CN106840292A - MEMS thermal mass gas meter apparatus and measuring gas flow rate method - Google Patents
MEMS thermal mass gas meter apparatus and measuring gas flow rate method Download PDFInfo
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- CN106840292A CN106840292A CN201510880550.1A CN201510880550A CN106840292A CN 106840292 A CN106840292 A CN 106840292A CN 201510880550 A CN201510880550 A CN 201510880550A CN 106840292 A CN106840292 A CN 106840292A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Flowmeters (AREA)
- Measuring Volume Flow (AREA)
Abstract
A kind of MEMS thermal mass gas meter apparatus and measuring gas flow rate method, its MEMS thermal mass gas meter apparatus is on the gas flow surveying instrument table body equipped with temperature sensor and transducer and connects shunt valve, and MEMS flow sensor is housed on shunt valve；Temperature sensor, transducer and MEMS flow sensor are all connected with data processor.Assay method with said apparatus gas flow is：1 gas instantaneous delivery is detected；The measure of 2 gas conversion coefficients；The amendment of 3 gas instantaneous deliveries, the gas flow for being measured.The present invention is combined ultrasonic acoustic speed measuring device with MEMS flow sensor, extend the scope of application, combustion gas and various industrial gasses can be measured, in data processing, the change of ultrasonic acoustic speed measuring device real-time monitoring gas component, calculate gas conversion coefficient to compensate instantaneous delivery, improve the certainty of measurement of gas flow, the application and popularization to heat type gas flow instrument have broad sense.
Description
Technical field
The present invention relates to gas flow measurement field, more particularly, to a kind of thermal mass gas meter apparatus and the assay method of gas flow.
Background technology
It is known that, the method for being used to measure gas flow now has many kinds, and corresponding test device is also varied, but every kind of device has the limitation that it is tested, such as heat type gas flow measurement apparatus, its principle is the relation that gas flow rate and gas molecule are taken away between heat.So the size of the component of gas and specific heat capacity at constant pressure, can all influence the accuracy of measurement.Such as current thermal type flow measuring apparatus, it is substantially and is demarcated with air or nitrogen, in gas metering, according to the Gas Components that scene provides, gas conversion coefficient is calculated to compensate, if but in use the Gas Components flow measurement that changes deviation will occurs.
Publication date is on March 30th, 2011, the patent document of the B of Publication No. CN 101126652 discloses electronic gas meter for mass and flow, gas meter housing is the housing with air-tightness cavity volume, appendix in housing is divided into independent air inlet pipe, and the flow detection pipe that links together and escaping pipe, air inlet, escaping pipe is entered with housing respectively, outlet interface is connected, the downstream of flow detection pipe is connected with escaping pipe and level is hanging in the housing, flow detection pipe has main flow air flue and bypass air flue, a device for being used to shunt is set in main flow air flue to be located between the two through hole of connection bypass air flue, bypass the sectional area of the sectional area less than main flow air flue of air flue, inwall of the sensing module of one thermal type mass flow sensor located at the bypass air flue for detecting.It can carry out mass flow metering to the combustion gas passed through, and the dust for being prevented from containing in combustion gas is attached on sensing element, improve combustion gas and use the accuracy of metering and the service life of gas meter, flow meter.Said apparatus can realize the mass flow measurement of combustion gas, without Temperature and Pressure Correction.The features such as MEMS thermal mass gas meters whether there is movable member, fast response, high accuracy, super-wide range, ultralow initial-flow, low pressure loss.But the device uses air demarcation, fixed gas conversion coefficient does not have real-Time Compensation function when Gas Components change, have impact on the authenticity of metering.
Publication date is on July 11st, 2012, the patent document of Publication No. CN102564516A discloses a kind of digital gas meter, including gas mass flow rate sensors, signal conditioning circuit, A/D converter, microprocessor, LCD MODULE, gas sensor, temperature and pressure sensor and gas data storehouse memorizer, the measurement of the volume flow to multicomponent gas under different temperatures, pressure condition is realized.Said apparatus are that gas composition is identified, volume flow is converted to mass flow carries out density revision, does not do the conversion coefficient amendment of gas, while the device is in actual applications, influence of the gas flow rate to gas sensor is also difficult to be completely eliminated, and influences the precision of flow detection.
The content of the invention
For the problem that current heat type gas flow measurement apparatus are present, there is provided a kind of certainty of measurement is high, good reliability, the flow measurement device with automatic identification gas conversion coefficient and gas flow measurement method.
The present invention for reach concrete technical scheme that above-mentioned technical purpose used for：A kind of MEMS thermal mass gas meter apparatus and measuring gas flow rate method, its MEMS thermal mass gas meter apparatus, including temperature sensor, ultrasonic transducer and data processor, it is characterized in that：MEMS thermal mass gas meter apparatus：It is on the gas flow surveying instrument table body 11 equipped with temperature sensor 4 and transmitting transducer 1 and receive transducer 10 and connects shunt valve 5, the import 9 of shunt valve 5 is located at the air-flow upstream side of bluff body 2, the outlet 3 of shunt valve is located at the airflow downstream side of bluff body 2, and MEMS flow sensor 6 is housed on shunt valve 5;Temperature sensor 4, transmitting transducer 1 and receive transducer 10 and MEMS flow sensor 6 on gas flow surveying instrument are all connected with data processor 7, the connection data presentation device 8 of data processor 7.
Assay method with said apparatus gas flow is：
1 gas instantaneous delivery is detected：When gas passes through the flowing of bluff body 2 from the entrance of table body 11 to outlet is interior, a part of gas is flowed into shunt valve 5 by shunt valve import 9, then exports 3 outflows from shunt valve, and flow signal is produced when MEMS flow sensor 6 is flowed through, and measures gas instantaneous delivery；
The measure of 2 gas conversion coefficients：When gas flows, transmitting transducer 1 launches ultrasonic wave, the receive transducer 10 on opposite receives ultrasonic wave, measure the time for launching and receiving ultrasonic wave in the bore x stroke of table body 11, the velocity of sound of the ultrasonic wave in gas in table body 11 is calculated, temperature sensor 4 measures temperature now, by temperature-compensating, data processor calculates the velocity of sound of gas under normal temperature, and corresponding gas conversion coefficient in memory is inquired about by the velocity of sound；
The amendment of 3 gas instantaneous deliveries：The gas of the flow calibration of present apparatus gas instantaneous delivery value is air, and the gas conversion coefficient of air is set as into 1, when combustion gas or other gases are measured, is then needed gas instantaneous delivery value amendment by gas conversion coefficient, so as to the gas flow for being measured.This change according to gas component, the method for carrying out automatic amendment to gas conversion coefficient in real time is in the program operational process of flow measurement while carrying out, and its flow is：Electricity on device, closes WatchDog Timer and sets system clock frequency, then flush events array, and the port to MCU is initialized；The time for setting WatchDog Timer and basic timer is respectively 1 second and 16 milliseconds and opens interrupters；When there is interrupt response, system performs the event routine of response, and when not having interrupt response, system then enters low-power consumption mode；External storage is initialized, MCU is read running status and systematic parameter from external storage；First to MEMS module initializations, then MEMS modules collection flow signal, instantaneous delivery value is calculated according to nominal data；In timer interruption, ultrasonic wave module and temperature sensor are initialized, make ultrasonic wave module acquisition time and calculate the velocity of sound, temperature sensor measures real time temperature, and temperature-compensating is carried out to the velocity of sound, MCU searches the gas conversion coefficient of the corresponding velocity of sound, after being modified to gas instantaneous delivery value, volume computation output display in Flash.
Beneficial effects of the present invention:
By gas meter, flow meter metering device provided by the present invention and the assay method of gas conversion coefficient, improve the authenticity of heating type gas measuring method, accuracy and reliability, ultrasonic acoustic speed measuring device and MEMS flow sensor are organically combined, extend the scope of application of heat type gas flow measurement apparatus, combustion gas and various industrial gasses can be measured, and data handling system is in data processing, the change of ultrasonic acoustic speed measuring device real-time monitoring gas component, gas conversion coefficient is calculated to compensate instantaneous delivery, so as to also improve the certainty of measurement of gas flow, to heat type gas flow instrument is in the application of gas burning field and promotes with broad sense.
Brief description of the drawings
Fig. 1 is the structural representation of MEMS thermal mass gas meter apparatus of the present invention.
Fig. 2 is the program circuit schematic diagram of the assay method of gas flow of the present invention
In Fig. 1:1. transmitting transducer, 2. bluff body, the 3. outlet of shunt valve, 4. temperature sensor, 5. shunt valve, 6. MEMS flow sensor, 7. data processor, 8. data presentation device, the 9. import of shunt valve, 10. receive transducer, 11. table bodies.
Specific embodiment
Below by embodiment, and the specific embodiment of technical solution of the present invention is further described with reference to accompanying drawing.
Embodiment 1：A kind of MEMS thermal mass gas meter apparatus and measuring gas flow rate method, its MEMS thermal mass gas meter apparatus, as shown in figure 1, its annexation is：In the upper band temperature sensor 4 (dallas, U.S.A model DS18B20) of table body 11 and (the model GB-117CS1A of transmitting transducer 1, PANASONIC) and the gas flow surveying instrument of receive transducer 10 on and connect shunt valve 5, a diameter of 3mm of shunt valve 5, ultrasonic wave can be launched and be received to two ultrasonic transducers, and the frequency of the ultrasonic wave that ultrasonic transducer is launched and received is 500KHz.The import 9 of shunt valve 5 is located at the air-flow upstream side of bluff body 2, the outlet 3 of shunt valve is located at the airflow downstream side of bluff body 2, the pressure difference of the generation of bluff body 2 is flowed through using table body gas, shunt valve gas is flowed through MEMS flow sensor 6 (model FMA1100R-001, MeiXin Semiconductor（Wuxi）Co., Ltd) surface carries out instantaneous delivery measurement.Temperature sensor 4, transmitting transducer 1 and receive transducer 10 and MEMS flow sensor 6 on gas flow surveying instrument are all connected with data processor 7 (TI Texas Instrument), data processor 7 is built with the data processing software by known computing formula Zhuan Change, the connection data presentation device 8 of data processor 7.
Assay method using said apparatus gas flow is：
1 gas instantaneous delivery is detected：When gas interior flowing by bluff body 2 from entrance to exit list body 11, pressure difference is produced in the both sides of bluff body 2, so that a part of gas is by the inflow shunt valve 5 of shunt valve import 9, flowed out from shunt valve outlet 3 again, flow signal is produced when gas flows through the surface of MEMS flow sensor 6, gas flow is measured；
The measure of 2 gas conversion coefficients：Transmitting transducer 1 launches ultrasonic wave, the receive transducer 10 on opposite receives ultrasonic wave, measure the time for launching and receiving ultrasonic wave in the bore x stroke of table body 11, calculate the velocity of sound of the ultrasonic wave in gas in table body 11, temperature sensor 4 measures temperature now, and by temperature-compensating, data processing equipment calculates the velocity of sound at a temperature of gas standard, gas conversion coefficient and velocity of sound corresponding relation database are inquired about by the velocity of sound, the actual converted coefficient of the gas is drawn.
The amendment of the first measured value of 3 gas flows：The gas of the flow calibration of present apparatus gas instantaneous delivery is air, measured value need not be modified when air mass flow is measured, the specific heat capacity at constant pressure of air is set as 1, when combustion gas or other gases are measured, then need gas flow just measured value amendment, this change according to gas component by gas conversion coefficient, the method for carrying out automatic amendment to gas conversion coefficient in real time, it is in the program operational process of flow measurement while carrying out, its flow is as shown in Fig. 2 be：Electricity on device, closes WatchDog Timer and sets system clock frequency, then flush events array, and the port to MCU is initialized；The time for setting WatchDog Timer and basic timer is respectively 1 second and 16 milliseconds and opens interrupters；When there is interrupt response, system performs the event routine of response, and when not having interrupt response, system then enters low-power consumption mode；External storage is initialized, MCU is read running status and systematic parameter from external storage；First to MEMS module initializations, then MEMS modules collection flow signal, instantaneous delivery is calculated according to nominal data；In timer interruption, ultrasonic wave module and temperature sensor are initialized, make ultrasonic wave module acquisition time and calculate the velocity of sound, temperature sensor measures real time temperature, and temperature-compensating is carried out to the velocity of sound, MCU searches the gas conversion coefficient of the corresponding velocity of sound, after being modified to gas instantaneous delivery, volume computation output display in Flash.
Claims (3)
1. a kind of MEMS thermal mass gas meter apparatus, including temperature sensor, ultrasonic transducer and data processor, it is characterized in that：MEMS thermal mass gas meter apparatus：It is on the gas flow surveying instrument table body 11 equipped with temperature sensor 4 and transmitting transducer 1 and receive transducer 10 and connects shunt valve 5, the import 9 of shunt valve 5 is located at the air-flow upstream side of bluff body 2, the outlet 3 of shunt valve is located at the airflow downstream side of bluff body 2, and MEMS flow sensor 6 is housed on shunt valve 5;Temperature sensor 4, transmitting transducer 1 and receive transducer 10 and MEMS flow sensor 6 on gas flow surveying instrument are all connected with data processor 7, the connection data presentation device 8 of data processor 7.
2. usage right requires the assay method of the gas flow of 1 described device, it is characterized in that：
1 gas instantaneous delivery is detected：When gas passes through the flowing of bluff body 2 from the entrance of table body 11 to outlet is interior, a part of gas is flowed into shunt valve 5 by shunt valve import 9, then exports 3 outflows from shunt valve, and flow signal is produced when MEMS flow sensor 6 is flowed through, and measures gas instantaneous delivery；
The measure of 2 gas conversion coefficients：When gas flows, transmitting transducer 1 launches ultrasonic wave, the receive transducer 10 on opposite receives ultrasonic wave, measure the time for launching and receiving ultrasonic wave in the bore x stroke of table body 11, the velocity of sound of the ultrasonic wave in gas in table body 11 is calculated, temperature sensor 4 measures temperature now, by temperature-compensating, data processor calculates the velocity of sound of gas under normal temperature, and corresponding gas conversion coefficient in memory is inquired about by the velocity of sound；
The amendment of gas instantaneous delivery：The gas of the flow calibration of present apparatus gas instantaneous delivery value is air, and the gas conversion coefficient of air is set as into 1, when combustion gas or other gases are measured, is then needed gas instantaneous delivery value amendment by gas conversion coefficient, so as to the gas flow for being measured.
3. this change according to gas component, the method for carrying out automatic amendment to gas conversion coefficient in real time is in the program operational process of flow measurement while carrying out, and its flow is：Electricity on device, closes WatchDog Timer and sets system clock frequency, then flush events array, and the port to MCU is initialized；The time for setting WatchDog Timer and basic timer is respectively 1 second and 16 milliseconds and opens interrupters, and when there is interrupt response, system performs the event routine of response, and when not having interrupt response, system then enters low-power consumption mode；External storage is initialized, MCU is read running status and systematic parameter from external storage；First to MEMS module initializations, then MEMS modules collection flow signal, instantaneous delivery value is calculated according to nominal data；In timer interruption, ultrasonic wave module and temperature sensor are initialized, make ultrasonic wave module acquisition time and calculate the velocity of sound, temperature sensor measures real time temperature, and temperature-compensating is carried out to the velocity of sound, MCU searches the gas conversion coefficient of the corresponding velocity of sound, after being modified to gas instantaneous delivery value, volume computation output display in Flash.
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| CN201510880550.1A CN106840292A (en) | 2015-12-04 | 2015-12-04 | MEMS thermal mass gas meter apparatus and measuring gas flow rate method |
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| CN201510880550.1A CN106840292A (en) | 2015-12-04 | 2015-12-04 | MEMS thermal mass gas meter apparatus and measuring gas flow rate method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109470325A (en) * | 2018-09-20 | 2019-03-15 | 北京七星华创流量计有限公司 | Gas flow measurement method, apparatus and control system and gaseous mass flowmeter |
| CN110672172A (en) * | 2018-07-03 | 2020-01-10 | 辽宁思凯科技股份有限公司 | Internet of things MEMS (micro-electromechanical systems) thermal mass gas meter system device and gas flow measuring method |
| CN110906993A (en) * | 2019-12-12 | 2020-03-24 | 浙江金卡智能水表有限公司 | Flow meter metering temperature compensation method and ultrasonic flow meter |
| CN111148972A (en) * | 2017-09-29 | 2020-05-12 | 日立汽车系统株式会社 | Physical quantity detecting device |
| CN111735519A (en) * | 2020-06-28 | 2020-10-02 | 国网浙江省电力有限公司电力科学研究院 | Mass flow conversion coefficient determining method and device |
| CN111795730A (en) * | 2020-07-29 | 2020-10-20 | 矽翔微机电(杭州)有限公司 | Gas thermal mass flowmeter |
| CN112198905A (en) * | 2020-09-11 | 2021-01-08 | 兰州空间技术物理研究所 | Gas flow control system and control method of standard digital interface |
| CN113884164A (en) * | 2021-12-06 | 2022-01-04 | 成都千嘉科技有限公司 | Self-adaptive calibration method of ultrasonic gas meter |
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| CN113884164A (en) * | 2021-12-06 | 2022-01-04 | 成都千嘉科技有限公司 | Self-adaptive calibration method of ultrasonic gas meter |
| CN113884164B (en) * | 2021-12-06 | 2022-02-22 | 成都千嘉科技有限公司 | Self-adaptive calibration method of ultrasonic gas meter |
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Application publication date: 20170613 |