connects circuit system and the connecting contact pin of MEMS calibration sensors and MEMS flow sensor by flowmeter shell.In practical measurement process, the output characteristics of MEMS flow sensor can be with measuring condition（Environment temperature, gas pressure, molecule composition, mechanical oscillation etc.）And change, therefore, MEMS calibration sensors constantly perceive current measuring condition, are then exported by calibration sensor（T, P, C）The analog signal of flow sensor and the influence amount of computation model are calibrated by the method for simulation or number, obtain accurately flow results.
Description
Technical field
The present invention relates to a kind of gas flow metering device based on MEMS sensing elements, more specifically to use
MEMS flow sensor and MEMS calibration sensors carry out compound gas flow metering device and its measurement of on-line proving compensation
Method.
Background technology
In gas industry, traditional machinery metering, such as the instrument such as pattern table, turbine, waist wheel occupy it is most of
Ratio, only minute quantity ultrasound wave table start small-scale on probation.No matter which kind of type, the combustion gas based on mechanical driven principle
, inevitably there is the phenomenon that accuracy decline because of mechanical aging in use in table, while mechanical device pushes away
It is dynamic to will also result in the pressure loss, in turn result in the loss on meterage.It is annual because mechanical wear causes according to industry statistic
Metering loss account for more than the 6% of gas consumption total amount.It is medium-scale with one（1000000 family civilian users, 1000 industrial
Family）Combustion gas operation enterprise for, metering loss caused by annual mechanical loss has more than 1,000,000,000 RMB, is extended to entire combustion
Gas industry, this number can reach more than one hundred billion RMB, caused by economic loss it is startling.
In order to cope with the massive losses that bring of tradition machinery metering, combustion gas meter based on ultrasonic wave principle and based on MEMS
The industrial flow meter of principle starts small lot occur to try out, and not yet realizes completely commercial.The mentality of designing difference of this two classes product
For：
1）The principle of ultrasonic wave table is that the spread speed of ultrasonic wave is related to the flowing velocity of place medium, by tested
The motion conditions of gas are detected, and then the analog signal of acquisition are drawn to the transmission environment of energy medium by conducting wire, so
It is obtained again by A/D conversions and the calculating of MCU by the volume of gas in the unit interval afterwards, and then by integrating cumulative obtain
By the total amount of gas, volume metering is realized；With
2）For the MEMS flowmeters of industrial precision manufactureing field internal standard gasmetry, at the standard conditions using high-purity
Degree calibrating gas does contrast test, and test result is directly stored, and is subsequently used for the real-time measurement of the gas.Then stringent
Calibrating gas is measured under controlled working condition, scheduled required precision can be reached.
It is compared with traditional mechanical measuring means, MEMS measuring techniques have a small size, wide range, high-precision, highly reliable
The significant advantages such as degree, low-power consumption, low cost.MEMS（Micro-Electro & Mechanism System）It is MEMS
Abbreviation, mainly including several parts such as micro mechanism, microsensor, micro actuator and corresponding processing circuits, it be
Merge a variety of micrometer-nanometer processing technologies, and the high-tech forward position to grow up on the basis of the newest fruits of application modern information technologies
Subject.Further, since chip has done the seasoned processing of device in process of production, calculating and control accuracy can be always maintained at
In higher level, along with electronic surveying has natural advantage, therefore MEMS gas meter, flow meters than mechanical means in principle
Product maturity and the market competitiveness it is gradually clear.
But above-mentioned technical proposal, during for composite gas, particularly gas metering, all there are some skills
Art defect and using obstacle, is mainly manifested in：
1）The extra cost that auxiliary device is brought increases
At present in many energy gauges, method and scheme based on ultrasonic wave principle are applied.Due to ultrasonic wave
The operation principle of measuring device is:A branch of ultrasonic wave is actively generated first；Ultrasonic wave is propagated when measured medium is passed through
The characteristics such as speed, direction, phase change；Again by the device of a detectable Ultrasonic Wave Propagation Character, above-mentioned change is detected
Change, be finally converted to the physical quantity of needs.So in this kind of product, need additionally to increase several ultrasonic wave transmitting dress
It puts, and these additional devices, cost, size, weight, power consumption data often account for more than 50% whole equipment, reduce
The cost advantage of product hinders the promotion of industrialization and the marketization.
2）Volume metering principle is in following expansion limitation problem
For from principle, ultrasonic wave table is a kind of device of volume metering, although being adapted to current gas metering
The market demand.However from national strategy, it can more reflect the mass metrology and caloricity gaging of combustion gas actual use situation（Matter
Measure * unit calorific values）It will be bound to become state compulsion standard in not far future.So ultrasonic wave table can not adapt to it is following these more
Adduction is managed and the metering requirements of science.
3）Measurand is limited and changes tracking problem
Existing MEMS industrial flows meter is only demarcated and is used under simple calibrating gas and working environment, right
In complicated and changeable
Natural gas motorcar environment, how the output variation characteristic of tracking transducer, lack necessary technological means, in addition,
The problems such as due to technique, market, properties of product, does not solve at all, and current this product is not obtained still in experimental stage
The popularization and application of the marketization.
Invention content
Therefore, the purpose of the present invention is to provide a kind of simple in structure, at low cost, precision is high, adaptable, can be to meter
Amount condition changes real-time compensation and amendment, is filled suitable for the MEMS composite gas streams gauge of the composite gas such as gas meter, flow meter metering environment
It puts.
For this purpose, the present invention provides a kind of MEMS compound gas flows counter device, which includes：Flowmeter shell,
Reach the MEMS flow sensor of scheduled measurement required precision and MEMS calibration sensors, circuit system, connection circuit system and
The connecting contact pin of MEMS calibration sensors and MEMS flow sensor.In practical measurement process, MEMS flow sensor
Output characteristics can be with measuring condition（Environment temperature T, gas pressure P, molecule form C, mechanical oscillation etc.）And change, because
This, MEMS calibration sensors constantly perceive current measuring condition, are then exported by calibration sensor（T, P, C）Flow is passed
The analog signal of sensor and the influence amount of computation model are calibrated by the method for simulation or number, obtain accurately flow
Signal.
The present invention provides a kind of circuit system for the calibration of MEMS compound gas flows counter device, and circuit system is by simulating
Calibration, AD conversion and digital operation processor module are formed, and wherein the working environment in calibrated analog signal is to Sensor Analog Relay System
Circuit answers the signal flow analog signals that flow sensor exports under the action of analog calibration circuit of phase to carry out preliminary school
Standard obtains revised analog flow signals；Other signals and revised analog flow signals warp in calibrated analog signal
Cross and enter digital operation processor after analog-to-digital conversion, digital operation processor screen out influenced indirectly in calibration signal flow because
Element further calibrates digital flow signal by special calibration algorithm, and then obtains accurately flow signal.
The present invention provides a kind of method that compound gas flow is measured using MEMS compound gas flows counter device.First,
On the flow collection period, MEMS flow sensor obtains the relevant sensing electric signal of flow under the action of gas flowing
(V0)；At the same time also required information group (A is calibrated in acquisition to calibration sensor on the calibration signal sampling period1,A2,A3,A4)
(B1,B2,B3), wherein (A1,A2,A3,A4) what is reflected is influence amount of the working environment to Sensor Analog Relay System circuit performance, also
It is the amount for directly affecting flow sensor output characteristics, respectively simulation migration, amplification deforms, vibrates too drastic and cumulative effect etc.
Factor, this some effects amount pass through special analog calibration circuit, and preliminary simulation school is carried out to original flow input signal
Standard, the analog flow signals (V after being calibrated1), (B1,B2,B3) it is exactly that the indirect flow sensor that influences exports result in other words
It is the amount for influencing metering model.
Technical scheme of the present invention is summarized as follows：
1st, a kind of gas flow metering device based on MEMS sensing elements, including：
Flowmeter shell circulates in pipeline therein including being measured gas；
MEMS flow sensor provides and surveys the relevant output signal of gas flow；
MEMS calibration sensors export and carry out the direct anti-of real time calibration for the result measured MEMS flow sensor
It reflects the opering characteristic of electric apparatus signal of flow sensor output and reflects the environmental information signal of flow sensor output indirectly；
Circuit system, is arranged on the flowmeter housing exterior, is connected by connecting contact pin with MEMS flow sensor
Connect, for MEMS to the acquisition of calibration sensor output signal, the acquisition to MEMS flow sensor measuring signal, calibration, with
And the flow rate calculation of the tested gas.
2nd, the gas flow metering device according to above 1, wherein two sensors seal up glue with structure insertion
Form is fixed, along gas flow direction before and after place, circuit system is located at the top of two sensors.
3rd, the gas flow metering device according to above 1, wherein the two sensors are located in cavity, with
Strengthen its impact force to gas, cavity is semi-surrounding structure, and the sensing surface of sensor is contacted with gas.
4th, the gas flow metering device according to above 1, wherein the MEMS flow sensor is to be based on
The sensor of MEMS technology manufacture, is based on one in pressure, acceleration, inclination, the hot type temperature difference, hot type acceleration perception principle
Sensor made of kind or several combination.
5th, the gas flow metering device according to above 1, wherein the MEMS calibration sensors are to use
The composite signal sensing module of MEMS technology can provide the electrical characteristic information (A of directly reflection flow sensor output1,
A2,A3,A4) and reflection flow sensor exports the environmental information (B of result indirectly1,B2,B3)。
6th, the gas flow metering device according to above 5, wherein the electrical characteristic information includes：A1Mould
Intend offset, A2Amplification deformation, A3Vibrate too drastic and A4Cumulative effect.
7th, the gas flow metering device according to above 5, wherein the environmental information signal includes：B1Temperature
Degree, B2Pressure, B3Gas is formed.
8th, the gas flow metering device according to above 1, wherein the circuit system by analog calibration circuit,
AD conversion module and digital operation processor module are formed, wherein analog calibration circuit, for the work in calibrated analog signal
Environment is to the corresponding signal of the Sensor Analog Relay System circuit flow mould that flow sensor exports under the action of analog calibration circuit
Intend signal and carry out preliminary calibration, obtain revised analog flow signals；AD conversion module is used in high-ranking officers' quasi-analog signal
Other signals and revised analog flow signals are converted into corresponding digital signal；Digital operation processor module, for discriminating
Do not go out in calibration signal to influence the factor of flow indirectly, digital flow signal is carried out by special calibration algorithm further
Calibration, and then obtain accurately flow signal.
9th, the gas flow metering device according to above 8 adds wherein the analog calibration circuit includes simulation
Musical instruments used in a Buddhist or Taoist mass, analog multiplier, analog differentiation device, analogue integrator and peripheral components, it is fixed on printing board PCB to form electricity
Road system.
10th, it is carried out using the gas flow metering device based on MEMS sensing elements any one of more than 1-9
The method of gas flow measurement, includes the following steps：
A), start to measure；
B), it measures by flow sensor and is tested the relevant analog flow signals of gas flow, and be output to simulation school
Quasi- circuit；
C), the signal offset brought by calibration sensor measurement by working condition, extraction analog calibration information one
Divide and be output to analog calibration circuit, another part is output to analog-digital converter and is converted into digital calibration information；
d）, in analog calibration circuit, mould that the analog calibration information flow sensor that is obtained using step c) is exported
Intend flow signal and carry out preliminary calibration, obtain flow preliminary calibration signal, and be output to analog-digital converter and be converted into digital flow
Signal；
E), judge whether to need digital calibration, if so, digital flow signal is calibrated with digital calibration information,
Digital flow signal after being calibrated, according to the digital flow signal conversion gas flow values after calibration；
f）, if it is not, then utilizing step d）In digital signal directly converted to obtain gas flow values.
11st, the measuring method according to above 10, the step that wherein analog calibration information calibrates analog flow signals
Suddenly include:The influence of simulation migration：
By A1Analog addition circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow after analog offset calibration
Signal；Amplify the influence of deformation：
By A2Analog multiplication circuit is inputted simultaneously with analogue flow rate output signal, obtains the stream after Simulation scale-up deformation calibration
Measure signal；Vibrate too drastic influence：
By A3Analog differentiation circuit is inputted simultaneously with analogue flow rate output signal, obtains vibrating the flow letter after too drastic calibration
Number；The influence of accumulative effect：
By A4Analog integrator circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow letter after cumulative effect calibration
Number；Wherein, A1、A2、A3、A4Respectively simulation migration, amplification deform, vibrate too drastic and cumulative effect.
12nd, the measuring method according to above 10, the step that wherein digital calibration information calibrates digital flow signal
Suddenly include:
1）The influence of null offset：
DV2=DV1–DB1；
2）The influence of device sensitivity：
DV2=DV1*DB2；
3）The influence of model nonlinear：
DV2=f(DV1, DB3)；Wherein f (x, y) is a nonlinear function, and specific combination of devices forms respective phenotype
Form.
Such as that may be higher order polynomial：DV1=(an*DB3**n+an-1*DB3**(n-1)+...a1*DB3+a0)
Or trigonometric function：DV1=a1*cos(b0*DB3)+a2*sin*(b1*DB3)
Or inverse relation：DV1=a0/DB3+a1/DB3**2+...
Wherein * * symbols be power function, * * m, that is, m powers.
Description of the drawings
Attached drawing 1 gives the overall structure of MEMS flowmeters of the present invention.
Attached drawing 2 provides the on-line calibration circuit system structure figure of MEMS signal sensed from flux.
Attached drawing 3 completes the main-process stream of on-line calibration process realization flow measurement for signal sensed from flux.
Specific embodiment
With reference to attached drawing 1, overall structure one embodiment of MEMS flowmeters of the present invention is given.From Fig. 1 it can be found that
Gas flow metering device based on MEMS sensing elements includes, flowmeter shell 1-3, circuit system 1-1, flow sensor peace
Assembling structure 1-6.Flow sensor mounting structure 1-6 includes two groups of MEMS sensors, and one of which flow sensor 1-7 is used for
The flow of detection gas；Another group of calibration sensor 1-5, for the calibration to flow heat transfer agent and connection circuit system
With the connecting contact pin 1-2 of two groups of MEMS sensors.Two sensors are connect with circuit system by conducting wire, and+envelope is embedded in structure
The form of glue is fixed, and for two sensors to be placed before and after gas flow direction, circuit system is located at the top of two sensors.Two
Group sensor is located in cavity to strengthen its impact force to gas, and cavity is semi-surrounding structure, the sensing surface of sensor and
Gas contacts.Flow sensor is the sensor based on MEMS technology, and principle can be pressure, acceleration, inclination, hot type temperature
One or several kinds of combinations of the perception principles such as difference, hot type power acceleration, the mechanical erection structure of flow sensor are protected
Demonstrate,proving sensor can be with the variation of sense gasses flow velocity, and by the analog signal output of sensor, while protects flow sensor
Not by the inflating force of gas dosing process and gas pressure destroys or misalignment, and rectification rear surface patch may be used in concrete structure
Dress, insertion probe or constant speed flow dividing structure are realized, but be not limited to above-mentioned several structures.
Calibration sensor is the composite signal sensing module using MEMS technology, required for output flow sensor calibration
Information, output signal covers calibration information needed for the flow sensor course of work, including directly reacting flow sensor
The electrical characteristic of output, such as simulation migration, amplification deform, vibrate the factors such as too drastic and cumulative effect, also include influencing indirectly
Flow sensor exports the environmental information of result, for example temperature, pressure, gas form etc. caused by factors such as zero, sensitive
Degree and model nonlinear.The mechanical erection structure of calibration sensor ensures that the output of calibration sensor is not become by tested gas flow rate
The influence of change, at the same can perceive traffic alignment signal can be calibrated sensor perception, can take including but not limit to
In realizations such as semi-enclosed cavity, single side hatch frame, self-oscillation flow field rock-steady structures.
During flow meters work, be capable of that the output result of flow sensor has an impact has（T, P, C, V）, wherein
T is temperature, and P is pressure, and C is formed for gas, and V is gas flow rate to be measured.And calibration sensor then exports（T, P, C）Convection current
The analog signal of quantity sensor and the influence amount of computation model, be usually expressed as direct current offset, Linear Amplifer, differential oscillating and
The circuits form such as cumulative effect is calibrated by the method for following simulations or number.
Based on attached drawing 2, attached drawing 2 provides the on-line calibration circuit system structure figure of MEMS signal sensed from flux.Circuit system
By analog calibration circuit 2-1, AD conversion module 2-2 and digital operation processor module 2-3 and 2-4PCB and peripheral components structure
Into analog calibration circuit 2-1 includes analog adder, analog multiplier, analog differentiation device, analogue integrator and resistance capacitance
Peripheral components are waited, fix forming circuit system by the means such as welding, be bonded on printing board PCB.Wherein calibrated analog
Working environment in signal answers Sensor Analog Relay System circuit the signal of the phase flow sensor under the action of analog calibration circuit
The analog flow signals of output carry out preliminary calibration, obtain revised analog flow signals；It is other in calibrated analog signal
Signal and revised analog flow signals enter digital operation processor after analog-to-digital conversion, and digital operation processor is screened
Go out in calibration signal to influence the factor of flow indirectly, further school is carried out to digital flow signal by special calibration algorithm
Standard, and then obtain accurately flow signal.The function of PCB and peripheral components is to ensure the normal operation of entire circuit system.
Based on attached drawing 3, attached drawing 3 completes the main-process stream of on-line calibration process realization flow measurement for signal sensed from flux.It is first
Before this on the flow collection period, MEMS flow sensor obtains the relevant sensing electric signal of flow under the action of gas flowing
(V0)；At the same time also required information group (A is calibrated in acquisition to calibration sensor on the calibration signal sampling period1,A2,A3,A4)
(B1,B2,B3), wherein (A1,A2,A3,A4) what is reflected is influence amount of the working environment to Sensor Analog Relay System circuit performance, respectively
For simulation migration, amplification deformation, the factors such as too drastic and cumulative effect are vibrated, this some effects amount is by special analog calibration electricity
Road carries out original flow input signal preliminary analog calibration, the analog flow signals (V after being calibrated1)。
Using above-mentioned analog calibration signal to original flow signal V0The method for carrying out analog calibration has：
1) influence of simulation migration：
By A1Analog addition circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow after analog offset calibration
Signal.
2) influence of amplification deformation：
By A2Analog multiplication circuit is inputted simultaneously with analogue flow rate output signal, obtains the stream after Simulation scale-up deformation calibration
Measure signal.
3) too drastic influence is vibrated：
By A3Analog differentiation circuit is inputted simultaneously with analogue flow rate output signal, obtains vibrating the flow letter after too drastic calibration
Number.
4) add up the influence of effect：
By A4Analog integrator circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow letter after cumulative effect calibration
Number.
Wherein above-mentioned steps 1) it can be adjusted to sequence 4) according to specific circuit characteristic, it is preliminary to finally obtain simulation
Flow signal V after calibration1。
And (B1,B2,B3) what is reflected is influence of the working environment to gas dosing model, it is sensitive including null offset, device
The influence amounts such as degree, model nonlinear, this some effects will become corresponding digital calibration signal (D after A/D is convertedB1, DB2,
DB3), the flow signal V after preliminary calibration1Become D after A/D is convertedV1, two ways of digital signals together enter digital operation at
Device is managed, further digital calibration is carried out to flow calculation model in the form of digital operation, finally obtains accurately flow letter
Breath, then flow rate calculation is carried out on this basis.
Have using the method that above-mentioned digital calibration signal carries out digital calibration to flow signal：
5) influence of null offset：
DV2=DV1-DB1
6) influence of device sensitivity：
DV2=DV1*DB2
7) influence of model nonlinear：
DV2=f(DV1, DB3);Wherein f (x, y) is a nonlinear function, and specific combination of devices forms respective phenotype
Form.
Such as that may be higher order polynomial：DV1=(an*DB3**n+an-1*DB3**(n-1)+...a1*DB3+a0)
Or trigonometric function：DV1=a1*cos(b0*DB3)+a2*sin*(b1*DB3)
Or inverse relation：DV1=a0/DB3+a1/DB3**2+...
Wherein * * symbols be power function, * * m, that is, m powers.
Wherein above-mentioned steps 5) it can be adjusted to sequence 7) according to specific circuit characteristic, finally obtain Modifying model
Volume computation D afterwards2。
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the present invention can later various modifications and variations.All within the spirits and principles of the present invention, that is made any repaiies
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
1-1 circuit systems
1-2 connecting contact pins
1-3 flowmeter shells
1-4 calibration sensor mounting structures
1-5MEMS calibration sensors
1-6 flow sensor mounting structures
1-7MEMS flow sensors
2-1 analog calibration circuits
2-2A/D modular converters
2-3 digital operation processors
2-4PCB and peripheral components.
Claims (11)
1. a kind of gas flow metering device based on MEMS sensing elements, including：
Flowmeter shell circulates in pipeline therein including being measured gas；
MEMS flow sensor provides and surveys the relevant output signal of gas flow；
MEMS calibration sensors export the direct reflection stream that real time calibration is carried out for the result measured MEMS flow sensor
The opering characteristic of electric apparatus signal of quantity sensor output and the indirectly environmental information signal of reflection flow sensor output；
Circuit system, is arranged on the flowmeter housing exterior, is connected by connecting contact pin with MEMS flow sensor, uses
In acquisitions of the MEMS to calibration sensor output signal, the acquisition to MEMS flow sensor measuring signal, calibration and it is described
The flow rate calculation of tested gas,
The wherein described circuit system is made of analog calibration circuit, AD conversion module and digital operation processor module, wherein
Analog calibration circuit, for the working environment in calibrated analog signal to the corresponding signal of Sensor Analog Relay System circuit in analog calibration
The flow analog signals that flow sensor exports under the action of circuit carry out preliminary calibration, obtain revised analogue flow rate letter
Number；The other signals and revised analog flow signals that AD conversion module is used in high-ranking officers' quasi-analog signal are converted into accordingly
Digital signal；Digital operation processor module, for screening out the factor for influencing flow in calibration signal indirectly, by special
Calibration algorithm further calibrates digital flow signal, and then obtains accurately flow signal.
2. gas flow metering device as described in claim 1, wherein two sensors are in the form of glue is sealed up in structure insertion
It is fixed, along gas flow direction before and after place, circuit system is located at the top of two sensors.
3. gas flow metering device as described in claim 1, wherein the two sensors are located in cavity, to strengthen
Its impact force to gas, cavity are semi-surrounding structure, and the sensing surface of sensor is contacted with gas.
4. gas flow metering device as described in claim 1, wherein the MEMS flow sensor is based on MEMS works
The sensor of skill manufacture, be based on one kind in pressure, acceleration, inclination, the hot type temperature difference, hot type acceleration perception principle or
Sensor made of several combination.
5. gas flow metering device as described in claim 1, wherein the MEMS calibration sensors are using MEMS works
The composite signal sensing module of skill, can provide directly the electrical characteristic information of reflection flow sensor output and indirectly reflection
Flow sensor exports the environmental information of result.
6. gas flow metering device as claimed in claim 5, wherein the electrical characteristic information includes：Simulation migration,
Too drastic and cumulative effect is vibrated in amplification deformation.
7. gas flow metering device as claimed in claim 5, wherein the environmental information signal includes：Temperature, pressure,
Gas is formed.
8. gas flow metering device as described in claim 1, wherein the analog calibration circuit include analog adder,
Analog multiplier, analog differentiation device, analogue integrator and peripheral components, it is fixed on printing board PCB to form circuit system
System.
9. a kind of gas flow metering device using as described in claim 1 based on MEMS sensing elements carries out gas flow
The method of measurement, includes the following steps：
A), start to measure；
B), it measures by flow sensor and is tested the relevant analog flow signals of gas flow, and be output to analog calibration electricity
Road；
C), the signal offset brought by calibration sensor measurement by working condition, an extraction analog calibration information part is simultaneously
Analog calibration circuit is output to, another part is output to analog-digital converter and is converted into digital calibration information；
D), in analog calibration circuit, analog stream that the analog calibration information flow sensor that is obtained using step c) is exported
It measures signal and carries out preliminary calibration, obtain flow preliminary calibration signal, and be output to analog-digital converter and be converted into digital flow signal；
E), judge whether to need digital calibration, if so, being calibrated with digital calibration information to digital flow signal, obtain
Digital flow signal after calibration, according to the digital flow signal conversion gas flow values after calibration；
F), if it is not, then directly being converted to obtain gas flow values using the digital signal in step d).
10. the step of measuring method as claimed in claim 9, wherein analog calibration information calibrates analog flow signals, wraps
It includes:The influence of simulation migration：
By A1Analog addition circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow signal after analog offset calibration；
Amplify the influence of deformation：
By A2Analog multiplication circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow letter after Simulation scale-up deformation calibration
Number；Vibrate too drastic influence：
By A3Analog differentiation circuit is inputted simultaneously with analogue flow rate output signal, obtains vibrating the flow signal after too drastic calibration；It is tired
Count the influence of effect：
By A4Analog integrator circuit is inputted simultaneously with analogue flow rate output signal, obtains the flow signal after cumulative effect calibration；Its
In, A1、A2、A3、A4Respectively simulation migration, amplification deform, vibrate too drastic and cumulative effect.
11. the step of measuring method as claimed in claim 9, wherein digital calibration information calibrates digital flow signal, wraps
It includes:
1) influence of null offset：
DV2=DV1–DB1；
2) influence of device sensitivity：
DV2=DV1*DB2；
3) influence of model nonlinear：
DV2=f (DV1, DB3)；Wherein f (x, y) is a nonlinear function, and specific combination of devices forms the shape of respective phenotype
Formula；
Wherein, DV1For the flow signal V after preliminary calibration1The signal obtained after A/D is converted；
DB1、DB2、DB3The influence B for being working environment to gas dosing model1、B2、B3It is corresponding obtained from after A/D is converted
Digital calibration signal；
DV2For the signal after the further digital calibration of progress in the form of digital operation.
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| CN105571666B (en) * | 2015-12-25 | 2018-11-09 | 新奥科技发展有限公司 | Flow-compensated method and compensation device, flow sensor |
| CN111795730B (en) * | 2020-07-29 | 2021-10-22 | 矽翔微机电(杭州)有限公司 | Gas thermal mass flowmeter |
| CN113156160B8 (en) * | 2021-04-28 | 2023-06-09 | 祎智量芯(江苏)电子科技有限公司 | Gas metering chip, metering method thereof and gas meter |
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| CN101403402A (en) * | 2008-08-12 | 2009-04-08 | 大连海事大学 | Hydraulic system power measurement apparatus based on MEMS plug-in type flow transducer |
| EP2088402A1 (en) * | 2008-02-11 | 2009-08-12 | Zentrum Mikroelektronik Dresden GmbH | Circuit arrangement to adjust and calibrate a MEMS-sensor for flow measurement of gases or liquids |
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2012
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101050974A (en) * | 2006-04-03 | 2007-10-10 | 杭州中矽微电子机械技术有限公司 | Measuring method and sensor for secondary differential flow of up-stream and down-stream temperature distribution and use |
| CN200975902Y (en) * | 2006-06-27 | 2007-11-14 | 四川矽亚科技有限公司 | Gaseous mass flowmeter |
| EP2088402A1 (en) * | 2008-02-11 | 2009-08-12 | Zentrum Mikroelektronik Dresden GmbH | Circuit arrangement to adjust and calibrate a MEMS-sensor for flow measurement of gases or liquids |
| CN101344105A (en) * | 2008-08-12 | 2009-01-14 | 大连海事大学 | Hydraulic system power measurement apparatus of V prick flow transducer based on MEMS |
| CN101403402A (en) * | 2008-08-12 | 2009-04-08 | 大连海事大学 | Hydraulic system power measurement apparatus based on MEMS plug-in type flow transducer |
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