CN2338734Y - Thermal type mass flow sensor - Google Patents

Thermal type mass flow sensor Download PDF

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Publication number
CN2338734Y
CN2338734Y CN 98224228 CN98224228U CN2338734Y CN 2338734 Y CN2338734 Y CN 2338734Y CN 98224228 CN98224228 CN 98224228 CN 98224228 U CN98224228 U CN 98224228U CN 2338734 Y CN2338734 Y CN 2338734Y
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CN
China
Prior art keywords
mass flow
operational amplifier
resistance
platinum
sensor
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Expired - Fee Related
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CN 98224228
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Chinese (zh)
Inventor
邵申登
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Shanghai HQ Instruments Co Ltd
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Shanghai HQ Instruments Co Ltd
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Priority to CN 98224228 priority Critical patent/CN2338734Y/en
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Publication of CN2338734Y publication Critical patent/CN2338734Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a thermal type mass flow sensor, which comprises a sensing circuit that is formed by the electrical connection of an operational amplifier U with a bridge circuit which is composed of two platinum thermal resistors R1 and R2, and two resistors R3 and R4, wherein, the two platinum thermal resistors R1 and R2 are both enclosed in a metal case to form a sensing element which is positioned in a pipe with fluids to be measured. The utility model is widely suitable for measuring the mass flow of various gases, such as air, coal gas, natural gas, methane gas, etc., and can also be used for measuring the mass flow of liquids.

Description

The thermal mass flow sensor
The utility model relates to a kind of thermal mass flow sensor.
In prior art, about the measurement of gas mass flow is to adopt the measuring system of being made up of sensor-based system and secondary instrument to finish, it generally all comprises speed flowrate meter or differential pressure flowmeter and pressure, temperature transmitter described sensor-based system, and therefore described sensor-based system complex structure, volume are greatly, wiring is complicated, measuring error is big, cost is high, use is inconvenient.But do not find to replace the function of described gas mass flow sensor-based system so far as yet, the measuring equipment of gas mass flow is oversimplified and high precision int with a sensor.
The purpose of this utility model be to provide a kind of directly relevant with gas or liquid quality flow, do not need to add the temperature and pressure compensation, simple in structure, volume is little, precision is high, install and use and all conveniently can substitute the thermal mass flow sensor that has gas mass flow sensor-based system function now.
The purpose of this utility model is achieved in that this thermal mass flow sensor device, it is characterized in that it comprises a sensing circuit, it is by operational amplifier U with by platinum resistance thermometer sensor, R1 for this sensing circuit, R2, resistance R 3, the bridge circuit that R4 four resistance are formed forms through being electrically connected: the end of the thermoelectric R1 of described platinum and the equal ground connection of an end of R2, the other end of its platinum resistance thermometer sensor, R1 links to each other with the negative terminal of described operational amplifier U and an end of resistance R 3 respectively, the other end of its platinum resistance thermometer sensor, R2 links to each other with the anode of described operational amplifier U and an end of resistance R 4 respectively, and the other end of described resistance R 3 and R4 all links to each other with the output terminal of described operational amplifier U;
Described two platinum resistance thermometer sensor, R1 and R2 all are encapsulated in and constitute a sensing element in the metal shell, and this sensing element is inserted in the pipeline of detected fluid.
It comprises a sensing circuit thermal mass flow sensor described in the utility model, it is formed this sensing circuit through being electrically connected by the bridge circuit that operational amplifier and four resistance R 1~R4 form, and described two platinum resistance thermometer sensor, R1 and R2 are encapsulated in sensing element of formation in the metal shell, this sensing element can directly be inserted and do not needed to add temperature and pressure compensation just can accurately measure mass rate in the pipeline of detected fluid (gas or liquid), therefore the utlity model has simple in structure, volume is little, precision is high, install and use advantages such as all convenient.The utility model can substitute the sensor-based system of existing gas mass flow fully, thereby has realized the high precision int and the simplification of mass rate testing apparatus.
Concrete structure of the present utility model is provided by following embodiment and accompanying drawing thereof.
Fig. 1 is the structural representation of sensor described in the utility model.
Fig. 2 is the structural representation of sensing element described in the utility model.
Describe structure in detail below in conjunction with Fig. 1 and Fig. 2 according to concrete sensor described in the utility model.
This thermal mass flow sensor device, it comprises a sensing circuit 1, it is by operational amplifier U with by platinum resistance thermometer sensor, R1 for this sensing circuit 1, R2, resistance R 3, the bridge circuit that R4 four resistance are formed forms through being electrically connected: the end of the thermoelectric R1 of described platinum and the equal ground connection of an end of R2, the other end of its platinum resistance thermometer sensor, R1 links to each other with the negative terminal of described operational amplifier U and an end of resistance R 3 respectively, the other end of its platinum resistance thermometer sensor, R2 links to each other with the anode of described operational amplifier U and an end of resistance R 4 respectively, and the other end of described resistance R 3 and R4 all links to each other with the output terminal of described operational amplifier U;
Described two platinum resistance thermometer sensor, R1 and R2 all are encapsulated in and constitute a sensing element 3 in the metal shell 2, and this sensing element 3 is inserted in the pipeline 4 of detected fluid.
Described operational amplifier U can adopt integrated circuit op-07 type.
Metal shell 2 in the described sensing element can adopt the metal circular tube of end closure, in this metal circular tube 2, be packaged with two metal tubes 5 and 6 that length is inequality, described platinum resistance thermometer sensor, R1 is encapsulated in the described long metal pipe 5, and described platinum resistance thermometer sensor, R2 is encapsulated in the described short metal tube 6.

Claims (3)

1. thermal mass flow sensor device, it is characterized in that it comprises a sensing circuit, it is by operational amplifier U with by platinum resistance thermometer sensor, R1 for this sensing circuit, R2, resistance R 3, the bridge circuit that R4 four resistance are formed forms through being electrically connected: the end of the thermoelectric R1 of described platinum and the equal ground connection of an end of R2, the other end of its platinum resistance thermometer sensor, R1 links to each other with the negative terminal of described operational amplifier U and an end of resistance R 3 respectively, the other end of its platinum resistance thermometer sensor, R2 links to each other with the anode of described operational amplifier U and an end of resistance R 4 respectively, and the other end of described resistance R 3 and R4 all links to each other with the output terminal of described operational amplifier U;
Described two platinum resistance thermometer sensor, R1 and R2 are encapsulated in and constitute a sensing element in the metal shell, and this sensing element is inserted in the pipeline of detected fluid.
2. thermal mass flow sensor according to claim 1 is characterized in that described operational amplifier U can adopt integrated circuit op-07 type.
3. thermal mass flow sensor according to claim 1, it is characterized in that metal shell in the described sensing element can adopt the metal circular tube of end closure, in this metal circular tube, be packaged with two metal tubes that length is inequality, described platinum resistance thermometer sensor, R1 is encapsulated in the described long metal pipe, and described platinum resistance thermometer sensor, R2 is encapsulated in the described short metal tube.
CN 98224228 1998-06-08 1998-06-08 Thermal type mass flow sensor Expired - Fee Related CN2338734Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 98224228 CN2338734Y (en) 1998-06-08 1998-06-08 Thermal type mass flow sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 98224228 CN2338734Y (en) 1998-06-08 1998-06-08 Thermal type mass flow sensor

Publications (1)

Publication Number Publication Date
CN2338734Y true CN2338734Y (en) 1999-09-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 98224228 Expired - Fee Related CN2338734Y (en) 1998-06-08 1998-06-08 Thermal type mass flow sensor

Country Status (1)

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CN (1) CN2338734Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101311684B (en) * 2007-05-21 2012-03-21 Abb股份公司 Thermal mass flow meter and method for its operation
CN1982855B (en) * 2005-12-16 2012-12-12 三菱电机株式会社 Thermal flow rate sensor supplying digital output
CN104523276A (en) * 2014-12-23 2015-04-22 清华大学 Respiration monitoring nasal paste and respiratory airflow monitoring system
CN110672171A (en) * 2012-02-21 2020-01-10 日立汽车系统株式会社 Thermal air flow measuring device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1982855B (en) * 2005-12-16 2012-12-12 三菱电机株式会社 Thermal flow rate sensor supplying digital output
CN101311684B (en) * 2007-05-21 2012-03-21 Abb股份公司 Thermal mass flow meter and method for its operation
CN110672171A (en) * 2012-02-21 2020-01-10 日立汽车系统株式会社 Thermal air flow measuring device
CN110672171B (en) * 2012-02-21 2021-07-13 日立汽车系统株式会社 Flow rate measuring device having flow rate detecting element disposed in sub-passage
CN104523276A (en) * 2014-12-23 2015-04-22 清华大学 Respiration monitoring nasal paste and respiratory airflow monitoring system

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C19 Lapse of patent right due to non-payment of the annual fee
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