CN206056692U - A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus - Google Patents

A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus Download PDF

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Publication number
CN206056692U
CN206056692U CN201620858985.6U CN201620858985U CN206056692U CN 206056692 U CN206056692 U CN 206056692U CN 201620858985 U CN201620858985 U CN 201620858985U CN 206056692 U CN206056692 U CN 206056692U
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bypass
air flue
flow
detection means
mems
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CN201620858985.6U
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韩怀成
隋晓东
杜明航
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Liaoning Scaler Technology Co Ltd
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Liaoning Scaler Technology Co Ltd
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Abstract

A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus, bluff body is housed on the inside of main flow air flue, bypass inlet Jing bypass air flue is connected with bypass outlet, MEMS mass flow sensors are housed in the top of bypass air flue, bypass detection means is constituted, four bypass detection means are individually positioned on the outside of main flow air flue and are symmetric., without any mechanical moving element, without any mechanical wear, fault rate is low, life-span length for this utility model.In covering, the civilian of low pressure, commercial combustion gas user and industrial user, range ratio is maximum up to 1000:1, it is not in low discharge leakage meter phenomenon that the range ability of ultra-wide makes table tool, with small volume, lightweight, noiseless, be unaffected by the magnetic field, Anti-dismantling, good, reproducible easy to install, zero stability, high precision, the low feature of initial-flow, multisensor is worked simultaneously, also improves the reliability of measurement apparatus.

Description

A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus
Technical field
This utility model is related to a kind of gas meter, flow meter, in particulars relate to a kind of MEMS hot type matter equipped with many bypass measurement apparatus Amount gas meter, flow meter.
Background technology
In at this stage, the instrument that mainly uses of civilian, the commercial combustion gas user of low pressure have diaphragm gas meter, waist wheel flow Meter, turbine flowmeter etc., this kind of gauge internal has mechanical moving element, needs periodic maintenance, and maintenance cost is high, life-time service precision It is difficult to ensure;Measurement range is narrow, and range ratio is little, especially easily occurs leakage meter phenomenon to the measurement of low discharge;Table is specifically long-pending and weighs Amount is larger, installs inconvenience.Flow instrument require in Pipe installing before straight length for 5 to 10 times of flow instrument diameter or more Greatly, before so larger for bore instrument straight length be accomplished by it is very long, some place be subject to install limit just are unable to reach will Ask.
Publication date is that March 30, the patent document of Publication No. CN101126652B in 2011 disclose a kind of electronic type Gas meter for mass and flow, including the housing that gas meter shell is concrete air-tightness cavity volume, the appendix in housing are divided into independence Air inlet pipe, and the flow detection pipe that links together and escape pipe, air inlet, escape pipe inlet, outlet respectively with housing Connection, the downstream of flow detection pipe be connected simultaneously level with escape pipe, and vacantly in the housing, flow detection pipe has main flow air flue With bypass air flue, a device for being used for shunting is set in main flow air flue and is located between the two through hole of connection bypass air flue, bypass gas Sectional area of the sectional area in road less than main flow air flue, the sensing module of a thermal type mass flow sensor are located at for detecting Bypass air flue inwall, Main Function is that signal transducer module measures less flow in bypass, by main flow air flue With the area ratio of bypass air flue, expand the measurement range of gas meter, flow meter.It can carry out mass flow metering to the combustion gas passed through, and And the dust contained in being prevented from combustion gas is attached on sensor elements.This gas meter, flow meter can realize gas metering, but Before requiring, straight length is longer, if the pipeline section before air inlet has valve or elbow produce bias current, so enters bypass gas In road, the flow of gas will change with the flow proportional of main flow air flue, affect the accuracy of gas meter, flow meter metering.
The content of the invention
Problem to be solved in the utility model is not enough for more than, there is provided a kind of to have simple structure, small volume, weight Gently, easy care, without the need for the MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus of temperature and pressure compensation.
This utility model solves the technical scheme adopted by its technical problem:
A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus, including MEMS mass flow sensors and resistance Fluid, it is characterised in that:Bluff body 7 is housed on the inside of the main flow air flue 1, bluff body 7 be located at bypass inlet 2 and bypass outlet 5 it Between.2 Jing of bypass inlet bypass air flues 3 are connected with bypass outlet 5, are sensed equipped with MEMS mass flows in the top of bypass air flue 3 Device 4, MEMS mass flow sensors 4 are fixed by sensor base 6.By bypass inlet 2, bypass air flue 3, MEMS flow sensor 4th, the composition of bypass outlet 5 bypass detection means, 1# bypass detection means 8,2# bypass detection means 9,3# bypass detection means 10, 4# bypasses detection means 11 is individually positioned on the outside of main flow air flue 1 and is symmetric.
The beneficial effects of the utility model are that a kind of MEMS thermal mass gas meter, flow meters with many bypass measurements, MEMS flow Quantity sensor can measure the mass flow of gas, without the need for temperature and pressure compensation.MEMS sensor is arranged in bypass so that antipollution Ability is improved, and can expand the flow measurement range of gas meter, flow meter additionally by adjustment measurement pipeline and the split ratio for bypassing. The flow measurement mode of many bypass sensors, by the multimetering of multiple bypass air flues, solves single bypass air flue because of gas The main flow air flue that bias current causes and the change for bypassing air flue flow proportional, the data weighting measured through multiple bypass air flues are put down Calculate, improve measuring accuracy, repeatability and the reliability of measuring instrumentss, reduce flow development length before flow instrument.
, without any mechanical moving element, without any mechanical wear, fault rate is low, life-span length for this utility model.In covering, it is low The civilian of pressure, commercial combustion gas user and industrial user, range ratio are maximum up to 1000:1, the range ability of ultra-wide has table will not There is low discharge leakage meter phenomenon, with small volume, lightweight, noiseless, be unaffected by the magnetic field, Anti-dismantling, easy to install, zero point it is steady Qualitative good, reproducible, high precision, the low feature of initial-flow, multisensor simultaneously work, and also improve measurement apparatus can By property.
Description of the drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of the A-A sections of Fig. 1;
In Fig. 1:5 bypass outlet of the bypass air flue 4MEMS flow transducers of 2 bypass inlet 3,6 sensor base 7 bluff bodys;
In Fig. 2:1 main flow air flue, 8 1# bypass detection means 9 2# bypass detection means 10 3# bypass detection means 11 4# bypass detection means.
Specific embodiment
In conjunction with the accompanying drawings and embodiments this utility model is further illustrated.
Embodiment 1
A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus, as depicted in figs. 1 and 2, in main flow air flue 1 Inner side is equipped with bluff body 7, and bluff body 7 is located between bypass inlet 2 and bypass outlet 5.2 Jing of bypass inlet bypasses air flue 3 and side Way outlet 5 connects, and in the top of bypass air flue 3, equipped with MEMS mass flow sensors 4, (model FMA1100R-001, U.S. are new Quasiconductor(Wuxi)Company limited), MEMS mass flow sensors 4 are fixed by sensor base 6.By bypass inlet 2, bypass Air flue 3, MEMS flow sensor 4, the composition bypass detection means of bypass outlet 5,1# bypass detection means 8,2# bypass detection dresses Put 9,3# bypass detection means 10,4# bypass detection means 11 to be individually positioned on the outside of main flow air flue 1 and be symmetric.
The measurement of gas flow:
When gas flows through main flow air flue 1, gas makes sub-fraction gas by producing pressure differential in upstream and downstream after bluff body 7 Body is entered in 1# bypass detection means 8, and in 1# bypass detection means 8, gas is entered in bypass air flue 3 by bypass inlet 2, Gas flows through 4 surface of MEME flow transducers and flows back to main flow air flue by bypass outlet 5, and MEMS flow sensor 4 measures side The gas flow of road air flue 3, calculates the flow of gas in gas off-take according to split ratio;In the same manner, also some gas is entered into In 2# bypass detection means 9,3# bypass detection means 10 and 4# bypass detection means 11, then each bypass detection means is distinguished By existing data processor means and computed in software program, the flow of measurement is calculated, finally with average weighted method meter Calculate 1# bypass detection means 8,2# bypass detection means 9,3# bypass detection means 10,4# bypass detection means 11, four sides The meansigma methodss of the gas flow of road detection means.As main flow air flue 1 is equipped with four bypass detection means, accurately can measure Go out the impact of change of flow state in main airway, and also make the flow value of metering more accurate using average weighted method.

Claims (1)

1. a kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus, including MEMS mass flow sensors and choked flow Body, it is characterised in that:It is symmetric on the outside of main flow air flue 1, places 1# bypass detection means 8,2# bypass detection dresses respectively 9,3# bypass detection means 10,4# bypass detection means 11 is put, bypass detection means is by by bypass inlet(2), bypass air flue (3), MEMS flow sensor(4), bypass outlet(5)Composition, its structure:Bluff body is housed on the inside of main flow air flue 1(7), resistance Fluid 7 is located at bypass inlet(2)And bypass outlet(5)Between, bypass inlet(2)Jing bypasses air flue(3)With bypass outlet(5)Even Connect, in bypass air flue(3)Top be equipped with MEMS mass flow sensors(4), MEMS mass flow sensors(4)By sensor Base(6)It is fixed.
CN201620858985.6U 2016-08-10 2016-08-10 A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus Active CN206056692U (en)

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CN201620858985.6U CN206056692U (en) 2016-08-10 2016-08-10 A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus

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CN201620858985.6U CN206056692U (en) 2016-08-10 2016-08-10 A kind of MEMS thermal mass gas meter, flow meters equipped with many bypass measurement apparatus

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796452A (en) * 2017-11-16 2018-03-13 矽翔微机电系统(上海)有限公司 Gas flowmeter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796452A (en) * 2017-11-16 2018-03-13 矽翔微机电系统(上海)有限公司 Gas flowmeter

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